Detection device and detection method for surface roughness of material

文档序号:223906 发布日期:2021-11-09 浏览:7次 中文

阅读说明:本技术 一种材料表面粗糙度的检测装置及其检测方法 (Detection device and detection method for surface roughness of material ) 是由 吴鹏 高杨 于 2021-08-26 设计创作,主要内容包括:本发明公开了一种材料表面粗糙度的检测装置及其检测方法,属于自动化技术领域。包括第一移动机构和夹持机构,其中第一移动机构上设有检测组件和电路组,检测组件采用线性方式检测材料表面的粗糙度,夹持机构对材料进行定位,同时旋转材料的方向,使得检测组件对材料进行多个方向上的粗糙度的检测,最终判断材料的粗糙度。本发明的检测材料表面粗糙度的装置,将电子器件的原材料的表面粗糙度转化为电信号,间接进行检测;在实际检测过程中进行,对材料进行线性区域划分,同时从不同方位进行此类周期性的划分并检测,对应材料件的表面模型数据,在计算机上以图形的方式模拟出材料的表面粗糙度。(The invention discloses a detection device and a detection method for material surface roughness, and belongs to the technical field of automation. Including first moving mechanism and fixture, wherein be equipped with determine module and circuit group on the first moving mechanism, determine module adopts the roughness on linear mode detection material surface, fixture fixes a position the material, the direction of rotatory material simultaneously for determine module carries out the detection of the roughness in a plurality of directions to the material, finally judges the roughness of material. The device for detecting the surface roughness of the material converts the surface roughness of the raw material of the electronic device into an electric signal, and indirectly detects the electric signal; the method is carried out in the actual detection process, linear area division is carried out on the material, the periodic division and detection are carried out from different directions, and the surface roughness of the material is simulated on a computer in a pattern mode corresponding to the surface model data of the material.)

1. The utility model provides a detection apparatus for material surface roughness, sets up on the workstation, its characterized in that still includes:

the first moving mechanism is arranged on the workbench; the first moving mechanism is provided with a detection assembly and a circuit group; the detection assembly detects the roughness of the surface of the current material in a linear mode and divides the current material into a plurality of parallel strip-shaped areas according to strips; the first moving mechanism controls the detection assembly to sequentially detect the surface roughness of the materials in the strip-shaped areas to obtain corresponding roughness information, and the circuit group converts the roughness information into an electric signal to display the electric signal based on the roughness information;

the clamping mechanism is arranged right below the first moving mechanism; the clamping mechanism positions the material and simultaneously reverses the material; when the material roughness detecting mechanism is used, materials clamped in the clamping mechanism are reversed according to detection requirements, the roughness of the same material in multiple directions is detected, and the roughness information of a plurality of strip-shaped areas is integrated to obtain the roughness of the current material.

2. The apparatus for detecting the surface roughness of a material according to claim 1, wherein the first moving mechanism comprises:

the vertical support frame is vertically arranged on the workbench; two parallel first sliding rails are arranged on the vertical mounting rack;

the two ends of the first sliding seat are arranged on the two first sliding rails to slide;

one side of the horizontal support frame is fixedly arranged on the first sliding seat; two second sliding rails are mounted on the lower surface of the horizontal support frame;

the two ends of the second sliding seat are arranged on the two second sliding rails to horizontally slide;

the first mounting plate is fixedly connected to the second sliding seat; the first mounting plate is provided with two parallel third sliding rails; the mounting direction of the third sliding rail is perpendicular to that of the second sliding rail;

the second mounting plate is fixedly connected with the sliding seat of the second sliding track;

and the two groups of clamping assemblies are arranged at two ends of the second mounting plate and used for fixing and clamping the detection assembly.

3. The apparatus for detecting the surface roughness of a material according to claim 1, wherein the detecting assembly comprises:

the two ends of the round shaft are provided with round external members through fasteners; the clamping assembly clamping kit is used for fixing the position of the round shaft and forbidding the round shaft to rotate;

the two ends of the third mounting plate are fixedly mounted on the sleeve, and the plane where the central plane of the third mounting plate is located passes through the central line of the circular shaft;

the lever structure is rotatably connected to the round shaft; one end of the lever structure, which is close to the third mounting plate, is longer, and an arc-shaped part is mounted; the arc-shaped piece is a part of an arc; the area of the end head at the other end of the arc-shaped piece is smaller, and the moving direction of the end head is an arc path;

the two ends of the fourth mounting plate are mounted on the sleeve and are positioned below the circular shaft; a spring is arranged on the fourth mounting plate; the other end of the spring is connected with one end of the arc-shaped piece; the spring is in a compressed state.

4. The device for detecting the surface roughness of the material as claimed in claim 3, wherein the short end bottom of the lever structure is fixedly welded with a rigid ball, and the surface of the ball is smooth.

5. The apparatus for detecting the surface roughness of a material according to claim 1, wherein the clamping mechanism comprises:

the plurality of lifting seats are arranged on the workbench;

the first supporting plate is arranged on the lifting seat; a fourth sliding rail is arranged on the first supporting plate; the installation direction of the fourth sliding track is the same as that of the second sliding track;

the fourth sliding seat is arranged on the fourth sliding track for sliding;

the second supporting plate is arranged on the fourth sliding seat; a rotating table is arranged on the second supporting plate;

and the positioning assemblies are arranged on the rotating table and used for positioning the material.

6. The device for detecting the surface roughness of the material according to claim 1, wherein the circuit group comprises:

the force sensitive resistor is arranged on the third mounting plate; the end of the arc-shaped part is pressed on the force sensitive resistor under the action of the spring;

the direct current amplifier is connected with the force-sensitive resistor and amplifies the current passing through the force-sensitive resistor;

and the oscilloscope is connected to a circuit formed by the direct current amplifier through a lead, detects the current transformation in the circuit, and inputs the image model into a computer for storage.

7. The detection method of the detection device based on the material surface roughness of any one of claims 1 to 6 is characterized by comprising the following steps:

the method comprises the following steps: shooting surface data of the sample piece in advance, recording the data into a calculation center, and performing linear area division on the surface of the first sample piece by the calculation center to perform path planning of first periodic detection; the calculation center divides the linear area of the surface of the first sample piece from the second direction again, and the path planning of the second periodic detection is carried out; repeatedly dividing paths for many times, and setting a detection route of the detection assembly;

step two: the detection assembly detects the surface roughness of the sample and converts the physical deformation into a current change linear graph which is directly observed through the circuit group;

step three: and the calculation center collects a plurality of measurement data graphs, corresponding to the surface data of the sample piece which is shot in advance, and carries out positioning coupling processing on the surface model of the sample piece which is shot in advance, so as to finally show the surface roughness of the sample piece.

Technical Field

The invention belongs to the technical field of automation, and particularly relates to a detection device and a detection method for material surface roughness.

Background

Under the action of a strong electric field, the equipotential surface of a place with large surface curvature of an electronic component is dense, the electric field intensity is greatly increased, air nearby the electronic component is ionized to generate gas discharge, point discharge is easy to generate, current breaks through insulated air to form a power-on circuit, and the service life of a bottom component is influenced, so that the material surfaces of a plurality of electronic components need to be subjected to smoothing treatment, instruments for daily inspection of the flatness of the surfaces of the materials are few, part of the materials are subjected to refraction and reflection treatment by adopting optics, but because the surface roughness of part of the materials is in a production allowable range, the roughness of the rough range is difficult to be determined by an optical instrument, and how to quantitatively detect the surface roughness of the materials is to be solved.

Disclosure of Invention

The present invention provides a device and a method for detecting surface roughness of a material, which solve the technical problems in the background art.

The invention adopts the following technical scheme: the utility model provides a detection apparatus for material surface roughness, sets up on the workstation, still includes:

the first moving mechanism is arranged on the workbench; the first moving mechanism is provided with a detection assembly and a circuit group; the detection assembly detects the roughness of the surface of the current material in a linear mode and divides the current material into a plurality of parallel strip-shaped areas according to strips; the first moving mechanism controls the detection assembly to sequentially detect the surface roughness of the materials in the strip-shaped areas to obtain corresponding roughness information, and the circuit group converts the roughness information into an electric signal to display the electric signal based on the roughness information;

the clamping mechanism is arranged right below the first moving mechanism; the clamping mechanism positions the material and simultaneously reverses the material; when the material roughness detecting mechanism is used, materials clamped in the clamping mechanism are reversed according to detection requirements, the roughness of the same material in multiple directions is detected, and the roughness information of a plurality of strip-shaped areas is integrated to obtain the roughness of the current material.

According to the technical scheme, when the detection assembly detects the roughness of the surface of the material in a linear mode, the circuit group converts the roughness of the surface of the electronic material into an electric signal, linear graph change data is transmitted into the computer, and the computer conducts coupling positioning processing according to the image model recorded in the electronic material in advance to simulate the roughness of the surface of the sample.

In a further embodiment, the first moving mechanism comprises:

the vertical support frame is vertically arranged on the workbench; two parallel first sliding rails are arranged on the vertical mounting rack;

the two ends of the first sliding seat are arranged on the two first sliding rails to slide;

one side of the horizontal support frame is fixedly arranged on the first sliding seat; two second sliding rails are mounted on the lower surface of the horizontal support frame;

the two ends of the second sliding seat are arranged on the two second sliding rails to horizontally slide;

the first mounting plate is fixedly connected to the second sliding seat; the first mounting plate is provided with two parallel third sliding rails; the mounting direction of the third sliding rail is perpendicular to that of the second sliding rail;

the second mounting plate is fixedly connected with the sliding seat of the second sliding track;

and the two groups of clamping assemblies are arranged at two ends of the second mounting plate and used for fixing and clamping the detection assembly.

Through the technical scheme, the detection assembly is adjusted in at least three mutually perpendicular directions in space so as to be suitable for path planning of preset detection roughness.

In a further embodiment, the detection assembly comprises:

the two ends of the round shaft are provided with round external members through fasteners; the clamping assembly clamping kit is used for fixing the position of the round shaft and forbidding the round shaft to rotate;

the two ends of the third mounting plate are fixedly mounted on the sleeve, and the plane where the central plane of the third mounting plate is located passes through the central line of the circular shaft;

the lever structure is rotatably connected to the round shaft; one end of the lever structure, which is close to the third mounting plate, is longer, and an arc-shaped part is mounted; the arc-shaped piece is a part of an arc; the area of the end head at the other end of the arc-shaped piece is smaller, and the moving direction of the end head is an arc path;

the two ends of the fourth mounting plate are mounted on the sleeve and are positioned below the circular shaft; a spring is arranged on the fourth mounting plate; the other end of the spring is connected with one end of the arc-shaped piece; the spring is in a compressed state.

Through above-mentioned technical scheme, the detection subassembly passes through lever structure's stub axle head and slides on the surface of electron sample spare, and its small discontinuous vibration is enlargied through lever structure for the first time, turns into the displacement physical quantity of the tip of lever structure's stub axle end simultaneously, can turn into a qualitative physical quantity with the roughness of uncertainty through detection device.

In a further embodiment, the short end bottom of the lever structure is fixedly welded with a rigid ball, and the surface of the ball is smooth.

Through above-mentioned technical scheme, the roller surface is smooth, and the attribute and the shape of ball self can prevent that it from carrying out destruction to sample spare surface, prevent to carry out the detection error that appears after the position rotation at the sample.

In a further embodiment, the clamping mechanism comprises:

the plurality of lifting seats are arranged on the workbench;

the first supporting plate is arranged on the lifting seat; a fourth sliding rail is arranged on the first supporting plate; the installation direction of the fourth sliding track is the same as that of the second sliding track;

the fourth sliding seat is arranged on the fourth sliding track for sliding;

the second supporting plate is arranged on the fourth sliding seat; a rotating table is arranged on the second supporting plate;

and the positioning assemblies are arranged on the rotating table and used for positioning the material.

Through the technical scheme, the position of the sample is adjusted to be suitable for the detection assembly to detect, the sample is turned to measure the roughness in different directions, and the measurement from linear measurement to opposite measurement is expanded.

In a further embodiment, the circuit group comprises:

the force sensitive resistor is arranged on the third mounting plate; the end of the arc-shaped part is pressed on the force sensitive resistor under the action of the spring;

the direct current amplifier is connected with the force-sensitive resistor and amplifies the current passing through the force-sensitive resistor;

and the oscilloscope is connected to a circuit formed by the direct current amplifier through a lead, detects the current transformation in the circuit, and inputs the image model into a computer for storage.

Through above-mentioned technical scheme, convert the physical displacement volume of the long axle head of lever structure among the monitoring devices into the signal of telecommunication, the electric current promptly, through the indirect detection that realizes the sample surface roughness to the monitoring of electric current.

In a further embodiment, the method comprises the following steps:

the method comprises the following steps: shooting surface data of the sample piece in advance, recording the data into a calculation center, and performing linear area division on the surface of the first sample piece by the calculation center to perform path planning of first periodic detection; the calculation center divides the linear area of the surface of the first sample piece from the second direction again, and the path planning of the second periodic detection is carried out; repeatedly dividing paths for many times, and setting a detection route of the detection assembly;

step two: the detection assembly detects the surface roughness of the sample and converts the physical deformation into a current change linear graph which is directly observed through the circuit group;

step three: and the calculation center collects a plurality of measurement data graphs, corresponding to the surface data of the sample piece which is shot in advance, and carries out positioning coupling processing on the surface model of the sample piece which is shot in advance, so as to finally show the surface roughness of the sample piece.

The invention has the beneficial effects that: converting the surface roughness of the raw material of the electronic device, converting the roughness into an electric signal, and indirectly detecting the surface roughness of the raw material; at least two times of amplification treatment is carried out in the actual detection process, and the surface roughness of the raw material is more visual when being detected through a lever structure and a direct current amplifier; the method comprises the steps of dividing a linear area of a material, periodically dividing the material from different directions and detecting the material, and simulating the surface roughness of the material on a computer in a pattern mode according to surface model data of a material piece.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is a partial structural schematic diagram of a first moving mechanism of the present invention.

Fig. 3 is a partial structural schematic diagram of the detection assembly of the present invention.

FIG. 4 is a schematic cross-sectional view of the detection assembly of the present invention.

Fig. 5 is a schematic structural diagram of the clamping mechanism of the invention.

FIG. 6 is a schematic diagram of the circuit group current of the present invention.

Each of fig. 1 to 6 is labeled as: the device comprises a workbench 1, a vertical support frame 2, a first moving mechanism 3, a first rail 31, a first sliding seat 32, a horizontal support frame 33, a second sliding rail 34, a second sliding seat 35, a first mounting plate 36, a third sliding rail 37, a second mounting plate 38, a clamping assembly 39, a detection assembly 44, a circular shaft 41, a kit 42, a third mounting plate 43, a lever structure 44, an arc-shaped member 45, a fourth mounting plate 46, a spring 47, a clamping mechanism 5, a lifting seat 51, a first support plate 52, a fourth rail 53, a fourth sliding seat 54, a second support plate 55, a rotating table 56, a positioning assembly 57, a circuit group 6, a force-sensitive resistor 61, an oscilloscope 62 and a direct current amplifier 63.

Detailed Description

Based on the requirement of the range of the roughness of the material for processing the electronic components, the material is required to be in an allowable range to carry out batch production of the electronic components, a method for amplifying the roughness of the surface of the material is adopted, the roughness of the surface of the material is amplified for the first time, the physical quantity is used for forming, the physical quantity is converted into an electric signal again, the electric signal is input into a computer program, fixed-point coupling calculation is carried out, and therefore qualitative model data is used for reflecting the surface roughness of the material.

The device for detecting the surface roughness of the material in the implementation is mainly used for linearly detecting the surface roughness of the electronic component material, carrying out pattern quantitative analysis on the roughness of the surface of the raw material so as to judge the roughness of the surface of the raw material, carrying out strip regionalization division on the sample material in advance, rotating the material, carrying out secondary strip regionalization division, carrying out repeated operation for a plurality of times, inputting a preset path into a calculation control center, and the detection assembly 4 mainly comprises a first moving mechanism 3 and a clamping mechanism 5, wherein the first moving mechanism 3 mainly controls and moves the detection assembly 4 so that the detection assembly 4 detects the surface roughness of the electronic raw material according to the preset path in different regions, the first moving mechanism 3 is arranged on the workbench 1, a circuit detection group 6 is additionally arranged on the first moving mechanism 3, the circuit detection group 6 is connected with the detection assembly 4, when the detection assembly 4 detects the roughness of the surface of a material in a linear mode, the circuit detection group 6 converts the roughness of the surface of an electronic material piece into an electric signal to be displayed and recorded, linear graph change data are transmitted into a computer, the computer performs coupling positioning processing according to image data recorded in the electronic material piece in advance to simulate the surface roughness of a sample, the clamping mechanism 5 is arranged right below the first moving mechanism 3, the clamping mechanism 5 positions the material and rotates the direction of the material, so that the detection assembly 4 detects the roughness of the material in multiple directions, and the roughness of the surface of the sample is further judged.

Based on the above structure, when the detecting component 4 detects the sample of the electronic material, due to factors such as the material and size of the sample of different electronic parts, the detecting component 4 needs to be adjusted in at least three directions to adapt to the detected path planning, in a further embodiment, the first moving mechanism 3 is provided to adjust the position of the detecting component 4, wherein the detecting component comprises a vertical supporting frame 2 vertically installed on the workbench 1, two parallel first sliding rails are arranged on the vertical supporting frame, two ends of the first sliding seat 32 are installed on the first sliding rails, the first sliding seat 32 slides up and down, one side part of the horizontal supporting frame 33 passes through the first sliding seat 32, a driving component is installed at one end of the horizontal supporting frame 33, and a part of the driving component is weighted to achieve the stability of the balancing device, the horizontal supporting frame 33 is fixedly installed on the first sliding seat 32, at least two parallel second sliding rails 34 are mounted on the lower surface of the horizontal support frame 33, two ends of each second sliding seat 35 are arranged on the corresponding second sliding rail 34 to perform horizontal sliding, a first mounting plate 36 is fixedly mounted on the lower surface of the corresponding second sliding seat 35, at least two parallel third sliding rails 37 are mounted on the lower surface of the corresponding first mounting plate 36, the projection of each third sliding rail 37 on the horizontal plane is perpendicular to the projection of the corresponding second sliding rail 34 on the horizontal plane, a second mounting plate 38 is mounted on the corresponding sliding seat of the corresponding second sliding rail 34, two sets of clamping assemblies 39 are mounted on two sides of the lower surface of the corresponding second mounting plate 38, each clamping assembly 39 is a movable circular piece, and the detection assembly 4 is positioned and clamped through screwing.

Based on the above structure, after determining the planning and setting of the detection path of the electronic sample, determining the roughness of the electronic sample by using the detection assembly 4, in a further embodiment, the detection assembly 4 primarily uses a lever structure to perform a first step amplification conversion on the surface of the electronic sample, that is, two ends of the circular shaft 41 are installed with the circular sleeve 42 by fasteners such as screws, the clamping device positions and clamps the circular sleeve 42 to prevent the circular shaft 41 from rotating, a third installation plate 43 is fixedly installed between the two sleeve 42, a plane of a central plane of the third installation plate 43 passes through a central line of the circular shaft 41, the third installation plate 43 is located in a direction of an upper side surface of the circular shaft 41, the lever structure 44 is rotatably installed at the center of the circular shaft 41, the local positioning piece is used to prevent the lever structure 44 from moving along the axial direction of the circular shaft 41, wherein one end of the lever structure 44 close to the third installation plate 43 is longer, the end part of the arc-shaped part 45 is provided with the arc-shaped part 45, the arc-shaped part 45 is a part of an arc, namely the motion track and the shape of the arc-shaped part 45 are overlapped with the motion track of the end part of the lever structure 44, the end head of the other end of the arc-shaped part 45 is smaller in area, a circular rigid sphere can be additionally welded so as to increase the pressure when the end part of the arc-shaped part 45 extrudes the resistor, two ends of the fourth mounting plate 46 are provided with the early sleeve part 42 and are positioned below the circular shaft 41, the fourth mounting plate 46 is provided with the spring 47, the other end of the spring 47 is connected with one end of the arc-shaped part 45, the spring 47 is in a compression state, so that the end part of the arc-shaped part 45 is always pressed on the resistor, the working process is that the short shaft end of the lever structure 44 slides on the surface of the electronic sample part, the tiny vibration of the lever structure 44 is amplified through the lever structure 44 for the first time, and is converted into the physical displacement quantity of the long end part of the lever structure 44, the uncertainty roughness can be converted into a qualitative physical quantity.

Based on above-mentioned structure, because electronic sample spare self roughness is difficult to detect, in further embodiment, carry out special treatment to the minor axis end of lever structure 44, be about to the minor axis end bottom vertical extension of lever structure 44, and make sharp-pointed design with its bottom, fixed welding rigidity ball in the ground of bottom, and the roller surface is smooth, firstly for the roughness on the surface of precision detection sample spare, the attribute of ball self can prevent its destruction to sample spare surface simultaneously, prevent to carry out the detection error that appears after the position rotation at the sample.

Based on the above structure, after the detection module 4 performs detection path planning and detection method determination, the detection module 4 preferably performs detection of a straight path, and still needs to perform position adjustment and steering on the sample, so as to expand from linear detection of the electronic sample piece to detection of the surface of the sample piece, in a further embodiment, a clamping mechanism 5 is provided to position and rotate the sample piece, wherein a plurality of lifting seats 51 are provided on the workbench 1, a first support plate 52 is installed on the lifting seats 51, the plurality of lifting seats 51 perform lifting operation synchronously, a fourth sliding rail is installed on the first support plate 52, the installation direction of the fourth sliding rail is the same as that of the second sliding rail 34, a fourth sliding seat 54 is provided on the fourth sliding rail for sliding, a second support plate 55 is installed on the fourth sliding seat 54, a rotating table 56 is installed on the second support plate 55, the revolving stage 56 rotates predetermined angle after detecting component 4 carries out linear detection to the sample spare at the stage, and detecting component 4 carries out next periodic linear detection to the sample spare to pool out the roughness of whole sample spare, a plurality of locating component 57 set up on the revolving stage 56 for the position of fixed material.

Based on the above structure, in a further embodiment, because the detection range of the detection assembly 4 is limited, the sensitivity of the lever structure 44 and the conversion degree of the surface of the sample piece are limited, and the converted roughness of the surface of the sample piece still needs to be further amplified, in a further embodiment, the circuit group 6 is adopted to convert the physical displacement of the long shaft end of the lever structure 44 in the detection assembly 4 into an electrical signal, i.e. current, for this purpose, a force sensitive resistor 61 is arranged on the third mounting plate 43, wherein the end of the arc-shaped member 45 is always pressed on the force sensitive resistor 61 under the action of the spring 47, a direct current amplifier 63 is connected with the force sensitive resistor 61 to amplify the current passing through the force sensitive resistor 61, an oscilloscope 62 is connected with the circuit formed by the direct current amplifier 63 to detect the conversion of the current in the circuit, and the image type is transferred to a computer to be stored, the circuit path is maintained, when the surface of the sample is smooth in a stable state, the current is stable, under the action of the direct current amplifier 63, the current presents stable linearity on the oscilloscope 62, when the surface of the sample is not smooth, the current presents a changing continuous curve on the oscilloscope 62, curve data are recorded into a computer, and the computer corresponds to the preset sample map data, so that the roughness of the sample piece can be presented linearly and visually.

The working principle is as follows: the sample piece is placed on the clamping mechanism 5, the surface data of the sample piece is shot in advance and recorded into a calculation center, the calculation center carries out linear area division on the first sample piece surface, the detection direction of the sample piece is adjusted, secondary linear area division is carried out, repeated division is carried out for a plurality of times, so that the detection route of the detection assembly 4 is set, firstly, the position of the sample is fixed at the center of the rotating table 56 by a plurality of positioning assemblies 57, a plurality of lifting seats 51 synchronously carry out lifting operation to enable the sample to be abutted to the designated height, the horizontal position of the sample is adjusted again by a fourth sliding rail to enable the sample to reach the designated measurement position, then, the position of the detection assembly 4 is adjusted by the first moving mechanism 3, so that the detection assembly 4 reaches the designated position, the positions of two ends of the first sliding seat 32 on the first sliding rail are fixed, and the second sliding seat 35 slides on the second sliding rail 34, the detection assembly 4 is driven to move linearly, wherein the end of the short shaft end of the lever structure 44 in the detection assembly 4 abuts against the surface of the sample piece, that is, the end of the short shaft end of the lever structure 44 slides on the surface of the sample piece along with the movement of the second sliding seat 35, after the detection is completed on the first path, the sliding seat of the third sliding track 37 drives the detection assembly 44 to move, so that the end of the short shaft end of the lever structure 44 is located on the second detection path, the detection is sequentially performed for a plurality of times until the surface of the sample piece is covered, wherein the tiny vibration of the lever structure 44 is amplified by the lever structure 44 for the first time and is converted into the physical displacement quantity of the end part of the long shaft end of the lever structure 44, the spring 47 is in a compressed state, so that the arc-shaped piece 45 always abuts against the force-sensitive resistor 61, the circuit group 6 is opened, the direct current amplifier 63 amplifies the current, the linear graph can be displayed on the oscilloscope 62, the curve data is recorded into the computer for a changed continuous curve, the rotating table 56 is controlled to rotate a preset angle of the sample piece, the next period of measurement is carried out, the computer corresponds to the preset sample graph data, point position coupling can be carried out on the graph data of the linear data corresponding to the sample, and the surface roughness of the sample piece is displayed through the image relationship.

The preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, however, the present invention is not limited to the specific details of the embodiments, and various equivalent changes can be made to the technical solution of the present invention within the technical idea of the present invention, and these equivalent changes are within the protection scope of the present invention.

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