阅读说明：本技术 玻璃卷的制造方法 (Method for manufacturing glass roll ) 是由 森弘树 斋藤隆义 稻山尚利 山城陆 于 2020-05-22 设计创作，主要内容包括：玻璃卷的制造方法包括开始准备工序(S1),在将与第一玻璃膜(GF1)的始端部(GFa)连结的第一导膜(LF1)从放卷装置(3)送出并使该第一导膜(LF1)通过了加热成膜装置(4)之后,使该第一导膜(LF1)卷绕于卷绕装置(8)。开始准备工序(S1)包括使加热成膜装置(4)升温至成膜温度的升温工序。在加热成膜装置(4)升温至成膜温度之前,第一玻璃膜(GF1)到达该加热成膜装置(4)。(The method for manufacturing a glass roll comprises a starting preparation step (S1) for feeding a first guide film (LF1) connected to the start end (GFa) of a first glass film (GF1) from an unwinding device (3) and passing the first guide film (LF1) through a heating film-forming device (4), and then winding the first guide film (LF1) around a winding device (8). The start preparation step (S1) includes a temperature raising step of raising the temperature of the heating film forming apparatus (4) to a film forming temperature. Before the temperature of the heating film forming device (4) is raised to the film forming temperature, the first glass film (GF1) reaches the heating film forming device (4).)

1. A method for manufacturing a glass roll, wherein a functional film is formed on a first glass film fed from an unwinding device by a heating film-forming device to form a second glass film, and the second glass film is wound by a winding device to manufacture the glass roll,

the method for manufacturing a glass roll is characterized by comprising:

a start preparation step of feeding a first guide film connected to a start end portion of the first glass film from the unwinding device, passing the first guide film through the heating film forming device, and then winding the first guide film around the winding device; and

a film forming step of forming a functional film on the first glass film by the heating film forming apparatus after the first conductive film passes through the heating film forming apparatus,

the start preparation step includes a temperature raising step of raising the temperature of the heating film forming apparatus to a film forming temperature,

before the heating film forming device is heated to the film forming temperature, the first glass film reaches the heating film forming device.

2. The method for manufacturing a glass roll according to claim 1,

the temperature increasing step is started after a connecting portion where the first glass film and the first conductive film are connected passes through the heating film forming apparatus.

3. The method for manufacturing a glass roll according to claim 1,

in the temperature raising step, the first glass film reaches the heating film forming apparatus during the temperature raising of the heating film forming apparatus.

4. The method for manufacturing a glass roll according to any one of claims 1 to 3,

the method for manufacturing a glass roll includes a finishing preparation step of: feeding a second guide film connected to a terminal end portion of the first glass film from the unwinding device, and passing the second guide film through the heated film forming device, and then winding the second guide film around the winding device,

the finishing preparation step includes a cooling step of cooling the heating film forming apparatus,

the temperature lowering step is started before the terminal end portion of the first glass film reaches the heating film forming apparatus.

5. The method for manufacturing a glass roll according to any one of claims 1 to 4,

the heating film forming apparatus includes a heating roller that is brought into contact with the first glass film to heat the glass film and conveys the glass film,

the conveyance speed of the first glass film in the preparation start step is set to be lower than the conveyance speed of the first glass film in the film formation step.

6. The method for manufacturing a glass roll according to claim 4,

the heating film forming apparatus includes a heating roller that is brought into contact with the first glass film to heat the glass film and conveys the glass film,

the conveyance speed of the first glass film in the end preparation step is set to be lower than the conveyance speed of the first glass film in the film formation step.

7. The method for manufacturing a glass roll according to claim 4,

the heating film forming apparatus includes a heating roller that is brought into contact with the first glass film to heat the glass film and conveys the glass film,

the conveyance speed of the first glass film in the end preparation step is set to be lower than the conveyance speed of the first glass film in the start preparation step.

8. The method for manufacturing a glass roll according to any one of claims 1 to 7,

in the temperature increasing step, after the first glass film reaches the heating film forming device, the first glass film is reciprocated between the unwinding device and the winding device.

Technical Field

The present invention relates to a method for manufacturing a glass roll by winding a glass film on which a functional film is formed.

Background

Conventionally, there is known a technique of forming a functional film on a glass film while pulling out the glass film from a base material glass Roll and conveying the glass film in a predetermined direction by a Roll-to-Roll (Roll) system.

For example, patent document 1 discloses a method for manufacturing a glass roll, which includes: a glass film supply step of feeding out a first glass film drawn from a base material glass roll in a predetermined direction; a film formation step of forming a second glass film by heating a functional film (transparent conductive film) to form a film on the first glass film; a protective film supplying step of forming a third glass film by overlapping the protective film with the second glass film; and a winding step of winding the third glass film into a roll shape to form a glass roll.

When the glass film (third glass film) on which the functional film is formed is wound in a roll shape as described above, it is necessary to connect the glass film to the winding core. For example, patent document 2 discloses a technique for connecting a winding core to a glass film by a resin guide film (leader) in order to prevent breakage of the glass film.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2018-188320

Patent document 2: japanese laid-open patent publication No. 2017-109850

Disclosure of Invention

Problems to be solved by the invention

When a functional film is formed on a glass film by a roll-to-roll method as in the related art, a resin conductive film has a lower heat resistance than the glass film, and therefore may be broken by heat from a film forming apparatus when passing through a film forming process.

The present invention has been made in view of the above circumstances, and an object of the present invention is to heat and form a glass film without breaking a conductive film.

Means for solving the problems

The present invention is directed to solving the above-described problems, and a method for manufacturing a glass roll by forming a functional film on a first glass film fed from an unwinding device by a heating film-forming device to form a second glass film, and winding the second glass film by a winding device to manufacture a glass roll, the method comprising: a start preparation step of feeding a first guide film connected to a start end portion of the first glass film from the unwinding device, passing the first guide film through the heating film forming device, and then winding the first guide film around the winding device; and a film forming step of forming a functional film on the first glass film by the heating film forming apparatus after the first conductive film passes through the heating film forming apparatus, wherein the start preparation step includes a temperature raising step of raising a temperature of the heating film forming apparatus to a film forming temperature, and the first glass film reaches the heating film forming apparatus before the temperature of the heating film forming apparatus is raised to the film forming temperature.

According to this configuration, the first conductive film connected to the first glass film can pass through the heating film forming apparatus before the heating film forming apparatus reaches the film forming temperature. Thus, the first glass film can be heated to form a film without breaking the first conductive film. Note that "before the heating device is heated to the film formation temperature" includes not only after the start of the temperature increasing step but also before the start of the temperature increasing step.

The temperature raising step may be started after a connecting portion where the first glass film and the first conductive film are connected passes through the heating film forming apparatus. The temperature raising step is started after all the first conductive film has passed through the heating film forming apparatus, and thus the first conductive film can be reliably prevented from being broken in the film forming step.

In the method for manufacturing a glass roll according to the present invention, the first glass film may reach the heating film forming apparatus during the temperature increase of the heating film forming apparatus in the temperature increase step.

The method for manufacturing a glass roll of the present invention may further include a finishing preparation step of: and a finishing preparation step of winding the second conductive film around the winding device after the second conductive film connected to the terminal end portion of the first glass film is fed out from the unwinding device and passed through the heating film forming device, wherein the finishing preparation step includes a cooling step of cooling the heating film forming device, and the cooling step is started before the terminal end portion of the first glass film reaches the heating film forming device.

According to this configuration, the temperature lowering step is started while the first glass film passes through the heating film forming apparatus, so that the temperature of the heating film forming apparatus can be lowered to a temperature at which the second conductive film does not break before the second conductive film reaches the heating film forming apparatus.

In the method for manufacturing a glass roll according to the present invention, the heated film forming apparatus may include a heating roller that is brought into contact with the first glass film to heat the first glass film and conveys the first glass film, and the conveyance speed of the first glass film in the preparation start step may be set to be lower than the conveyance speed of the first glass film in the film forming step.

According to this configuration, the conveyance speed in the preparation start step is set to be lower than the conveyance speed in the film formation step, and the amount of the first glass film conveyed without film formation can be reduced as much as possible in the preparation start step.

In the glass roll manufacturing method of the present invention, the conveyance speed of the first glass film in the completion preparation step may be set to be lower than the conveyance speed of the first glass film in the film formation step.

According to this configuration, the conveyance speed in the preparation end step is set to be lower than the conveyance speed in the film formation step, and the amount of the first glass film conveyed without film formation can be reduced as much as possible in the preparation end step.

In the method for manufacturing a glass roll according to the present invention, the conveyance speed of the first glass film in the end preparation step may be set to be lower than the conveyance speed of the first glass film in the start preparation step.

The time required to complete the temperature decreasing step of the preparatory step is longer than the time required to start the temperature increasing step of the preparatory step. Therefore, by setting the conveyance speed at which the preparation step is ended to be lower than the conveyance speed at which the preparation step is started, it is possible to ensure a longer time until the second conductive film reaches the heating film forming apparatus.

In the method for manufacturing a glass roll according to the present invention, in the temperature increasing step, after the first glass film reaches the heated film forming apparatus, the first glass film may be reciprocated between the unwinding device and the winding device. This makes it possible to reduce the amount of the first glass film to be conveyed without film formation in the initial preparation step.

Effects of the invention

According to the present invention, a glass film can be formed by heating without breaking a conductive film.

Drawings

Fig. 1 is a sectional view showing a glass roll manufacturing apparatus according to a first embodiment.

Fig. 2 is a flowchart illustrating a method of manufacturing a glass roll.

Fig. 3 is a cross-sectional view showing a step of the method for manufacturing a glass roll.

Fig. 4 is a cross-sectional view showing a step of the method for manufacturing a glass roll.

Fig. 5 is a cross-sectional view showing a step of the method for manufacturing a glass roll.

Fig. 6 is a cross-sectional view showing a step of the method for manufacturing a glass roll according to the second embodiment.

Fig. 7 is a cross-sectional view showing a step of the method for manufacturing a glass roll.

Detailed Description

Embodiments of the present invention will be described below with reference to the drawings. Fig. 1 to 5 show a first embodiment of a method for manufacturing a glass roll according to the present invention.

The manufacturing apparatus used in the method manufactures a glass Roll by forming a functional film on a transparent glass film drawn from a base glass Roll by a Roll-to-Roll (Roll) method and winding the functional film into a Roll. Hereinafter, the glass film drawn from the base glass roll is referred to as a first glass film, and the glass film after the functional film is formed is referred to as a second glass film.

As shown in fig. 1, the manufacturing apparatus 1 includes a vacuum chamber 2, an unwinding device 3, a film deposition device 4, a guide roller 5, sensors 6 and 7, a winding device 8, and a control device 9.

The vacuum chamber 2 internally houses the unwinding device 3, the film forming device 4, the guide roller 5, the sensors 6 and 7, and the winding device 8. The internal space of the vacuum chamber 2 is set to a predetermined degree of vacuum by a vacuum pump. An inert gas such as argon can be supplied into the vacuum chamber 2.

The unwinding device 3 rotatably supports a base material glass roll GR1, and draws out the first glass film GF1 from the base material glass roll GR1 and feeds it to the film forming apparatus 4. The unwinding device 3 can change the rotation speed of the base glass roll GR1 (the feeding speed of the first glass film GF1) by the control of the control device 9.

The parent material glass roll GR1 mounted on the unwinding device 3 includes a first glass film GF1, a first guide film LF1 connected to the start end portion GFa of the first glass film GF1, a second guide film LF2 connected to the end portion GFb of the first glass film GF1, a protective film PF1 overlapping the first glass film GF1, and a winding core WC 1.

The first glass film GF1 and the respective guide films LF1 and LF2 are connected by another connecting member such as an adhesive tape. Hereinafter, a connection portion connecting the start end portion GFa of the first glass film GF1 and the first guide film LF1 is referred to as a first connection portion 10, and a connection portion connecting the end portion GFb of the first glass film GF1 and the second guide film LF2 is referred to as a second connection portion 11. The second guide film LF2 has one end (starting end) connected to the terminating end GFb of the first glass film GF1 via the second connection portion 11, and has the other end (terminating end) connected to the core WC 1.

The thickness of the first glass film GF1 is 500 μm or less, preferably 10 μm or more and 300 μm or less, most preferably 30 μm or more and 200 μm or less.

As the material of the first glass film GF1, silicate glass or silica glass is used, borosilicate glass, soda-lime glass, aluminosilicate glass or chemically strengthened glass is preferably used, and alkali-free glass is most preferably used. Here, the alkali-free glass means glass substantially not containing an alkali component (alkali metal oxide), specifically, glass having an alkali component weight ratio of 3000ppm or less. The weight ratio of the alkali component in the present invention is preferably 1000ppm or less, more preferably 500ppm or less, and most preferably 300ppm or less.

Resin films were used for the guide films LF1 and LF 2. Specifically, as each of the conductive films LF1 and LF2, for example, an organic resin film (synthetic resin film) such as a polyethylene terephthalate film, an ionomer film, a polyethylene film, a polypropylene film, a polyvinyl chloride film, a polyvinylidene chloride film, a polyvinyl alcohol film, a polyester film, a polycarbonate film, a polystyrene film, a polyacrylonitrile film, an ethylene-vinyl acetate copolymer film, an ethylene-vinyl alcohol copolymer film, an ethylene-methacrylic acid copolymer film, a nylon (registered trademark) film (polyamide film), a polyimide film, and cellophane can be used.

The unwinding device 3 includes a protective film recovery unit 12 that winds the protective film PF1 included in the base material glass roll GR 1. The protective film collecting unit 12 is disposed at a position above the winding device 8, but is not limited to this position. The protective film recovery unit 12 peels off the protective film PF1 overlapped with the first glass film GF1, and winds the protective film into a roll for recovery.

The film formation apparatus 4 is a heating film formation apparatus that conveys the first glass film GF1 while heating the first glass film and forms a functional film on the first glass film GF 1. The film formation apparatus 4 can form a functional film on the first glass film GF1 by various film formation methods such as a sputtering method, a vapor deposition method, and a CVD method. In this embodiment, a case where a transparent conductive film, for example, an ITO film, which is a functional film is formed by a sputtering method will be described.

The film forming apparatus 4 is constituted by an ion beam sputtering apparatus, a magnetron sputtering apparatus, and the like. The film formation apparatus 4 as a sputtering apparatus mainly includes a plurality of sputtering sources 13 including targets and a heating unit 14 that heats the first glass film GF 1.

Each sputtering source 13 is disposed at a predetermined interval from the heating unit 14 so that sputtering particles (ITO particles) scattered from a target adhere to one surface of the first glass film GF 1.

The heating unit 14 is composed of a rotatable heating roller (drum roller) that heats while contacting the first glass film GF 1. The heating unit 14 includes a cylindrical roller main body 15 that supports the first glass film GF1, and a heater 16 that heats the roller main body 15.

The roller main body 15 is made of glass, ceramic, or metal. The roller body 15 is rotatably supported by the shaft portion 17.

The heater 16 is disposed inside the roller main body 15 to heat the roller main body 15. The heater 16 is made of, for example, an infrared heater or a near infrared heater, but is not limited thereto.

The plurality of guide rollers 5 are driven to rotate by a motor not shown, but a part thereof may be constituted by a free roller. The guide rollers 5 are disposed at intervals between the unwinding device 3 and the film deposition device 4 and between the film deposition device 4 and the winding device 8.

The sensors 6 and 7 include a first sensor 6 disposed downstream of the film forming apparatus 4 (between the film forming apparatus 4 and the winding apparatus 8) and a second sensor 7 disposed upstream of the film forming apparatus 4 (between the unwinding apparatus 3 and the film forming apparatus 4). Each of the sensors 6 and 7 is configured by a non-contact sensor such as a transmission laser sensor, for example, but is not limited to this configuration.

The first sensor 6 detects the first connection portion 10 and the leading end portion GFa of the first glass film GF1, and transmits a detection signal to the control device 9. The second sensor 7 detects the second coupling portion 11 and the terminal end portion GFb of the first glass film GF1, and transmits a detection signal to the control device 9.

The winding device 8 forms a glass roll by winding the protective film PF2 on the winding core WC2 while overlapping the second glass film. The winding device 8 can change the rotation speed of the winding core WC2 by the control of the control device 9.

The winding device 8 includes a protective film supply unit 18 that supplies a protective film PF2 to the second glass film wound around the winding core WC 2. The protective film supply unit 18 is disposed at a position above the winding device 8, but is not limited to this position. The protective film supplying unit 18 includes a protective film roll PFR, and supplies the protective film PF2 drawn out from the protective film roll PFR to the second glass film.

The control device 9 includes, for example, a computer (e.g., PC) on which various hardware such as a CPU, ROM, RAM, HDD, input/output interface, display, and the like are mounted. The control device 9 is connected to the unwinding device 3, the guide roller 5, the film forming device 4, and the winding device 8 so as to be able to communicate with each other, and executes control of the winding device 8, rotation control of the guide roller 5, heating of the film forming device 4, control of film formation and conveyance, control of the winding device 8, and the like.

A method for manufacturing a glass roll using the manufacturing apparatus 1 having the above-described structure will be described below. As shown in fig. 2, the method includes a start preparation process S1, a film formation process S2, and an end preparation process S3.

In the starting preparation step S1, the base material glass roll GR1 is mounted on the unwinding device 3, the first guide film LF1 is pulled out from the base material glass roll GR1, and the start end portion thereof is connected to the winding core WC2 of the winding device 8. Thereafter, the vacuum chamber 2 is closed, and the internal space thereof is set to a predetermined degree of vacuum. In addition, the vacuum chamber 2 is filled with an inert gas.

Next, the control device 9 synchronizes the unwinding device 3, the guide roller 5, the roller main body 15 of the heating section 14, and the winding device 8, and conveys the first guide film LF1 from the upstream unwinding device 3 to the downstream winding device 8 at a predetermined speed. The transport speed of the first guide film LF1 in this case is desirably constant within a range of 0.01 to 0.5m/min, but is not limited to this range. The first guide film LF1 passes through the film forming device 4 and is wound by the winding device 8.

In the start preparation step S1, the first glass film GF1 included in the base material glass roll GR1 is wound around the winding apparatus 8 by the first guide film LF1 of the film forming apparatus 4 and is pulled out from the base material glass roll GR 1. The first glass film GF1 passes through the film forming apparatus 4 together with the first guide film LF1 and is conveyed to the winding apparatus 8. At this time, the first glass film GF1 is conveyed at the same speed as the conveying speed of the first guide film LF 1. The conveyance speed of the first glass film GF1 in the start preparation step S1 is set to be lower than the conveyance speed of the first glass film GF1 in the film formation step S2 described later.

The start preparation step S1 includes a temperature increasing step of increasing the temperature of the film forming apparatus 4. As shown in fig. 3, when the first connection portion 10 passes through the film formation device 4, the first sensor 6 detects the first connection portion 10 and the leading end portion GFa of the first glass film GF1, and transmits a detection signal to the control device 9. Thereby, the control device 9 activates the heater 16 of the heating section 14 and starts heating of the roller main body 15. At the start of the temperature increasing process, the first connection portion 10 and the leading end portion GFa of the first glass film GF1 pass through the film forming apparatus 4, and therefore the first guide film LF1 does not contact the roller main body 15 during the execution of the temperature increasing process.

The roller main body 15 is heated to a predetermined film formation temperature or higher by the heater 16 while guiding the first glass film GF1 to the downstream side. The temperature of the heated roller main body 15 is set to, for example, 200 ℃ to 500 ℃, but is not limited to this range. During the temperature increasing step, the sputtering source 13 is not operated, and the sputtering particles are not emitted.

When the temperature increasing step is completed (when the roller main body 15 is heated to a predetermined film forming temperature or higher), the control device 9 starts the film forming step S2. The control device 9 controls the feeding speed of the unwinding device 3, the rotation speed of the roller main body 15, and the winding speed of the winding device 8, and increases the conveyance speed of the first glass film GF 1. The transport speed of the first glass film GF1 in the film forming step S2 is preferably constant within a range of 0.1 to 10m/min, but is not limited to this range.

The roller main body 15 guides the first glass film GF1 to the downstream side while heating the first glass film GF 1. The first glass film GF1 was heated to 150 ℃ or higher by the roller body 15. When the sputtered particles are ITO, the first glass film GF1 is desirably heated to 200 ℃ or more, more desirably heated to 250 ℃, and most desirably heated to 300 ℃ or more.

Under the control of the control device 9, the film formation device 4 scatters sputtered particles (for example, ITO particles) from the plurality of sputtering sources 13, and sequentially adheres the sputtered particles to the first glass film GF1 conveyed by the roller main body 15.

By heating the first glass film GF1 by the roller body 15, the ITO particles adhered to the first glass film GF1 are crystallized, and a functional film FM having a low resistance (for example, 20 Ω/□ or less) is formed. Thereby, the second glass film GF2 was formed as shown in fig. 4.

As shown in fig. 4, in the film forming step S2, the protective film PF2 is overlapped with the second glass film GF2 by the protective film supply unit 18, and the second glass film GF2 and the protective film PF2 are wound around the winding core WC2 by the winding apparatus 8. Thereby, a glass roll GR2 is formed around the winding core WC 2. The glass roll GR2 has an enlarged outer diameter in accordance with the rotation of the roll core WC 2.

When the film forming process S2 is nearly completed, all the first glass film GF1 is fed out from the unwinding device 3. Thereafter, the second connecting portion 11 is fed out from the unwinding device 3. As shown in fig. 5, when the second coupling section 11 reaches the second sensor 7, the second sensor 7 detects the second coupling section 11 and the terminal end GFb of the first glass film GF1, and transmits a detection signal to the control device 9.

Upon receiving the signal from the second sensor 7, the control device 9 starts the end preparation step S3. The end preparation step S3 includes a temperature reduction step of reducing the temperature of the film formation device 4 to prevent the second guide film LF2 from being broken. The temperature lowering process is started while the first glass film GF1 passes through the film formation apparatus 4 and before the terminal end GFb reaches the film formation apparatus 4.

In the temperature lowering step, the controller 9 stops heating by the heating unit 14. The heater 16 is stopped, and the temperature of the roller main body 15 gradually decreases. The controller 9 stops the sputtering source 13 of the film formation apparatus 4. The controller 9 controls the feeding speed of the unwinding device 3, the rotation speed of the heating roller, and the winding speed of the winding device 8, and sets the conveyance speed of the first glass film GF1 and the second guide film LF2 to be lower than the conveyance speed in the film forming step S2. More preferably, the conveyance speed is set to be lower than the conveyance speed of the first glass film GF1 in the start preparation step S1.

In the temperature lowering step, while the first glass film GF1 passes through the heating unit 14, the roller main body 15 is rotated and lowered to a temperature (for example, 80 ℃ or lower) at which the second guide film LF2 does not break. When the first glass film GF1 passes through the heating portion 14, the second guide film LF2 connected to the terminal end GFb of the first glass film GF1 reaches the heating portion 14. At this time, since the temperature of the roller main body 15 is sufficiently lowered, the second guide film LF2 is conveyed to the downstream side by the roller main body 15 without being broken.

When the second guide film LF2 having passed through the film formation apparatus 4 is wound around the winding apparatus 8, the end preparation step S3 is completed with the glass roll GR2 supported by the winding apparatus 8. The glass roll GR2 is taken out of the vacuum chamber 2 and conveyed to the next step.

In the subsequent steps, the glass roll GR2 is pulled out from the second glass film GF2, and a predetermined circuit pattern (for example, an electrode pattern) is formed on the functional film FM by means of photolithography or the like. When a prescribed manufacturing-related process is performed, the protective film PF2 is removed (peeled off) from the second glass film GF 2.

According to the above-described manufacturing method of the glass roll GR2 of the present embodiment, in the start preparation step S1, before the temperature of the roller main body 15 is raised to the film formation temperature, that is, before the start of the temperature raising step, the first glass film GF1 is caused to reach the heating unit 14 so that the first conductive film LF1 is not broken by the heat of the heating unit 14. Therefore, the roller main body 15 of the heating section 14 is not in contact with the first guide film LF1, and is heated by the heater 16 while conveying the first glass film GF 1. This makes it possible to reliably perform the film forming step S2 without dissolving the first guide film LF 1.

In the end preparation step S3, the temperature lowering step is performed while the first glass film GF1 passes through the film formation device 4, so that the second guide film LF2 passes through the film formation device 4 without being broken by the heat of the heating unit 14 and is wound around the winding device 8.

In the present embodiment, by setting the conveyance speed of the first glass film GF1 in the start preparation step S1 and the end preparation step S3 to be lower than the conveyance speed of the first glass film GF1 in the film forming step S2, the amount (length) of the first glass film GF1 that passes through the film forming apparatus 4 without film formation can be reduced as much as possible during the execution of the temperature increasing step and the execution of the temperature decreasing step.

Further, by setting the conveyance speed of the first glass film GF1 in the end preparation step S3 to be lower than the conveyance speed of the first glass film GF1 in the start preparation step S1, the amount (length) of the first glass film GF1 that passes through the film forming apparatus 4 without film formation can be reduced as much as possible in the temperature lowering step that requires a longer time than the temperature raising step.

Fig. 6 and 7 show a second embodiment of the present invention. In the present embodiment, the film formation apparatus 4 in the manufacturing apparatus 1 is different from that in the first embodiment. The heating unit 14 of the present embodiment does not include the roller main body 15, and includes a heater 16 that heats the first glass film GF1 without contacting the first glass film GF 1. The sputtering source 13 is disposed at a predetermined interval from the heater 16. A guide roller 5a for guiding the first guide film LF1, the first glass film GF1, and the second guide film LF2 between the sputtering source 13 and the heater 16 is disposed in a position near the heater 16.

The other configurations in this embodiment are the same as those in the first embodiment. In the present embodiment, the same reference numerals as those in the first embodiment are given to the common components with the first embodiment.

A method for producing the glass roll GR2 using the production apparatus 1 having the above-described configuration will be described below. In the present embodiment, in the start preparation step S1, after the first glass film GF1 reaches the film formation device 4 (heating unit 14), the first sensor 6 detects the first connection portion 10 and the start end portion GFa of the first glass film GF1, and the temperature increase step is started, as in the first embodiment.

As shown in fig. 6, during the temperature increasing process, the control device 9 controls the unwinding device 3, the guide rollers 5 and 5a, and the winding device 8, and reciprocates the first guide film LF1 and the first glass film GF1 on the conveyance path between the unwinding device 3 and the winding device 8. In this case, it is desirable that the first connection portion 10 and the leading end portion GFa of the first glass film GF1 reciprocate in a region on the downstream side of the first sensor 6. Accordingly, the first guide film LF1 is not broken, and the first connection portion 10 and the start end portion GFa of the first glass film GF1 are not re-detected by the first sensor 6, so that the first glass film GF1 can be left in the conveyance path. By this reciprocating movement, the amount of the first glass film GF1 wound around the winding device 8 without forming the functional film FM can be reduced as much as possible. This reciprocating mode can also be applied to the first embodiment of the method for manufacturing a glass roll of the present invention shown in fig. 1 to 5.

When the temperature increasing process is completed, the controller 9 controls the unwinding device 3, the guide rollers 5 and 5a, and the winding device 8 to complete the reciprocation of the first glass film GF1 and convey the first glass film GF1 toward the winding device 8 on the downstream side. Thereafter, as shown in fig. 7, a film forming process S2 performed by the film forming apparatus 4 is performed. When the film forming step S2 ends, the control device 9 executes an end preparation step S3 in the same manner as in the first embodiment.

The present invention is not limited to the configurations of the above embodiments, and is not limited to the above-described operational effects. The present invention can be variously modified within a scope not departing from the gist of the present invention.

In the above embodiment, the example in which the glass films GF1 and GF2 and the guide films LF1 and LF2 are conveyed by setting the conveying speed of the glass films GF1 and GF2 and the guide films LF1 and LF2 in the start preparation step S1 and the end preparation step S3 to be lower than the conveying speed of the glass films GF1 and GF2 in the film forming step S2 has been described, but the present invention is not limited to this configuration. For example, in the start preparation step S1 and the end preparation step S3, the conveyance of the glass films GF1 and GF2 and the guide films LF1 and LF2 may be temporarily stopped. However, when there is a possibility that the roller main body 15 of the heating section 14 may rub against the glass films GF1 and GF2 due to thermal expansion and contraction of the roller main body 15, it is desirable that the first glass film GF1 is conveyed at a low speed without being stopped.

The conveyance speed of the first glass film GF1 in the start preparation step S1 and the conveyance speed of the first glass film GF1 in the end preparation step S3 may be set to be equal to each other. The conveyance speed of the first glass film GF1 in the start preparation step S1 and the end preparation step S3 may be set to be equal to the conveyance speed of the first glass film GF1 in the film forming step S2.

In the above-described embodiment, the example in which the temperature increasing step of the start preparation step S1 is started after the first connection portion 10 and the leading end portion GFa of the first glass film GF1 pass through the heating portion 14 is described, but the present invention is not limited to this configuration. For example, the temperature increasing process may be started while the first guide film LF1 is being conveyed by the roller main body 15 of the heating section 14. That is, in the present invention, the first glass film GF1 may be allowed to reach the heating unit 14 during the temperature increasing step (before the temperature of the roller main body 15 is increased to the film forming temperature).

In the above-described embodiment, the heater 16 of the heating unit 14 is stopped in the temperature lowering step of the end preparation step S3, and the heating unit 14 is naturally cooled in the vacuum chamber 2. For example, in the temperature decreasing step, a refrigerant such as an inert gas may be injected from a nozzle disposed in the vacuum chamber 2 toward the heating section 14 to cool the heating section 14.

In the above embodiment, the conveyance speed of the first conductive film is set to a relatively low speed (for example, 0.01 to 0.5mm/min) in the start preparation step S1, but the present invention is not limited to this embodiment. For example, by appropriately adjusting the position of the first sensor 6 or increasing the number of sensors, the lead time (lead time) until the temperature raising step is started can be shortened by setting a speed (e.g., 1 to 15m/min) higher than the transport speed (e.g., 0.1 to 10m/min) in the film forming step S2 until the first connecting portion 10 is detected by the sensors in the start preparation step S1. In this case, after the sensor detects the first connecting portion 10, the temperature increasing step may be started by setting the conveying speed to a relatively low speed (for example, 0.01 to 0.5 m/min).

In the above-described embodiment, the conveyance speed of the first glass film GF1 in the end preparation step S3 was set to be lower than the conveyance speed of the first glass film GF1 in the start preparation step S1, but the present invention is not limited to this embodiment. For example, in the end preparation step S3, when the temperature of the film forming apparatus 4 has sufficiently decreased after the completion of the temperature decrease step, the conveyance speed of the second guide film LF2 may be set to a high speed (e.g., 1 to 15m/min) in order to shorten the lead time.

Description of the reference numerals

3 unwinding device

4 film forming apparatus

8 winding device

14 heating part (heating roller)

FM functional film

GF1 first glass film

GF2 second glass film

GFa starting end of first glass film

GFb terminal end of first glass film

LF1 first guide film

LF2 second guide film

GR2 glass roll

S1 starting the preparation process

S2 film Forming Process

S3 ends the preparation process.