阅读说明：本技术 直线电机及包括其的焊线机 (Linear motor reaches bonding wire machine including it ) 是由 J·S·派瑞许 G·J·库蒂利 于 2020-04-16 设计创作，主要内容包括：提供一种直线电机。直线电机包括移动磁体组件,移动磁体组件包括(i)磁体轨道、(ii)联接到磁体轨道的第一多个永磁体和(iii)联接到磁体轨道并布置在第一多个永磁体下方的第二多个永磁体。直线电机还包括布置在移动磁体组件上方的第一线圈组件。第一线圈组件包括第一多个齿,在第一多个齿之间具有第一槽。第一线圈组件还包括至少部分地设置在第一槽的至少一部分中的第一多个线圈。直线电机还包括布置在移动磁体组件下方的第二线圈组件。第二线圈组件包括第二多个齿,在第二多个齿之间具有第二槽。第二线圈组件包括至少部分地设置在第二槽的至少一部分中的第二多个线圈。(A linear motor is provided. The linear motor includes a moving magnet assembly including (i) a magnet track, (ii) a first plurality of permanent magnets coupled to the magnet track, and (iii) a second plurality of permanent magnets coupled to the magnet track and disposed below the first plurality of permanent magnets. The linear motor further includes a first coil assembly disposed above the moving magnet assembly. The first coil assembly includes a first plurality of teeth with a first slot therebetween. The first coil assembly also includes a first plurality of coils at least partially disposed in at least a portion of the first slot. The linear motor further includes a second coil assembly disposed below the moving magnet assembly. The second coil assembly includes a second plurality of teeth with a second slot therebetween. The second coil assembly includes a second plurality of coils at least partially disposed in at least a portion of the second slot.)

1. A linear motor, comprising:

a moving magnet assembly comprising (i) a magnet track, (ii) a first plurality of permanent magnets coupled to the magnet track, and (iii) a second plurality of permanent magnets coupled to the magnet track and disposed below the first plurality of permanent magnets;

a first coil assembly disposed above the moving magnet assembly, the first coil assembly comprising a first plurality of teeth with first slots therebetween, the first coil assembly further comprising a first plurality of coils at least partially disposed in at least a portion of the first slots; and

a second coil assembly disposed below the moving magnet assembly, the second coil assembly comprising a second plurality of teeth having second slots therebetween, the second coil assembly further comprising a second plurality of coils at least partially disposed in at least a portion of the second slots.

2. The linear motor of claim 1 wherein the first coil assembly includes a plurality of laminations defining each of the first plurality of teeth and the second coil assembly includes a plurality of laminations defining each of the second plurality of teeth.

3. The linear motor of claim 1 wherein each of the first plurality of permanent magnets is positioned directly above a corresponding one of the second plurality of permanent magnets in relation to the magnet track to form a magnet pair.

4. A linear motor as recited in claim 3, wherein a magnetic attraction exists between each magnet pair.

5. The linear motor of claim 1 wherein each of the first plurality of permanent magnets and each of the second plurality of permanent magnets are attached to the magnet track with at least one of an adhesive and a fastener.

6. The linear motor of claim 1 wherein the magnet track is formed of a non-magnetic material.

7. The linear motor of claim 6, wherein the non-magnetic material comprises aluminum.

8. The linear motor of claim 1 wherein the exposed surface of each of the first plurality of magnets is positioned adjacent the first coil assembly at a first distance and the exposed surface of each of the second plurality of magnets is positioned adjacent the second coil assembly at a second distance, wherein the first distance is substantially the same as the second distance.

9. The linear motor of claim 1 wherein the magnet track defines a plurality of tab portions, and each of the first and second plurality of permanent magnets includes a step portion configured to mate with a corresponding one of the plurality of tab portions.

10. The linear motor of claim 1 wherein the first coil assembly and the second coil assembly are coupled together as a combined coil assembly.

11. The linear motor of claim 10 wherein movement of the moving magnet assembly along a horizontal axis causes movement of the combined coil assembly along the horizontal axis.

12. The linear motor of claim 10 further comprising at least one damper element and at least one spring element positioned between the combined coil assembly and the base structure of the linear motor.

13. The linear motor of claim 10 further including a position encoder system for providing position information associated with the combined coil assembly.

14. A linear motor according to claim 13, wherein the position encoder system is selected from the group consisting of an optical encoder system and a magnetic encoder system.

15. The linear motor of claim 10 further including a position encoder system including (i) a scale portion coupled to the combined coil assembly and (ii) an optics portion for imaging the scale portion, the optics portion being coupled to another portion of the linear motor that does not move with the combined coil assembly.

16. A linear motor as recited in claim 13, wherein the linear motor is a three-phase motor, and wherein the position information provided by the position encoder system is used to control the commutation angle of the linear motor.

17. A wire bonding system comprising:

a bonding head assembly carrying a wire bonding tool; and

a linear motor system for driving a weld head assembly along a first horizontal axis, the linear motor system comprising: (a) a moving magnet assembly comprising (i) a magnet track, (ii) a first plurality of permanent magnets coupled to the magnet track, and (iii) a second plurality of permanent magnets coupled to the magnet track and disposed below the first plurality of permanent magnets; (b) a first coil assembly disposed above the moving magnet assembly, the first coil assembly comprising a first plurality of teeth with first slots therebetween, the first coil assembly further comprising a first plurality of coils at least partially disposed in at least a portion of the first slots; and (c) a second coil assembly disposed below the moving magnet assembly, the second coil assembly comprising a second plurality of teeth with second slots therebetween, the second coil assembly further comprising a second plurality of coils at least partially disposed in at least a portion of the second slots.

18. The wire bonding system of claim 17 further comprising another linear motor system for driving the bond head assembly along a second horizontal axis, the second horizontal axis being substantially perpendicular to the first horizontal axis.

19. The wire bonding system of claim 18 further comprising a decoupling element for decoupling the linear motor system from the other linear motor system.

Technical Field

The present invention relates to linear motor systems, and more particularly to an improved linear motor including a moving magnet assembly.

Background

Linear motors are well known in the art and are used in many different industries. For example, linear motor systems are used in wire bonding machines to provide high speed linear motion along various axes. For example, in certain wire bonding machines, linear motors are used to provide precise high speed movement along the x-axis and y-axis of the machine. Exemplary patents detailing examples of linear motion systems include: U.S. patent No. 7,825,549 to Wang (entitled "line MOTOR WITH REDUCED clocking"), U.S. patent No. 4,912,746 to Oishi (entitled "line DC brushlegess MOTOR"), U.S. patent No. 5,642,013 to Wavre (entitled "PERMANENT-MAGNET SYNCHRONOUS MOTOR"), and U.S. patent No. 5,910,691 to Wavre (entitled "PERMANENT-MAGNET LINEAR SYNCHRONOUS MOTOR").

Efforts have been made to provide improvements in the operation of linear motors in areas such as noise reduction, vibration reduction, speed, force, efficiency, accuracy, and motor cost. Accordingly, it would be desirable to provide an improved linear motor.

Disclosure of Invention

According to an exemplary embodiment of the present invention, a linear motor is provided. The linear motor includes a moving magnet assembly, the moving magnet assembly including: (i) a magnet track; (ii) a first plurality of permanent magnets coupled to the magnet track; and (iii) a second plurality of permanent magnets coupled to the magnet track and disposed below the first plurality of permanent magnets. The linear motor further includes a first coil assembly disposed above the moving magnet assembly. The first coil assembly includes a first plurality of teeth with a first slot therebetween. The first coil assembly also includes a first plurality of coils at least partially disposed in at least a portion of the first slot. The linear motor further includes a second coil assembly disposed below the moving magnet assembly. The second coil assembly includes a second plurality of teeth with a second slot therebetween. The second coil assembly includes a second plurality of coils at least partially disposed in at least a portion of the second slot.

According to another exemplary embodiment of the present invention, a wire bonding system is provided. The wire bonding system includes a bond head assembly carrying a wire bonding tool and a linear motor system for driving the bond head assembly along a first horizontal axis. The linear motor system includes a moving magnet assembly having (i) a magnet track, (ii) a first plurality of permanent magnets coupled to the magnet track, and (iii) a second plurality of permanent magnets coupled to the magnet track and disposed below the first plurality of permanent magnets. The linear motor system also includes a first coil assembly disposed above the moving magnet assembly. The first coil assembly includes a first plurality of teeth with a first slot therebetween. The first coil assembly also includes a first plurality of coils at least partially disposed in at least a portion of the first slot. The linear motor system further includes a second coil assembly disposed below the moving magnet assembly. The second coil assembly includes a second plurality of teeth with a second slot therebetween. The second coil assembly includes a second plurality of coils at least partially disposed in at least a portion of the second slot.

Other machines (other than wire bonding machines) are also contemplated as within the scope of the present invention including the linear motor of the present invention. Examples of such machines include die attach machines, flip chip bonders, thermocompression bonders, pick and place machines, and other semiconductor packaging machines.

Drawings

The invention is best understood from the following detailed description when read with the accompanying drawing figures. It is emphasized that, according to common practice, the various features of the drawing are not to scale. On the contrary, the dimensions of the various features are arbitrarily expanded or reduced for clarity. Included in the drawings are the following figures:

fig. 1A is a cross-sectional view of a linear motor according to an exemplary embodiment of the present invention;

FIG. 1B is a combined side and cross-sectional view of the linear motor of FIG. 1A;

FIG. 1C is a detailed view of a portion of FIG. 1A;

fig. 2A is a cross-sectional view of another linear motor according to another exemplary embodiment of the present invention;

FIG. 2B is a combined side and cross-sectional view of the linear motor of FIG. 2A;

fig. 3A is a cross-sectional view of yet another linear electric machine according to another exemplary embodiment of the present invention;

FIG. 3B is a combined side and cross-sectional view of the linear motor of FIG. 3A;

fig. 4A is a cross-sectional view of still another linear motor according to another exemplary embodiment of the present invention;

FIG. 4B is a combined side and cross-sectional view of the linear motor of FIG. 4A;

FIG. 5A is a cross-sectional view of a moving magnet assembly according to an exemplary embodiment of the present invention;

FIG. 5B is a detailed view of a portion of FIG. 5A;

FIG. 5C is a perspective cross-sectional view of the moving magnet assembly of FIG. 5A;

FIG. 5D is a detailed view of a portion of FIG. 5C;

FIG. 5E is a top view of the moving magnet assembly of FIG. 5A;

fig. 6 is a cross-sectional view of another linear motor according to an exemplary embodiment of the present invention;

fig. 7 is a cross-sectional view of still another linear motor according to an exemplary embodiment of the present invention;

fig. 8 is a cross-sectional block diagram of a wire bonding machine including the linear motor of fig. 7 in accordance with an exemplary embodiment of the present invention; and

fig. 9A-9C are various cross-sectional block diagrams of the wire bonding machine of fig. 8 in accordance with an exemplary embodiment of the present invention.

Detailed Description

As used herein, the terms "linear motor," "linear motor system," and "linear motion system" may be considered synonymous. For example, fig. 1A-1C, 2A-2B, 3A-3B, and 4A-4B illustrate respective linear motors 100a, 100B, 100C, and 100 d. Although fig. 6 refers to linear motor system 600 and fig. 7 refers to linear motion system 700, each may also be considered a "linear motor" within the scope of the present invention.

As used herein, the term "magnet track" is intended to refer to any of a variety of structures in a linear electric machine that carry a plurality of permanent magnets arranged to magnetically interact with a coil assembly of the linear electric machine so as to provide a desired linear motion of at least one of the magnet track and the coil assembly. Thus, the magnet tracks are not intended to be limited to any particular arrangement or spacing of, for example, permanent magnets, nor are the magnet tracks intended to be limited to any particular support structure for permanent magnets.

Fig. 1A is a sectional view of a linear motor 100 a. Linear motor 100a includes moving magnet assembly 102, first coil assembly 104a1, and second coil assembly 104a 2. As understood by those skilled in the art, certain components (e.g., electrical connections, etc.) of the linear electric motor 100a have been omitted for simplicity. The moving magnet assembly 102 includes (i) a magnet track 102a, (ii) a first plurality of permanent magnets 102b1, 102b2, · a.., 102b21, 102b22 coupled to the magnet track 102a, and (iii) a second plurality of permanent magnets 102c1, 102c2,. a.., 102c21, 102c22 coupled to the magnet track 102a and disposed below the first plurality of permanent magnets 102b1, 102b2,. a.., 102b 22. As shown in fig. 1A, the permanent magnets are arranged in magnet pairs, one disposed directly above the other. For example, the permanent magnet 102b1 is positioned directly above the permanent magnet 102c1 such that the permanent magnets 102b1 and 102c1 form a "magnet pair". According to an exemplary aspect of the present invention, a magnetic attraction force may exist between each pair of magnets.

The magnet track 102a (as well as any other magnet track described in this patent application) may be formed from a non-magnetic material (e.g., a material comprising aluminum, such as aluminum or an aluminum alloy). Other exemplary non-magnetic materials include carbon fiber, beryllium, and many others.

Each of the first plurality of permanent magnets 102b1, 102b2, the.. or 102b22 and each of the second plurality of permanent magnets 102c1, 102c2, the.. or 102c22 are connected (directly or indirectly) to the magnet track 102a using any of a variety of techniques, such as adhesives, fasteners, or the like. The magnet track 102a includes a coupling portion 102d for connecting to another structure to be moved along a desired axis by the linear motor 100 a. For example, the coupling portion 102d may be connected to a y-axis slide of a wire bonding machine for moving the bonding head assembly along the y-axis (see, e.g., fig. 8).

Linear motor 100a also includes a first coil assembly 104a1 (also referred to as stator 104a1) disposed above moving magnet assembly 102. The first coil assembly 104a1 includes a first plurality of teeth with first slots 105a1 therebetween. The first plurality of teeth includes an end tooth 104a1a at each end of the first coil assembly 104a1 and a plurality of teeth 104a1b disposed between two end teeth 104a1 a. The first coil assembly further includes a coil 106 at least partially disposed in at least a portion of the first slot 105a 1. As shown in fig. 1A (and more clearly in fig. 1B), each slot 105a1 (except for the end slot adjacent to end tooth 104a1A, which has received a portion of only one coil 106) has received a portion of two adjacent coils 106. The linear motor 100a further includes a second coil assembly 104a2 (also referred to as a stator 104a2) disposed below the moving magnet assembly 102. The second coil assembly 104a2 includes a second plurality of teeth with second slots 105a2 therebetween. The second plurality of teeth includes an end tooth 104a2a at each end of the second coil assembly 104a2 and a plurality of teeth 104a2b disposed between two end teeth 104a2 a. The second coil assembly 104a2 also includes a coil 106 at least partially disposed in at least a portion of the second slot 105a 2. As shown in fig. 1A (and more clearly in fig. 1B), each slot 105a2 (except for the end slot adjacent to end tooth 104a2a, which has received a portion of only one coil 106) has received a portion of two adjacent coils 106.

Each of first coil assembly 104a1 and second coil assembly 104a2 may include a plurality of laminations stacked together, as known to those skilled in the art. Thus, the stacked laminations define respective first and second pluralities of teeth 104a1a, 104a1b, 104a2a, 104a2 b.

As shown in fig. 1C, the exposed surface of each of the first plurality of permanent magnets 102b1, 102b2, the...., 102b22 is positioned adjacent to the first coil assembly 104a1 at a first distance d1, and the exposed surface of each of the second plurality of permanent magnets 102C1, 102C2, the...., 102C22 is positioned adjacent to the second coil assembly 104a2 at a second distance d 2. The first distance d1 is substantially the same as the second distance d 2.

To the extent practicable, the features described above with respect to fig. 1A-1C are also applicable to the additional embodiments of the invention described herein (as well as other embodiments within the scope of the invention). Accordingly, certain details have been omitted for the sake of brevity in relation to the remaining embodiments, and certain reference numerals have been repeated in the various illustrated embodiments of the invention.

Fig. 1A-1C illustrate a first coil assembly 104a1 and a second coil assembly 104a2 having teeth 104a1A, 104a1b, 104a2a, and 104a2 b. The end teeth 104a1a, 104a2a have a shape as shown in U.S. patent No. 7,825,549. The teeth 104a1b, 104a2b have a "T" shaped configuration in which the ends of each tooth are wider than the body of the respective tooth (see fig. 1A in which the gaps 104a1c and 104a2c between adjacent teeth are smaller at the ends due to the "T" shape). Of course, the design of these teeth is exemplary in nature, and the present invention is not limited to this configuration.

Fig. 2A-2B illustrate a linear motor 100B, the linear motor 100B being very similar to the linear motor 100a described above with respect to fig. 1A-1B. The linear electric motor 100B comprises a magnet assembly 102 which is identical to the magnet assembly 102 according to fig. 1A-1B. The linear motor also includes a first coil assembly 104B1 (including teeth 104B1A, 104B1B) and a second coil assembly 104B2 (including teeth 104B2a, 104B2B), the first coil assembly 104B1 and the second coil assembly 104B2 being very similar to the first coil assembly 104a1 and the second coil assembly 104a2 according to fig. 1A-1B. One difference is that in fig. 2A-2B, the teeth 104B1B, 104B2B do not have the "T" configuration described above. In contrast, the teeth 104b1b, 104b2b have the same (or substantially the same) width along their entire length, which makes positioning of the coil 106 relatively simple.

Fig. 3A-3B illustrate a linear motor 100c, the linear motor 100c being very similar to the linear motor 100a described above with respect to fig. 1A-1B. The linear motor 100c includes a magnet assembly 102 that is identical to the magnet assembly 102 according to fig. 1A-1B. The linear motor also includes a first coil assembly 104c1 (including teeth 104c1A, 104c1B) and a second coil assembly 104c2 (including teeth 104c2a, 104c2B), the first coil assembly 104c1 and the second coil assembly 104c2 being very similar to the first coil assembly 104a1 and the second coil assembly 104a2 according to fig. 1A-1B. In fig. 3A-3B, however, only one coil 106 is disposed in each slot (see fig. 3B for clarity). Thus, in the example shown in fig. 3A-3B, six coils 106 are provided, while in fig. 1A-1B, twelve coils 106 are provided.

Fig. 4A-4B illustrate a linear motor 100d, the linear motor 100d being very similar to the linear motor 100a described above with respect to fig. 1A-1B. The linear electric motor 100d includes a magnet assembly 102 that is identical to the magnet assembly 102 according to fig. 1A-1B. Linear motor 100d also includes first coil assembly 104d1 (including teeth 104d1A, 104d1B) and second coil assembly 104d2 (including teeth 104d2a, 104d2B), first coil assembly 104d1 and second coil assembly 104d2 being very similar to first coil assembly 104a1 and second coil assembly 104a2 according to fig. 1A-1B. However, similar to fig. 3A-3B, in fig. 4A-4B, only one coil 106 is disposed in each slot (see fig. 4B for clarity). Thus, in the example shown in fig. 4A-4B, six coils 106 are provided, while in fig. 1A-1B, twelve coils 106 are provided. Another difference is that in FIGS. 4A-4B, the teeth 104d1B, 104d2B do not have the "T" configuration described above with respect to FIGS. 1A-1B. In contrast, the teeth 104d1b, 104d2b have the same (or substantially the same) width along their entire length, which makes positioning of the coil 106 relatively simple.

Fig. 5A-5E illustrate various details of the magnet assembly 102. Fig. 5A illustrates a cross-sectional view of the magnet assembly 102 shown in fig. 1A-1C, 2A-2B, 3A-3B, and 4A-4B, along with the direction of motion (in the example shown in this application, along the y-axis). Fig. 5B is a detailed view of a portion of fig. 5A, clearly illustrating certain features of the magnet assembly. In particular, fig. 5B illustrates that the magnet track 102a defines a plurality of tab portions 102 e. As shown in fig. 5B, each of the first plurality of permanent magnets 102B1, 102B2,.. said, 102B22 and the second plurality of permanent magnets 102c1, 102c2, …, 102c22 includes a step "ST" configured to mate with a corresponding one of the plurality of tab portions 102 e. Fig. 5C-5D provide additional perspective cross-sectional views of the magnet assembly 102. Fig. 5E illustrates a top view (not a cross-sectional view as in fig. 5A-5D) of the magnet assembly 102. In fig. 5E, the connection portion 102f of the magnet assembly 102 is visible. The connection 102f is used to engage some type of bearing assembly (see bearing 606 and bearing housing 604 shown in fig. 6) in order to assist in the movement of the moving magnet assembly 102. For example, the bearing assembly may be a linear bearing housing that engages a linear bearing rail. Of course, other types of bearing assemblies are contemplated.

According to certain aspects of the present invention, the design of the substrate (i.e., the magnet track) carrying the plurality of permanent magnets of the moving magnet assembly 102, including both the first plurality of permanent magnets and the second plurality of permanent magnets, is important. It may be particularly advantageous to carry the magnets without a cover or skin between the magnets and the respective stator (i.e. between the first plurality of permanent magnets and the first coil assembly and between the second plurality of permanent magnets and the second coil assembly). This lack of inclusion of a cover or skin significantly reduces the electrical and mechanical clearance between the magnets and the respective stator, and further reduces unnecessary mass in the linear motor. Still additionally, such a substrate (i.e., magnet track) does not significantly interfere with the magnetic flux path.

Still further, the design of the moving magnet assembly 102 (including the symmetrical magnet pairs disposed one above the other) and the design of the dual stators (including the first coil assembly and the second coil assembly) desirably create a substantially equal force constant for each stator and create a substantially equal and opposite magnetic attraction force for each stator. This minimizes (substantially net zero) loading on the moving magnet assembly 102 and associated bearings.

Fig. 6 illustrates a linear motor system 600 with additional components. Although the linear motor system 600 includes the linear motor 100B according to fig. 2A-2B, it is understood that any other linear motor within the scope of the present invention (e.g., linear motors 100a, 100c, 100d or any other linear motor within the scope of the present invention) may also be included in the linear motor system 600. Linear motor system 600 includes housing portions 602a, 602b, and 602 c. Collectively, housing portions 602a, 602b, and 602c are part of a common housing, where the common housing couples (directly or indirectly) first coil assembly 104b1 with second coil assembly 104b2 to provide a combined coil assembly. For example, first coil assembly 104b1 and second coil assembly 104b2 may be secured in a common housing using adhesives, fasteners, a combination of the two, and other techniques. It is understood that the common housing for the first coil assembly 104b1 and the second coil assembly 104b2 may be constructed in any desired configuration (e.g., a single piece of material or multiple distinct pieces of material, rather than three distinct housing portions as shown). Fig. 6 also illustrates a bearing 606 supported by the bearing mount 604 (where the bearing mount 604 may be considered part of a combined coil assembly). Through operation of the linear motor system 600, the moving magnet assembly 102 moves along the Y-axis while riding along the bearings 606 (ride).

Fig. 7 illustrates a linear motion system 700, the linear motion system 700 including a linear motor system 600 according to fig. 6. Although fig. 7 illustrates a linear motor system 600 including a linear motor 100B according to fig. 2A-2B, it is understood that any other linear motor within the scope of the present invention (e.g., linear motors 100a, 100c, 100d or any other linear motor within the scope of the present invention) may also be included in the linear motor system 600. During operation of linear motion system 700, movement of moving magnet assembly 102 along a horizontal axis (the Y-axis shown in fig. 7) causes some resultant movement of the combined coil assembly (including housing portions 602a, 602b, and 602c, and first and second coil assemblies 104b1 and 104b2) along the same horizontal axis. In the block diagram view of fig. 7, this motion is provided for via bearing 702 e. More specifically, the linear motion system 700 includes a base structure 702a, a side mass portion 702b, a damper 702c, a spring 702d, and a bearing 702 e. Bearing 702e is supported by base structure 702 a. The spring 702d and damper 702c are disposed between a common housing (including housing portions 602a, 602b, and 602c and the combined coil assembly) and the side mass portion 702 b. The spring 702d assists the common housing (the combined coil assembly including the first coil assembly 104b1 and the second coil assembly 104b2) in re-centering after the moving magnet assembly 102 is moved. The damper 702c assists in controlling the stability of the linear motion system 700 with respect to the motion of the moving magnet assembly 102.

Fig. 7 also illustrates a position encoder system 702f for providing position information related to a combined coil assembly (including the first coil assembly 104b1 and the second coil assembly 104b 2). The position encoder system 702f (including elements 702f1 and 702f2) may be any of a number of types of position encoder systems (e.g., optical encoder systems, magnetic encoder systems, etc.). The position encoder system 702f shown in FIG. 7 can be considered various types of position encoder systems. For example, in an optical encoder system, the scale portion 702f1 is provided in a manner coupled (directly or indirectly) to a combined coil assembly, and an optical portion 702f2 is provided to image the scale portion. In such an example, the optic 702f2 is coupled (directly or indirectly) to another portion of the linear motion 700 (e.g., base 702a) that does not move with the combined coil assembly. In another example, the elements 702f1 and 702f2 may be part of a magnetic encoder system.

In any event, the inclusion of the position encoder system 702f may be particularly beneficial if the linear motor 100b is a three-phase motor, wherein the position information provided by the position encoder system 702f is used to control the commutation angle of the linear motor 100 b.

Fig. 8 illustrates a wire bonding system 800 including the linear motion system 700 according to fig. 7. Wire bonding system 800 further includes: bond head assembly 804 (carrying wire bonding tool 806), y-axis slide 802, bearing mount 810 (for supporting y-axis slide 802), and bearing 812. As will be understood by those skilled in the art, the y-axis slide 802 may incorporate a bearing seat 810 (i.e., the y-axis slide 802 will bear directly on the bearing 812). Movement of the moving magnet assembly 102 along the y-axis causes corresponding movement of the weld head assembly 804. Wire bonding system 800 also includes a linear motion system 700' that carries y-axis slide 802 and bearing mount 810 along bearing 812. Although shown as a block in fig. 8, it is understood that linear motion system 700' is also a linear motion system within the scope of the present invention, such as a replica of linear motion system 700. Linear motion system 700' provides linear motion of bonding head assembly 804 along the x-axis of wire bonding system 800 (where the x-axis is substantially perpendicular to the y-axis). Wire bonding system 800 also includes a decoupling element 808 for decoupling the operation of linear motion system 700 from the operation of linear motion system 700'. Thus, the operation of the linear motion system 700 is decoupled from the operation of the linear motion system 700'.

Fig. 9A-9C illustrate operation of linear motor 100b along the y-axis of wire bonding machine 800. In fig. 9A, wire bonding tool 806 (carried by bond head assembly 804) is moved to the right in the figure ("forward"), causing a reverse movement of the common housing (shown as compression of left spring element 702 d). In fig. 9B, wire bonding tool 806 is shown in its central position. In fig. 9C, wire bonding tool 806 (carried by bond head assembly 804) is moved to the left ("rearward") in the figure, causing a reverse motion of the common housing (shown as compression of right spring element 702 d).

The linear motor of the present invention may find application in a number of technical fields. One exemplary field of use is with wire bonding machines in which linear motors according to the present invention may be used to provide linear motion along either the x-axis or the y-axis or both the x-axis and the y-axis. More specifically, such linear motors may be used, for example, to provide linear motion to a horn assembly of a wire bonding machine along an x-axis of the horn assembly, a y-axis of the horn assembly, or both. Of course, the linear motor of the present invention will find use in any of a number of other technical fields.

While certain embodiments of the present invention (see fig. 8) show the y-axis slide 802 carried by the x-axis linear motion system 700', it is understood that this is exemplary in nature. In various embodiments within the scope of the present invention, the x-axis slide may also be carried by the y-axis linear motion system.

Although aspects of the present invention are described with respect to a linear motor including 6 coils and 12 coils, the present invention is not limited thereto. These are examples and any number of coils may be provided as desired within the scope of the invention.

Although the present invention is described with respect to exemplary tooth designs (including end teeth and intermediate teeth between the end teeth), it is understood that all tooth designs are exemplary in nature-and any other tooth designs may be incorporated as desired within the scope of the present invention.

Although the invention is illustrated and described herein with reference to specific embodiments, the invention is not intended to be limited to the details shown. Rather, various modifications may be made in the details within the scope and range of equivalents of the claims and without departing from the invention.