阅读说明：本技术 用于负氧离子束产生与引出的磁铁结构 (Magnet structure for generating and extracting negative oxygen ion beam ) 是由 孙良亭 金钱玉 赵红卫 于 2021-09-18 设计创作，主要内容包括：本发明涉及一种用于负氧离子束产生与引出的磁铁结构,包括：磁铁封装本体,为中空的筒状结构,所述磁铁封装本体上沿其中心孔周向设置若干磁铁容置槽,且各磁铁容置槽沿轴向贯穿磁铁封装本体的两端面；磁铁,若干列所述磁铁分别封装于各个所述磁铁容置槽内,若干列磁铁被配置为在所述磁铁封装本体的中心轴线位置产生二极磁场。本发明能够提高引出负氧离子束的亮度；同时通过磁铁一端的过滤磁场,过滤掉与负氧离子一起被引出的电子,可以降低引出电源的功率及引出电极承受的热负载；通过该磁铁结构的引入,可以降低离子源的建造成本及显著延长离子源的运行寿命。(The invention relates to a magnet structure for generating and extracting negative oxygen ion beams, which comprises: the magnet packaging body is of a hollow cylindrical structure, a plurality of magnet containing grooves are formed in the magnet packaging body along the circumferential direction of a central hole of the magnet packaging body, and each magnet containing groove penetrates through two end faces of the magnet packaging body along the axial direction; the magnets are respectively packaged in the magnet containing grooves, and the magnets in the rows are configured to generate a dipolar magnetic field at the central axis position of the magnet packaging body. The invention can improve the brightness of the extracted negative oxygen ion beam; meanwhile, electrons led out together with negative oxygen ions are filtered out through a filtering magnetic field at one end of the magnet, so that the power of an outgoing power supply and the heat load born by an outgoing electrode can be reduced; by introducing the magnet structure, the construction cost of the ion source can be reduced, and the service life of the ion source can be obviously prolonged.)

1. A magnet structure for negative oxygen ion beam generation and extraction, comprising:

the magnet packaging body is of a hollow cylindrical structure, a plurality of magnet containing grooves are formed in the magnet packaging body along the circumferential direction of a central hole of the magnet packaging body, and each magnet containing groove penetrates through two end faces of the magnet packaging body along the axial direction;

the magnets are respectively packaged in the magnet containing grooves, and the magnets in the rows are configured to generate a dipolar magnetic field at the central axis position of the magnet packaging body.

2. The magnet structure according to claim 1, wherein the number of the magnet receiving slots is 20, and each of the magnet receiving slots is radially and uniformly distributed on the magnet package body; accordingly, the magnets are also 20 rows.

3. The magnet structure according to claim 2, wherein starting from the horizontal direction of the magnet package body in the counterclockwise direction, the magnets of odd-numbered columns are configured to generate a transverse magnetic field, and two adjacent odd-numbered columns of magnets are in one group, and the magnetic field directions of the magnets of each group of adjacent odd-numbered columns are opposite;

the magnets of even columns are configured to generate a radial magnetic field.

4. The magnet structure according to claim 3, wherein the magnets of the even-numbered columns 2, 6, 10, 14, 18 are N-pole magnets;

the magnets in the 4 th, 8 th, 12 th, 16 th and 20 th rows of the even-numbered rows are S-pole magnets.

5. A magnet structure according to claim 4, characterized in that a part is cut out at one end of the magnets in the 5 th, 6 th and 7 th columns, and the cut-out part is replaced with an S-pole magnet; meanwhile, one end of the magnet in the 15 th, 16 th and 17 th rows is also partially cut off, and the cut-off part is replaced by an N-pole magnet; and the two cut-outs are located at the same end.

6. The magnet structure according to claim 1, characterized in that the magnet package body is made of aluminum material.

7. The magnet structure according to claim 1, characterized in that the magnets are of an all permanent magnetic material.

8. The magnet structure according to claim 1, wherein the two ends of the magnet package body form flange structures, and each magnet accommodating groove penetrates through the flange end faces of the two ends of the magnet package body.

Technical Field

The invention relates to the technical field of negative oxygen ion beam targeting of a secondary ion mass spectrometer, in particular to a magnet structure for generating and extracting negative oxygen ion beams.

Background

The secondary ion mass spectrometer has high-precision, high-sensitivity, high-resolution and high-efficiency micro-area in-situ isotope and element analysis capability, and has wide application in the fields of earth science, material science, ocean science, nuclear science, life science and the likeThe wide application is one of the most advanced international large-scale micro-area in-situ analysis instruments. The radio frequency negative oxygen ion source is the most advanced ion source used on the current secondary ion mass spectrometer and is used for generating O^-、O₂ ^-The ion can be used for scientific research in the fields of geology and chronology and the like. The chronology analysis mainly utilizes radioactive isotope to determine the formation age of different types of rocks and ore deposits, and the target test ion is electropositive radioactive isotope ion due to strong electronegativity O^-、O₂ ^-The ions can effectively improve the yield of electropositive secondary ions and reduce the influence of the charge effect on analysis, and other types of ions can not efficiently generate secondary ions, so that the negative oxygen ion source is used as a primary ion beam ion source of a secondary ion mass spectrometer and is widely applied to in-situ analysis of geological and chronology micro-areas.

However, in many leading-edge fields and studies of hot spot problems, in order to improve the accuracy of event age measurement, a high-brightness high-spatial resolution negative oxygen ion beam is required. The existing radio frequency negative oxygen ion source does not introduce a magnetic field to restrain plasma and optimize the forming process of negative oxygen ions. In order to improve the brightness and the spatial resolution capability of the negative oxygen ion beam, the formation and extraction processes of the negative oxygen ion beam need to be interfered by introducing a magnetic field, so that the performance of the ion source can be obviously improved.

Disclosure of Invention

In view of the above problems, it is an object of the present invention to provide a magnet structure for negative oxygen ion beam generation and extraction capable of improving the brightness of an extracted negative oxygen ion beam; meanwhile, electrons led out together with negative oxygen ions are filtered out through a filtering magnetic field at one end of the magnet, so that the power of an outgoing power supply and the heat load born by an outgoing electrode can be reduced; by introducing the magnet structure, the construction cost of the ion source can be reduced, and the service life of the ion source can be obviously prolonged.

In order to achieve the purpose, the invention adopts the following technical scheme:

the invention relates to a magnet structure for generating and extracting negative oxygen ion beams, which comprises: the magnet packaging body is of a hollow cylindrical structure, a plurality of magnet containing grooves are formed in the magnet packaging body along the circumferential direction of a central hole of the magnet packaging body, and each magnet containing groove penetrates through two end faces of the magnet packaging body along the axial direction; the magnets are respectively packaged in the magnet containing grooves, and the magnets in the rows are configured to generate a dipolar magnetic field at the central axis position of the magnet packaging body.

Preferably, the number of the magnet accommodating grooves is 20, and the magnet accommodating grooves are uniformly distributed on the magnet packaging body in a radial shape; accordingly, the magnets are also 20 rows.

The magnet structure is preferably counted from the horizontal direction of the magnet packaging body along the counterclockwise direction, the magnets in odd-numbered rows are configured to generate a transverse magnetic field, and two adjacent magnets in odd-numbered rows form a group, and the magnetic field directions of the magnets in each group of adjacent magnets in odd-numbered rows are opposite; the magnets of even columns are configured to generate a radial magnetic field.

In the magnet structure, preferably, the magnets in the 2 nd, 6 th, 10 th, 14 th and 18 th even-numbered columns are N-pole magnets; the magnets in the 4 th, 8 th, 12 th, 16 th and 20 th rows of the even-numbered rows are S-pole magnets.

In the magnet structure, preferably, a part is cut off at one end of the magnets in the 5 th, 6 th and 7 th rows, and the cut-off part is replaced by an S-pole magnet; meanwhile, one end of the magnet in the 15 th, 16 th and 17 th rows is also partially cut off, and the cut-off part is replaced by an N-pole magnet; and the two cut-outs are located at the same end.

In the magnet structure, the magnet package body is preferably made of an aluminum material.

The magnet structure is preferably made of an all-permanent magnet material.

Preferably, the magnet structure has flange structures formed at two ends of the magnet package body, and each magnet accommodating groove penetrates through flange end faces at two ends of the magnet package body.

Due to the adoption of the technical scheme, the invention has the following advantages:

the invention can improve the brightness of the extracted negative oxygen ion beam; meanwhile, electrons led out together with negative oxygen ions are filtered out through a filtering magnetic field at one end of the magnet, so that the power of an outgoing power supply and the heat load born by an outgoing electrode can be reduced; by introducing the magnet structure, the construction cost of the ion source can be reduced, and the service life of the ion source can be obviously prolonged.

The invention provides a method for introducing a magnetic field on a negative oxygen ion source to act on the formation and extraction processes of negative oxygen ions, which is beneficial to improving the brightness of the extracted negative oxygen ion beam, is finally used for a secondary ion mass spectrometer to generate a primary ion beam with high brightness and high spatial resolution, and comprehensively improves the performance and maintenance period of the instrument.

Drawings

Fig. 1 is a schematic three-dimensional structure diagram of a magnet package body according to the present invention;

FIG. 2 is a schematic three-dimensional structure of the distribution of magnets according to the present invention;

fig. 3 is a schematic diagram of a magnet distribution and expansion structure according to the present invention.

The figures are numbered:

1-a magnet package body; 2-a magnet; 3-magnet containing groove.

Detailed Description

The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the objects, features and advantages of the invention can be more clearly understood. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.

The invention provides a magnet structure for generating and leading out negative oxygen ion beams, which comprises a magnet packaging body, wherein the magnet packaging body is of a hollow cylindrical structure, a plurality of magnet accommodating grooves are formed in the magnet packaging body along the circumferential direction of a central hole of the magnet packaging body, and each magnet accommodating groove penetrates through two end faces of the magnet packaging body along the axial direction; the magnets are respectively packaged in the magnet containing grooves, and the magnets in the rows are configured to generate a dipolar magnetic field at the central axis position of the magnet packaging body. The invention can improve the brightness of the extracted negative oxygen ion beam; meanwhile, electrons led out together with negative oxygen ions are filtered out through a filtering magnetic field at one end of the magnet, so that the power of an outgoing power supply and the heat load born by an outgoing electrode can be reduced; by introducing the magnet structure, the construction cost of the ion source can be reduced, and the service life of the ion source can be obviously prolonged.

As shown in fig. 1 and 2, the present invention provides a magnet structure for negative oxygen ion beam generation and extraction, comprising: the magnet packaging body 1 is of a hollow cylindrical structure, a plurality of magnet accommodating grooves 3 are formed in the magnet packaging body 1 along the circumferential direction of a central hole of the magnet packaging body, and each magnet accommodating groove 3 axially penetrates through two end faces of the magnet packaging body 1; and magnets 2, wherein a plurality of rows of magnets 2 are respectively packaged in each magnet containing groove 3, and the plurality of rows of magnets 2 are configured to generate a dipolar magnetic field at the central axis position of the magnet packaging body 1.

In the above embodiment, preferably, the number of the magnet accommodating grooves 3 is 20, and the magnet accommodating grooves 3 are radially and uniformly distributed on the magnet package body 1; accordingly, the magnets 2 are also 20 rows.

In the above embodiment, preferably, as shown in fig. 2 and 3, starting from the horizontal direction of the magnet package body 1 in the counterclockwise direction, the magnets 2 in odd columns (1, 3,5 … … 15,17,19 in the figures) are configured to generate a transverse magnetic field (denoted by symbol T in the figures), and two adjacent odd columns of magnets 2 are in one group, and the magnetic field directions of each group of adjacent odd columns of magnets 2 are opposite; the magnets 2 of the even columns (2, 4,6 … … 16,18,20 in the figure) are configured to generate a radial magnetic field (denoted by the symbol N or S in the figure, representing the N pole or S pole respectively), with the N pole magnets and the S pole magnets being arranged alternately.

In the above embodiment, preferably, as shown in fig. 3, the magnets 2 in the even-numbered columns 2, 6, 10, 14, 18 are N-pole magnets; the magnets 2 in the even-numbered rows 4, 8, 12, 16, and 20 are S-pole magnets.

In the above embodiment, preferably, a portion is cut out at one end of the magnets 2 in the 5 th, 6 th and 7 th rows, and the cut-out portion is replaced with an S-pole magnet; at the same time, a part is also cut out at one end of the magnets 2 in the 15 th, 16 th and 17 th columns, the cut out part is replaced with an N-pole magnet, and the two cut out parts are located at the same end. When the magnetic field configuration is applied to an ion source, one end of the magnetic field configuration is used for plasma confinement, and the other end (comprising 3 rows of shorter N-pole or S-pole magnets respectively) is placed at an ion beam extraction position and can filter electrons. According to the design scheme, a dipolar magnetic field can be generated at the central axis position of the magnet packaging body 1 and is used for filtering electrons led out along with negative oxygen ions, after the electrons are filtered, the power of a power supply system is greatly reduced, the heat bombardment borne by the led-out electrodes is also obviously reduced, the construction cost of the ion source is reduced, and the long-term operation life of the ion source is prolonged.

In the above embodiment, it is preferable that the magnet package body 1 is made of an aluminum material having a small influence on the magnetic field distribution, and if a plasma is generated in the central region of the magnet package body in practical use, the plasma bombards the aluminum material to emit secondary electrons, thereby increasing the negative oxygen ion yield.

In the above embodiment, the magnet 2 is preferably an all permanent magnet material.

In the above embodiment, it is preferable that both ends of the magnet package body 1 form flange structures, and each magnet receiving groove 3 penetrates through flange end faces of both ends of the magnet package body 1.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.