阅读说明：本技术 取膜装置及取膜方法 (Film taking device and film taking method ) 是由 杨佳裕 陈明宗 赖家伟 于 2020-06-24 设计创作，主要内容包括：一种取膜装置及取膜方法,所述取膜装置包含一基座、一吸盘、一膜料抵压件以及一传动机构；基座具有一抽气流道；吸盘设置于基座并用以吸取膜料；膜料抵压件可抵压膜料,以使膜料附着于基座,进而于膜料和基座之间形成与抽气流道连通的密闭空间；传动机构连接于基座或膜料抵压件,用以使基座与膜料抵压件相互靠近。(A film taking device and a film taking method are provided, the film taking device comprises a base, a sucking disc, a film material pressing piece and a transmission mechanism; the base is provided with an air pumping flow channel; the sucking disc is arranged on the base and used for sucking the membrane material; the film material pressing piece can press the film material so as to enable the film material to be attached to the base, and a closed space communicated with the air exhaust flow channel is formed between the film material and the base; the transmission mechanism is connected with the base or the film material pressing piece and used for enabling the base and the film material pressing piece to approach each other.)

1. A film taking device is characterized by comprising:

a base having an air-extracting channel;

a sucking disc arranged on the base and used for sucking the membrane material;

a film material pressing piece which can press the film material to make the film material adhere to the base, and a closed space communicated with the air exhaust flow passage is formed between the film material and the base; and

and the transmission mechanism is connected with the base or the film material pressing piece and is used for enabling the base and the film material pressing piece to approach each other.

2. The film taking device as claimed in claim 1, wherein the suction cup is an electrostatic suction cup.

3. The film removing device as claimed in claim 1, wherein the driving mechanism moves the base and the film pressing member toward each other so that a pressing position of the film pressing member presses the film, and a horizontal distance between the center of the suction cup and the edge of the suction cup is smaller than a horizontal distance between the center of the suction cup and the pressing position.

4. The film taking device as claimed in claim 1, wherein the transmission mechanism causes the base and the film material pressing member to approach each other so that a portion of the film material is sandwiched between the film material pressing member and the base to form the closed space.

5. The film take-off device as claimed in claim 4, wherein the film material pressing member corresponds to an edge area of the film material.

6. The film removing device as claimed in claim 1, further comprising a film removing auxiliary unit disposed corresponding to the suction cup, wherein the film removing auxiliary unit is made of porous material, and the film pressing member surrounds the film removing auxiliary unit.

7. The apparatus according to claim 1, wherein the base comprises a chamber and a pumping line disposed in the chamber, the pumping line has the pumping channel, and the chamber and the pumping line are independent from each other.

8. A film taking method is characterized by comprising the following steps:

providing a film material and a base provided with a sucker;

a closed space is formed by the membrane material and the base together;

pumping air into the closed space; and

sucking the film material by the sucking disc.

9. The method according to claim 8, wherein the forming the closed space by the film material and the base comprises:

and moving a film material pressing part to be close to the base so that the film material pressing part and the base clamp the film material together to form the closed space.

10. The method according to claim 8, wherein the forming the closed space by the film material and the base comprises:

and moving the base to be close to a film material pressing piece so that the film material pressing piece and the base clamp the film material together to form the closed space.

11. The method for extracting membrane according to claim 8, further comprising:

after the closed space is exhausted, the membrane material is blown towards the direction of the sucking disc, wherein the sucking disc is used for sucking the membrane material before the closed space is exhausted.

12. The method for extracting film according to claim 11, further comprising:

before the membrane material is sucked by the sucking disc, the membrane material is sucked by a membrane-taking auxiliary unit, the membrane material is sucked by the sucking disc after the membrane-taking auxiliary unit stops sucking the membrane material, and the membrane material is blown by the membrane-taking auxiliary unit towards the sucking disc.

13. The method for extracting film according to claim 11, further comprising:

the film material is blown in the direction of the sucking disc by an auxiliary film taking unit, and a gap is kept between the film material and the auxiliary film taking unit.

Technical Field

The invention relates to a film taking device and a film taking method, in particular to a film taking device and a film taking method for picking up film materials by using a sucking disc.

Background

Accordingly, in the semiconductor or electronic component industry, it is necessary to attach a film material (e.g., an adhesive film, Mylar) on a substrate as a building layer or an adhesive for subsequent processes. Generally, the film is sucked by a suction cup and then moved to a film-attaching work area corresponding to the substrate by a driving mechanism, and then the suction cup releases the film to complete the operation of attaching the film to the surface of the substrate.

However, when the film needs to be heated, bubbles and wrinkles are easily generated between the suction cup and the film after the suction cup sucks the film, and the film is not flat enough due to poor adhesion with the suction cup, which may affect the subsequent film yield and film quality.

Disclosure of Invention

In view of the above problems, the present invention discloses a film taking device and a film taking method, which are helpful for solving the problem that bubbles and wrinkles are generated when a heated film material is picked up by a suction cup.

The technical problem to be solved by the invention is realized by the following technical scheme:

the invention discloses a film taking device which comprises a base, a sucking disc, a film material pressing piece and a transmission mechanism. The base is provided with an air pumping flow passage. The sucking disc sets up in the base and is used for absorbing the coating material. The film material pressing piece can press the film material so as to enable the film material to be attached to the base, and a closed space communicated with the air exhaust flow passage is formed between the film material and the base sucker. The transmission mechanism is connected with the base or the film material pressing piece and used for enabling the base and the film material pressing piece to approach each other.

The film taking method disclosed by the invention comprises the following steps: providing a film material and a base provided with a sucker; a closed space is formed by the membrane material and the base together; pumping air into the closed space; and sucking the membrane material by a sucking disc.

In other words, the present invention provides a film taking device, comprising:

a base having an air-extracting channel;

a sucking disc arranged on the base and used for sucking the membrane material;

a film material pressing piece which can press the film material to make the film material adhere to the base, and a closed space communicated with the air exhaust flow passage is formed between the film material and the base; and

and the transmission mechanism is connected with the base or the film material pressing piece and is used for enabling the base and the film material pressing piece to approach each other.

The chuck is an electrostatic chuck.

The transmission mechanism enables the base and the film material pressing piece to approach each other so that a pressing position of the film material pressing piece presses the film material, and the horizontal distance between the center of the sucking disc and the edge of the sucking disc is smaller than the horizontal distance between the center of the sucking disc and the pressing position.

The transmission mechanism enables the base and the film material pressing piece to approach each other so that one part of the film material is clamped between the film material pressing piece and the base to form the closed space.

The film material pressing piece corresponds to the edge area of the film material.

The film taking device further comprises a film taking auxiliary unit arranged corresponding to the sucker, the film taking auxiliary unit is made of porous materials, and the film material pressing piece surrounds the film taking auxiliary unit.

The base comprises a cavity and an air extraction pipeline arranged in the cavity, the air extraction pipeline is provided with the air extraction flow channel, and the cavity and the air extraction pipeline are independent respectively.

The invention also provides a membrane taking method, which comprises the following steps:

providing a film material and a base provided with a sucker;

a closed space is formed by the membrane material and the base together;

pumping air into the closed space; and

sucking the film material by the sucking disc.

The membrane material and the base together form the closed space, and the closed space comprises:

and moving a film material pressing part to be close to the base so that the film material pressing part and the base clamp the film material together to form the closed space.

The membrane material and the base together form the closed space, and the closed space comprises:

and moving the base to be close to a film material pressing piece so that the film material pressing piece and the base clamp the film material together to form the closed space.

The film taking method further comprises the following steps:

after the closed space is exhausted, the membrane material is blown towards the direction of the sucking disc, wherein the sucking disc is used for sucking the membrane material before the closed space is exhausted.

The film taking method further comprises the following steps:

before the membrane material is sucked by the sucking disc, the membrane material is sucked by a membrane-taking auxiliary unit, the membrane material is sucked by the sucking disc after the membrane-taking auxiliary unit stops sucking the membrane material, and the membrane material is blown by the membrane-taking auxiliary unit towards the sucking disc.

The film taking method further comprises the following steps:

the film material is blown in the direction of the sucking disc by an auxiliary film taking unit, and a gap is kept between the film material and the auxiliary film taking unit.

According to the film taking device and the film taking method disclosed by the invention, the film material pressing piece can press the film material so as to enable the film material to be attached to the base, and a closed space is formed between the film material and the base. Can use negative pressure device to connect the runner of bleeding in order to bleeding to airtight space, and then eliminate the bubble between membrane material and the sucking disc, the bubble disappears simultaneously and also can help the membrane material to attach on the sucking disc surface better, lets the membrane material that is absorb can keep flat no fold.

The above description of the present invention and the following description of the embodiments are provided to illustrate and explain the spirit and principles of the present invention and to provide further explanation of the scope of the present invention.

Drawings

FIG. 1 is a schematic view of a film taking apparatus according to an embodiment of the present invention;

FIG. 2 is a partially enlarged schematic view of the film taking device of FIG. 1;

FIG. 3 is a schematic flow chart of a film-taking method according to an embodiment of the present invention;

fig. 4 to 9 are schematic diagrams of the film taking device in fig. 1 executing a film taking method;

FIG. 10 is a schematic flow chart of a film-taking method according to another embodiment of the present invention;

fig. 11 to 14 are schematic diagrams of the film taking device in fig. 10 executing a film taking method.

[ description of reference ]

Get membrane device … 1

Base … 10

Bleed flow path … 100

Extraction opening … 101

Cavity … 110

Extraction line … 120

Suction cup … 20

Side wall … 210

Film material pressing piece … 30

Transmission … 40

Film taking auxiliary unit … 50

Membrane material … F

Horizontal distances … D1, D2

First film … F1

Second film … F2

Gap … G

Pressing position … P

Enclosed space … S

Steps … S11-S15, S21-S24

Detailed Description

The detailed features and advantages of the present invention are described in detail in the following embodiments, which are sufficient for one skilled in the art to understand the technical contents of the present invention and to implement the present invention, and the related objects and advantages of the present invention can be easily understood by those skilled in the art from the disclosure, the protection scope and the drawings of the present specification. The following examples further illustrate the aspects of the present invention in detail, but are not intended to limit the scope of the invention in any way.

Referring to fig. 1 and fig. 2 together, wherein fig. 1 is a schematic view of a film-taking device according to an embodiment of the invention. Fig. 2 is a partially enlarged schematic view of the film taking device in fig. 1. In the present embodiment, the film taking device 1 includes a base 10, a suction tray 20, a film pressing member 30 and a transmission mechanism 40.

The base 10 has an air-extracting channel 100. Specifically, the susceptor 10 of the present embodiment includes a chamber 110 and a pumping line 120 disposed in the chamber 110. The chamber 110 and the pumping line 120 are independent components, and the pumping line 120 has the pumping channel 100. Unlike the configuration of FIG. 2 in which the pumping line 120 is installed below the chamber 110, the pumping channel in other embodiments may be formed inside the susceptor, i.e., the susceptor may be an integrally formed component with the pumping channel.

The suction cup 20 is provided on the base 10. The chuck 20 is, for example, an electrostatic chuck for sucking the film material to perform the film-taking operation. The pumping port 101 of the pumping flow path 100 of the susceptor 10 faces the sidewall 210 of the chuck 20.

The film material pressing member 30 is correspondingly disposed below the base 10 and the suction cup 20. The film pressing member 30 is, for example, a rubber ring, and is used for pressing the film sucked by the suction cup 20 so as to adhere the film to the base 10.

The transmission mechanism 40 is, for example, a screw, a cylinder or a stepping motor, and is connected to the base 10 or the film pressing member 30 for moving the base 10 and the film pressing member 30 toward each other. Specifically, the transmission mechanism 40 may contact the film material pressing member 30, so that the film material pressing member 30 can be pushed by the transmission mechanism 40 to move relative to the base 10; alternatively, the driving mechanism 40 may be connected to the base 10 so that the base 10 can move relative to the film material pressing member 30. The base 10 and the film material pressing member 30 are urged to approach each other by the transmission mechanism 40, so that the film material pressing member 30 presses the film material.

In the present embodiment, the film taking apparatus 1 may further include a film taking auxiliary unit 50 disposed corresponding to the suction cup 20 and used for carrying the film, and the film pressing member 30 surrounds the film taking auxiliary unit 50. The auxiliary membrane taking unit 50 may be made of porous material, for example, the auxiliary membrane taking unit 50 is a porous ceramic platform.

The following describes a film removal method according to an embodiment of the present invention. Referring to fig. 3 to 9 together, wherein fig. 3 is a schematic flow chart of a film taking method according to an embodiment of the invention, and fig. 4 to 9 are schematic diagrams of the film taking device in fig. 1 executing the film taking method. In the present embodiment, the film taking method may be performed by the film taking apparatus 1, and includes steps S11 to S15.

In step S11, the film-taking assisting unit 50 sucks the film material. As shown in fig. 4, the film material F that has been previously cut or previously heat-treated is conveyed to the film take-out assisting unit 50. In the present embodiment, the film material F includes a first film F1 having a relatively large size and a second film F2 having a relatively small size, and the second film F2 is interposed between the first film F1 and the upper surface of the film taking auxiliary unit 50. The first film F1 is, for example, a polyethylene terephthalate (PET) film, and the second film F2 is, for example, an ABF film or a photoresist film. The film material of the present invention is not limited to a two-layer film structure or a multi-layer film structure, and the film material in other embodiments may be a single-layer film.

In the case that the film taking auxiliary unit 50 is made of a porous ceramic material, the inside of the film taking auxiliary unit 50 may be evacuated by using a negative pressure device (not shown), so that the fine holes on the upper surface of the film taking auxiliary unit 50 become suction holes. Thereby, the film material F can be fixed to the upper surface of the film taking assisting unit 50.

After the step S11, a step S12 is executed to suck the film F by the suction cup 20. As shown in fig. 5, before the suction cup 20 is powered on, the film taking assisting unit 50 releases the negative pressure to stop sucking the film material F. Thereafter, the driving mechanism 40 moves the base 10 down to approach the film taking auxiliary unit 50, and the suction cup 20 (electrostatic suction cup in this example) electrically sucks the film F.

In step S13, a closed space is formed by the film material F and the base 10. As shown in fig. 6 and 7, the film material pressing member 30 is moved close to the base 10, so that the film material pressing member 30 and the base 10 collectively hold the first film F1 in the film material F. In fig. 6, a pressing position P of the film material pressing member 30 contacts and presses the first film F1. The horizontal distance D1 between the center of the suction cup 20 and the edge of the suction cup 20 is smaller than the horizontal distance D2 between the center of the suction cup 20 and the pressing position P, so that the pressing position P of the film material pressing member 30 is pressed against the edge area of the first film F1. In the present embodiment, the film material pressing member 30 presses the first film F1 against the outer surface of the suction duct 120, and a portion of the first film F1 is clamped between the film material pressing member 30 and the suction duct 120 of the base 10, so that a closed space S communicating with the suction flow path 100 is formed between the film material F and the cavity 110 of the base 10, and the suction cup 20 is located in the closed space S.

In step S14, the sealed space S is evacuated. As shown in fig. 8, a negative pressure device (not shown) is connected to the air-extracting channel 100 to extract air into the enclosed space S, so as to eliminate air bubbles between the first film F1 and the suction cup 20, and the disappearance of the air bubbles can help the first film F1 to adhere to the surface of the suction cup 20 better, so that the film material F can be kept flat and without wrinkles when being extracted.

Step S15 is an optional step in the film taking method, in which the film material F is blown in the direction of the suction cup 20 by the film taking auxiliary unit 50. As shown in fig. 9, gas (e.g., air, argon or nitrogen) may be introduced into the film-taking auxiliary unit 50 from the outside, so as to flow out from the top of the film-taking auxiliary unit 50, and at this time, the hole on the upper surface of the film-taking auxiliary unit 50 becomes an air outlet, so as to blow the film material F toward the suction cup 20, which can assist the energized suction cup 20 to suck the film material F more firmly, and at the same time, help to flatten the side of the film material F farther from the suction cup 20 (i.e., the second film F2).

In the foregoing film-taking method, the film material is firstly sucked by the film-taking auxiliary unit before being sucked by the suction cup, but the invention is not limited thereto. Referring to fig. 10 to 14 together, wherein fig. 10 is a schematic flow chart of a film taking method according to another embodiment of the present invention, and fig. 11 to 14 are schematic diagrams of the film taking device of fig. 10 executing the film taking method. In the present embodiment, the film fetching method can be performed by the film fetching apparatus 1, and the film fetching method includes steps S21 to S24. Since the standby position of the top of the film material pressing member 30 is higher than the film taking auxiliary unit 50 in the embodiment, the film material F is firstly carried on the film material pressing member 30 and keeps a gap G with the film taking auxiliary unit 50 before being picked up, which is helpful for preventing the high-temperature film material F from being adhered to the film taking auxiliary unit 50.

In step S21, the suction plate 20 sucks the film material F. As shown in fig. 11, before the suction cup 20 is energized, the driving mechanism 40 moves the base 10 close to the film F, and the suction cup 20 is energized to suck the film F.

In step S22, a closed space S is formed by the film material F and the base 10. As shown in fig. 12, the driving mechanism 40 moves the base 10 close to the film pressing member 30, so that the film pressing member 30 and the base 10 together clamp the edge area of the first film F1 in the film F. A part of the first film F1 is sandwiched between the film pressing member 30 and the suction line 120 of the base 10, thereby forming a closed space S communicating with the suction flow path 100 between the film F and the base 10.

In step S23, the sealed space S is evacuated. As shown in fig. 13, the suction flow path 100 is connected to suction the closed space S using a negative pressure device (not shown) to remove air bubbles between the first film F1 and the suction cup.

Step S24 is an optional step in the film taking method, in which the film material F is blown in the direction of the suction cup 20 by the film taking auxiliary unit 50. As shown in fig. 14, after the sealed space S is evacuated, gas may be introduced from the outside into the film extraction assisting unit 50, and the gas may be allowed to flow out from the top of the film extraction assisting unit 50. At this time, the holes on the upper surface of the film taking auxiliary unit 50 serve as air outlets, and the film material F can be blown toward the suction cup 20.

After the film taking operation of the suction cup 20 sucking the film material F is completed, the driving mechanism 40 may further move the base 10 and the suction cup 20 to a position above a substrate (e.g., a circuit board or a silicon wafer, not shown) for performing a subsequent film attaching operation of attaching the film material F to the substrate.

In summary, the film taking device disclosed by the invention comprises the film material pressing piece and the air-extracting runner film material pressing piece. The film material pressing piece can press the film material to enable the film material to be attached to the base, and a closed space communicated with the air exhaust flow channel is formed between the film material and the base. In addition, according to the film taking method disclosed by the invention, the negative pressure device can be used for connecting the air exhaust flow passage to exhaust the closed space, so that air bubbles between the film material and the sucking disc are eliminated, and the disappearance of the air bubbles can help the film material to be better attached to the surface of the sucking disc, so that the sucked film material can be kept flat without wrinkles.