阅读说明：本技术 晶圆检测装置 (Wafer detection device ) 是由 武一鸣 古市昌稔 于 2021-08-30 设计创作，主要内容包括：本发明提供一种晶圆检测装置,第一/第二连杆的一端共同枢接驱动机构的活动端,另一端对应枢接第三/第四连杆的一端,所述第三/第四连杆的另一端固定连接所述第一/第二滑块及所述第一/第二光电传感器,所述第一/第二滑块均滑动连接线性滑轨,所述驱动机构驱动所述活动端相对于所述线性滑轨垂直进退移动,并带动所述第一/第二连杆,传动所述第三一/第四连杆、所述第一/第二滑块,且连动所述第一/第二光电传感器分别自对应的第一/第二初始位置及对应的第一/第二检测位置间往返移动,从而实现所述第一光电传感器及所述第二光电传感器之间的距离变化,以灵活对应不同开口尺寸的晶圆盒内不同尺寸的晶圆的检测。(The invention provides a wafer detection device, wherein one end of a first/second connecting rod is jointly pivoted with a movable end of a driving mechanism, the other end of the first/second connecting rod is correspondingly pivoted with one end of a third/fourth connecting rod, the other end of the third/fourth connecting rod is fixedly connected with a first/second sliding block and a first/second photoelectric sensor, the first/second sliding block is connected with a linear sliding rail in a sliding way, the driving mechanism drives the movable end to move forwards and backwards relative to the linear sliding rail vertically and drives the first/second connecting rod to drive the third/fourth connecting rod and the first/second sliding block and drive the first/second photoelectric sensor to move back and forth respectively from a corresponding first/second initial position and a corresponding first/second detection position, so that the distance between the first photoelectric sensor and the second photoelectric sensor is changed, so as to flexibly correspond to the detection of the wafers with different sizes in the wafer cassettes with different opening sizes.)

1. A wafer inspection apparatus, comprising:

the detection assembly comprises a base, a linear slide rail, a driving mechanism, a first/second photoelectric sensor, a first/second sliding block, a first/second connecting rod and a third/fourth connecting rod, wherein the linear slide rail is fixedly connected with the base, the linear slide rail is perpendicular to the movable end of the driving mechanism, the first/second photoelectric sensor, the first/second sliding block and the first/second connecting rod are symmetrically arranged relative to the movable end of the driving mechanism, the third/fourth connecting rod is perpendicular to the linear slide rail, one end of the first/second connecting rod is pivoted at an angle with the movable end of the driving mechanism, the other end of the first/second connecting rod corresponds to one end of the third/fourth connecting rod, and the other end of the third/fourth connecting rod is fixedly connected with the first/second sliding block and the first sliding block The first/second slide block is connected with the linear slide rail in a sliding way, the driving mechanism drives the movable end to move forwards and backwards vertically relative to the linear slide rail and drives the first/second connecting rod to drive the third/fourth connecting rod to drive the first/second slide block and link the first/second photoelectric sensor to respectively move back and forth between a corresponding first/second initial position and a corresponding first/second detection position; wherein the content of the first and second substances,

the angle is greater than or equal to 0 ° and less than or equal to 180 °.

2. The wafer detection device as claimed in claim 1, wherein the first/second detection positions corresponding to the first/second photosensors are respectively disposed at two sides of the flat edge, and the flat edges on the same side are separated by a first/second preset edge distance; the opening is provided with two opposite sides, the flat sides on the same side of the distance are separated by a first distance and a second distance, the first distance is larger than the first preset edge distance, and the second distance is larger than the second preset edge distance.

3. The wafer inspection device of claim 2, wherein the first predetermined margin is equal to the second predetermined margin and the first pitch is equal to the second pitch.

4. The wafer detection apparatus as claimed in claim 1, further comprising a control unit electrically connected to the driving mechanism and the photoelectric sensor and providing a first signal and a second signal to the driving mechanism; wherein the content of the first and second substances,

the driving mechanism receives the first signal or the second signal, drives the movable end to vertically retreat or advance relative to the linear slide rail, drives the first/second connecting rod, and drives the third/fourth connecting rod, the first/second sliding block and the first/second photoelectric sensor, and the first/second photoelectric sensor respectively moves from the corresponding first/second detection position to the corresponding first/second initial position or respectively moves from the corresponding first/second initial position to the corresponding first/second detection position.

5. The wafer inspection device of claim 4, further comprising a robot, wherein the pedestal is fixedly coupled to the robot; wherein the content of the first and second substances,

the opening penetrates from the top to the bottom of the wafer box, a plurality of wafers are stacked in the wafer box from top to bottom at intervals from the opening, each wafer is provided with a flat edge and has the same diameter, the control unit provides a third/fourth signal to the mechanical arm, the mechanical arm receives the third signal, moves up and down relative to each wafer and drives the detection assembly to move synchronously, and receives the fourth signal, moves back and forth relative to each wafer and drives the detection assembly to move synchronously.

6. The wafer inspection device of claim 5, wherein the diameter of the wafer comprises one of 2 inches, 3 inches, 4 inches, 6 inches, 8 inches, and 12 inches.

7. The wafer inspection device of claim 1, wherein the first photosensor or the second photosensor emits light and the second photosensor or the first photosensor receives the light.

8. The wafer inspection device as claimed in claim 1, wherein the first and second photosensors are each provided with a light emitting element and a light receiving element, and the light emitting element emits light which is emitted to the wafer and reflected to the corresponding light receiving element.

9. The wafer inspection device of claim 5, further comprising an end effector, wherein the end effector is opposite the inspection assembly and is fixedly attached to the robot; the control unit further provides a fifth signal to the manipulator, and the manipulator receives the fifth signal, drives the end effector and the detection assembly to rotate 180 degrees relative to the manipulator, and drives the end effector or the detection assembly to be adjacent to the opening.

10. The wafer detection device as claimed in claim 1, wherein the driving mechanism includes a telescopic cylinder, an inlet tube and an outlet tube, and compressed gas is introduced from the inlet tube to an inlet of the telescopic cylinder and pushes the movable end to move forward, or is exhausted from an exhaust port of the telescopic cylinder to the outlet tube and pulls the movable end to move backward.

Technical Field

The invention relates to the technical field of semiconductors, in particular to a wafer detection device.

Background

Before cutting, the silicon rod determines the crystallization direction of the surface through X-Ray diffraction or parallel light diffraction, marks the surface in a Flat edge (Flat) mode, and then cuts the silicon rod into round pieces. The flat edge functions as a locating feature in the IC fabrication, processing and handling equipment. The transfer of wafers between various stations in various IC (integrated circuit) equipment is essential to the proper operation of the equipment. In the manufacturing process, wafers need to move among different manufacturing stations, so that the wafers are often arranged in a wafer box so as to be conveniently conveyed to a specific manufacturing station, and whether the wafers exist in a certain station is a precondition for ensuring accurate transmission of the wafers. At present, various IC devices transmit wafers by means of various manipulators, whether the wafers are on a certain station or not is judged by means of the manipulators, and the station does not have the function of wafer on-site detection.

In the wafer detection device in the prior art, the reflective sensor is used for emitting light to the wafer at a certain angle, and then the reflected light at the edge of the wafer is received, so as to determine whether the wafer exists or not. The wafer light-shielding device can also be used for judging whether the wafer exists or not by utilizing a correlation sensor to emit light at one side of the wafer and receive light at the other side of the wafer, and the scheme can accurately detect whether the wafer exists in the wafer storage device but cannot be corresponding to different types of wafer storage devices.

In view of the above, overcoming the drawbacks of the prior art is an urgent problem in the art.

Disclosure of Invention

The invention aims to overcome the defects in the prior art and provide a wafer detection device to realize the detection device for accurately detecting wafers with different sizes.

To achieve the above object, the present invention provides a wafer inspecting apparatus, comprising: the wafer box is provided with an opening at one side, a wafer is horizontally arranged in the wafer box from the opening, and the flat edge of the wafer is adjacent to the opening; the detection assembly comprises a base, a linear slide rail, a driving mechanism, a first/second photoelectric sensor, a first/second sliding block, a first/second connecting rod and a third/fourth connecting rod, wherein the linear slide rail and the driving mechanism are fixedly connected with the base, the linear slide rail is perpendicular to the movable end of the driving mechanism, the first/second photoelectric sensor, the first/second sliding block, the first/second connecting rod and the third/fourth connecting rod are symmetrically arranged relative to the movable end of the driving mechanism, one end of the first/second connecting rod is jointly pivoted with the movable end of the driving mechanism, the other end of the first/second connecting rod is respectively pivoted with one end of the third/fourth connecting rod, and the other end of the third/fourth connecting rod is fixedly connected with the first/second sliding block and the first/second photoelectric sensor, the first/second sliding blocks are both connected with the linear sliding rail in a sliding manner, the driving mechanism drives the movable end to move forward and backward vertically relative to the linear sliding rail and drives the first/second connecting rod to drive the third/fourth connecting rod and the first/second sliding block and drive the first/second photoelectric sensor to respectively move back and forth between a corresponding first/second initial position and a corresponding first/second detection position; the first/second detection positions corresponding to the first/second photoelectric sensors are respectively arranged on two sides of the flat edge, and the flat edges on the same side are separated by a first/second preset edge distance.

Preferably, the opening has two opposite sides, and the flat sides on the same side of the distance are separated by a first distance and a second distance, the first distance is greater than the first preset edge distance, and the second distance is greater than the second preset edge distance.

Preferably, the first preset margin is equal to the second preset margin, and the first distance is equal to the second distance.

Preferably, the device further comprises a control unit electrically connected to the driving mechanism and the photoelectric sensor, and providing a first signal and a second signal to the driving mechanism; the driving mechanism receives the first signal or the second signal, drives the movable end to vertically retreat or advance relative to the linear slide rail, drives the first/second connecting rod, and drives the third/fourth connecting rod, the first/second sliding block and the first/second photoelectric sensor to respectively move from the corresponding first/second detection position to the corresponding first/second initial position, or respectively move from the corresponding first/second initial position to the corresponding first/second detection position.

Preferably, the device further comprises a manipulator, and the base is fixedly connected with the manipulator; the opening penetrates from the top to the bottom of the wafer box, a plurality of wafers are stacked in the wafer box from top to bottom at intervals from the opening, each wafer is provided with a flat edge and has the same diameter, the control unit provides a third/fourth signal to the mechanical arm, the mechanical arm receives the third signal, moves up and down relative to each wafer and drives the detection assembly to move synchronously, and receives the fourth signal, moves back and forth relative to each wafer and drives the detection assembly to move synchronously.

Preferably, the diameter of the wafer comprises one of 2 inches, 3 inches, 4 inches, 6 inches, 8 inches, and 12 inches.

Preferably, the first photosensor or the second photosensor emits light, and the second photosensor or the first photosensor receives the light.

Preferably, the first and second photosensors are each provided with a light emitting element and a light receiving element, and the light emitting element emits light, which is emitted to the wafer and reflected to the corresponding light receiving element.

Preferably, the robot further comprises an end effector, wherein the end effector is opposite to the detection assembly and is fixedly connected with the manipulator; the control unit further provides a fifth signal to the manipulator, and the manipulator receives the fifth signal, drives the end effector and the detection assembly to rotate 180 degrees relative to the manipulator, and drives the end effector or the detection assembly to be adjacent to the opening.

Actuating mechanism includes telescopic cylinder, intake pipe and outlet duct, compressed gas certainly the intake pipe inserts extremely telescopic cylinder's air inlet, and promote the expansion end antedisplacement, or, certainly telescopic cylinder's gas vent discharges to the outlet duct, and the pulling the expansion end moves backward.

According to the technical scheme, the driving mechanism drives the movable end to vertically advance and retreat relative to the linear slide rail and drives the first connecting rod/the second connecting rod to drive the third connecting rod/the fourth connecting rod, the first sliding block/the second sliding block and the first photoelectric sensor/the second photoelectric sensor, and the first photoelectric sensor and the second photoelectric sensor respectively move back and forth between the corresponding first initial position/second initial position and the corresponding first detection position/second detection position; the first/second detection positions corresponding to the first/second photoelectric sensors are respectively arranged on two sides of the flat edge, and the flat edges on the same side are separated by a first/second preset edge distance, so that the distance between the first photoelectric sensor and the second photoelectric sensor is changed, and the detection of wafers with different sizes in wafer boxes with different opening sizes is flexibly corresponding.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic view illustrating an initial state of a detecting member of a wafer detecting apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic diagram illustrating a detecting status of a detecting element of a wafer detecting device according to an embodiment of the present invention;

fig. 3 is a schematic diagram of a wafer inspection apparatus according to an embodiment of the invention.

Detailed Description

In order to make the contents of the present invention more comprehensible, the present invention is further described below with reference to the accompanying drawings. The invention is of course not limited to this particular embodiment, and general alternatives known to those skilled in the art are also covered by the scope of the invention.

In the following detailed description of the embodiments of the present invention, in order to clearly illustrate the structure of the present invention and to facilitate explanation, the structure shown in the drawings is not drawn to a general scale and is partially enlarged, deformed and simplified, so that the present invention should not be construed as limited thereto.

In order to make the objects, technical solutions and advantages of the present invention more clear, the following description is further made with reference to fig. 1 and 2, and as shown in fig. 1, a wafer inspection apparatus of the present invention includes a wafer cassette and an inspection assembly.

In the embodiment, the opening penetrates from the top to the bottom of the wafer box, a plurality of wafers are stacked in the wafer box from top to bottom at intervals from the opening, and the wafers are provided with flat edges and have the same diameter. In another embodiment, the wafer is placed on the worktable, and the placement manner and position of the wafer are not limited, particularly based on the requirement.

The detecting assembly includes a base, a linear slide rail, a driving mechanism, a first/second photoelectric sensor, a first/second slider (not shown), a first/second connecting rod, and a third/fourth connecting rod.

Wherein the linear slide rail and the driving mechanism are fixedly connected with the base, the linear slide rail is perpendicular to the movable end of the driving mechanism, the first/second photoelectric sensors, the first/second sliding blocks, the first/second connecting rods and the third/fourth connecting rods are symmetrically arranged relative to the movable end of the driving mechanism, the third/fourth connecting rods are perpendicular to the linear slide rail, one end of the first/second connecting rods is pivoted with the movable end of the driving mechanism at an angle, the other end of the first/second connecting rods is correspondingly and fixedly connected with one end of the third/fourth connecting rods, the other end of the third/fourth connecting rods is fixedly connected with the first/second sliding blocks and the first/second photoelectric sensors, and the first/second sliding blocks are all connected with the linear slide rail in a sliding manner, the driving mechanism drives the movable end to move forward and backward vertically relative to the linear slide rail and drives the first/second connecting rod to drive the third/fourth connecting rod and the first/second sliding block, and the driving mechanism is linked with the first/second photoelectric sensor to respectively move back and forth between the corresponding first/second initial position and the corresponding first/second detection position.

Specifically, as shown in fig. 1 and 2, the first and second connecting rods and the third and fourth connecting rods are symmetrically arranged with respect to the movable end of the driving mechanism, the third and fourth connecting rods are perpendicular to the linear slide rail, one end of the first and second connecting rods is pivotally connected to the movable end of the driving mechanism at an angle greater than or equal to 0 ° and less than or equal to 180 °, the first and second connecting rods are connected to the movable end of the driving mechanism to form a Y-shape, and the first and second connecting rods push the corresponding third and fourth connecting rods to move linearly along the linear slide rail. The driving mechanism drives the movable end to move forward and backward vertically relative to the linear slide rail and drives the third/fourth connecting rod to drive the first/second slide block, and the first/second photoelectric sensor is linked to move back and forth between a corresponding first/second initial position and a corresponding first/second detection position respectively, the first/second detection position corresponding to the first/second photoelectric sensor is respectively arranged on two sides of the flat edge, and the flat edges on the same side are separated by a first/second preset edge distance so as to realize the distance change between the first/second photoelectric sensors.

In the same wafer box, each wafer has a flat edge and the diameter of the wafers is the same, the diameter of the wafers comprises one of 2 inches, 3 inches, 4 inches, 6 inches, 8 inches and 12 inches, and the flat edge of each wafer is adjacent to the opening. The first/second detection positions corresponding to the first/second photoelectric sensors are respectively arranged on two sides of the flat edge, the flat edges on the same side are separated by a first/second preset edge distance, the opening is provided with two opposite sides, the flat edges on the same side are separated by a first distance and a second distance, the first distance is larger than the first preset edge distance, and the second distance is larger than the second preset edge distance. The first distance is larger than the first preset edge distance, and the second distance is larger than the second preset edge distance.

Specifically, the first/second photoelectric sensors are respectively located at corresponding first/second detection positions, respectively adjacent to the flat sides on the same side, correspondingly separated by first/second preset edge distances, and respectively disposed between the opening and the gap of the wafer. The wafer sizes of different wafer boxes are different, so that the flat sides are different, the distance between the first photoelectric sensor and the second photoelectric sensor is adjusted through the driving mechanism, the first preset side distance and the second preset side distance are fixed, and the wafer detection corresponding to different sizes is flexible.

The driving mechanism and the photoelectric sensor are electrically connected through the control unit, and a first signal and a second signal are provided for the driving mechanism.

Specifically, the driving mechanism receives the first signal or the second signal, drives the movable end to move back or forward vertically relative to the linear slide rail, and drives the first/second connecting rod, and drives the third/fourth connecting rod, the first/second slider, and the first/second photoelectric sensor, where the first/second photoelectric sensor moves from the corresponding first/second detection position to the corresponding first/second initial position, or moves from the corresponding first/second initial position to the corresponding first/second detection position, respectively.

The first photosensor or the second photosensor emits light, and the second photosensor or the first photosensor receives the light; or, the first photoelectric sensor and the second photoelectric sensor are both provided with a light emitting part and a light receiving part, the light emitting part emits light, and the light is emitted to the wafer and reflected to the corresponding light receiving part. The first/second photoelectric sensors on the opposite sides are arranged, so that the existence/nonexistence of the wafer is judged.

In this implementation, the base is fixedly connected with the manipulator, the opening penetrates from the top to the bottom of the wafer box, a plurality of wafers are stacked in the wafer box from top to bottom at intervals from the opening, each wafer has a flat edge and has the same diameter, the control unit provides a third/fourth signal to the manipulator, the manipulator receives the third signal, moves up and down relative to each wafer and drives the detection assembly to move synchronously, and receives the fourth signal, moves back and forth relative to each wafer and drives the detection assembly to move synchronously, so that the existence/nonexistence of wafers at different positions in the same wafer box is judged.

In an embodiment, the end effector is opposite to the detection assembly and is fixedly connected to the robot, the first/second photoelectric sensors are respectively located at corresponding first/second initial positions, the control unit further provides a fifth signal to the robot, and the robot receives the fifth signal and drives the end effector and the detection assembly to rotate 180 ° relative to the robot, so as to drive the end effector or the detection assembly to be adjacent to the opening. And the end effector is used for transmitting each wafer into the wafer box, and after the wafer box is filled with wafers, the manipulator receives the fifth signal, drives the end effector and the detection assembly to rotate 180 degrees relative to the manipulator, and drives the end effector to be far away from the opening and the detection assembly to be close to the opening.

In this embodiment, actuating mechanism includes telescopic cylinder, intake pipe and outlet duct, and compressed gas certainly the intake pipe inserts extremely telescopic cylinder's air inlet, and promote the expansion end antedisplacement, or, certainly telescopic cylinder's gas vent discharges to the outlet duct, and the pulling the expansion end moves backward. .

The compressed gas may be compressed air or compressed nitrogen, and is not limited herein, particularly based on actual requirements.

The above description is only for the preferred embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, so that all the equivalent structural changes made by using the contents of the description and the drawings of the present invention should be included in the scope of the present invention.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.