阅读说明：本技术 一种新型溅镀工艺 (Novel sputtering process ) 是由 叶生政 郭玉 周明焕 于 2021-09-24 设计创作，主要内容包括：本发明属于镀膜领域,公开了一种新型溅镀工艺,包括以下步骤：步骤一：在800℃的恒温条件下将纳米发热涂层喷涂在微晶玻璃承载体上,然后在850℃的恒温条件下渗透烧结；步骤二：待纳米发热涂层与微晶玻璃承载体烧结一体后,再在800℃恒温条件将导电涂层喷涂在烧结好的纳米发热涂层上；步骤三：喷涂完成后,在800℃恒温条件下二次渗透烧结,使得导电涂层与纳米发热涂层烧结为一体。本发明通过导电涂层让纳米发热涂层得电,纳米发热涂层内部分子因电场的作用开始布朗运动,由分子将的相互碰撞产生热量并通过玻璃载体转换热,最后通过玻璃载体的扩散将热传递出去,实现玻璃载体的发热工作需求,且热扩散快、热转换效率高。(The invention belongs to the field of film coating, and discloses a novel sputtering process, which comprises the following steps: the method comprises the following steps: spraying the nano heating coating on a glass ceramic carrier under the constant temperature condition of 800 ℃, and then infiltrating and sintering under the constant temperature condition of 850 ℃; step two: after the nano heating coating and the microcrystalline glass bearing body are sintered into a whole, spraying the conductive coating on the sintered nano heating coating at the constant temperature of 800 ℃; step three: after the spraying is finished, secondary infiltration sintering is carried out at the constant temperature of 800 ℃, so that the conductive coating and the nano heating coating are sintered into a whole. According to the invention, the nano heating coating is electrified through the conductive coating, molecules in the nano heating coating start Brownian motion under the action of an electric field, the molecules collide with each other to generate heat and convert the heat through the glass carrier, and finally the heat is transferred out through the diffusion of the glass carrier, so that the heating work requirement of the glass carrier is realized, and the heat diffusion is fast and the heat conversion efficiency is high.)

1. A novel sputtering process is characterized in that: the method comprises the following steps:

the method comprises the following steps: spraying the nano heating coating on a glass ceramic carrier under the constant temperature condition of 800 ℃, and then infiltrating and sintering under the constant temperature condition of 850 ℃;

step two: after the nano heating coating and the microcrystalline glass bearing body are sintered into a whole, spraying the conductive coating on the sintered nano heating coating at the constant temperature of 800 ℃;

step three: after the spraying is finished, secondary infiltration sintering is carried out at the constant temperature of 800 ℃, so that the conductive coating and the nano heating coating are sintered into a whole.

2. A novel sputtering process according to claim 1, characterized in that: the thickness of the nanometer heating coating is 0.20-0.46 mm.

3. A novel sputtering process according to claim 1, characterized in that: the thickness of the conductive coating is 0.20-0.48 mm.

Technical Field

The invention relates to the technical field of sputtering coating, and particularly provides a novel sputtering process.

Background

Vacuum coating mainly refers to a coating needing to be carried out under higher vacuum degree, and specifically comprises various types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into two types, evaporation and sputtering, and the material to be coated is called substrate and the material to be coated is called target. The substrate and the target material are in the vacuum cavity. In the evaporation coating, a target is generally heated to evaporate surface components in the form of atomic groups or ions, and the surface components are deposited on the surface of a substrate to form a thin film through a film forming process.

The microcrystalline glass is also called as microcrystalline jade or ceramic glass, the microcrystalline glass is characterized in that some nucleating substances are added into the glass, a large number of micro crystals are uniformly precipitated in the glass through means of heat treatment, light irradiation, chemical treatment or the like to form a compact multiphase complex of a microcrystalline phase and a glass phase, the microcrystalline glass can replace a traditional heating tube, and a brand new generation heat source mode is provided for industrial baking, such as an industrial baking oven, a tunnel oven, an electroplating baking oven, a tobacco baking technology, heating and baking processing of agricultural and sideline products, household heating, a dehumidification food baking oven and the like.

However, in the prior art, the surface area is increased by sand blasting on the surface of the microcrystalline glass, and the adhesion of the coating is increased, and the microcrystalline glass is usually subjected to low-temperature sintering or non-sintering, so that the size of sprayed particles is uneven, the density of the sprayed particles is uneven, the sintering depth and penetration are affected, and the compactness of the coating is affected, so that the heat transfer diffusivity in the temperature rise process is affected, the heat conversion rate is also affected, the thermal expansion and expansion traction force of the microcrystalline glass in the use process is affected, the supporting body is damaged, and further, the cost loss and the production loss are large.

Disclosure of Invention

The invention aims to solve the defects in the prior art and provides a novel sputtering process.

In order to achieve the purpose, the invention provides the following technical scheme:

a novel sputtering process comprises the following steps:

the method comprises the following steps: spraying the nano heating coating on a glass ceramic carrier under the constant temperature condition of 800 ℃, and then infiltrating and sintering under the constant temperature condition of 850 ℃;

step two: after the nano heating coating and the microcrystalline glass bearing body are sintered into a whole, spraying the conductive coating on the sintered nano heating coating at the constant temperature of 800 ℃;

step three: after the spraying is finished, secondary infiltration sintering is carried out at the constant temperature of 800 ℃, so that the conductive coating and the nano heating coating are sintered into a whole.

Preferably, the thickness of the nanometer heating coating is 0.20-0.46 mm.

Preferably, the thickness of the conductive coating is 0.20-0.48 mm.

Compared with the prior art, the invention provides a novel sputtering process, which has the following beneficial effects:

(1) according to the invention, the nano heating coating is electrified through the conductive coating, molecules in the nano heating coating start Brownian motion under the action of an electric field, the molecules collide with each other to generate heat and convert the heat through the glass carrier, and finally the heat is transferred out through the diffusion of the glass carrier, so that the heating work requirement of the glass carrier is realized, and the heat diffusion is fast and the heat conversion efficiency is high.

(2) The microcrystalline glass bearing body disclosed by the invention has the advantages of deep penetration, uniform sintering, rapid and uniform thermal diffusion, small thermal expansion and expansion traction force of the bearing body, high thermal conversion efficiency, high temperature rise speed and long service life.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

A novel sputtering process comprises the following steps:

the method comprises the following steps: spraying the nano heating coating on a glass ceramic carrier under the constant temperature condition of 800 ℃, and then infiltrating and sintering under the constant temperature condition of 850 ℃;

step two: after the nanometer heating coating and the microcrystalline glass bearing body are sintered into a whole, spraying the conductive coating on the sintered nanometer heating coating at the constant temperature of 800 ℃, wherein the thickness of the nanometer heating coating is 0.20-0.46 mm;

step three: after the spraying is finished, secondary infiltration sintering is carried out at the constant temperature of 850 ℃, so that the conductive coating and the nano heating coating are sintered into a whole, and the thickness of the conductive coating is 0.20-0.48 mm.

The crystal on the surface layer of the glass ceramics can be softened under the temperature condition of 800-;

experiments prove that: the spraying is carried out at the constant temperature of 800 ℃ and the sintering is carried out at the constant temperature of 850 ℃, so that the density binding degree of the sprayed particles is increased by 60 percent, and the depth of a sprayed particle permeable layer is increased by 38 percent, thereby improving the thermal diffusivity of the supporting body by 45 percent, improving the heat transfer rate by 35 percent, reducing the thermal expansion traction force of the supporting body by 45 percent, preventing the supporting body from being damaged due to the thermal expansion traction force, improving the highest temperature by 45 percent and shortening the temperature rise time by 35 to 40 percent.

The foregoing is only a preferred embodiment of the present invention; the scope of the invention is not limited thereto. Any person skilled in the art should be able to cover the technical scope of the present invention by equivalent or modified solutions and modifications within the technical scope of the present invention.