阅读说明：本技术 陀螺仪和电子设备 (Gyroscope and electronic device ) 是由 裘安萍 施芹 胡启方 赵阳 夏国明 于 2020-06-18 设计创作，主要内容包括：本申请实施例提供一种陀螺仪和电子设备,电子设备可以包括手机、电脑、手持计算机、对讲机、可穿戴设备、虚拟现实设备、蓝牙音响/耳机、或车载前装等拍摄的移动或固定终端,通过陀螺仪包括衬底,第一外框架以及分别与第一外框架相连的驱动结构和检测结构,驱动结构位于第一外框架内,包括相对于第一外框架的中心轴对称的两部分,检测结构包括位于第一外框架两侧的两部分,驱动结构和检测结构均与衬底相连。这样,该陀螺仪的驱动结构的力臂和力矩误差较小,降低了陀螺仪的输出误差,提高了陀螺仪的灵敏度,同时还提高了陀螺仪的振动性能和适应性能。(The embodiment of the application provides a gyroscope and electronic equipment, electronic equipment can include the cell-phone, a computer, a hand-held computer, the intercom, wearable equipment, virtual reality equipment, bluetooth sound/earphone, or removal or the fixed terminal of shooting such as on-vehicle preceding dress, include the substrate through the gyroscope, first outer frame and drive structure and detection structure that link to each other with first outer frame respectively, drive structure is located first outer frame, include two parts for the central axis symmetry of first outer frame, detect the structure including two parts that are located first outer frame both sides, drive structure and detection structure all link to each other with the substrate. Therefore, the moment arm and moment error of the driving structure of the gyroscope are small, the output error of the gyroscope is reduced, the sensitivity of the gyroscope is improved, and meanwhile, the vibration performance and the adaptability of the gyroscope are also improved.)

1. A gyroscope, comprising: the detection device comprises a substrate, a first outer frame, a driving structure and a detection structure, wherein the driving structure and the detection structure are respectively connected with the first outer frame;

the driving structure is positioned in the first outer frame, the driving structure comprises two parts which are symmetrical relative to the central axis of the first outer frame, and the detection structure comprises two parts which are positioned on two sides of the first outer frame; the drive structure and the detection structure are both connected with the substrate.

2. The gyroscope of claim 1, wherein the detection structures are located on both sides of the first outer frame along a first direction, the first direction being perpendicular to an extension direction of the central axis; alternatively, the first and second electrodes may be,

the detection structures are located on two sides of the first outer frame along a second direction, and the second direction is parallel to the extending direction of the central shaft.

3. The gyroscope of claim 2, wherein each of the two portions of the detection structure on either side of the first outer frame comprises at least one sub-detection structure, each sub-detection structure comprising: a detection electrode and a second outer frame; the second outer frame is fixedly connected with the first outer frame, one end of the detection electrode is electrically connected with the substrate, and the other end of the detection electrode is suspended.

4. The gyroscope of claim 3, wherein the detection electrode has a plurality of fixed detection fingers thereon, the inner edge of the second outer frame has a plurality of movable detection fingers, and an end of the plurality of fixed detection fingers facing away from the detection electrode and an end of the plurality of movable detection fingers facing away from the inner edge of the second outer frame are suspended such that the plurality of fixed detection fingers and the plurality of movable detection fingers interleave with each other to form a detection capacitor.

5. The gyroscope of claim 4, wherein the plurality of fixed detection fingers and the plurality of movable detection fingers are spaced apart.

6. The gyroscope of claim 4 or 5, wherein the detection electrodes comprise: the detection device comprises a main detection electrode and a plurality of branch detection electrodes, wherein the branch detection electrodes are respectively positioned at two sides of the main detection electrode, one end of the main detection electrode is connected with the substrate, and the other end of the main detection electrode is suspended;

one end of each branch detection electrode is electrically connected with the main detection electrode, and the other end of each branch detection electrode is close to the inner edge of the second outer frame;

and a plurality of the fixed detection comb teeth are located on the branch detection electrode.

7. The gyroscope of claim 6, wherein the second outer frame has a plurality of extending portions extending toward the main detection electrodes, and the extending directions of the extending portions are parallel to the branch detection electrodes; one end of the extension part is connected with the second outer frame, and the other end of the extension part is close to the main detection electrode;

and a plurality of the movement detection comb teeth are located on the extension portion.

8. The gyroscope of any of claims 3-7, wherein each of the sub-detection structures further comprises: and one end of the feedback electrode is electrically connected with the substrate, and the other end of the feedback electrode is suspended.

9. The gyroscope of claim 8, wherein the feedback electrode further has a plurality of fixed feedback fingers thereon, and the inner edge of the second outer frame further has a plurality of movable feedback fingers thereon; one end of the fixed feedback comb teeth, which is far away from the feedback electrode, and one end of the movable feedback comb teeth, which is far away from the inner edge of the second outer frame, are suspended, so that the fixed feedback comb teeth and the movable feedback comb teeth are staggered to form a feedback capacitor.

10. The gyroscope of claim 9, wherein the plurality of movable feedback fingers and the plurality of fixed feedback fingers are arranged in the same direction as the plurality of movable detection fingers or the plurality of fixed detection fingers.

11. The gyroscope of any one of claims 8-10, wherein the feedback signals received by the feedback capacitors in the two sub-sensing structures located on either side of the first outer frame have opposite polarities;

and the polarities of feedback signals accessed by the feedback capacitors in the two adjacent sub-detection structures positioned on the same side of the first outer frame are opposite.

12. The gyroscope of any of claims 1-11, wherein the drive structures are positioned within the first outer frame and are symmetrically disposed about a central axis of the first outer frame, and wherein an outer edge of the drive structures parallel to the central axis is connected to an inner edge portion of the first outer frame.

13. The gyroscope of any of claims 1-12, wherein a portion of the outer edges of the drive structures are connected to the inner edge of the first outer frame by drive beams.

14. The gyroscope of any of claims 1-13, wherein each of the two portions of the drive structure that are symmetric about the central axis of the first outer frame comprises at least one sub-drive structure, each of the sub-drive structures comprising: an inner frame and at least two sets of drive electrodes located within the inner frame; one end of the driving electrode is connected with the substrate, and the other end of the driving electrode is suspended.

15. The gyroscope of claim 14, wherein the drive electrode has a plurality of fixed drive fingers thereon, the inner edge of the inner frame has a plurality of movable drive fingers, an end of the plurality of fixed drive fingers facing away from the drive electrode and an end of the plurality of movable drive fingers facing away from the inner edge of the inner frame are cantilevered such that the plurality of fixed drive fingers and the plurality of movable drive fingers interleave with each other to form a drive capacitance;

the movable driving comb teeth are distributed at the inner edge of the inner frame at intervals;

the plurality of fixed drive comb teeth are distributed on the drive electrode at intervals.

16. The gyroscope of claim 14 or 15, wherein each of the sub-drive structures further comprises: at least two sets of drive detection electrodes located within the inner frame, wherein one set of the drive detection electrodes is located between one set of the drive electrodes and another set of the drive detection electrodes.

17. The gyroscope of claim 16, wherein the inner edge of the inner frame further has a plurality of first drive detection combs, the drive detection electrodes further have a plurality of second drive detection combs thereon,

a plurality of first drive detection comb teeth arranged at intervals along a direction parallel to the central axis at an inner edge of the inner frame;

the plurality of second drive detection comb teeth are arranged at intervals on one side of the drive detection electrode facing the first drive detection comb teeth, and the plurality of first drive detection comb teeth and the plurality of second drive detection comb teeth are arranged in a staggered manner, so that a drive detection capacitor is formed between the first drive detection comb teeth and the second drive detection comb teeth.

18. The gyroscope of claim 15, wherein the alternating voltages input to two adjacent driving electrodes located within each inner frame are in opposite phases.

19. The gyroscope of claim 18, wherein the movable drive combs disposed at the inner edge of one of the inner frames are arranged mirror-symmetrically to the movable drive combs disposed at the inner edge of the other of the inner frames.

20. The gyroscope of any of claims 1-19, further comprising: the structure of the isolation structure is provided,

the outer edge of the first outer frame is provided with a mounting opening, the isolation structure is mounted at the mounting opening, and the isolation structure is connected with the first outer frame through a folding beam.

21. The gyroscope of claim 20, further comprising: and one end of each anchor point is connected with the isolation structure, and the other end of each anchor point is connected with the substrate.

22. The gyroscope of claim 20, wherein the material of the folded beam is silicon.

23. The gyroscope of claim 13, wherein the material of the drive beams is silicon.

24. An electronic device comprising a gyroscope according to any of claims 1 to 23.

25. The electronic device of claim 24, further comprising: the display screen, the middle frame, the circuit board, the battery and the rear cover; the circuit board and the battery are arranged on one surface of the middle frame, which faces the rear cover, and the display screen and the rear cover are respectively positioned on two sides of the middle frame;

the gyroscope is located on any one of the middle frame, the circuit board, the battery, and the rear cover.

Technical Field

The embodiment of the application relates to the technical field of micro electro mechanical systems, in particular to a gyroscope and electronic equipment.

Background

A Micro Electro Mechanical System (MEMS) refers to a high-technology device with a size of several millimeters or less, and its internal structure is generally in the micrometer or even nanometer level, and it is an independent intelligent System, mainly composed of three major parts, i.e. a sensor, an actuator and a Micro energy source. The micro electro mechanical system relates to various subjects and engineering technologies such as physics, semiconductor, optics, electronic engineering, chemistry, material engineering, mechanical engineering, medicine, information engineering, biological engineering and the like, and develops wide application in the fields of synthetic biology, microfluidic technology and the like of intelligent systems, consumer electronics, wearable equipment, smart homes, system biotechnology and the like. Common products include MEMS accelerometers, MEMS microphones, micro-motors, micro-pumps, micro-vibrators, MEMS pressure sensors, MEMS gyroscopes, MEMS humidity sensors, and the like, as well as integrated products thereof.

In the prior art, the MEMS gyroscope mainly includes a substrate layer doped with silicon or glass and a device layer connected to the substrate layer, the device layer includes two substructures, an i-shaped frame, a torsion bar, a multi-fold beam and an isolation structure, the two substructures are symmetrically arranged in the i-shaped frame and connected to the i-shaped frame through a driving beam, the substructures include a detection structure and a driving structure, the detection structure is connected to the driving structure through a detection support beam, the i-shaped frame is connected to the isolation structure through the torsion bar and the multi-fold beam, and then the isolation structure is bonded to a fixed base on the substrate layer below through an anchor point arranged on the isolation structure.

However, the driving structures in the MEMS gyroscope are disposed on the upper and lower sides of the device layer structure, and a large moment arm and a large moment error are generated between the driving comb teeth in the driving structures of the upper and lower portions, so that the MEMS gyroscope is prone to generate a large detection error.

Disclosure of Invention

The application provides a gyroscope and electronic equipment, and the arm of force between the drive broach in the drive structure of this gyroscope is less with moment error, has reduced output error, has improved the sensitivity of gyroscope, has still improved the vibration performance and the adaptability of gyroscope simultaneously.

A first aspect of the present application provides a gyroscope comprising: the detection device comprises a substrate, a first outer frame, a driving structure and a detection structure, wherein the driving structure and the detection structure are respectively connected with the first outer frame; the driving structure is positioned in the first outer frame, the driving structure comprises two parts which are symmetrical relative to the central axis of the first outer frame, and the detection structure comprises two parts which are positioned on two sides of the first outer frame; the drive structure and the detection structure are both connected with the substrate.

The application provides a gyroscope, through arranging the drive structure in the centre of gyroscope structure, the arm of force and the moment error between the drive broach in the drive structure of messenger's this gyroscope are less, have reduced output error, have improved the sensitivity of gyroscope, have still improved the vibration performance and the adaptability of gyroscope simultaneously. Meanwhile, different detection structures are simultaneously arranged on the first outer frame, so that the different detection structures are connected together, and the synchronism of the movement of the detection comb teeth can be ensured when the detection structures move.

In a possible implementation manner, the detection structures are located on two sides of the first outer frame along a first direction, and the first direction is perpendicular to the extending direction of the central shaft; alternatively, the first and second electrodes may be,

the detection structures are located on two sides of the first outer frame along a second direction, and the second direction is parallel to the extending direction of the central shaft.

In one possible implementation, each of the two portions of the detection structure located on both sides of the first outer frame includes at least one sub-detection structure, and each sub-detection structure includes: a detection electrode and a second outer frame; the second outer frame is fixedly connected with the first outer frame, one end of the detection electrode is electrically connected with the substrate, and the other end of the detection electrode is suspended.

In a possible implementation manner, the detection electrode has a plurality of fixed detection comb teeth, the inner edge of the second outer frame has a plurality of movable detection comb teeth, and a plurality of fixed detection comb teeth and a plurality of movable detection comb teeth are separated from one end of the detection electrode and one end of the inner edge of the second outer frame are suspended, so that the plurality of fixed detection comb teeth and the plurality of movable detection comb teeth are staggered with each other to form a detection capacitor.

The plurality of fixed detection comb teeth and the plurality of movable detection comb teeth are staggered to form differential capacitance detection, so that output decoupling of the detection structure is realized, and interference signals are suppressed. And the detection capacitor is formed by a plurality of fixed detection comb teeth and a plurality of movable detection comb teeth which are arranged in a staggered mode, the detection comb teeth of the gyroscope structure adopt a variable-area detection mode, and the capacitance variation and the angular rate have good linearity. Therefore, the gyroscope can measure a large angular rate, and has high sensitivity and better linearity.

In one possible implementation manner, the plurality of fixed detection comb teeth and the plurality of movable detection comb teeth are arranged at intervals.

In one possible implementation, the detection electrode includes: the detection device comprises a main detection electrode and a plurality of branch detection electrodes, wherein the branch detection electrodes are respectively positioned at two sides of the main detection electrode, one end of the main detection electrode is connected with the substrate, and the other end of the main detection electrode is suspended; one end of each branch detection electrode is electrically connected with one suspended end of the main detection electrode, the other end of each branch detection electrode is close to the inner edge of the second outer frame, and the plurality of fixed detection comb teeth are positioned on the branch detection.

In a possible implementation manner, the second outer frame has a plurality of extending portions extending toward the detection electrodes, and the extending directions of the extending portions are parallel to the branch detection electrodes; one end of the extension part is connected with the second outer frame, and the other end of the extension part is close to the main detection electrode; and a plurality of the movement detection comb teeth are located on the extension portion.

In one possible implementation manner, each of the sub-detection structures further includes: and one end of the feedback electrode is electrically connected with the substrate, and the other end of the feedback electrode is suspended.

In a possible implementation manner, the feedback electrode is further provided with a plurality of fixed feedback comb teeth, and the inner edge of the second outer frame is further provided with a plurality of movable feedback comb teeth; one end of the movable feedback comb teeth, which deviates from the feedback electrode, and one end of the movable feedback comb teeth, which deviates from the inner edge of the second outer frame, are suspended, so that the fixed feedback comb teeth and the movable feedback comb teeth are staggered to form a feedback capacitor.

Through setting up feedback electrode and forming multiunit feedback capacitance, can make the detection structure of gyroscope keep in balanced position, realized the stable control to detecting the mode to can accomplish the closed loop detection to the gyroscope, like this, can avoid the detection structure of gyroscope to produce great displacement and bring the structure and twist reverse the interference, still be favorable to optimizing the nonlinearity degree of device simultaneously, and then improve the measurement accuracy of gyroscope.

In a possible implementation manner, the arrangement direction of the plurality of movable feedback comb teeth and the plurality of fixed feedback comb teeth is the same as the arrangement direction of the plurality of movable detection comb teeth or the plurality of fixed detection comb teeth.

In a possible implementation manner, the polarities of feedback signals accessed by the feedback capacitors in the two sub-detection structures located at two sides of the first outer frame are opposite; and the polarities of feedback signals accessed by the feedback capacitors in the two adjacent sub-detection structures positioned on the same side of the first outer frame are opposite.

Like this, can guarantee that the feedback signal polarity that two adjacent feedback capacitances in any direction insert is opposite, through loading feedback voltage signal on feedback electrode to this produces electrostatic force and is used for offsetting brother formula inertia force on the outer frame, can make detection structure work like this under closed loop force balance state, make the outer frame be difficult to produce the displacement in the course of the work, the motion of drive structure then can't couple to the detection structure like this, thereby further realized the complete decoupling of drive structure and detection structure.

In a possible implementation manner, each of the driving structures is located in the first outer frame and symmetrically arranged with respect to a central axis of the first outer frame, and an outer edge of the driving structure parallel to the central axis is connected to an inner edge portion of the first outer frame.

In one possible implementation, a portion of the outer edge of the drive structure is connected to the inner edge of the first outer frame by a drive beam.

Therefore, the driving structure can generate reverse resonance under the action of electrostatic driving force, and meanwhile, the detection structure on the first outer frame is kept not to move, namely, the influence of the movement of the driving structure on the movement of the detection structure is reduced, so that decoupling of driving vibration and detection movement is realized, and the output error of the gyroscope is further reduced.

In one possible implementation, each of the two portions of the driving structure symmetrical with respect to the central axis of the first outer frame includes at least one sub-driving structure, and each of the sub-driving structures includes: an inner frame and at least two sets of drive electrodes located within the inner frame; one end of the driving electrode is connected with the substrate, and the other end of the driving electrode is suspended.

In one possible implementation manner, the driving electrode is provided with a plurality of fixed driving comb teeth, the inner edge of the inner frame is provided with a plurality of movable driving comb teeth, one end of the plurality of fixed driving comb teeth, which faces away from the driving electrode, and one end of the plurality of movable driving comb teeth, which faces away from the inner edge of the inner frame, are suspended, so that the plurality of fixed driving comb teeth and the plurality of movable driving comb teeth are staggered with each other to form a driving capacitor; the movable driving comb teeth are distributed at the inner edge of the inner frame at intervals; the plurality of fixed drive comb teeth are distributed on the drive electrode at intervals.

In one possible implementation, each of the sub-driving structures further includes: at least two sets of drive detection electrodes located within the inner frame; wherein one set of the drive detection electrodes is located between one set of the drive electrodes and the other drive detection electrode.

The gyroscope drive mode differential detection can be realized by arranging at least two groups of drive detection electrodes and forming at least two groups of drive detection capacitors, and the capacitance variation is fed back to the drive electrodes through a peripheral circuit to correspondingly adjust the drive displacement so as to realize the constant-frequency constant-amplitude closed-loop control of the drive mode.

In a possible implementation manner, the inner edge of the inner frame is further provided with a plurality of first driving detection comb teeth, the driving detection electrode is further provided with a plurality of second driving detection comb teeth, and the plurality of first driving detection comb teeth are arranged at intervals on the inner edge of the inner frame along a direction parallel to the central axis; the plurality of second drive detection comb teeth are arranged at intervals on one side of the drive detection electrode facing the first drive detection comb teeth, and the plurality of first drive detection comb teeth and the plurality of second drive detection comb teeth are arranged in a staggered manner, so that a drive detection capacitor is formed between the first drive detection comb teeth and the second drive detection comb teeth.

In one possible implementation, the phases of the alternating voltages input by two adjacent driving electrodes in each inner frame are opposite.

In one possible implementation, the movable driving comb teeth arranged at the inner edge of one of the inner frames are arranged mirror-symmetrically to the movable driving comb teeth arranged at the inner edge of the other inner frame. Thus, by applying the same driving voltage to the driving electrodes of two different inner frames, the two inner frames can be moved toward each other, thereby simplifying the circuit to some extent.

In one possible implementation manner, the method further includes: the isolation structure is arranged at the position of the mounting opening and is connected with the first outer frame through a folding beam.

Therefore, the structural stability of the gyroscope can be improved, the anti-vibration performance of the gyroscope structure is improved, meanwhile, the influences of the production process and packaging can be reduced, and the temperature error is reduced.

In one possible implementation manner, the method further includes: and one end of each anchor point is connected with the isolation structure, and the other end of each anchor point is connected with the substrate.

Therefore, the structural stability of the gyroscope can be further improved, and the anti-vibration performance of the gyroscope structure can be improved. And the inner frame is connected with the outer frame through the driving beam, the outer frame is connected with the isolation structure through the folding beam, and the isolation structure is connected with the anchor point and fixed on the substrate.

In one possible implementation, the material of the folded beam is silicon.

In one possible implementation, the material of the drive beam is silicon.

A second aspect of the embodiments of the present application provides an electronic device, including any one of the gyroscopes described above.

Through set up above-mentioned gyroscope in electronic equipment, reduced arm of force and moment error between the drive broach in the drive structure of this gyroscope, reduced the output error of gyroscope, improved the sensitivity of gyroscope, still improved the vibration performance and the adaptability of gyroscope simultaneously to make the gyroscope can provide signals such as more accurate position, level, position, speed and acceleration for electronic equipment, optimized electronic equipment's experience effect. Meanwhile, the stability of signal transmission in the electronic equipment is ensured, and the normal work of the electronic equipment is ensured.

In one possible implementation manner, the method further includes: the display screen, the middle frame, the circuit board, the battery and the rear cover; the circuit board and the battery are arranged on one surface of the middle frame, which faces the rear cover, and the display screen and the rear cover are respectively positioned on two sides of the middle frame;

the gyroscope is located on any one of the middle frame, the circuit board, the battery, and the rear cover.

Drawings

Fig. 1 is a schematic overall structure diagram of an electronic device according to an embodiment of the present disclosure;

fig. 2 is a schematic view of a split structure of an electronic device according to an embodiment of the present application;

fig. 3 is a schematic overall assembly diagram of a gyroscope provided in scenario one of the embodiments of the present application;

fig. 4 is a schematic structural diagram of a gyroscope structure of a gyroscope provided in scenario one of the embodiments of the present application;

fig. 5 is another schematic structural diagram of a gyroscope structure of a gyroscope provided in scenario one of the embodiments of the present application;

fig. 6 is a schematic structural diagram of a gyroscope structure of a gyroscope provided in scenario one of the embodiments of the present application;

fig. 7 is a schematic plan structure diagram of a sub-detection structure of a gyroscope structure provided in scenario one of the embodiments of the present application;

fig. 8 is a schematic perspective view of a sub-detection structure of a gyroscope structure provided in scenario one of the embodiments of the present application;

fig. 9 is a schematic plan structure diagram of a sub-driving structure of a gyroscope provided in a first scenario of the present application;

fig. 10 is a schematic perspective view of a sub-driving structure of a gyroscope structure provided in scenario one of the embodiments of the present application;

fig. 11 is a schematic structural diagram of a gyroscope structure of a gyroscope provided in scenario two in the embodiment of the present application;

fig. 12 is a schematic plan structure diagram of a sub-detection structure of a gyroscope structure provided in scenario two in the present application;

fig. 13 is a schematic perspective structure diagram of a sub-detection structure of a gyroscope structure provided in scene two in the embodiment of the present application.

Description of reference numerals:

100-a gyroscope; 1-a gyroscope structure; 10-a first outer frame; 20-sub drive structure; 201-inner frame; 2011-movable drive comb teeth; 2012-a first drive detection comb; 202-a drive electrode; 2021-stationary drive combs; 203-drive the detection electrode; 2031 — second drive detection comb; 30-daughter detection structure; 301-a detection electrode; 3011-fixing the detection comb teeth; 3012-a primary detection electrode; 3013-detection electrodes; 302-a second outer frame; 3021-activity detection comb; 3022-an extension; 3023-moving feedback combs; 303-a feedback mechanism; 304-a feedback electrode; 3041-fixing feedback comb teeth; 3042-a main feedback electrode; 3043-a feedback electrode; 40-a drive beam; 50-a mounting port; 501-an isolation structure; 502-anchor point; 503-connecting beam; 60-folding the beam; 2-a substrate; l1-center axis; l2-first direction; l3-second direction; 200-mobile phone; 21-a display screen; 211-opening a hole; 22-middle frame; 221-metal middle plate; 222-a border; 23-a circuit board; 24-a battery; 25-rear cover; 26 a-a front camera module; 26 b-rear camera module.

Detailed Description

The terminology used in the description of the embodiments of the present application is for the purpose of describing particular embodiments of the present application only and is not intended to be limiting of the application, as the embodiments of the present application will be described in detail below with reference to the accompanying drawings.

The embodiment of the present application provides an electronic device, which may include, but is not limited to, a mobile or fixed terminal having the gyroscope, such as a mobile phone, a tablet computer, a notebook computer, an ultra-mobile personal computer (UMPC), a handheld computer, an intercom, a netbook, a Point of sale (POS) machine, a Personal Digital Assistant (PDA), a wearable device, a virtual reality device, a wireless usb disk, a bluetooth sound/earphone, or a vehicle-mounted front-end, a car recorder, and a security device.

In the embodiment of the present application, the mobile phone 200 is taken as the above-mentioned electronic device for example, the mobile phone 200 provided in the embodiment of the present application may be a curved-screen mobile phone or a flat-screen mobile phone, and in the embodiment of the present application, a flat-screen mobile phone is taken as an example for description. Fig. 1 and fig. 2 respectively show an overall structure and a detachable structure of the mobile phone 200, the display screen 21 of the mobile phone 200 provided in the embodiment of the present application may be a water drop screen, a bang screen, a full screen, or a hole digging screen (see fig. 1), and the following description takes the hole digging screen as an example for description.

Referring to fig. 2, a handset 200 may include: the display device comprises a display screen 21, a middle frame 22, a circuit board 23 and a back cover 25, wherein the circuit board 23 can be arranged on the middle frame 22, for example, the circuit board 23 can be arranged on one side of the middle frame 22 facing the back cover 25 (as shown in fig. 2), or the circuit board 23 can be arranged on one side of the middle frame 22 facing the display screen 21, and the display screen 21 and the back cover 25 are respectively arranged on two sides of the middle frame 22. In some other examples, the mobile phone 200 may further include a battery 24, and the battery 24 may be disposed on a side of the middle frame 22 facing the rear cover 25 (as shown in fig. 2), or the battery 24 may be disposed on a side of the middle frame 22 facing the display screen 21, for example, a side of the middle frame 22 facing the rear cover 25 may have a battery compartment (not shown), and the battery 24 is installed in the battery compartment.

The battery 24 may be connected to the charging management module and the circuit board 23 through a power management module, and the power management module receives input from the battery 24 and/or the charging management module and supplies power to the processor, the internal memory, the external memory, the display screen 21, the camera module, the communication module, and the like. The power management module may also be used to monitor parameters such as battery 24 capacity, battery 24 cycle count, battery 24 health (leakage, impedance), etc. In other embodiments, the power management module may also be disposed in the processor of the circuit board 23. In other embodiments, the power management module and the charging management module may be disposed in the same device.

When the mobile phone 200 is a flat-panel mobile phone, the Display screen 21 may be an Organic Light-Emitting Diode (OLED) Display screen or a Liquid Crystal Display (LCD) Display screen, and when the mobile phone 200 is a curved-panel mobile phone, the Display screen 21 may be an OLED Display screen.

With continued reference to fig. 2, the middle frame 22 may include a metal middle plate 221 and a frame 222, wherein the frame 222 is disposed around the periphery of the metal middle plate 221. In general, the bezel 222 may include a top bezel, a bottom bezel, a left side bezel, and a right side bezel, which enclose the bezel 222 in a square ring structure. The metal middle plate 221 is made of, but not limited to, an aluminum plate, an aluminum alloy, stainless steel, a steel-aluminum composite die-cast plate, a titanium alloy, or a magnesium alloy. The frame 222 may be a metal frame, a ceramic frame, or a glass frame. When the frame 222 is a metal frame, the material of the metal frame includes, but is not limited to, aluminum alloy, stainless steel, steel-aluminum composite die-cast plate, or titanium alloy. The middle metal plate 221 and the frame 222 may be clamped, welded, bonded or integrally formed, or the middle metal plate 221 and the frame 222 may be fixedly connected by injection molding.

The rear cover 25 may be a metal rear cover, a glass rear cover, a plastic rear cover, or a ceramic rear cover, and in the embodiment of the present application, the material of the rear cover 25 is not limited, and is not limited to the above example.

It should be noted that, in some examples, the rear cover 25 of the mobile phone 200 may be connected to the bezel 222 to form an integrally formed (Unibody) rear cover, for example, the mobile phone 200 may include: the display 21, the metal middle plate 221 and the battery cover, which may be a rear cover formed by integrally molding (Unibody) the frame 222 and the rear cover 25, so that the circuit board 23 and the battery 24 are located in a space surrounded by the metal middle plate 221 and the battery cover.

In order to implement the shooting function, the mobile phone 200 may further include: camera module, with continued reference to fig. 2, the camera module may include a front camera module 26a and a rear camera module 26 b. The rear camera module 26b may be disposed on a surface of the middle metal plate 221 facing the rear cover 25, the display screen 21 is provided with an opening 211, and a lens of the rear camera module 26b corresponds to the opening 211. The rear cover 25 may be provided with a mounting hole (not shown) for mounting a partial region of the rear camera module 26b, and the rear camera module 26b may be mounted on a surface of the rear cover 25 facing the metal middle plate 221. The front camera module 26a may be disposed on a surface of the middle metal plate 221 facing the display screen 21, or the front camera module 26a may be disposed on a surface of the middle metal plate 221 facing the rear cover 25, or the front camera module 26a may be disposed on a surface of the rear cover 25 facing the display screen 21, and the middle metal plate 221 is provided with an opening through which a lens end of the front camera module 26a is exposed.

In the embodiment of the present application, the positions where the front camera module 26a and the rear camera module 26b are disposed include, but are not limited to, the above description. In some embodiments, the number of the front camera modules 26a and the rear camera modules 26b in the mobile phone 200 may be 1 or N, where N is a positive integer greater than 1.

To further increase the achievable functions of the cellular phone 200, the gyroscope 100 may be mounted on the cellular phone 200, and for example, to achieve a navigation function, a pedometer function, or an orientation detection function, the gyroscope 100 may be mounted on any one of the middle frame 22, the circuit board 23, the battery 24, and the rear cover 25 in the cellular phone 200. Or, in order to realize the camera shake prevention function, the gyroscope 100 may be installed on the camera module, for example, the gyroscope 100 may be installed on any one or both of the front camera module 26a and the rear camera module 26b, as shown in fig. 2, the gyroscope 100 is installed on the rear camera module 26b in the embodiment of the present application, so as to realize the camera shake prevention function.

It is to be understood that the illustrated structure of the embodiment of the present application does not specifically limit the mobile phone 200. In other embodiments of the present application, handset 200 may include more or fewer components than shown, or some components may be combined, some components may be split, or a different arrangement of components. The illustrated components may be implemented in hardware, software, or a combination of software and hardware.

Based on the above description, the embodiments of the present application provide a gyroscope 100, and the following describes a specific structure of the gyroscope 100 by taking different embodiments as examples.

The gyroscope is an angular motion detection device that detects angular motion of a housing about one or two axes orthogonal to a rotation axis with respect to an inertia space using a moment of momentum of a high-speed rotation body, or an angular motion detection device that is made by using other principles and can perform the same function may be called a gyroscope. The MEMS gyroscope is a novel inertial sensor, adopts a micro-machining technology to realize structural processing, and can be completely integrated with a measurement and control circuit on a silicon chip, so that the MEMS gyroscope has the advantages of small volume, low cost, light weight, high reliability and the like, and has important application value in the dual-purpose field of military and civilian use.

The gyroscope is usually produced by adopting a micro machining technology, the micro machining technology can process a micron-scale structure, but the processing error is in a submicron scale, namely the processing error is very large, so that a very large quadrature coupling error can be generated, even the problem of circuit saturation can be caused, and the performance of the gyroscope is inhibited, therefore, the processing precision is improved, the error is reduced, and the performance of the MEMS gyroscope can be effectively improved. However, a large force arm and a large moment error are generated between driving comb teeth in driving structures of an upper part and a lower part of the current gyroscope, so that the MEMS gyroscope is easy to generate a large detection error and poor in temperature environment adaptability.

Based on this, this application embodiment provides a gyroscope, through arranging drive structure in the middle of the gyroscope structure, has reduced arm of force and moment error between the drive broach in this gyroscope's drive structure, has reduced the output error of gyroscope, has improved the sensitivity of gyroscope, has still improved the vibration performance and the adaptability of gyroscope simultaneously.

Scene one

Referring to fig. 3, an embodiment of the present application provides a gyroscope 100, which may include: a substrate 2 and a gyroscope structure 1 located on the substrate 2, wherein, as shown in fig. 4, the gyroscope structure 1 may include: the first outer frame 10 and the driving structure and the detecting structure connected to the first outer frame 10, respectively, wherein the driving structure is located in the first outer frame 10, the driving structure includes two portions symmetrical with respect to a central axis L1 of the first outer frame 10, the detecting structure includes two portions located at two sides of the first outer frame 10, and the driving structure and the detecting structure are both connected to the substrate 2.

Each of the two symmetrical portions of the driving structure with respect to the central axis L1 of the first outer frame 10 may include at least one sub-driving structure 20, and the arrangement of the driving structure in the first outer frame 10 may be that two sub-driving structures 20 are located in the outer frame 10 and are symmetrically arranged with respect to the central axis L1 of the outer frame 10 as shown in fig. 4, or may also be that four sub-driving structures 20 are located in the outer frame 10 and are symmetrically arranged two by two with respect to the central axis L1 of the outer frame 10 as shown in fig. 5, or may also be that more sub-driving structures 20 are located in the outer frame 10, which is not limited by the embodiment of the present application.

Also, in the embodiment of the present application, each of the two portions of the detection structure located at the two sides of the first outer frame 10 may include at least one sub-detection structure 30, and the arrangement of the detection structure in the gyroscope structure 1 includes, but is not limited to, the following two possible implementations:

one possible implementation is: as shown in fig. 6, each of the sub-sensing structures 30 is located on both sides of the first outer frame 10 along a first direction L2, which is perpendicular to the extending direction of the central axis L1 in the first direction L2.

Another possible implementation is: as shown in fig. 4, each of the sub-sensing structures 30 is located on both sides of the first outer frame 10 along the second direction L3, and the second direction L3 is parallel to the extending direction of the central axis L1.

It should be noted that, in the embodiments of the present application, several arrangements are described as examples, and in other embodiments, the arrangement of the driving structure and the detecting structure may be different from the structures shown in fig. 4 to 6, so the arrangement of the driving structure and the detecting structure in the embodiments of the present application is not limited, and is not limited to the above examples.

In the embodiment of the present application, the gyroscope structure 1 adopts a structural form of internal driving and external detection, and the driving structure is arranged in the middle of the whole gyroscope structure 1, so that the moment error generated by the driving structure is reduced, the output error of the gyroscope 100 is reduced, the sensitivity of the gyroscope 100 is improved, and meanwhile, the vibration performance and the adaptability of the gyroscope 100 are also improved.

Moreover, since the sub detection structures 30 located at both sides of each sub driving structure 20 are simultaneously disposed on the first outer frame 10, so that a plurality of sub detection structures 30 are connected together, it is possible to ensure the synchronism of the movement of the plurality of sub detection structures 30. As shown in fig. 4, the gyro structure 1 includes two sub-driving structures 20, and the dual-driving structure can increase the output signal and improve the sensitivity of the gyro structure 1.

Further, because the gyro structure 1 adopts the frame structure like the first outer frame 10, the rotational stiffness of the gyro structure 1 is increased, and the influence of the same-phase acting force, such as vibration, impact and the like, is effectively inhibited.

In some embodiments, as shown in fig. 7, each sub-detection structure 30 may include: the detection electrode 301 and the second outer frame 302, the second outer frame 302 is fixedly connected with the first outer frame 10, wherein, one end of the detection electrode 301 is electrically connected with the substrate 2, and the other end of the detection electrode 301 is suspended.

Specifically, with reference to fig. 7, the detection electrode 301 has a plurality of fixed detection comb teeth 3011, the inner edge of the second outer frame 302 has a plurality of movable detection comb teeth 3021, and one end of the plurality of fixed detection comb teeth 3011 facing away from the detection electrode 301 and one end of the plurality of movable detection comb teeth 3021 facing away from the inner edge of the second outer frame 302 are suspended, so that the plurality of fixed detection comb teeth 3011 and the plurality of movable detection comb teeth 3021 are interleaved to form a detection capacitor, and thus, a differential capacitance detection can be formed, thereby implementing an output decoupling of the detection mechanism and suppressing an interference signal.

Moreover, the detection capacitor is composed of a plurality of fixed detection comb teeth 3011 and a plurality of movable detection comb teeth 3021 which are staggered, the detection comb teeth of the gyroscope structure 1 adopt a detection mode of variable area, and the capacitance variation and the angular rate have good linearity, so that the vibration amplitude can be increased, and the detection sensitivity of the gyroscope 100 is improved. Thus, the gyroscope 100 can measure large angular rates while having high sensitivity and high linearity.

In one possible implementation, the plurality of fixed detection comb teeth 3011 and the plurality of movable detection comb teeth 3021 are arranged at intervals, for example, as shown in fig. 7, the plurality of fixed detection comb teeth 3011 and the plurality of movable detection comb teeth 3021 may be arranged at intervals along the first direction L2, respectively.

Further, as shown in fig. 8, the detection electrode 301 may include: the detection device comprises a main detection electrode 3012 and a plurality of branch detection electrodes 3013, wherein the branch detection electrodes 3013 are respectively located on two sides of the main detection electrode 3012, one end of the main detection electrode 3012 is connected with the substrate 2, and the other end of the main detection electrode 3012 is suspended in the air.

One end of each of the branch detection electrodes 3013 is electrically connected to the main detection electrode 3012, and the other end of each of the branch detection electrodes 3013 may extend in a direction perpendicular to the central axis L1 and be close to the inner edge of the second outer frame 302. Also, a plurality of fixed detection comb-teeth 3011 are located on the branch detection electrode 3013.

In the present embodiment, with continued reference to fig. 8, the second outer frame 302 has a plurality of extension portions 3022, and the extension portions 3022 extend in a direction parallel to the branch detection electrodes 3013. Specifically, one end of the extension portion 3022 is connected to the second outer frame 302, the other end of the extension portion 3022 is close to the main detection electrode 3012, and the plurality of movement detection comb teeth 3021 are located on the extension portion 3022.

In the embodiment of the present application, as shown in fig. 4, the driving structures are located inside the first outer frame 10 and are symmetrically disposed with respect to the central axis L1 of the first outer frame 10, and the outer edge of the driving structures parallel to the central axis L1 is connected to the inner edge portion of the first outer frame 10.

As an alternative embodiment, part of the outer edge of the driving structure may be connected to the inner edge of the first outer frame 10 by the driving beams 40. In this way, the driving structure may generate reverse resonance under the action of electrostatic driving force, and meanwhile, the detection structure connected to the first outer frame 10 is kept from moving, that is, the influence of the movement of the driving structure on the movement of the detection structure is reduced, so that decoupling of the driving movement and the detection movement is realized, and the output error of the gyroscope 100 is further reduced.

Furthermore, in fig. 4, the driving structure is located in the middle of the gyroscope structure 1, the driving structure is connected to the first outer frame 10 through the driving beam 40, and all the movement detection comb teeth 3021 are arranged on the same first outer frame 10, so that the movement of the driving structure and the movement of the detection structure of the gyroscope structure 1 constitute tuning fork movement, respectively, and the synchronism of the movement of the gyroscope structure 1 is ensured.

As an alternative embodiment, the material of the drive beam 40 may be silicon.

Referring to fig. 9, each sub driving structure 20 may include: the device comprises an inner frame 201 and at least two groups of driving electrodes 202 positioned in the inner frame 201, wherein one ends of the driving electrodes 202 are connected with a substrate 2, and the other ends of the driving electrodes 202 are suspended.

With continued reference to fig. 9, the driving electrode 202 has a plurality of fixed driving comb teeth 2021 thereon, the inner edge of the inner frame 201 has a plurality of movable driving comb teeth 2011, and an end of the plurality of fixed driving comb teeth 2021 facing away from the driving electrode 202 and an end of the plurality of movable driving comb teeth 2011 facing away from the inner edge of the inner frame 202 are suspended, so that the plurality of fixed driving comb teeth 2021 and the plurality of movable driving comb teeth 2011 are interlaced with each other to form a driving capacitor.

Specifically, a plurality of movable drive comb teeth 2011 are spaced apart at the inner edge of the inner frame 201, and a plurality of fixed drive comb teeth 2021 are spaced apart on the drive electrode 202. For example, as shown in fig. 9, a plurality of movable driving comb teeth 2011 may be spaced along the second direction L3 at the inner edge of the inner frame 201, and a plurality of fixed driving comb teeth 2021 may be spaced along the second direction L3 on the driving electrode 202.

In one possible implementation, the movable driving comb 2011 disposed at the inner edge of one inner frame 201 is mirror-symmetrically disposed with respect to the movable driving comb 2011 disposed at the inner edge of the other inner frame 201. In this way, by applying the same driving voltage to the driving electrodes 202 of two different inner frames 201, the two inner frames 201 can be moved toward each other, thereby simplifying the circuit to some extent.

As shown in fig. 9, each sub driving structure 20 may further include: at least two sets of drive detection electrodes 203 are positioned within the inner frame 201, wherein one set of drive detection electrodes 203 is positioned between one set of drive electrodes 202 and the other set of drive detection electrodes 203.

In the embodiment of the present application, referring to fig. 10, the inner edge of the inner frame 201 may further have a plurality of first driving detection comb teeth 2012, the driving detection electrode 203 may further have a plurality of second driving detection comb teeth 2031, the plurality of first driving detection comb teeth 2012 are arranged at intervals along a direction parallel to the central axis L1 at the inner edge of the inner frame 201, and the plurality of second driving detection comb teeth 2031 are arranged at intervals at a side of the driving detection electrode 203 facing the first driving detection comb teeth 2012.

Also, the plurality of first drive detection comb 2012 and the plurality of second drive detection comb 2031 are arranged alternately, so that a drive detection capacitance can be formed between the first drive detection comb 2012 and the second drive detection comb 2031.

By arranging at least two groups of drive detection electrodes 203 and forming at least two groups of drive detection capacitors, one drive detection capacitor forms a drive detection anode, and the other drive detection capacitor forms a drive detection cathode, so that the capacitance change of the drive detection anode and the drive detection cathode can realize the differential detection of the drive mode of the gyroscope 100, and the capacitance change quantity can be fed back to the drive electrodes 202 through a peripheral circuit to correspondingly adjust the drive displacement, thereby realizing the constant-frequency constant-amplitude closed-loop control of the drive mode, therefore, the differential detection mode can eliminate the drive common-mode interference and improve the signal-to-noise ratio and the anti-vibration impact resistance.

In actual use, the phases of the ac voltages input to the adjacent two driving electrodes 202 located in each inner frame 201 are opposite. For example, a double-sided drive may be formed by applying a dc-biased ac voltage to one of the drive electrodes 202 located within the same inner frame 201 and applying a dc-biased anti-ac voltage to the other drive electrode 202 located within the same inner frame 201. Then, the inverted dc voltages are applied to two adjacent driving detection electrodes 203 in the same inner frame 201, respectively, to form differential capacitance detection.

It should be noted that, applying an ac voltage with dc bias to one of the driving electrodes 202 on the same inner frame 201, and applying an opposite ac voltage with dc bias to the other driving electrode 202 will generate an alternating electrostatic force, and the electrostatic driving force is:

wherein n is the number of teeth of the movable comb for driving the resonator, ε is the dielectric constant, h is the thickness of the structure, d is the comb tooth spacing, U_dDC bias voltage for the drive voltage, U_aIs an alternating voltage, omega_dIs the angular frequency of the ac voltage.

Similarly, applying a dc-biased ac voltage to one of the driving electrodes 202 on the other inner frame 201 and applying a dc-biased opposite ac voltage to the other driving electrode 202 will also generate an alternating electrostatic force.

However, since the movable drive combs 2011 located at different inner frames 201 are arranged in mirror symmetry, the electrostatic drive forces acting on different inner frames 201 are opposite in direction.

Thus, the two inner frames 201 vibrate in opposite directions in a harmonic manner in the driving direction by the electrostatic driving force. When the frequency of the driving ac voltage coincides with the natural frequency of the driving mode of the gyroscope 100, the line vibration displacement is:

in the formula, F_d0Amplitude of electrostatic driving force, k_xElastic stiffness in the X direction, Q_xIs the quality factor of the driving mode.

The linear vibration speed was:

then, when the gyroscope 100 has an external input angular rate ω_zAccording to the right-hand rule, the detection structure is subjected to coriolis acceleration in the second direction L3, whose magnitude is:

in the formula (I), the compound is shown in the specification,is the right-hand included angle between the input angular rate and the linear vibration speed.

Let the detection mass be m_sThe coriolis force acting on the sensing structure is then:

the coriolis force acting on the two sub-driving structures 20 is opposite in direction, forming a coriolis moment, and the first outer frame 10 and the inner frame 201 vibrate in opposite directions in harmonic mode under the action of the coriolis moment. Thus, the gap between the movable detection comb 3021 and the fixed detection comb 3011 changes according to a certain simple harmonic vibration law, and the capacitance difference signal is processed by the peripheral circuit to obtain an output voltage signal.

In the embodiment of the present application, the output voltage signal is the sum of the output voltage signals of the four-subset detecting structure 30, and the magnitude of the output voltage signal is proportional to the magnitude of the input angular rate, so that the magnitude of the angular rate can be obtained. Then, the phase relationship between the output voltage signal and the input voltage signal is compared through the phase discriminator, so that the direction of the input angular rate can be judged.

It is understood that a phase detector refers to a radio frequency device capable of phase discrimination, also called a phase comparator, which is a device capable of phase discrimination of an input signal, and is a circuit that makes a phase difference between an output voltage and an input signal have a definite relationship.

Furthermore, in the embodiment of the present application, the gyroscope 100 may further include: the spacer 501, the outer edge of the first outer frame 10 may be opened with the mounting opening 50, and the spacer 501 is mounted at the mounting opening 50, for example, as shown in fig. 4, two outer edges of the first outer frame 10 perpendicular to the central axis L1 may be opened with the mounting opening 50, and the spacer 501 is mounted at the mounting opening 50. Alternatively, in some other embodiments, the first outer frame 10 may have mounting openings 50 formed in two outer edges thereof parallel to the central axis L1, and the isolation structure 501 may be mounted at the mounting openings 50. Alternatively, the first outer frame 10 may have mounting openings 50 formed at four outer edges thereof, and each of the mounting openings 50 is provided with the isolation structure 501.

It should be noted that one end of the isolation structure 501 may be connected to the first outer frame 10 through the folding beam 60, and the other end of one end of the isolation structure 501 is connected to the substrate 2, so that the structural stability of the gyroscope 100 can be increased, the anti-vibration performance of the gyroscope structure 1 can be improved, and meanwhile, the influence of the production process and the packaging can be reduced, and the temperature error can be reduced.

As an alternative embodiment, the material of the folded beam 60 may be silicon.

In addition, the gyroscope 100 may further include: a plurality of anchors 502, as shown in fig. 4, one end of the anchor 502 is connected to the isolation structure 501 and the other end of the anchor 502 is connected to the substrate 2.

It should be noted that the anchor point 502 may be connected to the isolation structure 501 through the connection beam 503, so that the structural stability of the gyroscope 100 can be further increased, and the anti-vibration performance of the gyroscope structure 1 can be improved. Moreover, the inner frame 201 is connected with the first outer frame 10 through the driving beam 40, the first outer frame 10 is connected with the isolation structure 501 through the folding beam 60, and the isolation structure 501 is connected with the anchor point 502 and fixed on the substrate 2, so that the connection mode greatly reduces the influence of processing stress and packaging stress, and simultaneously reduces temperature error.

As an alternative embodiment, the material of the connection beam 503 may also be silicon.

It should be noted that, the gyroscope structure 1 in the embodiment of the present application may be prepared by using an SOG (Silicon On Glass) process or an SOI (Silicon On Insulator) process, and the preparation process of the gyroscope structure 1 in the embodiment of the present application is not limited, and is not limited to the above example.

Scene two

On the basis of the first scenario, the embodiment of the present application further provides another gyroscope 100, and unlike the first scenario, as shown in fig. 11, each sub-detection structure 30 in the gyroscope structure 1 of the gyroscope 100 may further include: a feedback mechanism 303.

As shown in fig. 12, the feedback mechanism 303 may include a feedback electrode 304, wherein one end of the feedback electrode 304 is electrically connected to the substrate 2, and the other end of the feedback electrode 304 is floating.

With continued reference to fig. 12, the feedback electrode 304 further has a plurality of fixed feedback comb teeth 3041 thereon, and the inner edge of the second outer frame 302 further has a plurality of movable feedback comb teeth 3023 thereon, wherein an end of the plurality of fixed feedback comb teeth 3041 facing away from the feedback electrode 304 and an end of the plurality of movable feedback comb teeth 3023 facing away from the inner edge of the second outer frame 302 are suspended such that the plurality of fixed feedback comb teeth 3041 and the plurality of movable feedback comb teeth 3023 are interleaved with each other to form a feedback capacitor.

Moreover, the arrangement direction of the plurality of movable feedback comb teeth 3023 and the plurality of fixed feedback comb teeth 3041 is the same as the arrangement direction of the plurality of movable detection comb teeth 3021 or the plurality of fixed detection comb teeth 3011.

In one possible implementation, as shown in fig. 13, the feedback electrode 304 may include: a main feedback electrode 3042 and a plurality of branch feedback electrodes 3043, wherein the branch feedback electrodes 3043 are respectively located at two sides of the main feedback electrode 3042, one end of the main feedback electrode 3042 is connected to the substrate 2, and the other end of the main feedback electrode 3042 is suspended.

It is easily understood that one end of the plurality of branch feedback electrodes 3043 is electrically connected to the suspended end of the main feedback electrode 3042, and the other end of the plurality of branch feedback electrodes 3043 extends in a direction perpendicular to the central axis L1 and is close to the inner edge of the outer frame 10. Also, one end of the plurality of fixed feedback comb teeth 3041 in each set of feedback capacitors is electrically connected to a branch feedback electrode 3043.

In the present embodiment, the first outer frame 10 has a plurality of extension portions 3022 extending inward of the feedback mechanism 303, and as shown in fig. 13, the extension portions 3022 extend in a direction parallel to the sub-feedback electrodes 3043; one end of the extension portion 3022 is connected to the first outer frame 10, and the other end of the extension portion 3022 is close to the main feedback electrode 3042. Also, one end of the plurality of movable feedback fingers 3023 in the partial feedback capacitance is connected to the extension 3022.

In actual use, closed-loop control of the detection structure can be realized by arranging a closed-loop detection circuit. Wherein, a plurality of fixed detection broach 3011 and a plurality of activity detection broach 3021 crisscross each other and form detection capacitance, and the closed loop detects that broach capacitance constitutes the difference between two liang and detects, and these two sets of signals go on again at last to further realize detection mechanism 30's signal output.

The polarities of feedback signals accessed by feedback capacitors in two sub-detection structures 30 positioned at two sides of the first outer frame 10 are opposite, and the polarities of feedback signals accessed by feedback capacitors in two adjacent sub-detection structures 30 positioned at the same side of the first outer frame 10 are opposite, so that the polarities of the feedback signals accessed by two adjacent feedback capacitors in any direction are opposite, and by loading a feedback voltage signal on the feedback electrode 304, an electrostatic force can be generated on the first outer frame 10 to counteract brother inertia force, so that the detection structure can work in a closed loop force balance state, the first outer frame 10 is not easy to displace in a working process, and the movement of the driving structure cannot be coupled to the detection structure, thereby further realizing decoupling of the driving structure and the detection structure.

In this application embodiment, can make the detection structure of gyroscope 100 keep in balanced position through setting up feedback mechanism 303, realized the stable control to detecting the mode to can accomplish the closed loop detection to gyroscope 100, like this, can avoid gyroscope 100's detection structure to produce great displacement and bring the structure and twist reverse the interference, still be favorable to optimizing the nonlinearity degree of device simultaneously, and then improve gyroscope 100's measurement accuracy.

In scenario two of the embodiments of the present application, other technical features are the same as those of scenario one, and the same or corresponding technical effects can be obtained, which are not described herein again.

In the description of the embodiments of the present application, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, a fixed connection, an indirect connection via an intermediary, a connection between two elements, or an interaction between two elements. The specific meanings of the above terms in the embodiments of the present application can be understood by those of ordinary skill in the art according to specific situations.

The terms "first," "second," "third," "fourth," and the like in the description and in the claims of the embodiments of the application and in the drawings described above, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order.

Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the embodiments of the present application, and are not limited thereto; although the embodiments of the present application have been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present application.