阅读说明：本技术 一种用于三维检测的光学引擎和三维检测设备 (Optical engine for three-dimensional detection and three-dimensional detection equipment ) 是由 吴俊� 李文静 董永红 于 2018-11-16 设计创作，主要内容包括：一种用于三维检测的光学引擎和三维检测设备,光学引擎包括有沿光路顺次设置的光源(1)、照明光学系统(6)、DMD光调制器(7),投影成像系统(8)和投影面(9)。光源发出的光经过准直、转折或汇聚等多个步骤,均匀地照射在DMD光调制器上,投影成像系统把经过DMD光调制器调制的光束投射在投影面上。光学引擎具有体积小、可以实现倾斜扫描等特点。(An optical engine and a three-dimensional detection device for three-dimensional detection are provided, the optical engine comprises a light source (1), an illumination optical system (6), a DMD optical modulator (7), a projection imaging system (8) and a projection surface (9) which are sequentially arranged along an optical path. The light emitted by the light source is uniformly irradiated on the DMD light modulator through a plurality of steps of collimation, turning or convergence and the like, and the projection imaging system projects the light beam modulated by the DMD light modulator on a projection surface. The optical engine has the characteristics of small volume, capability of realizing oblique scanning and the like.)

An optical engine for three-dimensional inspection, comprising:

a light source (1) for emitting a light beam;

A Digital Micromirror Device (DMD) light modulator (7) for digital pulse width modulation of the light beam incident thereon;

an illumination optical system (6) that uniformly irradiates the DMD light modulator (7) with a light beam;

a projection imaging system (8) for receiving the outgoing light beam from the DMD light modulator (7) and projecting the outgoing light beam on a projection surface (9);

the DMD optical modulator (7) and a light emergent surface of the illumination optical system form a tiny angle (alpha), so that an optical path structure formed by the equivalent DMD optical modulator (7 '), a lens positioning surface (10) of the projection imaging system and a projection surface (9) meets the Schlemm's law.

An optical engine for three-dimensional inspection according to claim 1, wherein: the light source (1) is a blue LED.

An optical engine for three-dimensional inspection according to claim 1, wherein: the optical engine further comprises a collimating lens group (2) for converting the diverging light beam emitted by said light source (1) into a parallel light beam.

An optical engine for three-dimensional inspection according to claim 1, wherein: the optical engine further comprises a turning device (3, 4, 5) for turning said light beam.

An optical engine for three-dimensional inspection according to claim 4, wherein: the turning device comprises a micro-lens array (3), a reflector (4) and a relay lens (5); wherein the microlens array converges the light beam to the reflective mirror and the relay lens converges the light beam from the reflective mirror.

An optical engine for three-dimensional inspection according to claim 1, wherein: the illumination optical system comprises a reflective total internal reflection RTIR prism (6) for allowing the light beam to pass and impinge on the DMD light modulator and separating the outgoing and incoming light beams from the DMD light modulator.

A three-dimensional inspection apparatus comprising at least one optical engine according to any one of claims 1 to 6.