阅读说明：本技术 一种具有良好气密性和高可靠安装精度的离子源 (Ion source with good air tightness and high reliable installation accuracy ) 是由 石金水 陈宇航 张晨 王丹 邓建军 马瑞利 于 2021-07-09 设计创作，主要内容包括：本发明公开了一种具有良好气密性和高可靠安装精度的离子源,包括阳极筒本体,所述阳极筒本体安装在离子源支座的左端；所述阳极筒本体的内部安装有准直器本体；阴极杆,所述阴极杆安装在离子源支座上,且阴极杆的内侧设置有标准陶瓷垫片,并且标准陶瓷垫片的内侧设置有接线柱。该具有良好气密性和高可靠安装精度的离子源,离子源结构优化在阴极杆和阳极筒的安装精度以及安装的工作效率有所提升,大幅度减少了离子源安装的工作量,提高离子源安装的工作效率,且在离子源整体的气密性方面也有着大幅度的提升,减少了氢气的损失量；且该离子源支座结构环境接受度高,制作成本合适,经济性好。(The invention discloses an ion source with good air tightness and high reliable installation precision, which comprises an anode cylinder body, wherein the anode cylinder body is arranged at the left end of an ion source support; a collimator body is arranged in the anode cylinder body; the cathode rod is installed on the ion source support, a standard ceramic gasket is arranged on the inner side of the cathode rod, and a binding post is arranged on the inner side of the standard ceramic gasket. According to the ion source with good air tightness and high reliable installation precision, the installation precision and the installation working efficiency of the cathode rod and the anode cylinder are improved by optimizing the structure of the ion source, the workload of installing the ion source is greatly reduced, the working efficiency of installing the ion source is improved, the integral air tightness of the ion source is also greatly improved, and the loss of hydrogen is reduced; the ion source support has the advantages of high environmental acceptance, proper manufacturing cost and good economical efficiency.)

1. An ion source having good gas tightness and high reliable mounting accuracy, comprising:

the anode cylinder body (1), the anode cylinder body (1) is arranged at the left end of the ion source support;

a collimator body (2) is arranged in the anode cylinder body (1);

the cathode rod (3), the cathode rod (3) is installed on the ion source support, a standard ceramic gasket (5) is arranged on the inner side of the cathode rod (3), and a binding post (6) is arranged on the inner side of the standard ceramic gasket (5).

2. An ion source with good gas tightness and high reliable installation accuracy according to claim 1, characterized in that: the anode cylinder is characterized in that an integrated eccentric hole is further formed in the anode cylinder body (1), the integrated eccentric hole is located in the inner wall of the anode cylinder body, and the collimator outer wall is provided with a protrusion matched with the integrated eccentric hole.

3. An ion source with good gas tightness and high reliable installation accuracy according to claim 1, characterized in that: the bottom surface of the anode cylinder body (1) is provided with a positioning flat (8).

4. An ion source with good gas tightness and high reliable installation accuracy according to claim 1, characterized in that: the outer side wall of the anode cylinder body (1) is provided with at least one pair of spigots (7).

5. An ion source with good gas tightness and high reliable installation accuracy according to claim 1, characterized in that: the cathode rod (3) is connected with a standard ceramic gasket (5) through a pair of locking screws (4), and the standard ceramic gasket (5) for positioning is arranged on the cathode rod (3) in a central symmetry manner.

6. An ion source with good gas tightness and high reliable installation accuracy according to claim 1, characterized in that: the ion source housing has a rough sealing region (9) formed by coating a tough insulating material on the housing.

7. An ion source with good gas tightness and high reliable installation accuracy according to claim 1, characterized in that: the binding post (6) is positioned at the tail end of the rough sealing area (9), and the length of the rough sealing area (9) is prolonged to enable the position of the binding post (6) to reach the joint of an air-water pipeline (11) of the ion source support.

8. An ion source with good gas tightness and high reliable installation accuracy according to claim 1, characterized in that: the joint of a gas-water pipeline (11) of the ion source support is a low-temperature brazing connector (10).

Technical Field

The invention relates to the technical field of ion sources, in particular to an ion source with good air tightness and high reliable installation precision.

Background

The ion source is used to generate a beam at a cyclotron, known as the cyclotron heart. The performance indexes of the ion source comprise beam intensity, beam stability, optimal working gas flow and other parameters. The ion source has the main performance index of beam intensity, and the beam intensity is influenced by the airtightness and the installation positions of the cathode rod and the anode cylinder. The research on the airtightness of the ion source and the installation positions of the cathode rod and the anode cylinder is indispensable.

The common ion source is installed in an insertion mode, the rigid ion source is installed on the displacement platform, and the adjustment mechanism of the displacement platform is used for accurately positioning the ion source to realize multi-dimensional movement control.

The existing collimator is an independent collimator, a collimating hole is formed in the collimator, an annular sputtering platform is arranged around the collimating hole, the height of the annular sputtering platform is lower than that of the upper surface of a collimator base body, an annular positioning step higher than that of the upper surface of the collimator base body is further arranged around the annular sputtering platform, the sputtering platform is overlapped with a base line of the collimating hole, and the sputtering platform is positioned and installed by depending on the positioning step and a support.

The ion source discharge mainly passes through a sinking platform hole structure of an anode cylinder, and is combined with a gap structure matched with a collimator and a cathode, electrons in a discharge space are constrained in the radial direction to generate rotary motion by utilizing an axial magnetic field, and the electrons are constrained in the axial direction by an electric field between the cathode and the anode and reflected back and forth between the cathode and a counter cathode. After the electrons are emitted from the surface of the cathode and enter a discharge area, the electrons are oscillated back and forth in a space formed by the cathode and the anode in a good electromagnetic field environment, hydrogen in the space is efficiently ionized, and negative hydrogen ions formed by ionization are led out from the anode cylinder to enter the acceleration cavity for acceleration under the action of an external electric field at the leading-out slit.

The plug-in ion source solves the internal space limitation, realizes complex and accurate multidimensional motion control, and is also separated from the limitation of vacuum conditions in maintenance, but has higher requirement on the installation precision of the ion source. The stroke of the mobile platform is limited, and the beam intensity is influenced to a certain extent by the positioning precision of the ion source. The collimator and the anode cylinder in the ion source are positioned by the seam allowance and cannot be positioned in the radial direction, the rotation occurs, the number of contact surfaces is increased, the requirement on airtightness is higher, and the realization is difficult. Therefore, the position relationship among the cathode, the anode and the collimator is lack of necessary constraint.

For the conventional ion source structure, as shown in fig. 2, the structure for mounting the cathode rod 3 is often mounted by using a non-standard ceramic gasket 51, which results in low positioning accuracy of the cathode rod 3; the excircle of the ion source support lacks a limiting function, if an included angle exists between the anode cylinder and the support when the anode cylinder is installed, the position of the anode cylinder needs to be corrected by the adjusting platform, so that the workload of installing the ion source is greatly increased, and the working efficiency of installing the ion source and the positioning accuracy of the anode cylinder are influenced; the ion source structure has a seam allowance on the sealing property, a sealing surface cannot be subjected to flat grinding, the roughness is not high, the precision is not well controlled, and the gas tightness of the ion source is poor, so that the loss of hydrogen introduced into the anode cylinder can be increased.

Therefore, we propose an ion source having good gas tightness and high reliable mounting accuracy so as to solve the problems proposed in the above.

Disclosure of Invention

The present invention is directed to provide an ion source with good air tightness and high reliable installation accuracy, so as to solve the problems of insufficient installation accuracy of a cathode rod and an anode cylinder and poor air tightness of the whole ion source, which are proposed in the background art.

In order to achieve the purpose, the invention provides the following technical scheme: an ion source having good gas tightness and high reliable mounting accuracy, the ion source having good gas tightness and high reliable mounting accuracy, comprising:

the anode cylinder body is arranged at the left end of the ion source support;

a collimator body is arranged in the anode cylinder body;

the cathode rod is installed on the ion source support, a standard ceramic gasket is arranged on the inner side of the cathode rod, and a binding post is arranged on the inner side of the standard ceramic gasket.

Preferably: the anode cylinder body is also provided with an integrated eccentric hole which is positioned on the inner wall of the anode cylinder body, the outer wall of the collimator is provided with a bulge matched with the integrated eccentric hole,

preferably: the bottom surface of the anode cylinder body is provided with a positioning flat.

Preferably: the cathode rod is connected with the standard ceramic gasket through a pair of locking screws, and the standard ceramic gasket for positioning is arranged on the cathode rod in a central symmetry manner.

Preferably: the ion source shell is provided with a rough sealing area, and the rough sealing area is formed by coating a tough insulating material on the shell.

Preferably, the wiring terminal is positioned at the tail end of the rough sealing area, and the length of the rough sealing area is prolonged, so that the position of the wiring terminal reaches the joint of an air-water pipeline (11) of the ion source support.

Preferably: the joint of the gas-water pipeline of the ion source support is a low-temperature brazing connector.

Compared with the prior art, the invention has the beneficial effects that: according to the ion source with good air tightness and high reliable installation precision, the installation precision and the installation working efficiency of the cathode rod and the anode cylinder are improved by optimizing the structure of the ion source, the workload of installing the ion source is greatly reduced, the working efficiency of installing the ion source is improved, the integral air tightness of the ion source is also greatly improved, and the loss of hydrogen is reduced; the ion source support has the advantages of high environmental acceptance, proper manufacturing cost and good economical efficiency.

Drawings

FIG. 1 is a schematic diagram of one embodiment of the present invention;

fig. 2 is a front view of a conventional ion source.

In the figure: 1. an anode cylinder body; 2. a collimator body; 3. a cathode rod; 4. locking the screw; 5. a standard ceramic gasket; 6. a binding post; 51. a non-standard ceramic gasket; 7. stopping the opening; 8. positioning flat; 9. a rough sealing area; 10. a low temperature brazing connector; 11. a gas-water pipeline; 12. a support frame flange.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative efforts based on the embodiments of the present invention belong to the protection scope of the present invention.

The ion source with good air tightness and high reliable installation precision comprises:

the anode cylinder body 1 is arranged at the left end of the ion source support, and the anode cylinder body 1 is arranged at the left end of the ion source support;

a collimator body 2 is arranged in the anode cylinder body 1;

the cathode rod 3 is installed on the ion source support, a standard ceramic gasket 5 is arranged on the inner side of the cathode rod 3, and a binding post 6 is arranged on the inner side of the standard ceramic gasket 5.

In one specific embodiment, the anode cylinder body 1 is further provided with an integrated eccentric hole, the integrated eccentric hole is located in the inner wall of the anode cylinder body, and the outer wall of the collimator is provided with a protrusion matched with the integrated eccentric hole.

The ion source with good air tightness and high-reliability installation accuracy shown in figure 1 comprises an anode cylinder body 1, a collimator body 2, a cathode rod 3, a locking screw 4, a standard ceramic gasket 5 and a binding post 6, when the ion source is used, the positioning of the anode cylinder body 1 depends on flat positioning formed by milling one end, the flat positioning is a plane, and a bevel is formed at the joint of arc lines of other areas of the anode cylinder, so that the anode cylinder body 1 is prevented from slipping, the anode cylinder can be positioned by depending on a pair of spigots 7 in the height direction shown in figure 1, a positioning structure of the anode cylinder body 1 is formed, and the anode cylinder body 1 is accurately installed inside the ion source.

And collimator body 2 then direct mount has solved collimator body 2 and has beaten the influence of changeing inside positive pole section of thick bamboo body 1, utilizes the integral type eccentric orfice, and collimator body 2 is beaten the commentaries on classics to the fixed collimator of the protruding cooperation of integral type eccentric orfice and collimator outer wall, avoids collimator body 2 to beat. And because the eccentric hole and the bottom surface of the integrated eccentric hole and collimator body form a seal after the eccentric hole is matched with the bulge, the collimator body 2 only needs to be sealed on the upper surface and the lower surface shown in figure 1, thereby reducing the number of sealing surfaces and improving the air tightness.

The location of cathode bar 3 is through relying on standard ceramic gasket appearance, uses locking screw 4 to fasten cathode bar 3, forms cathode bar 3's location structure to realize that cathode bar 3 carries out accurate installation and fastening inside the ion source.

The ion source housing has a rough sealing region 9 formed by coating a tough insulating material on the housing. The air tightness of the ion source depends on the high roughness of the rough sealing area, and a sealing structure is formed by fastening and extruding a sealing material with toughness and rough surface, such as rubber or a high-molecular polyester material and the like by using bolts, so that a better sealing effect is achieved. Compared with the ion source processed by the traditional process, the flatness of the sealing surface is 0.01 mm. When hydrogen is introduced into the anode tube, the gas leakage rate of the ion source can be reduced to be within 1 percent.

Preferably, the wiring terminal is positioned at the tail end of the rough sealing area, and the length of the rough sealing area is prolonged, so that the position of the wiring terminal reaches the joint of an air-water pipeline of the ion source support. Can make the terminal simultaneously fixed ceramic pad and the junction of trachea way this moment, simplify connection structure to increase coarse seal district length, promoted sealed effect.

The joint of the whole gas-water pipeline of the ion source adopts the low-temperature brazing connector 10, compared with the conventional mode, the method has small deformation amount and high tightness in the welding process, and the welding environment is in a vacuum state and has a protection effect on all parts; the installation is basically the same as the common mode, firstly, an internal cathode and an external binding post 6 are installed, then, an upper support, a lower support and an anode cylinder body 1 are installed, and finally, the installation is connected with a support frame flange 12; the anode cylinder body 1 is replaced only by removing the upper support and the lower support, connecting the upper support and the lower support with the bracket and taking out the anode cylinder body 1, and convenient and quick replacement is achieved by means of positioning.

Compared with the prior art, the invention has the beneficial effects that: according to the ion source with good air tightness and high reliable installation precision, the installation precision and the installation working efficiency of the cathode rod and the anode cylinder are improved by optimizing the structure of the ion source, the workload of installing the ion source is greatly reduced, the working efficiency of installing the ion source is improved, the integral air tightness of the ion source is also greatly improved, and the loss of hydrogen is reduced; the ion source support has the advantages of high environmental acceptance, proper manufacturing cost and good economical efficiency.

The standard parts used in the invention can be purchased from the market, the special-shaped parts can be customized according to the description of the specification and the accompanying drawings, the specific connection mode of each part adopts conventional means such as bolts, rivets, welding and the like mature in the prior art, the machinery, parts and equipment adopt conventional models in the prior art, and the circuit connection adopts the conventional connection mode in the prior art, and the details are not described, and the content not described in detail in the specification belongs to the prior art known by persons skilled in the art.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.