阅读说明：本技术 用于角运动的音圈致动器 (Voice coil actuator for angular motion ) 是由 T·勃姆 E·克劳斯 S·M·F·鲍姆哈克尔 于 2020-11-13 设计创作，主要内容包括：一种定位系统,包括：第一板；第二板,该第二板耦接至第一板并且可绕轴线枢转；一对音圈致动器,该一对音圈致动器被配置成使第二板绕所述轴线旋转；以及处理器,该处理器被配置成将电流驱动到一对音圈致动器；其中,所述一对音圈致动器包括：第一磁体结构和第二磁体结构,该第一磁体结构和第二磁体结构以与所述轴线的距离相等且相对的方式安装在第一板上；以及第一线圈和第二线圈,该第一线圈和第二线圈安装在第二板上,并且定位成使得当第二板绕轴旋转时,各自的第一磁体结构和第二磁体结构移入和移出于第一线圈和第二线圈；其中,第一磁体结构和第二磁体结构中的每一个基本上为弧形,该弧形的中心位于轴线上且半径等于磁体结构到轴线的距离。(A positioning system, comprising: a first plate; a second plate coupled to the first plate and pivotable about an axis; a pair of voice coil actuators configured to rotate the second plate about the axis; and a processor configured to drive a current to the pair of voice coil actuators; wherein the pair of voice coil actuators includes: a first magnet structure and a second magnet structure mounted on the first plate at equal distances from and opposite to the axis; and first and second coils mounted on the second plate and positioned such that when the second plate is rotated about the axis, the respective first and second magnet structures move into and out of the first and second coils; wherein each of the first and second magnet structures is substantially arc-shaped with a center on the axis and a radius equal to the distance of the magnet structure from the axis.)

1. A positioning system, comprising:

a first plate;

a second plate coupled to the first plate by a pivot and pivotable about at least one axis relative to the first plate;

a pair of voice coil actuators, one for each steerable shaft, the pair of voice coil actuators configured to rotate the second plate relative to the first plate about the at least one axis; and

a processor configured to drive current to the pair of voice coil actuators;

wherein the pair of voice coil actuators includes: first and second magnet structures mounted on one plate at equal and opposite distances from the at least one axis, and first and second coils mounted on the other plate and positioned such that when the second plate is rotated relative to the first plate about the at least one axis, the respective first and second magnet structures move in and out of the first and second coils;

wherein each of the first and second magnet structures is substantially arc-shaped having a center on the at least one axis and a radius equal to a distance of the magnet structure to the at least one axis.

2. The positioning system of claim 1, wherein each of the first and second magnet structures comprises a plurality of magnets stacked together to form a structure substantially conforming to the arc or a structure having a similar curved design to reduce a gap between the magnet structure and the respective coil to increase achievable force.

3. The positioning system of claim 1, wherein the resultant force applied to the pivot by the pair of voice coil actuators is substantially zero.

4. The positioning system of claim 1, wherein each of the first coil and the second coil comprises a stack of at least two independently activated coil segments; the magnetic poles of the magnets of each of the first and second magnet structures are located between the two coil segments of their respective first and second coils when the platform is in a neutral position, and the magnetic poles of the magnets of each of the first and second magnet structures are located within the active coil segments of their respective first and second coils when the platform is rotated.

5. The positioning system of claim 4, wherein the processor is configured to activate the coil segment when a pole of the magnet is located within the coil segment.

6. The positioning system of claim 1, wherein the platform is pivotable about two axes, and the platform further comprises another pair of voice coil actuators, such that one pair of voice coil actuators is configured to rotate the second plate about one of the two axes and another pair of voice coil actuators is configured to rotate the second plate about the other of the two axes.

7. The positioning system of claim 1, wherein one of the first plate and the second plate comprises a mirror.

8. The positioning system of claim 1, further comprising a sensor configured to detect a position of a magnet structure or to detect a relative position between the first plate and the second plate.

9. The positioning system of claim 8, wherein the detected position of the magnet structure or the detected relative position between the first plate and the second plate is fed back to the processor.

10. The positioning system of claim 2, wherein the magnet is a disk magnet and the coil has an elliptical profile.

11. The positioning system of claim 6, wherein one of the first plate and the second plate comprises a mirror.

12. The positioning system of claim 6, further comprising a sensor configured to detect a position of a magnet structure of each of two pairs of voice coil actuators or to detect a relative position between the first plate and the second plate.

13. The positioning system of claim 12, wherein, of the two pairs of voice coil actuators, the detected position of the magnet structure of each of the two pairs of voice coil actuators or the detected relative position between the first plate and the second plate is fed back to the processor.

14. The positioning system of claim 6, wherein each of the first and second magnet structures comprises a plurality of magnets stacked together to form a structure substantially conforming to the arc or a structure having a similar curved design to reduce a gap between the magnet structure and the respective coil to increase achievable force.

15. The positioning system of claim 14, wherein the magnet is a disk magnet and the coil has an elliptical profile.

Technical Field

The present invention relates to actuators, and more particularly to a voice coil actuator for angular or spherical motion.

Background

Angular or spherical movement of the optical element within the axis of the beam is necessary in many scanning applications, tracking applications, and other applications where controllable steering of the beam is desired.

A Fast Steering Mirror (FSM) system is a precision beam steering mechanism that uses its reflective surface to adjust the beam between the light source and the receiver. Fig. 1 shows a prior FSM system, in which the mirrors are supported by a pivotable support or gimbal. The four voice coil actuators work in pairs to drive the mirror such that the mirror tilts in the x-direction and the y-direction. A voice coil actuator is a high performance and compact actuator that has been developed particularly for applications requiring simultaneous high precision and high speed positioning in a short to medium stroke range. It should be noted that FSM systems require spherical motion to be provided, but voice coil actuators use linear magnets and linear coils. It is well known that existing FSM systems have some significant limitations.

For the prior FSM system shown in fig. 2A, in the tilt position, the force on the left and the force on the right are unbalanced due to the non-linearity of the forces. As can be seen from fig. 2B and 2C, the force on the left side differs from the force on the right side due to the position of their respective magnets relative to their coils. The voice coil is more or less active if the magnetic poles are inside the coil. As shown in fig. 2A, only one voice coil (with the left magnet in the coil) generates force on the axis, and the second voice coil is inactive (with the pole of the right magnet outside the coil). The opposing forces on the axis are asymmetric. Thus, at the pivot bearing, the resultant force Δ F resulting therefrom is not zero. Such stresses can cause wear and tear on the bearings. Furthermore, when the system is tilted back and forth, the oscillating forces generated at the bearings may excite undesirable resonances.

For voice coil actuators, the coil efficiency depends on the position of the coil relative to the poles and the air gap between the magnet and the coil. Fig. 3 shows the relationship between coil efficiency for different coil diameters and the position of the coil relative to the magnet. The maximum force occurs when the poles of the magnet are located at the edge of the coil. As can be seen from fig. 2A, the coil is inefficient in the prior art system because the poles of the right magnet are far from the outside of the coil.

As shown in fig. 4, the maximum force becomes larger with the diameter of the coil, and the gap between the coil and the magnet is thereby reduced. It is noted that when the coil diameter becomes smaller than a certain value, a smaller coil will become unusable as the magnet will contact the coil by a non-linear motion.

As shown in fig. 5, the magnets in the coil do not move linearly, and the coil does not have only one winding, but has a height of several millimeters. Thus, for larger deflections, the gap between the magnet and the coil becomes smaller, and at a certain angular value of tilt, for smaller gaps, the magnet and the coil will collide.

Fig. 6 shows a graph of drive voltage versus tilt angle for the left and right coils in a prior art system. In the case of asymmetric forces, only the sum of the two voice coil actuators will produce a linear function. Fig. 7 shows the derivative of the drive voltage versus tilt angle for the left and right coils in a prior art system. It can be seen that the efficiency of the coil and the force of the coil are very different. A drawback with the existing system is that the same voltage applied to the opposite coil produces a highly asymmetric force.

Therefore, there is a strong need for a voice coil positioning system for angular or spherical motion that does not suffer from the above-mentioned disadvantages in existing devices or systems.

Disclosure of Invention

In one embodiment, the driving force for spherical motion is generated by a combination of a curved fixed coil and a movable magnet (voice coil). The maximum force that can be generated depends to a large extent on the gap between the magnet and the coil. The smaller the gap, the greater the magnetic flux density through the coil windings and the greater the lorentz force generated. For linear drive tracks, small gaps can be easily achieved, but for angular or spherical motion, small gaps are not easily achieved. Thus, in one embodiment, the entire system includes curved "magnets and coils" for more performance over the entire working area.

In addition, the actuator will only generate the maximum force in a small area. In one embodiment, to obtain better linearity, the coil is divided into two or more segments. The advantage of a segmented coil is that (except for a small transition region) only the upper or lower coil is exposed to the drive current. This allows the system to concentrate the available current towards the actual location of the magnet poles. The increase in efficiency is due to the less efficient part of the coil being turned off, which reduces power dissipation and heat input to the non-active coil.

In one embodiment, the coil is manufactured using self-adhesive wire that is wound on a removable core and "baked" at high temperatures. After "baking", the coil is fixed in shape and the core can be removed. Due to the absence of the coil body, a small gap is left between the coil and the internal magnet. In addition, the shape of the coil is not straight but angled in order to better follow the curved magnetic path.

In one embodiment, a composite magnet is constructed by bonding several smaller disc-shaped magnets into the shape of a banana (based on the spherical motion of a gimbal). The last magnet on the "working" side is slightly larger in diameter to reduce the gap to the coil. The upper smaller magnet is typically used to keep the opposite poles of the magnet outside the coil (otherwise the forces would be equal). For smaller magnets, the size of the gap to the coil has no effect, as the device only uses magnetic flux at the bottom end of the banana-shaped structure.

One embodiment typically uses available, simple and inexpensive disk magnets, which is an economical alternative to ideal shaped curved magnets that can be manufactured by erosion at higher cost.

An embodiment of the present invention provides a positioning system, including: a first plate; a second plate coupled to the first plate by a pivot and pivotable about at least one axis relative to the first plate; a pair of voice coil actuators configured to rotate the second plate relative to the first plate about the at least one axis; and a processor configured to drive a current to the pair of voice coil actuators; wherein the pair of voice coil actuators includes: a first magnet structure and a second magnet structure mounted on one of the first plate and the second plate at equal and opposite distances from the at least one axis; and first and second coils mounted on the other of the first and second plates and positioned such that when the second plate is rotated relative to the first plate about the at least one axis, the respective first and second magnet structures move in and out of the first and second coils; wherein each of the first and second magnet structures is substantially arc-shaped having a center on the at least one axis and a radius equal to a distance of the magnet structure to the at least one axis.

Drawings

FIG. 1 illustrates a prior art fast steering mirror system having a voice coil actuator.

Fig. 2A shows that the force exerted on the pivot support is non-zero, fig. 2B shows the left voice coil force and fig. 2C shows the right voice coil force.

Fig. 3 shows the coil efficiency as a function of the coil position.

Fig. 4 shows the maximum coil efficiency for a fixed magnet diameter of 8mm in relation to the gap width between the coils.

Fig. 5 shows the angular range of a prior art system and shows unusable areas due to collisions caused by spherical motion.

Fig. 6 shows the relationship between the driving voltage and the tilt angle for the existing system.

Fig. 7 shows the relation between the driving voltage steepness and the tilt angle for a prior system.

FIG. 8 illustrates a force at a neutral position of a system according to an embodiment.

FIG. 9 illustrates forces at a tilted position of a system according to an embodiment.

FIG. 10 illustrates an angular range of a system according to an embodiment.

FIG. 11 illustrates a relationship between drive voltage and tilt angle for a system according to one embodiment.

Fig. 12 shows the relation between the driving voltage steepness and the tilt angle for a system according to an embodiment.

FIG. 13 illustrates a relationship between linearity and tilt angle of a drive voltage for a system according to an embodiment.

FIG. 14 illustrates the relationship between coil efficiency and magnet position for a three coil system according to one embodiment.

FIG. 15 illustrates a voice coil design according to one embodiment.

FIG. 16 illustrates a magnet structure moving in and out of a coil assembly according to one embodiment.

FIG. 17 is a photograph of a magnet structure and coil assembly according to an embodiment.

FIG. 18 is a perspective view of a base of a positioning system according to an embodiment.

FIG. 19 is a photograph of a positioning system according to an embodiment.

FIG. 20 is a photograph of a platform of a positioning system according to an embodiment.

FIG. 21 is a photograph of a base of a positioning system according to an embodiment.

Fig. 22A-C illustrate the space requirements of the magnet in the x-direction and the y-direction.

FIG. 23 illustrates a positioning system according to one embodiment.

Detailed Description

The description of illustrative embodiments in accordance with the principles of the invention is intended to be read in connection with the accompanying drawings, which are to be considered part of the entire written description. In the description of the embodiments of the present invention, any reference to orientation or direction is only for convenience of description, and does not limit the scope of the present invention in any way. Relative terms, such as "lower," "upper," "horizontal," "vertical," "above," "below," "upward," "downward," "top" and "bottom" as well as derivatives thereof (e.g., "horizontally," "downwardly," "upwardly," etc.) should be construed to refer to the orientation as then described or as shown in the drawing under discussion. These relative terms are for convenience of description only and do not require that the apparatus be constructed or operated in a particular orientation unless explicitly stated as such. Unless expressly stated otherwise, terms such as "attached," "adhered," "connected," "coupled," "interconnected," and the like refer to a relationship wherein structures are secured or attached to one another either directly or indirectly through intervening structures, and both are either movably or rigidly attached or associated. Furthermore, the features and advantages of the present invention are explained with reference to exemplary embodiments. It is thus evident that the invention should not be limited to such exemplary embodiments showing some possible non-limiting combinations of features that may be present alone or in other combinations of features; the scope of the invention is defined by the appended claims.

The instant disclosure describes one or more best modes of practicing the invention as presently contemplated. This description is not intended to be construed in a limiting sense, but rather provides an example of the invention which is presented for purposes of illustration only and to convey the advantages and configuration of the invention to those skilled in the art by reference to the figures. The same reference numbers will be used throughout the drawings to refer to the same or like parts.

FIG. 23 illustrates a positioning system 100 according to an embodiment. The system includes a first plate 110; a second plate 120, the second plate 120 coupled to the first plate and pivotable about at least one axis relative to the first plate by a pivotable structure 130; a pair of voice coil actuators, one for each shaft, configured to rotate the second plate relative to the first plate about the at least one axis; and a processor 140, the processor 140 configured to drive current to the pair of voice coil actuators; wherein the pair of voice coil actuators comprises a first magnet structure 150 and a second magnet structure 150, the first and second magnet structures 150 and 150 being mounted on a first plate at equal and opposite distances from the at least one axis, and a first coil 160 and a second coil 160, the first and second coils 160 being mounted on the second plate and positioned such that when the second plate is rotated relative to the first plate about the at least one axis, the respective first and second magnet structures move in and out of the first and second coils; wherein each of the magnet structures is substantially arc-shaped with a center on the at least one axis and a radius equal to the distance of the magnet structure to the at least one axis. Also shown in fig. 23 is a sensor 170, the sensor 170 being configured to detect the position of the magnet structure, and the detected position being fed back to the processor. The input device 180 may allow a user to input a desired rotation of the system.

Fig. 8 and 9 illustrate forces in a positioning system according to an embodiment. Fig. 8 shows the force when the system is in its neutral position, i.e. the tilt angle is 0 °. Left side F₁Upper force is equal to right side F₂The magnitude of the force on. The magnet is located in the center of the coil in the neutral position. Since the forces on the left and the right are equal and opposite, the resulting force generated at the bearing is zero. Fig. 9 shows the forces when the system is in a tilted position. Due to the vertical symmetry, the two forces are balanced in all angular positions. Thus, for all angles, the left side F₁Upper force is equal to right side F₂The magnitude of the force on. The resulting force deltaf is zero or substantially zero for all tilt angles. Due to two forces at all anglesThe degrees are balanced so there is less stress on the bearings and there is no undesirable stimulation of mechanical resonance.

FIG. 10 illustrates a magnet structure and a coil according to an embodiment. It can be seen that the magnet stack comprises a plurality of disc magnets arranged to substantially coincide with the arc of rotational movement. In one embodiment, the arc is a segment of 8 ° of a circle having a radius equal to the distance of the coil/magnet arrangement from the pivot axis (center of the circle). The coil is divided into an upper coil section and a lower coil section. The coil is bent such that the centers of the middle and both ends of the coil substantially coincide with the arc of the rotational movement.

Fig. 11 shows the driving voltage versus the tilt angle for the upper coil section and the lower coil section. It can be seen that each of the upper and lower coil sections has a low steepness region (i.e. high efficiency) over a range of tilt angles. Thus, high coil efficiency can be achieved by switching on the upper coil section when the tilt angle is within the effective range of the upper coil section, and switching on the lower coil section when the tilt angle is within the effective range of the lower coil section. Fig. 12 shows the driving voltage steepness of the upper coil section and the lower coil section in relation to the tilt angle. In this example, the lower coil section is activated when the angle of inclination is between-8 ° and +1 °, and the upper coil section is activated when the angle of inclination is between +1 ° and +8 °. Fig. 12 also shows a transition range in which switching between the upper and lower coil segments can occur.

Fig. 13 illustrates a dual coil segment that may achieve superior linearity according to one embodiment. Fig. 14 shows the coil efficiency of a coil having three coil segments according to an embodiment. In general, it is contemplated that a coil having multiple coil segments may be used to achieve high coil efficiency and drive voltage linearity. The system uses coil segments only in their respective higher effective ranges. The maximum driving force may be about 10 times the static spring force of the bearing.

FIG. 15 illustrates a voice coil design according to one embodiment. One side of the dome is fixed to the plate or mirror and the other side is bonded to the magnet structure. In the exemplary embodiment, the structure includes three smaller diameter disc magnets and one larger disc magnet. The magnets are bonded together eccentrically to obtain the desired circular shape substantially following the arc of motion, or with a similar curved design to reduce the gap between the magnet structure and the coil, thereby increasing the achievable force (see fig. 16). In the neutral position (tilt angle 0 °), the pole of the larger magnet is centered between the two coil segments. Each coil segment is tilted to substantially follow the arc of motion of the magnet. The coil is supported by the coil housing. FIG. 17 shows a photograph of a voice coil according to one embodiment.

In one embodiment, the positioning device is capable of spherical motion. In the positioning apparatus, the stage is coupled to the substrate, and the stage is pivotable relative to the substrate about two axes (e.g., an x-axis and a y-axis). In one embodiment, the platform is a plate on which mirrors or other optical elements may be mounted. The device comprises two pairs of voice coil actuators as described above. Each pair of voice coil actuators provides angular motion along an axis. For example, a first pair of voice coils provides angular motion about the x-axis, while a second pair of voice coils provides angular motion about the y-axis. FIG. 18 illustrates a base of a positioning device according to an embodiment. FIG. 19 is a photograph of a positioning system according to an embodiment. Fig. 20 is a photograph of a platform having a pivotable support structure and four magnet structures according to an embodiment. In one embodiment, the pivotable structure includes one or more bearings aligned with the x-axis and another one or more bearings aligned with the y-axis. FIG. 21 is a photograph of a substrate with four coils according to one embodiment. It is noted that the magnet may be mounted on the substrate or platform and the coil may be mounted on the platform or substrate accordingly.

The spatial requirements of the magnet in the x-direction and the y-direction are different for rotation about the x-axis and the y-axis. This difference is given by the principle of the gimbal bearing, since a pair of magnets is more affected by the second shaft. Fig. 22A is a simulation diagram of space consumption of two pairs of magnets. And figure 22B shows a side view of the space consumption of a magnet tilted along the x-axis and y-axis. Fig. 22C shows a top view of the space consumption of a magnet tilted along the x-axis and y-axis. Therefore, the coil profile needs to be designed to account for the difference in space requirements of the magnet in the x-direction and the y-direction. The aspect ratio in both directions is chosen to provide the best coil efficiency. For example, the width/height ratio in the x direction is 1.27, and the width/height ratio in the y direction is 1.45.

In one embodiment, the positioning system includes a processor configured to control the current into the coil. The processor may be coupled to an input for a target location, and the processor may be coupled to one or more current drivers to drive respective voice coil segments. In one embodiment, the positioning system further comprises a sensor configured to detect the position/motion of the magnet and/or the platform relative to the base. The detected position/motion may be used to provide feedback to the processor.

Although the present invention has been described in relation to several described embodiments, with a certain length and certain characteristics, the invention is not limited to any such details or embodiments or any particular embodiments, but rather is to be understood as providing the broadest interpretation in view of the prior art and, therefore, effectively encompassing the intended scope of the invention. Furthermore, the foregoing describes the invention in terms of embodiments foreseen by the inventor for which an enabling description was available, notwithstanding that insubstantial modifications of the invention, not presently foreseen, may nonetheless represent equivalents thereto.