阅读说明：本技术 对准系统及其控制方法、激光直写曝光设备 (Alignment system, control method thereof and laser direct-writing exposure equipment ) 是由 李永强 何少锋 杨宇航 于 2020-12-31 设计创作，主要内容包括：本发明公开了一种对准系统及其控制方法、激光直写曝光设备,该对准系统可应用于激光直写曝光设备,其对准组件包括对准镜头、光源和图像采集单元,对准镜头对标靶进行成像,光源对靶标进行照明,图像采集单元采集靶标图像,光源至少包括第一和第二类型光源；其上位机将靶标图像传输至显示装置,并接收显示装置反馈的抓靶信息,根据抓靶信息控制光源切换至第一类型光源和/或第二类型光源；其显示装置,用于显示靶标图像,并反馈对应的抓靶信息。本发明能够自由切换光源种类,有效针对不同工艺靶点进行合理的照明处理,从而能够快速准确的进行靶点抓取,提高通用性和对位精度高,降低失败率,利于提高机台作业的稳定性,同时提高生产效率。(The invention discloses an alignment system, a control method thereof and laser direct-writing exposure equipment, wherein the alignment system can be applied to the laser direct-writing exposure equipment; the upper computer transmits the target image to the display device, receives target grabbing information fed back by the display device, and controls the light source to be switched to the first type light source and/or the second type light source according to the target grabbing information; the display device is used for displaying the target image and feeding back corresponding target grabbing information. The invention can freely switch the types of light sources and effectively carry out reasonable illumination processing aiming at different process targets, thereby being capable of quickly and accurately carrying out target grabbing, improving the universality and the alignment precision, reducing the failure rate, being beneficial to improving the stability of the operation of a machine table and simultaneously improving the production efficiency.)

1. An alignment system applied to a laser direct write exposure apparatus, comprising: an alignment assembly, an upper computer and a display device, wherein,

the alignment assembly, comprising: the device comprises an alignment lens, a light source and an image acquisition unit, wherein the alignment lens is used for imaging a target, the light source is used for illuminating the target, and the image acquisition unit is used for acquiring a target image, wherein the light source at least comprises a first type light source and a second type light source;

the upper computer is used for transmitting the target image to the display device, receiving target grabbing information fed back by the display device, and controlling the light source to be switched to the first type light source and/or the second type light source according to the target grabbing information;

and the display device is used for displaying the target image and feeding back the corresponding target grabbing information.

2. The alignment system of claim 1, wherein the image acquisition unit comprises:

the camera comprises a camera, wherein pixels of the camera are higher than preset pixels, and the acquisition frame rate of the camera is higher than a preset frame rate.

3. The alignment system of claim 1, wherein the first type of light source and the second type of light source each comprise a plurality of different wavelength band lighting units;

and the upper computer is also used for controlling the first type light source and/or the second type light source to output light with different wave bands according to the target grabbing information.

4. The alignment system of claim 3, wherein the first type of light source is configured as a paraxial light source and the second type of light source is configured as a coaxial light source.

5. The alignment system of claim 2, wherein the alignment assembly further comprises:

the first adapter is connected between the camera and the alignment lens and used for fixing the camera and the alignment lens.

6. The alignment system of claim 4, wherein the alignment assembly further comprises:

and the second adapter is connected between the paraxial light source and the alignment lens and used for fixing the paraxial light source and the alignment lens.

7. The alignment system of claim 4, wherein the coaxial light source is fixedly disposed on the alignment lens.

8. The alignment system of any of claims 1-7, wherein the alignment lens is configured as a double telecentric coaxial lens.

9. A laser direct write exposure apparatus characterized by comprising the alignment system according to any one of claims 1 to 8.

10. A control method of an alignment system according to any one of claims 1 to 8, applied to a laser direct write exposure apparatus, the method comprising the steps of:

the method comprises the steps that an alignment assembly collects a target image, wherein the alignment assembly at least comprises a first type light source and a second type light source;

the upper computer transmits the target image to a display device;

the display device displays the target image and feeds back corresponding target grabbing information;

the upper computer receives the target grabbing information and controls the alignment assembly to be switched to the first type light source and/or the second type light source according to the target grabbing information.

11. The method of controlling an alignment system of claim 10, wherein the first type of light source and the second type of light source each comprise a plurality of different wavelength band lighting units, the method further comprising:

and the upper computer controls the first type light source and/or the second type light source to output light with different wave bands according to the target grabbing information.

Technical Field

The invention relates to the technical field of laser direct-writing exposure, in particular to an alignment system, a control method thereof and laser direct-writing exposure equipment.

Background

At present, for the image acquisition of a target point in the exposure process of laser direct writing exposure equipment, single paraxial illumination or single coaxial illumination is generally adopted to match with an alignment lens for the image acquisition of the target point.

However, when the target point image acquisition mode is used for target points of different process plates, the capturing universality is poor, the failure rate is high, and the alignment precision is poor.

Disclosure of Invention

The present invention is directed to solving at least one of the problems of the prior art.

Therefore, an object of the present invention is to provide an alignment system, which can solve the problem of image acquisition for different process targets during the exposure process of a laser direct writing exposure apparatus, and the alignment system can freely switch the types of light sources, and effectively perform reasonable illumination processing for different process targets, so that target capture can be performed quickly and accurately, the versatility and the alignment precision are improved, the failure rate is reduced, the stability of machine operation is improved, and the production efficiency is improved.

To this end, a second object of the present invention is to propose a laser direct write exposure apparatus.

To this end, a second object of the invention is to propose a control method of an alignment system.

In order to achieve the above object, an embodiment of a first aspect of the present invention discloses an alignment system applied to a laser direct write exposure apparatus, the alignment system including: aim at subassembly, host computer and display device, wherein, aim at the subassembly, include: the device comprises an alignment lens, a light source and an image acquisition unit, wherein the alignment lens is used for imaging a target, the light source is used for illuminating the target, and the image acquisition unit is used for acquiring a target image, wherein the light source at least comprises a first type light source and a second type light source; the upper computer is used for transmitting the target image to the display device, receiving target grabbing information fed back by the display device, and controlling the light source to be switched to the first type light source and/or the second type light source according to the target grabbing information; and the display device is used for displaying the target image and feeding back the corresponding target grabbing information.

According to the alignment system disclosed by the embodiment of the invention, the types of light sources can be freely switched, reasonable illumination processing can be effectively carried out on different process targets, the sharp edges, high contrast and high image definition of the alignment system are ensured, and meanwhile, the compatibility is expanded, so that the alignment system can be effectively used for picking and grabbing target points on holes, special printing ink and transparent glass substrates, thereby being capable of quickly and accurately grabbing the target points, improving the universality and the alignment precision, reducing the failure rate, being beneficial to improving the stability of machine operation and improving the production efficiency.

In addition, the alignment system of the above embodiment of the present invention may further have the following additional technical features:

in some examples, the image acquisition unit includes: the camera comprises a camera, wherein pixels of the camera are higher than preset pixels, and the acquisition frame rate of the camera is higher than a preset frame rate.

In some examples, the first type of light source and the second type of light source each include a plurality of different wavelength band lighting units; and the upper computer is also used for controlling the first type light source and/or the second type light source to output light with different wave bands according to the target grabbing information.

In some examples, the first type of light source is configured as a paraxial light source and the second type of light source is configured as a coaxial light source.

In some examples, the alignment assembly further comprises: the first adapter is connected between the camera and the alignment lens and used for fixing the camera and the alignment lens.

In some examples, the alignment assembly further comprises: and the second adapter is connected between the paraxial light source and the alignment lens and used for fixing the paraxial light source and the alignment lens.

In some examples, the coaxial light source is fixedly disposed on the alignment lens.

In some examples, the alignment lens is configured as a double telecentric coaxial lens

To achieve the above object, an embodiment of a second aspect of the present invention discloses a laser direct writing exposure apparatus, which includes the alignment system according to the embodiment of the first aspect of the present invention.

According to the laser direct-writing exposure equipment provided by the embodiment of the invention, the alignment system can freely switch the light source types, so that reasonable illumination processing can be effectively carried out on different process targets, the sharp edge, high contrast and high image definition of the laser direct-writing exposure equipment are ensured, and meanwhile, the compatibility is expanded, so that the target points on holes, special printing ink and a transparent glass substrate can be effectively picked and grabbed, so that the target point grabbing can be quickly and accurately carried out, the universality and the alignment precision are improved, the failure rate is reduced, the stability of machine operation is favorably improved, and the production efficiency is improved.

In order to achieve the above object, an embodiment of a third aspect of the present invention discloses a control method of an alignment system, which is applied to a laser direct-write exposure apparatus, the method including the steps of: the method comprises the steps that an alignment assembly collects a target image, wherein the alignment assembly at least comprises a first type light source and a second type light source; the upper computer transmits the target image to a display device; the display device displays the target image and feeds back corresponding target grabbing information; the upper computer receives the target grabbing information and controls the alignment assembly to be switched to the first type light source and/or the second type light source according to the target grabbing information.

According to the control method of the alignment system, disclosed by the embodiment of the invention, the alignment system can be controlled to freely switch the light source types, so that reasonable illumination processing can be effectively carried out on different process target points, the sharp edge, high contrast and high image definition of the alignment system are ensured, and meanwhile, the expansion compatibility can be effectively used for carrying out image acquisition and grabbing on the target points on holes, special printing ink and a transparent glass substrate, so that the target point grabbing can be quickly and accurately carried out, the universality and the alignment precision are improved, the failure rate is reduced, the stability of machine operation is favorably improved, and the production efficiency is improved.

In addition, the control method of the alignment system according to the above embodiment of the present invention may further have the following additional technical features:

in some examples, the first and second types of light sources each include a plurality of different wavelength band lighting units, the method further comprising: and the upper computer controls the first type light source and/or the second type light source to output light with different wave bands according to the target grabbing information.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a block diagram of an alignment system according to one embodiment of the present invention;

FIG. 2 is a schematic diagram of the operation of an alignment system according to a specific embodiment of the present invention;

FIG. 3 is a schematic diagram of an alignment system according to another embodiment of the present invention;

fig. 4 is a flow chart of a control method of an alignment system according to the present invention.

Reference numerals:

100-an alignment system; 110-an alignment assembly; 120-an upper computer; 130-a display device; 111-alignment lens; 112-a light source; 113-an image acquisition unit; 114-a first transition piece; 115-second adaptor.

Detailed Description

Embodiments of the present invention will be described in detail below, the embodiments described with reference to the drawings being illustrative, and the embodiments of the present invention will be described in detail below.

An alignment system, a control method thereof, and a laser direct write exposure apparatus according to embodiments of the present invention are described below with reference to fig. 1 to 4.

FIG. 1 is a block diagram of an alignment system according to one embodiment of the present invention. The alignment system can be applied to laser direct-writing exposure equipment, can solve the problem of image acquisition of different process targets in the exposure process of the laser direct-writing exposure equipment, can freely switch light source types, and effectively carries out reasonable illumination processing aiming at the different process targets, so that the target grabbing can be carried out quickly and accurately, the universality and the alignment precision are improved, the failure rate is reduced, the stability of the operation of a machine table is improved, and the production efficiency is improved.

As shown in fig. 1, the alignment system 100 includes: an alignment assembly 110, an upper computer 120, and a display device 130.

Wherein, align subassembly 110, include: alignment lens 111, light source 112, and image capture unit 113. Specifically, the alignment lens 111 is used for imaging a target, the light source 112 is used for illuminating the target, and the image acquisition unit 113 is used for acquiring an image of the target, wherein the light source 112 at least includes a first type light source and a second type light source.

Specifically, the target, which is a target, is all bare boards or coated and pressed film substrates used in the circuit board manufacturing industry, and is used for accurately measuring the board surface size or position relationship in the production operation process of laser direct writing exposure equipment to reach through holes, blind holes, salient points, color development targets and the like.

And the upper computer 120 is used for transmitting the target image to the display device 130, receiving the target grabbing information fed back by the display device 130, and controlling the light source 112 to be switched to the first type light source and/or the second type light source according to the target grabbing information.

Specifically, the upper computer 120 can freely switch the light source types according to the requirements, for example, the upper computer can switch to the first type light source according to the actual requirements, and the first type light source performs the independent illumination; or the light source can be switched to the second type of light source according to the requirement, and the second type of light source is used for illuminating independently; or the light sources can be switched to the first type light source and the second type light source at the same time according to requirements, namely, the first type light source and the second type light source are simultaneously matched for illumination. Therefore, reasonable lighting treatment can be effectively carried out on different process targets, target grabbing can be carried out quickly and accurately, universality and alignment accuracy are improved, and failure rate is reduced.

And the display device 130 is used for displaying the target image and feeding back corresponding target grabbing information. Specifically, the target imaging quality and the target capture data can be obtained through analysis of the displayed target image, corresponding target capture information is generated according to the target imaging quality and the target capture data, and the target capture information is fed back to the upper computer 120.

Therefore, the alignment system 100 can freely switch the types of the light sources, such as switching to the first type light source for illumination according to different process target points, or switching to the second type light source for illumination, or simultaneously adopting the first type light source and the second type light source for illumination, thereby effectively performing reasonable illumination processing on different process target points, ensuring sharp edges, high contrast and high image definition, simultaneously expanding compatibility, effectively performing image acquisition and grabbing on the target points on holes, special printing ink and a transparent glass substrate, rapidly and accurately grabbing the target points, improving universality and alignment precision, reducing failure rate, being beneficial to improving the stability of machine operation, and simultaneously improving production efficiency.

In one embodiment of the invention, the image acquisition unit 113 comprises, for example, a camera.

Specifically, the pixels of the camera are higher than the preset pixels, and the camera acquisition frame rate is higher than the preset frame rate.

In one embodiment, the predetermined number of pixels is, for example, 300 ten thousand pixels, and the predetermined frequency is, for example, FPS 40. It is understood that a camera is considered a high frame rate, high resolution camera when its pixels are higher than a preset pixel (e.g., pixels above 300 million) and the camera acquisition frame rate is higher than a preset frame rate (e.g., the acquisition frame rate is above FPS 40). Therefore, the high-frame-rate and high-resolution camera is adopted, high transmission efficiency is guaranteed, the edge of a target point is clearer and sharper, and image identification precision is improved.

In an embodiment, as shown in fig. 2 or fig. 3, the camera is, for example, a CCD (charge coupled device)/CMOS (Complementary Metal Oxide Semiconductor) camera. The CCD/CMOS camera is a high-frame-rate and high-resolution camera, and can ensure high transmission efficiency, make the edges of target points clearer and sharper and improve the image identification precision.

In one embodiment of the invention, the first type light source and the second type light source respectively comprise a plurality of lighting units of different wavelength bands; and the upper computer 120 is further used for controlling the first type light source and/or the second type light source to output light with different wave bands according to the target grabbing information.

Specifically, the first type light source and the second type light source are configured as light source arrays, each of which includes a plurality of lighting units of different wavelength bands therein, so that light of different wavelength bands can be output. The upper computer 120 can control the first type light source and/or the second type light source to output light with different wave bands according to the target grasping information, that is, the first type light source is controlled to output light with different wave bands, such as red light, green light, yellow light, infrared light or ultraviolet light, according to actual needs; or, the second type light source is controlled to output light with different wave bands, such as red light, green light, yellow light, infrared light or ultraviolet light; or, the first type light source and the second type light source are controlled to simultaneously output light with different wave bands, such as red light, green light, yellow light, infrared light or ultraviolet light. When the first type light source and the second type light source are controlled to simultaneously output light with different wave bands, the first type light source and the second type light source can be controlled to output light with the same wave band according to requirements, for example, the first type light source and the second type light source both output red light, yellow light, green light, infrared light or ultraviolet light, and the like, and the first type light source and the second type light source can also be controlled to output light with different wave bands according to requirements, for example, the first type light source is controlled to output red light, and the second type light source is controlled to output green light; or, the first type light source is controlled to output yellow light, and the second type light source is controlled to output red light, etc., which are not described herein again to reduce redundancy.

It should be noted that the upper computer 120 may control the first type light source and/or the second type light source to output light in different wavelength bands according to the target-grabbing information on the basis of controlling the light source 112 to switch to the first type light source and/or the second type light source according to the target-grabbing information. That is, the upper computer 120 can control the switched light source types to output light of different bands on the basis of switching the light source types, so as to further adapt to grabbing of different process targets and improve the application range.

In one embodiment of the invention, as shown in connection with fig. 2 or 3, the first type of light source is configured as a paraxial light source and the second type of light source is configured as a coaxial light source.

Further, the coaxial light source and the paraxial light source are configured as light source arrays each including a plurality of illumination units of different wavelength bands, so that light of different wavelength bands can be output. Therefore, the coaxial light source can provide a plurality of coaxial illumination units with multiple wave bands for the alignment lens 111, which can be independently controlled, and can be matched with the upper computer 120 to switch aiming at different process target points, so that excellent imaging of the target points and accurate point grasping are ensured; similarly, the paraxial light source can also provide a plurality of independently controllable paraxial lighting units with multiple wavebands for the alignment lens 111, so that different process target points can be switched by matching the upper computer 120, and the imaging of the target points is clear, the edges are sharp, and the point grabbing is accurate.

The upper computer 120 can switch to a coaxial light source and/or a paraxial light source according to the target grabbing information; meanwhile, the coaxial light source and/or the paraxial light source can be controlled to output light with different wave bands, namely the paraxial light source is controlled to output light with different wave bands, such as red light, green light, yellow light, infrared light or ultraviolet light and the like according to actual requirements; or, the coaxial light source is controlled to output light of different wave bands, such as red light, green light, yellow light, infrared light or ultraviolet light; or, the coaxial light source and the paraxial light source are controlled to simultaneously output light of different wave bands, such as red light, green light, yellow light, infrared light or ultraviolet light. When the coaxial light source and the paraxial light source are controlled to simultaneously output light with different wave bands, the coaxial light source and the paraxial light source can be controlled to output light with the same wave band according to requirements, for example, the coaxial light source and the paraxial light source both output red light, green light, yellow light, infrared light or ultraviolet light, and the coaxial light source and the paraxial light source can also be controlled to output light with different wave bands according to requirements, for example, the coaxial light source is controlled to output red light, and the paraxial light source is controlled to output green light; or, the coaxial light source is controlled to output yellow light, and the paraxial light source is controlled to output red light, etc., which is not described herein for reducing redundancy.

Therefore, the upper computer 120 can switch the light source 112 to the coaxial light source and/or the paraxial light source according to actual requirements, for example, the target grabbing information, and can also control the coaxial light source and/or the paraxial light source to output light of different wave bands, so that reasonable lighting processing can be effectively performed on different process target points, target grabbing can be performed quickly and accurately, the universality and the alignment precision are improved, and the failure rate is reduced.

Specifically, a multiband paraxial light source is adopted for illumination, illumination processing can be effectively carried out on different process targets, and sharp edges, high contrast and high image definition of the process targets are guaranteed. And the multiband coaxial light source can be adopted for illumination independently or simultaneously, so that the compatibility is expanded, and the target points on holes, special printing ink and a transparent glass substrate can be effectively subjected to drawing and grabbing.

In a specific embodiment, that is, the upper computer 120 can switch the light sources of different types and/or different wave bands to perform the point grabbing according to the target grabbing information, so that reasonable lighting processing can be effectively performed on different process target points, the target point grabbing can be performed quickly and accurately, the universality and the alignment precision are improved, and the failure rate is reduced.

In one embodiment of the present invention, as shown in FIG. 3, the alignment assembly 110 further includes a first adapter 114.

The first adapter 114 is connected between the camera and the alignment lens 111 and used for fixing the camera and the alignment lens 111, so that the stability of the lens during image acquisition is improved, and the accuracy of target image acquisition is improved. For example, as shown in fig. 3, a first adapter 114 is connected between the CCD/CMOS camera and the alignment lens 111 to fix the CCD/CMOS camera and the alignment lens 111.

In one embodiment of the present invention, as shown in FIG. 3, the alignment assembly 110 further includes a second adapter 115.

The second adaptor 115 is connected between the paraxial light source and the alignment lens 111 and used for fixing the paraxial light source and the alignment lens 111, so that the illumination accuracy and reliability of the paraxial light source are improved, and clear target images can be acquired conveniently.

In an embodiment of the present invention, as shown in fig. 3, the coaxial light source is fixedly disposed on the alignment lens 111, i.e. the coaxial light source is integrally disposed with the alignment lens 111, which is beneficial to save the structural space of the alignment system 100. Meanwhile, the alignment lens 111 is convenient to use with a coaxial light source.

In one embodiment of the present invention, alignment lens 111 is configured as a double telecentric coaxial lens. That is, the alignment lens 111 has a high resolution, such as a micrometer resolution, so that a micrometer target point can be effectively identified, and the imaging and capturing precision can be improved.

In a specific embodiment, as shown in fig. 2, the work flow of the alignment system 100 is summarized as follows: the target image is collected through the alignment assembly 110, the target image is transmitted to the display device 130 through the upper computer 120, the display device 130 displays the target image, target information is fed back to the upper computer 120 according to imaging quality and the point grabbing data, and the upper computer 120 switches light sources of different types and/or different wave bands to grab points according to the target information fed back by the display device 130. The multi-waveband coaxial light source can be switched, so that illumination processing can be effectively carried out on different process targets, the sharp edge, high contrast and high image definition of the multi-waveband coaxial light source are ensured; the device can also be independently or simultaneously switched to paraxial light sources of multiple wavebands, can effectively carry out illumination processing aiming at different process targets, and can effectively carry out drawing and grabbing aiming at the targets on holes, special printing ink and transparent glass substrates by expanding compatibility. In addition, a high-frame-rate and high-resolution camera is adopted, so that the edges of target points of the camera are clearer and sharper while high transmission efficiency is ensured, and the image identification precision is improved.

Therefore, in a specific embodiment, the alignment system 100 can perform light source type and/or waveband switching by matching the upper computer 120 according to different process target points, and different lighting modes are adopted according to actual requirements, so that excellent and clear imaging of the target points, sharp edges and accurate point grasping are ensured. Furthermore, the alignment system 100 can quickly and accurately capture target spots for different process targets, thereby improving the stability of the machine operation; the coaxial light source and the paraxial light source can be compatible for alignment illumination at the same time, and different modes can be switched rapidly to improve the production efficiency; the image acquisition precision can be effectively improved by using a high-pixel and high-frame-rate camera, and the alignment precision is further improved.

According to the alignment system disclosed by the embodiment of the invention, the types of light sources can be freely switched, reasonable illumination processing can be effectively carried out on different process targets, the sharp edges, high contrast and high image definition of the alignment system are ensured, and meanwhile, the compatibility is expanded, so that the alignment system can be effectively used for picking and grabbing target points on holes, special printing ink and transparent glass substrates, thereby being capable of quickly and accurately grabbing the target points, improving the universality and the alignment precision, reducing the failure rate, being beneficial to improving the stability of machine operation and improving the production efficiency.

A further embodiment of the present invention proposes a laser direct write exposure apparatus comprising the alignment system described in any of the above embodiments of the present invention.

Therefore, when the laser direct writing exposure apparatus is aligned, a specific implementation manner of the laser direct writing exposure apparatus is similar to a specific implementation manner of the alignment system described in any of the above embodiments of the present invention, and for details, please refer to the description of the alignment system part, and details are not described here again in order to reduce redundancy.

According to the laser direct-writing exposure equipment provided by the embodiment of the invention, the alignment system can freely switch the light source types, so that reasonable illumination processing can be effectively carried out on different process targets, the sharp edge, high contrast and high image definition of the laser direct-writing exposure equipment are ensured, and meanwhile, the compatibility is expanded, so that the target points on holes, special printing ink and a transparent glass substrate can be effectively picked and grabbed, so that the target point grabbing can be quickly and accurately carried out, the universality and the alignment precision are improved, the failure rate is reduced, the stability of machine operation is favorably improved, and the production efficiency is improved.

In addition, other configurations and functions of the laser direct writing exposure apparatus according to the above-described embodiment of the present invention are known to those skilled in the art, and are not described in detail in order to reduce redundancy.

The embodiment of the invention also provides a control method of the alignment system. The alignment system is, for example, the alignment system 100 described in any of the above embodiments of the present invention. The control method of the alignment system can be applied to laser direct-writing exposure equipment, can solve the problem of image acquisition of different process targets in the exposure process of the laser direct-writing exposure equipment, can freely switch the light source types, and effectively carries out reasonable illumination processing aiming at the different process targets, so that target grabbing can be rapidly and accurately carried out, the universality and the alignment precision are improved, the failure rate is reduced, the stability of machine operation is favorably improved, and the production efficiency is improved.

Fig. 4 is a flowchart of a control method of an alignment system according to an embodiment of the present invention. As shown in fig. 4, the control method of the alignment system includes the following steps:

step S1: the alignment assembly acquires a target image and at least comprises a first type light source and a second type light source.

Step S2: and the upper computer transmits the target image to the display device.

Step S3: the display device displays the target image and feeds back corresponding target grabbing information.

Step S4: the upper computer receives the target grabbing information and controls the alignment assembly to be switched to the first type light source and/or the second type light source according to the target grabbing information.

In one embodiment of the invention, the first type of light source and the second type of light source each comprise a plurality of lighting units of different wavelength bands, the method further comprising: and the upper computer controls the first type light source and/or the second type light source to output light with different wave bands according to the target grabbing information.

It should be noted that, when the control method of the alignment system according to the embodiment of the present invention performs alignment control of laser direct writing exposure, a specific implementation manner of the control method is similar to that of the alignment system described in any one of the above embodiments of the present invention, and please refer to the description of the alignment system part specifically, and details are not repeated here in order to reduce redundancy.

According to the control method of the alignment system, disclosed by the embodiment of the invention, the alignment system can be controlled to freely switch the light source types, so that reasonable illumination processing can be effectively carried out on different process target points, the sharp edge, high contrast and high image definition of the alignment system are ensured, and meanwhile, the expansion compatibility can be effectively used for carrying out image acquisition and grabbing on the target points on holes, special printing ink and a transparent glass substrate, so that the target point grabbing can be quickly and accurately carried out, the universality and the alignment precision are improved, the failure rate is reduced, the stability of machine operation is favorably improved, and the production efficiency is improved.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example.

While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.