阅读说明：本技术 一种氧化铈超亲水光学薄膜的制备方法 (Preparation method of cerium oxide super-hydrophilic optical film ) 是由 汪彦龙 李刚 金玉奇 向潜 张绍骞 吕起鹏 于 2020-12-02 设计创作，主要内容包括：本发明公开了一种磁控溅射法生长、氧烧除碳法处理后得到氧化铈超亲水光学薄膜的方法,该薄膜膜层镀于光学镜片基底表面时,不影响原镜片的光学性能。可应用于要求超亲水性的光学元器件表面,如防雾、防霉光学透射镜、反射镜等,为具有自清洁功能的光学元器件的研制和后期保养提供了重要的科学依据。(The invention discloses a method for obtaining a cerium oxide super-hydrophilic optical film after growth by a magnetron sputtering method and treatment by an oxygen burning-out carbon method. The method can be applied to the surfaces of optical components requiring super-hydrophilicity, such as antifogging and mildewproof optical transmission mirrors, reflectors and the like, and provides important scientific basis for development and later maintenance of optical components with self-cleaning functions.)

1. A preparation method of a cerium oxide super-hydrophilic optical film is characterized by comprising the following steps: a cerium oxide super-hydrophilic optical film layer is arranged on the light receiving surface or the light incident surface of the optical lens;

preparing a cerium oxide super-hydrophilic optical film on the surface of the optical lens by adopting magnetron sputtering coating; the target material is cerium target;

the preparation parameters adopted are as follows: depositing a cerium oxide film on the optical lens substrate, wherein the film deposition time is 1-4 hours under the conditions of the working air pressure of 0.45-0.5Pa, the argon flow of 215-235sccm, the oxygen flow of 20-30sccm, the target base distance of 12-13cm and the room temperature.

2. The method of claim 1, wherein: the optical lens substrate is a sheet-shaped optical glass lens or a silicon (100) lens.

3. The production method according to claim 1 or 2, characterized in that: the roughness root mean square of the substrate is less than 1 nm.

4. The production method according to claim 1 or 2, characterized in that: the optical lens may be a bulk optical material or an optical lens as a substrate, or may be an optical lens with a single layer film or a multilayer film.

5. The production method according to claim 1 or 2, characterized in that: the refractive index of the film layer of the cerium oxide super-hydrophilic optical film is 2.305 under the test wavelength of 750 nm.

6. The production method according to claim 1 or 2, characterized in that: the cerium oxide super-hydrophilic optical film layer has super-hydrophilicity and high light transmission property, and is applied to optical components with self-cleaning requirements on the surface, wherein the optical lens comprises a transmission lens, a reflection lens, a band-pass filter, a narrow-band filter or the surface of a light transmission layer of a solar cell.

7. The production method according to any one of claims 1 to 6, characterized in that: the cerium oxide super-hydrophilic optical film layer takes away dust by utilizing the extension of water drops on the surface, does not influence the optical performance of the original substrate, can be applied to the surface of an optical component requiring super-hydrophilicity, such as one or more than two of antifogging and mildew-proof optical transmission lenses, reflecting mirrors and the like, and provides important scientific basis for the development and later maintenance of the optical component with the self-cleaning function.

Technical Field

The invention relates to the field of coating, in particular to the field of a cerium oxide optical film capable of ensuring super-hydrophilicity and high light transmittance.

Background

Self-cleaning coatings are a hot area of research in recent years. The high-energy laser has the characteristics of good beam quality, high radiation power, long time and the like, so that the requirements of high damage threshold and low thermal deformation are provided for high-quality strong light elements. The absorption of light by the optical element is an important factor affecting both of these criteria. The absorption of light by the optical thin film usually cannot be ignored due to environmental pollution, except for intrinsic absorption, defect and impurity absorption. Therefore, finding a method for preventing the surface of the strong light film from being polluted plays an important role in the practical application of high-energy laser. In ancient times, the hydrophobic character of the lotus leaf surface was recognized and was popular by the well-known beauty poetry of the population. This phenomenon also provides a new idea for realizing self-cleaning of the strong light element. The self-cleaning effect is strongly related to the hydrophobic angle. For the super-hydrophobic material, dust can be taken away by water in the process of surface movement of the material, and the dust-proof and dirt-proof effects are achieved. And for the super-hydrophilic material with the contact angle less than 10 degrees, the super-hydrophilic coating can play a role in mildew resistance and fog resistance. The superhydrophilic surface can serve an additional function of chemically decomposing adsorbed dust in the sun, compared to the superhydrophobic surface.

The current research on cerium oxide self-cleaning optical thin films mainly focuses on the preparation of hydrophobic surfaces, while cerium oxide-based super-hydrophilic surfaces are rarely reported. As described above, the coating with hydrophilic, especially super-hydrophilic surface can have the mildew-proof and anti-fog effects that the hydrophobic coating does not have in some complicated and harsh environments, and therefore, it is urgently needed to develop a high light transmittance film layer with super-hydrophilic property to improve the pollution problem on the surface of the strong optical element and further maintain the light beam quality.

Disclosure of Invention

In order to solve the problems, the invention provides a cerium oxide super-hydrophilic optical film which is used for solving the requirement of self-cleaning of the surface of an optical component under certain severe conditions.

The super-hydrophilic coating of the present invention is amorphous transparent cerium oxide.

The cerium oxide film is prepared by a magnetron sputtering coating process, and carbon adsorption on the surface is removed by annealing in an oxygen atmosphere.

The cerium oxide film has smooth surface and super-hydrophilic property.

The light-transmitting wave band of the cerium oxide film can cover visible light and near infrared light wave bands.

The invention discloses a cerium oxide super-hydrophilic optical film obtained after growth by a magnetron sputtering method and treatment by an oxygen burning-out carbon method, wherein when the film is coated on the surface of the substrate of an optical lens, the optical performance of the original lens is not influenced. The method can be applied to the surfaces of optical devices requiring super-hydrophilicity, such as mildew-proof and antifogging optical transmission mirrors, reflectors, band-pass filters, narrow-band filters or the surfaces of solar cells. The cerium oxide film of the invention is obtained by growing by adopting a magnetron sputtering method and annealing and decarbonizing in an oxygen atmosphere, and has excellent optical performance and wide application.

Drawings

FIG. 1 is a transmission curve of a cerium oxide thin film grown on a quartz glass substrate.

FIG. 2 is a comparison of hydrophilic and hydrophobic properties of a cerium oxide film before and after 500 ℃ oxygen calcination. (a) An optical photograph of the water drop on the surface of the original cerium oxide film shows a static contact angle of 76 deg. (b) An optical photograph of the surface of the cerium oxide thin film after the oxygen burning treatment with a static contact angle of 6 °.

FIG. 3 comparison of XPS spectra of cerium oxide films before and after 500 ℃ oxygen firing.

FIG. 4 comparison of FTIR spectra before and after 500 ℃ oxygen firing of cerium oxide films.

Detailed Description

In order that the objects and advantages of the invention will be more clearly understood, the invention is further described in detail below with reference to specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Example (c): coating a film on the surface of K9 glass;

a cerium oxide film is deposited on glass and a silicon (100) substrate by using an intermediate frequency magnetron sputtering system of ACSP73 manufactured by Dalian Ticke science and technology, and the roughness root mean square of the two substrates is less than 1 nm. The thin film deposition was performed for 4 hours under the conditions of a working pressure of 0.5Pa, an argon flow of 225sccm, an oxygen flow of 25sccm, a target distance of 13cm, and room temperature. The cerium target was purchased from crys rech co.cn and had a purity of 99.9%.

To ensure that the cerium oxide sample is contaminated as little as possible, after the sample has been taken out of the magnetron sputtering chamber, it is carefully sealed with a lens paper and immediately transferred to a glove box under a pure nitrogen atmosphere for storage at a temperature of about 20 ℃. A specially designed portable sample transfer container is used to transport the sample between the glove box and XPS chamber, keeping the sample in a high vacuum or high purity nitrogen gas environment, and thus free from air contamination.

FIG. 1 is a transmission curve of a cerium oxide thin film grown on a quartz glass substrate. The transmission spectrum measurement is carried out by using a PE Lambda950 spectrometer (precision 0.5nm), and the measured transmission curve shows that the cerium oxide film has relatively high transmission rate in the 500-1000nm wave band.

FIG. 1 is a graph comparing the hydrophilic and hydrophobic properties of a cerium oxide film having a thickness of 768.8nm before and after annealing at 500 ℃ in an oxygen atmosphere. The prepared cerium oxide film was subjected to a measurement of the hydrophobic angle of the sample using a surface tension meter (FRANCE GBX HTECH) placed in a glove box (MIKROUNA Universal 2440). The glove box was filled with high purity nitrogen gas, the temperature was controlled at 20 ℃ plus or minus 1 ℃, the box pressure was 101425Pa, and the water and oxygen contents were less than 0.1 ppm. Using the measured film contact angle, 2. mu.L of deionized distilled water was deposited on the surface of the sample at a time, and an image of the droplet was taken using a microscope, and further, using3.0 tracking and fitting the drop edges to analyze the drop shape. And carrying out multiple measurements on different points on the film and different film samples to obtain a static hydrophobic angle average value with statistical errors. The oxygen atmosphere annealing was performed in a tube furnace (HF-Keying OTF-1200X). The cerium oxide film on the silicon substrate is placed in a quartz tube, high purity oxygen (the pressure of the air inlet end is fixed to be 0.01MPa) is introduced into the quartz tube, and the quartz tube is heated by a tube furnace. The furnace was heated from room temperature to 500 ℃ at a temperature ramp rate of 10 ℃/min. After the temperature was maintained at 500 ℃ for 2 hours, the furnace was naturally cooled to room temperature. As can be seen from fig. 2, the original cerium oxide film has hydrophobic property, and the hydrophobic angle reaches 6 ° after annealing in an oxygen atmosphere, which indicates that the cerium oxide is in a super-hydrophilic state.

FIG. 3 is a comparison of XPS spectra of cerium oxide films before and after 500 ℃ oxygen firing. The surface chemical composition of the film was determined by X-ray photoelectron spectroscopy (Thermo Scientific ESCALAB 250 Xi). Monochromatic Al Kalpha rays are selected for X-ray radiation, and the spot size and the emergence angle are respectively 0.9 mm and 35 degrees. The measured spectra were recorded at a high pass energy of 20eV and an energy step size of 0.1 eV. The vertical emission spectrum is used in the analysis of bulk material composition, while the off-angle (-30-40 deg.) emission spectrum is typically used for the analysis of surface properties. The study mainly selected off-angle emission to analyze samples. The XPS spectra were calibrated with the fatty C1s peak position at 284.6 eV. As can be seen from fig. 3, the surface of the as-grown cerium oxide film contains adsorbed carbon species, which substantially disappear after annealing in an oxygen atmosphere, indicating that the clean cerium oxide film has super-hydrophilic characteristics, and the adsorbed carbon species cause the cerium oxide film to exhibit hydrophobic characteristics.

To further determine the species adsorbed on the sample, fig. 4 was characterized by FTIR using an in situ FTIR spectrometer (Bruker sensor 27) on cerium oxide films at 500 ℃ before and after oxygen firing. Fixing the sample in a sample cell, taking a spectrum, and then performing O-phase chromatography at 0.1MPa₂The temperature was raised to 500 ℃ at a temperature rise rate of 10 ℃/min under the atmosphere. And after the temperature is kept stable, the spectrum is taken again. FTIR spectra were obtained by measuring the absorbance spectra of the film against an empty cell background at each temperature and correcting the baseline using horizontal lines. As can be seen from fig. 4, the absorption peak of the native ceria thin film corresponding to the hydrocarbon species is relatively strong, and the peak substantially disappears after annealing in an oxygen atmosphere, and it can be seen from the data before the above, that the adsorbed species which causes the ceria thin film to exhibit hydrophobic characteristics are hydrocarbon species.