阅读说明：本技术 温度控制系统及综合温度控制系统 (Temperature control system and comprehensive temperature control system ) 是由 伊藤彰浩 国保典男 纐缬雅之 长谷川功宏 中泽敏治 高梨圭介 福住幸大 于 2020-11-06 设计创作，主要内容包括：温度控制系统(600),其具备分别供第一热媒、第二热媒、第三热媒循环的第一循环回路、第二循环回路、第三循环回路(110,20,130),第一循环回路具备：使液体状态的第一热媒膨胀并雾化的第一膨胀部(111)；供第一温度的第一热媒流通的第一流通部(114)；压缩气体状态的第一热媒的第一压缩部(112)；以及使第一热媒冷凝并向第一膨胀部供给的第一冷凝部(113),第二循环回路具备将第二热媒的温度调整成比第一温度更高的第二温度来进行供给的第二调整装置(21)以及第二流通部(124),第三循环回路具备调整在第一流通部与第三流通部(133)间交换的热量以及在第二流通部与第四流通部(134)间交换的热量的调整部(135)。(A temperature control system (600) is provided with a first circulation circuit, a second circulation circuit and a third circulation circuit (110, 20, 130) for circulating a first heat medium, a second heat medium and a third heat medium respectively, wherein the first circulation circuit is provided with: a first expansion part (111) which expands and atomizes the first heat medium in a liquid state; a first circulation part (114) for circulating a first heating medium with a first temperature; a first compressing part (112) for compressing the first heating medium in a gas state; and a first condenser (113) for condensing the first heat medium and supplying the first heat medium to the first expansion unit, wherein the second circulation circuit is provided with a second adjustment device (21) for adjusting the temperature of the second heat medium to a second temperature higher than the first temperature and supplying the second heat medium, and the third circulation circuit is provided with an adjustment unit (135) for adjusting the amount of heat exchanged between the first circulation unit and the third circulation unit (133) and the amount of heat exchanged between the second circulation unit and the fourth circulation unit (134).)

1. A temperature control system that controls a temperature of a control target, the temperature control system comprising:

a first circulation loop for circulating a first heating medium;

a second circulation circuit for circulating a second heating medium independently from the first circulation circuit; and

a third circulation circuit for circulating a third heating medium independently from the first circulation circuit and the second circulation circuit, the third heating medium having a usable temperature range wider than usable temperature ranges of the first heating medium and the second heating medium,

the first circulation circuit includes:

a first expansion unit that expands and atomizes the first heating medium in a liquid state;

a first circulation unit through which the first heating medium flows;

a first outward path for circulating the first heating medium at a first temperature atomized by the first expansion unit to the first circulation unit;

a first compression part for compressing the first heating medium in a gas state;

a first return path that circulates the first heat medium that has flowed through the first circulation unit and has been vaporized to the first compression unit; and

a first condenser unit for condensing the first heating medium in a gaseous state compressed by the first compressor unit and supplying the condensed first heating medium to the first expansion unit,

the second circulation circuit includes:

a second adjusting device for supplying the second heating medium with a second temperature higher than the first temperature;

a second circulation part for circulating the second heating medium;

a second outward path for circulating the second heat medium supplied from the second adjustment device to the second circulation unit; and

a second return path for circulating the second heating medium flowing through the second circulation part to the second adjustment device,

the third circulation circuit includes:

a third circulation part through which the third heating medium flows and which exchanges heat with the first circulation part;

a fourth circulation part through which the third heating medium flows and which exchanges heat with the second circulation part;

a third outward path for allowing the third heat medium to flow from the third flow part and the fourth flow part to a heat exchange part for exchanging heat with the control target; and

a third return path for circulating the third heat medium from the heat exchange unit to the third circulation unit and the fourth circulation unit,

the third circulation loop does not have a reservoir for storing the third heating medium,

the temperature control system includes an adjustment unit that adjusts the amount of heat exchanged between the first flow unit and the third flow unit and the amount of heat exchanged between the second flow unit and the fourth flow unit.

2. The temperature control system of claim 1,

the adjusting portion includes a drive control portion that controls a driving state of the first compressing portion.

3. The temperature control system of claim 2,

the first circulation loop includes: a bypass flow path that bypasses the first compression unit and circulates the vaporized first heat medium from the first return path to the first condensation unit; and an opening/closing valve for opening and closing the bypass flow path,

when the on-off valve is opened, the drive control unit stops the first compression unit.

4. The temperature control system according to any one of claims 1 to 3,

the first circulation loop includes: a connection flow path that connects the first compressor and the first condenser to the first outward path and that allows the first heat medium in a gaseous state compressed by the first compressor to flow to the first outward path; and an open/close valve for opening and closing the connection flow path.

5. The temperature control system according to any one of claims 1 to 3, wherein the second adjustment device includes:

a second expansion unit that expands and atomizes the second heating medium in a liquid state and supplies the second heating medium to the second outward path;

a second compression part to which the second heat medium that flows through the second circulation part and is gasified is supplied through the second return passage, the second compression part compressing the second heat medium in a gaseous state; and

and a second condenser unit for condensing the second heating medium in a gaseous state compressed by the second compressor unit and supplying the condensed second heating medium to the second expansion unit.

6. The temperature control system according to any one of claims 1 to 3, wherein the second adjustment device includes:

a second compressor for compressing the second heating medium in a gaseous state and supplying the compressed second heating medium to the second outgoing path;

a second expansion part supplied with the second heating medium flowing through the second circulation part and liquefied through the second return passage, and expanding and atomizing the second heating medium in a liquid state; and

and an evaporation unit that evaporates the second heat medium atomized by the second expansion unit and supplies the second heat medium to the second compression unit.

7. The temperature control system of claim 6,

the first condensing part performs heat exchange between the cooling water of a first water temperature and the first heat medium to condense the first heat medium,

the evaporation unit exchanges heat between the cooling water at a second water temperature higher than the first water temperature and the second heat medium to evaporate the second heat medium.

8. The temperature control system of claim 7,

the cooling water of the second water temperature is cooling water heated by the cooling water of the first water temperature for cooling a predetermined component.

9. The temperature control system of claim 6,

the first condensing part condenses the first heating medium by performing heat exchange between cooling water and the first heating medium,

the evaporation part exchanges heat between the cooling water and the second heating medium to evaporate the second heating medium,

the temperature control system is provided with:

a precooler that cools the cooling water supplied to the first condensation section by the cooling water flowing through the evaporation section; and

a preheater configured to heat the cooling water supplied to the evaporation unit by the cooling water flowing through the first condensation unit.

10. The temperature control system according to any one of claims 1 to 3,

the second adjusting means includes a heater capable of controlling the amount of heat generation.

11. The temperature control system according to any one of claims 1 to 3,

the first circulation circuit includes a first heat storage unit through which the first heat medium flows and which stores thermal energy based on a change in state of the first heat storage material at a third temperature,

the first outward passage circulates the first heating medium atomized by the first expansion part to the first circulation part and the first heat storage part,

the first return passage circulates the first heating medium that has flowed through the first circulation portion and the first heat storage portion and has been vaporized, to the first compression portion,

the second circulation circuit includes a second heat storage unit that stores thermal energy based on a change in state of a second heat storage material at a fourth temperature higher than the third temperature while the second heat medium is supplied to flow therethrough,

the second outward passage allows the second heat medium supplied from the second adjustment device to flow to the second flow passage and the second heat storage unit,

the second return passage circulates the second heating medium flowing through the second circulation portion and the second heat storage portion to the second adjustment device.

12. The temperature control system according to claim 11, wherein the adjustment portion includes:

a first distribution valve provided in the first outward route and changing a ratio of the first heating medium atomized by the first expansion unit to be distributed to the first circulation unit and the first heat storage unit; and

and a second distribution valve provided in the second outward passage and configured to change a ratio of the second heat medium supplied from the second adjustment device to be distributed to the second circulation unit and the second heat storage unit.

13. The temperature control system of claim 12,

the temperature control system includes a control unit that controls the first distribution valve and the second distribution valve,

the controller may cause the second heat medium supplied from the second adjustment device to flow to the second heat storage unit through the second distribution valve when the first heat medium atomized by the first expansion unit is caused to flow to the first flow path through the first distribution valve; when the second heat medium supplied from the second adjustment device is caused to flow to the second circulation portion by the second distribution valve, the first heat medium atomized by the first expansion portion is caused to flow to the first heat storage portion by the first distribution valve.

14. The temperature control system according to any one of claims 1 to 3,

the adjusting unit includes a third distribution valve provided in the third return passage, and changes a ratio of the third heat medium flowing from the heat exchange unit to the third flow passage to the third heat medium flowing from the heat exchange unit to the fourth flow passage.

15. The temperature control system of claim 12,

the adjusting part includes a third distribution valve provided in the third return passage, and changes a ratio of the third heat medium flowing from the heat exchange part to the third flow part to the third heat medium flowing from the heat exchange part to the fourth flow part,

the temperature control system includes a control unit that controls the first distribution valve, the second distribution valve, and the third distribution valve,

the controller may cause the first heat medium atomized by the first expansion part to flow to the first heat storage part through the first distribution valve without causing the third heat medium to flow from the heat exchanger to the third flow path through the third distribution valve; when the third heat medium is not caused to flow from the heat exchanger to the fourth flow unit through the third distribution valve, the second heat medium supplied from the second adjustment device is caused to flow to the second heat storage unit through the second distribution valve.

16. The temperature control system of claim 15, wherein the third return comprises:

a first intermediate return path for allowing the third heating medium to flow from the heat exchanger to the third flow path through the first heat storage unit; and

and a second intermediate return path for circulating the third heating medium from the heat exchange unit to the fourth circulation unit through the second heat accumulation unit.

17. The temperature control system according to any one of claims 1 to 3, wherein the adjusting portion includes a fourth distribution valve provided in the third return passage, and changes a ratio of the third heat medium flowing from the heat exchanger to the third flow passage, the third heat medium returning from the heat exchanger to the heat exchanger without passing through the third flow passage and the fourth flow passage, and the third heat medium flowing from the heat exchanger to the fourth flow passage.

18. A temperature control system that controls a temperature of a control target, the temperature control system comprising:

a first circulation loop for circulating a first heating medium;

a heater that heats the control target and can control the amount of heat generated; and

a third circulation circuit for circulating a third heating medium independently from the first circulation circuit, the third heating medium having a usable temperature range wider than that of the first heating medium,

the first circulation circuit includes:

a first expansion unit that expands and atomizes the first heating medium in a liquid state;

a first circulation unit through which the first heating medium flows;

a first outward path for circulating the first heating medium at a first temperature atomized by the first expansion unit to the first circulation unit;

a first compression part for compressing the first heating medium in a gas state;

a first return path that circulates the first heat medium that has flowed through the first circulation unit and has been vaporized to the first compression unit; and

a first condenser unit for condensing the first heating medium in a gaseous state compressed by the first compressor unit and supplying the condensed first heating medium to the first expansion unit,

the third circulation circuit includes:

a third circulation part through which the third heating medium flows and which exchanges heat with the first circulation part;

a third outward path for allowing the third heat medium to flow from the third flow path to a heat exchange unit for exchanging heat with the control target; and

a third return path for allowing the third heat medium to flow from the heat exchange unit to the third flow passage,

the third circulation loop does not have a reservoir for storing the third heating medium,

the temperature control system includes an adjustment unit that adjusts the amount of heat exchanged between the first and third flow-through units and the amount of heat generated by the heater.

19. An integrated temperature control system, wherein,

the integrated temperature control system includes a plurality of temperature control systems that control a temperature of a control target, and includes:

a first circulation loop for circulating a first heating medium;

a second circulation circuit for circulating a second heating medium independently from the first circulation circuit; and

a third circulation circuit for circulating a third heating medium independently from the first circulation circuit and the second circulation circuit, the third heating medium having a usable temperature range wider than usable temperature ranges of the first heating medium and the second heating medium,

the first circulation circuit includes:

a first expansion unit that expands and atomizes the first heating medium in a liquid state;

a first circulation unit through which the first heating medium flows;

a first outward path for circulating the first heating medium at a first temperature atomized by the first expansion unit to the first circulation unit;

a first compression part for compressing the first heating medium in a gas state;

a first return path that circulates the first heat medium that has flowed through the first circulation unit and has been vaporized to the first compression unit; and

a first condenser unit for condensing the first heating medium in a gaseous state compressed by the first compressor unit and supplying the condensed first heating medium to the first expansion unit,

the second circulation circuit includes:

a second adjusting device for supplying the second heating medium with a second temperature higher than the first temperature;

a second circulation part for circulating the second heating medium;

a second outward path for circulating the second heat medium supplied from the second adjustment device to the second circulation unit; and

a second return path for circulating the second heating medium flowing through the second circulation part to the second adjustment device,

the third circulation circuit includes:

a third circulation part through which the third heating medium flows and which exchanges heat with the first circulation part;

a fourth circulation part through which the third heating medium flows and which exchanges heat with the second circulation part;

a third outward path for allowing the third heat medium to flow from the third flow part and the fourth flow part to a heat exchange part for exchanging heat with the control target; and

a third return path for circulating the third heat medium from the heat exchange unit to the third circulation unit and the fourth circulation unit,

the third circulation loop does not have a reservoir for storing the third heating medium,

the temperature control system includes an adjusting unit that adjusts the amount of heat exchanged between the first flow passage and the third flow passage and the amount of heat exchanged between the second flow passage and the fourth flow passage,

a set of the first expansion portion, the first compression portion, and the first condensation portion is provided for a plurality of the temperature control systems.

Technical Field

The present disclosure relates to a temperature control system that controls a temperature of a control object.

Background

Conventionally, there is a temperature control system for supplying a heat exchange fluid to a heat exchanger cycle, the temperature control system including: a heat exchanger for exchanging heat with a temperature control target; a cooling-side circulation circuit having a cooling device and a storage container for heat exchange fluid; a heating-side circulation circuit having a heating device and a storage container for heat exchange fluid; and a switching valve connected to the heat exchanger so as to switch between the cooling-side circulation circuit and the heating-side circulation circuit (see patent document 1).

Documents of the prior art

Patent document

Patent document 1: japanese laid-open patent publication No. 2001-134324

Disclosure of Invention

Problems to be solved by the present application

However, in the temperature control system (temperature control system) described in patent document 1, a common heat exchange fluid (heat medium) is circulated through the heat exchanger, the cooling-side circulation circuit, and the heating-side circulation circuit. Therefore, the amount of the heat exchange fluid supplied to the heat exchanger cycle increases, and the temperature of the heat exchange fluid cannot be changed quickly. Therefore, the temperature adjustment system described in patent document 1 has room for improvement in terms of improving the responsiveness of the temperature of the control target (control target). In addition, heat exchange fluids that can be used in a wide temperature range from low temperatures to high temperatures are often expensive, and it is desirable to reduce the amount of expensive heat exchange fluids used.

The present disclosure is made to solve the above-described problems, and a main object of the present disclosure is to provide a temperature control system capable of reducing an amount of an expensive heat medium to be used and improving responsiveness of controlling a temperature of a control target.

A first aspect for solving the above problems is a temperature control system for controlling a temperature of a control target, the temperature control system including: a first circulation loop for circulating a first heating medium; a second circulation circuit independent from the first circulation circuit and circulating a second heating medium; and a third circulation circuit which is independent from the first circulation circuit and the second circulation circuit and circulates a third heat medium, wherein a usable temperature range of the third heat medium is wider than usable temperature ranges of the first heat medium and the second heat medium, and the first circulation circuit includes: a first expansion unit that expands and atomizes the first heating medium in a liquid state; a first circulation unit through which the first heating medium flows; a first outward path for circulating the first heating medium at a first temperature atomized by the first expansion unit to the first circulation unit; a first compression part for compressing the first heating medium in a gas state; a first return path that circulates the first heat medium that has flowed through the first circulation unit and has been vaporized to the first compression unit; and a first condenser unit configured to condense the first heating medium in a gaseous state compressed by the first compressor unit and supply the condensed first heating medium to the first expansion unit, wherein the second circulation circuit includes: a second adjusting device for supplying the second heating medium with a second temperature higher than the first temperature; a second circulation part for circulating the second heating medium; a second outward path for circulating the second heat medium supplied from the second adjustment device to the second circulation unit; and a second return path that circulates the second heat medium flowing through the second circulation unit to the second adjustment device, the third circulation circuit including: a third circulation part through which the third heating medium flows and which exchanges heat with the first circulation part; a fourth circulation part through which the third heating medium flows and which exchanges heat with the second circulation part; a third outward path for allowing the third heat medium to flow from the third flow part and the fourth flow part to a heat exchange part for exchanging heat with the control target; and a third circulation path that circulates the third heat medium from the heat exchange unit to the third circulation unit and the fourth circulation unit, wherein the third circulation path does not include a tank that stores the third heat medium, and wherein the temperature control system includes an adjustment unit that adjusts the amount of heat exchanged between the first circulation unit and the third circulation unit and the amount of heat exchanged between the second circulation unit and the fourth circulation unit.

According to the above configuration, the temperature control system controls the temperature of the control target. The temperature control system is provided with a first circulation circuit for circulating a first heating medium, a second circulation circuit independent from the first circulation circuit and for circulating a second heating medium, and a third circulation circuit. The third circulation circuit is independent from the first circulation circuit and the second circulation circuit, and circulates a third heat medium having a usable temperature range wider than that of the first and second heat media. Therefore, even if the third heat medium is expensive, the third heat medium is circulated only in the third circulation circuit, and the amount of the third heat medium used can be reduced. The third circulation circuit does not include a container for storing the third heating medium. Therefore, the amount of the third heat medium circulating in the third circulation circuit can be further reduced.

The first circulation circuit includes: a first expansion part for expanding and atomizing the first heating medium in a liquid state; a first circulation part for circulating a first heating medium; and a first outward path for allowing the first heat medium having the first temperature atomized by the first expansion unit to flow to the first flow path. Therefore, the first heat medium at the first temperature expanded and atomized can be caused to flow to the first flow path through the first outward passage. Further, by causing the first flow portion to function as an evaporator, the first heat medium is evaporated in the first flow portion, whereby thermal energy can be supplied to the first flow portion (specifically, the first flow portion is cooled). Further, the first circulation circuit includes: a first compression part for compressing the first heating medium in a gas state; a first return path for circulating the first heat medium, which has flowed through the first circulation unit and has been vaporized, to the first compression unit; and a first condenser unit for condensing the first heating medium in a gaseous state compressed by the first compressor unit and supplying the condensed first heating medium to the first expansion unit. Therefore, the first heat medium that has flowed through the first circulation unit and has been vaporized can be condensed, and the first heat medium in a liquid state can be supplied to the first expansion unit. Here, since the first heat medium having a narrower usable temperature range than the third heat medium is used, a low-priced heat medium can be used as the first heat medium.

The second circulation circuit is provided with a second adjusting device. The second adjusting device supplies a second heating medium with a second temperature higher than the first temperature. Therefore, the second heating medium of the second temperature for heat exchange can be supplied. The second circulation circuit includes: a second circulation part for circulating a second heating medium; a second outward path for circulating the second heat medium supplied from the second adjusting device to the second circulating part; and a second return passage for circulating the second heat medium flowing through the second circulation part to the second adjustment device. Therefore, the thermal energy can be supplied to the second circulation part through the second heat medium. Here, since the second heat medium having a smaller usable temperature range than the third heat medium is used, a low-priced heat medium can be used as the second heat medium.

The third circulation circuit includes: a third circulation part through which a third heating medium flows and which exchanges heat with the first circulation part; and a fourth circulation part through which the third heat medium flows and which exchanges heat with the second circulation part. Therefore, the thermal energy supplied to the first flow portion can be supplied to the third flow portion by heat exchange between the first flow portion and the third flow portion. Similarly, the thermal energy supplied to the second flow portion can be supplied to the fourth flow portion by heat exchange between the second flow portion and the fourth flow portion.

The third circulation circuit includes: a third outward path for allowing the third heat medium to flow from the third flow part and the fourth flow part to the heat exchange part for exchanging heat with the control object; and a third return path for allowing the third heat medium to flow from the heat exchange unit to the third flow unit and the fourth flow unit. Therefore, the heat energy can be supplied to the heat exchange unit that exchanges heat with the control target through the third heat medium. The temperature control system includes an adjusting unit that adjusts the amount of heat exchanged between the first flow unit and the third flow unit and the amount of heat exchanged between the second flow unit and the fourth flow unit. Therefore, the adjustment unit can adjust the heating energy supplied to the third flow unit and the fourth flow unit, control the heating energy supplied to the heat exchanger by the third heat medium, and control the temperature of the control target. Here, as described above, the amount of the third heat medium circulating in the third circulation circuit can be reduced. Therefore, the temperature of the third heat medium can be changed quickly, and the responsiveness of controlling the temperature of the control target can be improved.

When there is a need for the second adjustment device to adjust the temperature of the second heat medium to the second temperature and supply the second heat medium, the second adjustment device is normally provided with a unit having a configuration equivalent to that of the first circulation circuit therein. Then, heat is exchanged between the heat medium used in the unit and the second heat medium, and the temperature of the second heat medium is adjusted to the second temperature. In this case, a configuration in which heat exchange is performed between the heat medium that is atomized, compressed, and condensed and the second heat medium and a configuration in which heat exchange is performed between the second heat medium in the second circulation part and the third heat medium in the fourth circulation part are necessary in the second circulation circuit. In contrast, in the first circulation circuit, the heat medium that is atomized, compressed, and condensed and the heat medium that flows through the first circulation unit are the same first heat medium, and there is no need to exchange heat between the heat medium that is atomized, compressed, and condensed and the first heat medium. Therefore, the configuration of the first circulation circuit can be simplified as compared with the second circulation circuit in the above-described case. In addition, when the first and third flow parts exchange heat, the latent heat of the first heat medium can be used, and therefore, the efficiency of heat exchange can be improved.

In the second aspect, the adjusting section includes a drive control section that controls a driving state of the first compressing section.

According to the above configuration, the driving state of the first compression unit is controlled by the drive control unit. Therefore, the degree of compression of the first heat medium in a gaseous state can be controlled by the first compression unit, and the amount of heat energy supplied to the first circulation unit can be controlled. Therefore, even if the flow rate of the first heat medium flowing through the first flow passage is not controlled, the amount of heat exchanged between the first flow passage and the third flow passage can be adjusted, and the temperature of the control target can be controlled.

In a third aspect, the first circulation loop comprises: a bypass flow path that bypasses the first compression unit and circulates the vaporized first heat medium from the first return path to the first condensation unit; and an open/close valve that opens and closes the bypass flow path, and when the open/close valve is opened, the drive control unit stops the first compression unit.

According to the above configuration, by closing the on-off valve, the vaporized first heat medium can be made to flow to the first compression unit through the first return passage without flowing to the bypass passage. On the other hand, by opening the on-off valve, the vaporized first heat medium can bypass the first compression unit through the bypass passage and can be circulated from the first return passage to the first condensation unit. The drive control unit stops the first compression unit when the on-off valve is opened. Therefore, when the required heat energy to be supplied to the first circulating portion is small, the first compressing portion can be stopped, and the energy consumed by the temperature control system can be reduced.

Since the first compression part compresses the first heat medium in a gaseous state, there is a possibility that the first heat medium in a liquid state may be damaged if compressed. When the amount of heat exchanged between the first circulation part and the third circulation part is small, the first heat medium flowing through the first circulation part may not be sufficiently evaporated and the first heat medium in a liquid state may be supplied to the first compression part.

In this regard, in a fourth aspect, the first circulation circuit includes: a connection flow path that connects the first compressor and the first condenser to the first outward path and that allows the first heat medium in a gaseous state compressed by the first compressor to flow to the first outward path; and an open/close valve for opening and closing the connection flow path. According to this configuration, the first heat medium in a gaseous state compressed by the first compression unit and having an increased temperature can be circulated to the first outward passage through the connection passage by opening the on-off valve. Therefore, even when the amount of heat exchanged between the first circulation part and the third circulation part is small, the first heat medium flowing through the first circulation part can be sufficiently evaporated, and the supply of the first heat medium in a liquid state to the first compression part can be suppressed.

In a fifth aspect, the second adjustment device includes: a second expansion unit configured to expand and atomize the second heating medium in a liquid state and supply the second heating medium to the second outward path; a second compression part to which the second heat medium flowing through the second circulation part and vaporized is supplied through the second return passage and which compresses the second heat medium in a gaseous state; and a second condenser unit that condenses the second heating medium in a gaseous state compressed by the second compressor unit and supplies the condensed second heating medium to the second expansion unit.

According to the above configuration, similarly to the first circulation circuit of the first aspect, the heat medium to be atomized, compressed, and condensed and the heat medium flowing through the second circulation unit are the same second heat medium in the second circulation circuit, and a configuration in which heat exchange is performed between the heat medium to be atomized, compressed, and condensed and the second heat medium is not necessary. Therefore, the configuration of the second circulation circuit can be simplified. In addition, when heat exchange is performed between the second circulation part and the fourth circulation part, latent heat of the second heat medium can be used, and therefore, the efficiency of heat exchange can be improved.

In a sixth aspect, the second adjustment device includes: a second compressor for compressing the second heating medium in a gaseous state and supplying the second heating medium to the second outgoing path; a second expansion part supplied with the second heating medium flowing through the second circulation part and liquefied through the second return passage, and expanding and atomizing the second heating medium in a liquid state; and an evaporation unit that evaporates the second heat medium atomized by the second expansion unit and supplies the second heat medium to the second compression unit.

The second adjustment device includes a second compression unit that compresses the second heating medium in a gaseous state and supplies the compressed second heating medium to the second outward path. Therefore, the second heat medium in a gaseous state can be caused to flow to the second flow path through the second outward path. In addition, by causing the second circulation unit to function as a condenser and condensing the second heat medium in the second circulation unit, it is possible to supply thermal energy to the second circulation unit (specifically, to heat the second circulation unit). Further, the second adjustment device includes: a second expansion unit to which the second heat medium that has flowed through the second circulation unit and has been liquefied is supplied through the second return path, and which expands and atomizes the second heat medium in a liquid state; and an evaporation unit that evaporates the second heat medium atomized by the second expansion unit and supplies the second heat medium to the second compression unit. Therefore, the second heat medium that has flowed through the second circulation part and has been liquefied can be evaporated, and the second heat medium in a gaseous state can be supplied to the second compression part.

In this case, the heat medium to be compressed, atomized, and vaporized and the heat medium flowing through the second flow path in the second circulation circuit are the same second heat medium, and a configuration in which heat exchange is performed between the heat medium to be compressed, atomized, and vaporized and the second heat medium is not necessary. Therefore, the configuration of the second circulation circuit can be simplified. In addition, when the second circulation part exchanges heat with the fourth circulation part, the latent heat of the second heat medium can be used, and thus the efficiency of heat exchange can be improved.

In general, in a factory or the like, cooling water may be used, and cooling water of a plurality of temperatures may be used.

In this regard, in a seventh aspect, the first condensing unit condenses the first heat medium by exchanging heat between the first heat medium and the cooling water at a first water temperature, and the evaporating unit evaporates the second heat medium by exchanging heat between the second heat medium and the cooling water at a second water temperature higher than the first water temperature. According to this configuration, when cooling water of a plurality of temperatures can be used, cooling water of a first water temperature can be used for the first condenser and cooling water of a second water temperature higher than the first water temperature can be used for the evaporator. Therefore, the cooling water at a plurality of temperatures can be effectively used, and thus energy consumed by the temperature control system can be reduced.

In the eighth aspect, the cooling water of the second water temperature is cooling water heated by the cooling water of the first water temperature for cooling a predetermined component.

According to the above configuration, the cooling water that has been increased from the first water temperature to the second water temperature by the cooling for the predetermined component can be effectively used as the cooling water of the second water temperature. Therefore, even when only the cooling water of the first water temperature is supplied in a factory or the like, the cooling water of the second water temperature can be supplied to the temperature control system.

In a ninth aspect, the first condensing unit condenses the first heat medium by exchanging heat between cooling water and the first heat medium, and the evaporating unit evaporates the second heat medium by exchanging heat between cooling water and the second heat medium, and the temperature control system includes: a precooler that cools the cooling water supplied to the first condensation section by the cooling water flowing through the evaporation section; and a preheater for heating the cooling water supplied to the evaporation unit by the cooling water flowing through the first condensation unit.

According to the above configuration, since the first condenser condenses the first heat medium by exchanging heat between the cooling water and the first heat medium, the first condenser requires the cooling water having a low temperature, and the temperature of the cooling water rises before and after the cooling water flows through the first condenser. Since the evaporation unit evaporates the second heat medium by exchanging heat between the cooling water and the second heat medium, the evaporation unit requires the cooling water having a high temperature, and the temperature of the cooling water decreases before and after the cooling water flows through the evaporation unit.

Here, the temperature control system includes a precooler that cools the cooling water supplied to the first condensation unit by the cooling water flowing through the evaporation unit. Therefore, the cooling water flowing through the evaporation unit and having a reduced temperature can be effectively used to cool the cooling water supplied to the first condensation unit. The temperature control system further includes a preheater for heating the cooling water supplied to the evaporation unit by the cooling water flowing through the first condensation unit. Therefore, the cooling water that has flowed through the first condensing unit and has increased in temperature can be effectively used to heat the cooling water supplied to the evaporating unit. Therefore, the energy consumed by the temperature control system can be reduced.

In the tenth aspect, the second adjustment means includes a heater capable of controlling the amount of heat generation.

According to the above configuration, since the second adjusting device includes the heater capable of controlling the amount of heat generation, the temperature of the second heat medium can be adjusted to the second temperature and supplied. In this case, since the heat medium heated by the heater and the heat medium flowing through the second flow path can be made to be the same second heat medium in the second circulation circuit, a configuration for exchanging heat between the heat medium subjected to compression, atomization, and vaporization and the second heat medium is not necessary. Therefore, the configuration of the second circulation circuit can be simplified.

In an eleventh aspect, the first circulation circuit includes a first heat storage portion through which the first heat medium is supplied to flow and which stores thermal energy based on a change in state of the first heat storage material at a third temperature, the first outward passage causes the first heat medium atomized by the first expansion portion to flow to the first flow portion and the first heat storage portion, the first return passage causes the first heat medium flowing through the first flow portion and the first heat storage portion and being gasified to flow to the first compression portion, the second circulation circuit includes a second heat storage portion through which the second heat medium is supplied to flow and which stores thermal energy based on a change in state of the second heat storage material at a fourth temperature higher than the third temperature, the second outward passage causes the second heat medium supplied from the second adjustment device to flow to the second flow portion and the second heat storage portion, the second return passage circulates the second heating medium flowing through the second circulation portion and the second heat storage portion to the second adjustment device.

According to the above configuration, the first circulation circuit includes: a first heat storage portion; a first outward passage for circulating the first heat medium atomized by the first expansion unit to the first circulation unit and the first heat storage unit; and a first return path that circulates the first heat medium, which has flowed through the first circulation unit and the first heat storage unit and has been vaporized, to the first compression unit. Therefore, the first heat medium can supply the thermal energy to the first flow portion and the first heat storage portion. The first heat storage portion is configured to allow the first heat medium to flow therethrough, and to store thermal energy based on a change in state of the first heat storage material at a third temperature. Therefore, the thermal energy can be stored in the first heat storage unit in advance in preparation for a change in the temperature of the control target or the like. In the second circulation circuit, the second adjustment device supplies the second heat medium having the second temperature higher than the first temperature, and the operation and effect equivalent to those of the first circulation circuit can be achieved.

In addition, when the adjustment portion adjusts the heating energy supplied to the third flow portion and the fourth flow portion, the heating energy stored in the first heat storage portion and the second heat storage portion can be used. Therefore, the heating energy supplied to the third flow portion and the fourth flow portion can be increased, and the temperature of the third heat medium can be rapidly changed. Therefore, the responsiveness of controlling the temperature of the control target can be further improved.

In the twelfth aspect, the adjusting section includes: a first distribution valve provided in the first outward route and changing a ratio of the first heating medium atomized by the first expansion unit to be distributed to the first circulation unit and the first heat storage unit; and a second distribution valve provided in the second outward passage and configured to change a ratio of the second heat medium supplied from the second adjustment device to be distributed to the second circulation unit and the second heat storage unit.

According to the above configuration, the first outward passage is provided with the first distribution valve that changes the ratio at which the first heat medium atomized by the first expansion part is distributed to the first circulation part and the first heat storage part. Therefore, the ratio of the thermal energy supplied from the first expansion portion to the first circulation portion to the thermal energy supplied to the first heat storage portion can be changed by the first distribution valve. Therefore, the ratio of the thermal energy used for heat exchange between the first and third flow-through portions to the thermal energy stored in the first heat storage portion can be changed. Similarly, the ratio of the thermal energy used for heat exchange between the second flow portion and the fourth flow portion to the thermal energy stored in the second heat storage portion can be changed.

In a thirteenth aspect, the temperature control system includes a controller that controls the first distribution valve and the second distribution valve, and the controller causes the second heat medium supplied from the second adjustment device to flow through the second distribution valve to the second heat storage unit when the first heat medium atomized by the first expansion unit is caused to flow through the first distribution valve to the first flow through unit; when the second heat medium supplied from the second adjustment device is caused to flow to the second circulation portion by the second distribution valve, the first heat medium atomized by the first expansion portion is caused to flow to the first heat storage portion by the first distribution valve.

According to the above configuration, the temperature control system includes the control unit that controls the first distribution valve and the second distribution valve. The controller causes the second heat medium supplied from the second adjustment device to flow through the second distribution valve to the second heat storage unit when the first heat medium atomized by the first expansion unit is caused to flow through the first flow passage by the first distribution valve. Therefore, when the first heat medium atomized by the first expansion part is caused to flow to the first circulation part, that is, when the need for heat exchange between the second circulation part and the fourth circulation part is small, the thermal energy can be stored in the second heat storage part. On the other hand, when the second heat medium supplied from the second adjustment device is caused to flow to the second flow passage, that is, when the need for heat exchange between the first flow passage and the third flow passage is small, the thermal energy can be stored in the first heat storage unit.

In a fourteenth aspect, the adjusting unit includes a third distribution valve that is provided in the third return passage and changes a ratio of the third heat medium flowing from the heat exchanger to the third flow passage to the third heat medium flowing from the heat exchanger to the fourth flow passage.

According to the above configuration, the third return passage is provided with the third distribution valve that changes the ratio of the third heat medium flowing from the heat exchange unit to the third flow passage to the third heat medium flowing from the heat exchange unit to the fourth flow passage. Therefore, the ratio of the thermal energy received by the third flow portion from the first flow portion to the thermal energy received by the fourth flow portion from the second flow portion can be changed by the third distribution valve. Further, for example, by causing the third heat medium to flow from the heat exchanger to only the fourth flow portion, heat exchange between the first flow portion and the third flow portion, which is caused by the third heat medium flowing to the third flow portion, can be suppressed. In addition, when the third heat medium flows through the third flow path, there is a possibility that: even if the first heat medium does not flow to the first flow path, the thermal energy remaining in the first flow path is supplied to the third flow path. In this regard, according to the above configuration, the responsiveness of controlling the temperature of the control target can be further improved.

In a fifteenth aspect, the adjusting unit includes a third distribution valve that is provided in the third return passage and that changes a ratio of the third heat medium flowing from the heat exchanger to the third flow passage to the third heat medium flowing from the heat exchanger to the fourth flow passage, and the temperature control system includes a controller that controls the first distribution valve, the second distribution valve, and the third distribution valve, and the controller causes the first heat medium atomized by the first expansion unit to flow to the first heat storage unit through the first distribution valve when the third heat medium is not caused to flow from the heat exchanger to the third flow passage through the third distribution valve; when the third heat medium is not caused to flow from the heat exchanger to the fourth flow unit through the third distribution valve, the second heat medium supplied from the second adjustment device is caused to flow to the second heat storage unit through the second distribution valve.

According to the above configuration, the temperature control system includes the control unit that controls the first distribution valve, the second distribution valve, and the third distribution valve. The controller causes the first heat medium atomized by the first expansion part to flow to the first heat storage part through the first distribution valve when the third heat medium is not caused to flow from the heat exchanger to the third flow passage through the third distribution valve. Therefore, when the third heat medium is not caused to flow from the heat exchanger to the third flow passage, that is, when heat exchange between the first flow passage and the third flow passage is not required, the thermal energy can be stored in the first heat storage portion. On the other hand, when the third heat medium is not caused to flow from the heat exchanger to the fourth flow unit, that is, when heat exchange between the second flow unit and the fourth flow unit is not required, the thermal energy can be accumulated in the second heat storage unit.

In a sixteenth aspect, the third homing includes: a first intermediate return path for allowing the third heating medium to flow from the heat exchanger to the third flow path through the first heat storage unit; and a second intermediate return path that causes the third heating medium to flow from the heat exchange unit to the fourth flow unit through the second heat accumulation unit.

According to the above configuration, the third return passage includes the first intermediate return passage that causes the third heat medium to flow from the heat exchanger to the third flow passage through the first heat storage portion. Therefore, when the third heat medium is caused to flow from the heat exchange portion to the third flow portion, the heat energy can be directly supplied from the first heat storage portion to the third heat medium. Similarly, when the third heat medium is caused to flow from the heat exchange unit to the fourth flow unit, the third heat medium can be directly supplied with thermal energy from the second heat storage unit. Therefore, the responsiveness of controlling the temperature of the control target can be further improved.

In a seventeenth aspect, the adjusting portion includes a fourth distribution valve that is provided in the third return passage and changes a ratio of the third heat medium flowing from the heat exchanger to the third flow passage, the third heat medium returning to the heat exchanger from the heat exchanger without passing through the third flow passage and the fourth flow passage, and the third heat medium flowing from the heat exchanger to the fourth flow passage.

According to the above configuration, the third return passage is provided with the fourth distribution valve that distributes the ratio of the third heat medium that has flowed from the heat exchanger to the third flow passage, the third heat medium that has not passed through the third flow passage and the fourth flow passage from the heat exchanger and returned to the heat exchanger, and the third heat medium that has flowed from the heat exchanger to the fourth flow passage. Therefore, the ratio of the thermal energy received by the third flow passage from the first flow passage, the thermal energy returned to the heat exchange portion, and the thermal energy received by the fourth flow passage from the second flow passage can be changed by the fourth distribution valve. Further, the third heat medium flowing out of the heat exchanger can be returned to the heat exchanger without flowing the third heat medium from the heat exchanger to the third and fourth flow paths.

An eighteenth aspect is a temperature control system that controls a temperature of a control target, the temperature control system including: a first circulation loop for circulating a first heating medium; a heater that heats the control target and can control a heat generation amount; and a third circulation circuit which is independent from the first circulation circuit and circulates a third heat medium, wherein the usable temperature range of the third heat medium is wider than the usable temperature range of the first heat medium, and the first circulation circuit includes: a first expansion unit that expands and atomizes the first heating medium in a liquid state; a first circulation unit through which the first heating medium flows; a first outward path for circulating the first heating medium at a first temperature atomized by the first expansion unit to the first circulation unit; a first compression part for compressing the first heating medium in a gas state; a first return path that circulates the first heat medium that has flowed through the first circulation unit and has been vaporized to the first compression unit; and a first condenser unit configured to condense the first heat medium in a gaseous state compressed by the first compressor unit and supply the condensed first heat medium to the first expander unit, wherein the third circulation circuit includes: a third circulation part through which the third heating medium flows and which exchanges heat with the first circulation part; a third outward path for allowing the third heat medium to flow from the third flow path to a heat exchange unit for exchanging heat with the control target; and a third return path that causes the third heat medium to flow from the heat exchange unit to the third flow unit, wherein the third circulation circuit does not include a tank that stores the third heat medium, and wherein the temperature control system includes an adjustment unit that adjusts the amount of heat exchanged between the first flow unit and the third flow unit and the amount of heat generated by the heater.

According to the above configuration, the third circulation circuit is independent from the first circulation circuit and circulates the third heat medium, and the usable temperature range of the third heat medium is wider than the usable temperature range of the first heat medium. Therefore, even if the third heat medium is expensive, the third heat medium can be circulated only in the third circulation circuit, and the amount of the third heat medium used can be reduced. The third circulation circuit does not include a container for storing the third heating medium. Therefore, the amount of the third heat medium circulating in the third circulation circuit can be further reduced.

The first circulation circuit can achieve the same operational effects as the first aspect. Further, since the first heat medium having a narrower usable temperature range than that of the third heat medium is used, a low-priced heat medium can be used as the first heat medium. The heater can heat a control target and can control the heat generation amount. Therefore, the control target can be directly heated without using a heat medium.

The temperature control system includes an adjusting unit that adjusts the amount of heat exchanged between the first and third flow-through units and the amount of heat generated by the heater. Therefore, the adjustment unit can adjust the thermal energy supplied to the third flow channel and the thermal energy directly supplied to the control target, and can control the temperature of the control target. Here, as described above, the amount of the third heat medium circulating in the third circulation circuit can be reduced. Therefore, the temperature of the third heat medium can be changed quickly, and the responsiveness of controlling the temperature of the control target can be improved.

A nineteenth aspect is a comprehensive temperature control system including the plurality of temperature control systems according to any one of the first to eighteenth aspects, wherein the plurality of temperature control systems are provided with the first expansion unit, the first compression unit, and the first condensation unit in a single set. According to this configuration, the first expansion unit, the first compression unit, and the first condensation unit for supplying the first heating medium at the atomized first temperature can be combined into one set in the plurality of temperature control systems. Therefore, the configuration of the integrated temperature control system including the plurality of temperature control systems can be simplified.

Here, the temperature control system controls the temperature of the control target by adjusting the amount of heat exchanged between the first and third flow-through portions by the adjusting portion. Therefore, the first expansion unit only needs to supply the atomized first heat medium with a constant first temperature, and there is no need to change the temperature of the first heat medium in accordance with a change in the target temperature of the control target. Therefore, even with a configuration in which a set of the first expansion unit, the first compression unit, and the first condensation unit is provided for a plurality of temperature control systems, the temperature of the control target of each temperature control system can be controlled. In addition, instead of controlling the temperature of the control target, a physical quantity related to the temperature of the control target may be controlled.

Drawings

The above objects, and other objects, features, and advantages of the present disclosure will become more apparent from the following detailed description with reference to the accompanying drawings.

Fig. 1 is a schematic diagram of a temperature control system of a first embodiment.

Fig. 2 is a schematic diagram of a modification of the first circulation circuit and the second circulation circuit.

Fig. 3 is a schematic diagram of a temperature control system of a second embodiment.

Fig. 4 is a schematic diagram of a temperature control system of a third embodiment.

Fig. 5 is a schematic view of a modification of the water path.

Fig. 6 is a schematic view of another modification of the water passage.

Fig. 7 is a schematic diagram of a temperature control system of a fourth embodiment.

Fig. 8 is a schematic diagram of a temperature control system of a fifth embodiment.

Fig. 9 is a schematic diagram of a temperature control system of a sixth embodiment.

Fig. 10 is a schematic diagram of a temperature control system of a seventh embodiment.

Fig. 11 is a schematic diagram of an integrated temperature control system of an eighth embodiment.

Detailed Description

(first embodiment)

Hereinafter, a first embodiment of a temperature control system embodied to control the temperature of a lower electrode (a control target) of a semiconductor manufacturing apparatus will be described with reference to the drawings.

As shown in fig. 1, the temperature control system 200 includes a first circulation circuit 110, a second circulation circuit 120, a third circulation circuit 130, a control unit 80, and the like.

First circulation circuit 110 is a circuit for circulating the first heating medium. The first heat medium is, for example, a Hydrofluorocarbon (HFC) refrigerant or a Hydrofluoroolefin (HFO) refrigerant. The second circulation circuit 120 is independent from the first circulation circuit 110 and is a circuit for circulating the second heating medium. The second heat medium is, for example, the same refrigerant as the first heat medium. The prices of the first heating medium and the second heating medium are low.

The third circulation circuit 130 is a circuit for circulating the third heating medium independently from the first circulation circuit 110 and the second circulation circuit 120. The third heating medium is, for example, a fluorine-based inert liquid. The lower limit temperature of the third heat medium that can be used is lower than the lower limit temperatures of the first heat medium and the second heat medium that can be used. The upper limit temperature of the third heat medium that can be used is higher than the upper limit temperatures of the first heat medium and the second heat medium that can be used. That is, the usable temperature range of the third heat medium is wider than the usable temperature ranges of the first and second heat mediums. Therefore, the price of the third heating medium is higher than the prices of the first and second heating media.

The first circulation circuit 110 includes a first expansion unit 111, a first compressor 112, a first condenser 113, a first fan 115, a first circulation unit 114, and the like.

The first expansion unit 111 is an expansion valve or a capillary tube that expands and atomizes the first heat medium in a liquid state. The first expansion section 111 and the first flow passage section 114 are connected by a flow passage 117. The flow path 117 (first outward path) allows the first heating medium at the first temperature atomized by the first expansion unit 111 to flow to the first flow path 114.

The first circulation part 114 is provided inside the heat exchanger 131, and circulates the first heating medium. The first circulation part 114 functions as an evaporator that evaporates the atomized first heating medium. The first flow path 114 is connected to the first compressor 112 via a flow path 118. The flow path 118 (first return path) circulates the first heat medium that has flowed through the first circulation unit 114 and has been vaporized to the first compressor 112.

The first compressor 112 (first compression part) compresses the first heating medium in a gaseous state. The first heating medium is compressed by the first compressor 112, and the temperature of the first heating medium is increased. The first compressor 112 and the first condenser 113 are connected by a flow path 116.

The first condenser 113 (first condenser) condenses the first heat medium in a gaseous state compressed by the first compressor 112 and supplies the condensed first heat medium to the first expansion unit 111. At this time, the first fan 115 air-cools the first heat medium flowing through the first condenser 113. The first condenser 113 and the first expansion unit 111 are connected by a flow path 119.

The second circulation circuit 120 includes a second expansion unit 121, a second compressor 122, a second condenser 123, a second fan 125, a second circulation unit 124, and the like.

The second expansion part 121 is an expansion valve or a capillary tube that expands and atomizes the second heating medium in a liquid state. The second expansion portion 121 and the second flow passage portion 124 are connected by a flow passage 127. The flow path 127 (second outward path) allows the second heat medium having the second temperature higher than the first temperature and atomized by the second expansion part 121 to flow to the second flow part 124.

The second circulation part 124 is disposed inside the heat exchanger 132 and circulates the second heating medium. The second circulation part 124 functions as an evaporator that evaporates the atomized second heating medium. The second flow passage 124 is connected to the second compressor 122 via a flow passage 128. The flow path 128 (second return path) circulates the second heat medium, which has flowed through the second circulation unit 124 and has been vaporized, to the second compressor 122.

The second compressor 122 (second compressing part) compresses the second heating medium in a gaseous state. The second heating medium is compressed by the second compressor 122, and the temperature of the second heating medium is increased. The second compressor 122 and the second condenser 123 are connected by a flow path 126.

The second condenser 123 (second condensing unit) condenses the second heating medium in a gaseous state compressed by the second compressor 122 and supplies the condensed second heating medium to the second expansion unit 121. At this time, the second fan 125 air-cools the second heat medium flowing through the second condenser 123. In addition, the degree of cooling of the second heat medium by the second fan 125 may be made smaller than the degree of cooling of the first heat medium by the first fan 115. The second condenser 123 is connected to the second expansion unit 121 through a flow path 129.

The third circulation circuit 130 includes a third flow portion 133, a fourth flow portion 134, a third distribution valve 135, a first check valve 136, a second check valve 137, the pump 32, and the like.

The third flow path 133 is provided inside the heat exchanger 131, and allows the third heat medium to flow therethrough. The third flow channel 133 is integrated with the first flow channel 114, and exchanges heat with the first flow channel 114.

The channel 133a is connected to the third flow channel 133. The flow path 133a is provided with a first check valve 136. The first check valve 136 allows the third heating medium to flow from the third circulation part 133 to the confluence point P1, and prohibits the third heating medium from flowing from the confluence point P1 to the third circulation part 133.

The flow path 134a is connected to the fourth flow path 134. The flow path 134a is provided with a second check valve 137. The second check valve 137 allows the third heating medium to flow from the fourth circulation part 134 to the confluence point P1, and prohibits the third heating medium from flowing from the confluence point P1 to the fourth circulation part 134. The channel 133a and the channel 134a are connected to the channel 135a at a confluence point P1.

The semiconductor manufacturing apparatus 90 includes an upper electrode 91 and a lower electrode 92, and generates plasma P between the upper electrode 91 and the lower electrode 92. A workpiece W such as a wafer is placed on the lower electrode 92. The temperature sensor 94 detects the temperature of the lower electrode 92. The lower electrode 92 is integrated with a heat exchanger 93. Heat is exchanged between the heat exchanger 93 and the lower electrode 92.

The flow passage 135a is connected to an inlet port of the heat exchanger 93. The third heat medium flows through the heat exchanger 93 (heat exchange unit). The outflow port of the heat exchanger 93 of the flow passage 135b is connected. The pump 32 is provided in the flow path 135 b. The flow path 135b is connected to a common port of the third distribution valve 135. The pump 32 sucks the third heat medium from the heat exchanger 93 side in the flow path 135b, and discharges the third heat medium to the third distribution valve 135 side (the third flow path 133 side, the fourth flow path 134 side).

The third distribution valve 135 (adjustment portion) is a three-way valve having a common port, an a port, and a B port. The flow path 135c is connected to the B port. The channel 135d is connected to the a port. The flow path 135c is connected to the third flow path 133 of the heat exchanger 131. The flow passage 135d is connected to the fourth flow passage 134 of the heat exchanger 132.

The third distribution valve 135 continuously changes the ratio of the flow rate of the third heat medium flowing from the flow path 135b to the flow path 135c to the flow rate of the third heat medium flowing to the flow path 135 d. That is, the third distribution valve 135 changes the ratio of the third heat medium flowing from the heat exchanger 93 to the third flow part 133 to the third heat medium flowing from the heat exchanger 93 to the fourth flow part 134. The third distribution valve 135 continuously changes the state between a state in which the third heat medium flows from the flow path 135b to the flow path 135c at 100% and a state in which the third heat medium flows from the flow path 135b to the flow path 135d at 100%. In the third distribution valve 135, the pressure loss of the third heating medium is fixed regardless of the ratio of the third circulation part 133 of the heat exchanger 131 to the fourth circulation part 134 of the heat exchanger 132 to distribute the third heating medium supplied from the pump 32.

Since the load of the pump 32 does not vary regardless of the distribution ratio of the third distribution valve 135, the pump 32 is driven in a certain driving state. Thereby, the pump 32 circulates the third heating medium in the third circulation circuit 130. The third circulation circuit 130 does not have a container for storing the third heating medium. The flow path 133a, the flow path 134a, and the flow path 135a form a third outward path. The flow paths 135b, 135c, and 135d form a third return path.

The control unit 80 is a microcomputer including a CPU, a ROM, a RAM, an input/output interface, and the like. The detection result of the temperature sensor 94 is input to the control unit 80. The control unit 80 controls the temperature of the lower electrode 92 to a set temperature. The set temperature (target temperature) is changed to 90 ℃, 0 ℃, or-20 ℃ depending on the process in the semiconductor manufacturing apparatus 90. Since heat flows from the plasma P into the lower electrode 92, the temperature of the lower electrode 92 rises to about 120 ℃ when the plasma P is generated. Accordingly, the temperature of the third heat medium flowing out of the heat exchanger 93 may also rise to around 120 ℃.

The control unit 80 (drive control unit) controls the driving states of the first compressor 112 and the second compressor 122. The controller 80 controls the degree of compression of the first heat medium by the first compressor 112 to be greater than the degree of compression of the second heat medium by the second compressor 122. The control portion 80 controls the distribution ratio of the third distribution valve 135 based on the set temperature of the lower electrode 92 and the detection result of the temperature sensor 94. Thereby, the flow rate of the third heat medium flowing through the third flow channel 133 is adjusted, and the amount of heat exchanged between the first flow channel 114 and the third flow channel 133 is adjusted. Further, the flow rate of the third heat medium flowing through the fourth flow path 134 is adjusted, and the amount of heat exchanged between the second flow path 124 and the fourth flow path 134 is adjusted.

The present embodiment described in detail above has the following advantages.

The third circulation circuit 130 circulates the third heating medium independently from the first circulation circuit 110 and the second circulation circuit 120, and the usable temperature range of the third heating medium is wider than the usable temperature ranges of the first heating medium and the second heating medium. Therefore, even if the third heat medium is expensive, the third heat medium is circulated only in the third circulation circuit 130, and the amount of the third heat medium used can be reduced. The third circulation circuit 130 does not have a container for storing the third heating medium. Therefore, the amount of the third heating medium circulated in the third circulation circuit 130 can be further reduced.

Since the first heat medium and the second heat medium having a smaller usable temperature range than the third heat medium are used in the first circulation circuit 110 and the second circulation circuit 120, respectively, the heat medium having a low price can be used as the first heat medium and the second heat medium.

The first circulation circuit 110 includes a first expansion unit 111 for expanding and atomizing the first heat medium in a liquid state; a first circulation part 114 for circulating a first heating medium; and a flow path 117 through which the first heating medium of the first temperature atomized by the first expansion part 111 flows to the first flow part 114. Therefore, the first heat medium at the first temperature expanded and atomized can be caused to flow through the flow path 117 to the first flow path 114. Further, by causing the first circulation part 114 to function as an evaporator, the first heating medium is evaporated in the first circulation part 114, whereby thermal energy can be supplied to the first circulation part 114 (specifically, the first circulation part 114 is cooled). The second circulation circuit 120 can achieve the same effect.

The first circulation circuit 110 includes: a first compressor 112 compressing a first heating medium in a gaseous state; a flow path 118 for flowing the first heat medium vaporized by flowing through the first flow path 114 to the first compressor 112; and a first condenser 113 for condensing the first heating medium in a gaseous state compressed by the first compressor 112 and supplying the condensed first heating medium to the first expansion unit 111. Therefore, the first heat medium that has flowed through the first flow path 114 and has been vaporized can be condensed, and the first heat medium in a liquid state can be supplied to the first expansion unit 111. The second circulation circuit 120 can achieve the same effect.

The third circulation circuit 130 includes a third flow passage 133 through which the third heat medium flows and which exchanges heat with the first flow passage 114; and a fourth circulation part 134 through which the third heating medium circulates and exchanges heat with the second circulation part 124. Therefore, the thermal energy supplied to the first flow portion 114 can be supplied to the third flow portion 133 through the heat exchange between the first flow portion 114 and the third flow portion 133. Similarly, the thermal energy supplied to the second flow portion 124 can be supplied to the fourth flow portion 134 by the heat exchange between the second flow portion 124 and the fourth flow portion 134.

As shown in fig. 8, when the second cooler 21 needs to adjust the temperature of the second heat medium to the second temperature and supply the second heat medium, the second cooler 21 normally includes a unit having the same configuration as the second circulation circuit 120 therein. Then, heat is exchanged between the heat medium used in the unit and the second heat medium, and the temperature of the second heat medium is adjusted to the second temperature. In this case, in the second circulation circuit 20, a configuration for exchanging heat between the heat medium that is atomized, compressed, and condensed and the second heat medium and a configuration for exchanging heat between the second heat medium in the second circulation part 124 and the third heat medium in the fourth circulation part 134 are required. In contrast, in the second circulation circuit 120, the heat medium that is atomized, compressed, and condensed and the heat medium that flows to the second circulation unit 124 are the same second heat medium, and a configuration in which heat exchange is performed between the heat medium that is atomized, compressed, and condensed and the second heat medium is not necessary. Therefore, the configuration of the second circulation circuit 120 can be simplified as compared with the second circulation circuit 20. Further, when the second circulation part 124 exchanges heat with the fourth circulation part 134, latent heat of the second heat medium can be used, so that the efficiency of heat exchange can be improved. The same effect can be achieved by the first circulation circuit 110.

The third circulation circuit 130 includes: flow paths 133a, 134a, and 135a for allowing the third heat medium to flow from the third flow portion 133 and the fourth flow portion 134 to the heat exchanger 93 for exchanging heat with the lower electrode 92; and flow paths 135b, 135c, and 135d for allowing the third heat medium to flow from the heat exchanger 93 to the third flow portion 133 and the fourth flow portion 134. Therefore, the heat exchanger 93 that exchanges heat with the lower electrode 92 can be supplied with the heat energy by the third heat medium.

The driving state of the first compressor 112 is controlled by the control unit 80. Therefore, the degree of compression of the first heat medium in a gaseous state by the first compressor 112 can be controlled, and the amount of heat energy supplied to the first flow path 114 can be controlled. Therefore, even if the flow rate of the first heat medium flowing through the first flow path 114 is not controlled, the heat exchanged between the first flow path 114 and the third flow path 133 can be adjusted, and the temperature of the lower electrode 92 can be controlled. Similarly, since the driving state of the second compressor 122 is controlled by the control unit 80, the temperature of the lower electrode 92 can be controlled by adjusting the amount of heat exchanged between the second flow passage 124 and the fourth flow passage 134.

The third circulation circuit 130 is provided with a third distribution valve 135, and the third distribution valve 135 changes the ratio of the third heat medium flowing from the heat exchanger 93 to the third flow part 133 to the third heat medium flowing from the heat exchanger 93 to the fourth flow part 134. Therefore, the ratio of the thermal energy received by the third flow portion 133 from the first flow portion 114 to the thermal energy received by the fourth flow portion 134 from the second flow portion 124 can be changed by the third distribution valve 135. For example, by flowing the third heat medium from the heat exchanger 93 to only the fourth flow portion 134, heat exchange between the first flow portion 114 and the third flow portion 133 due to the third heat medium flowing to the third flow portion 133 can be suppressed. In addition, when the third heat medium flows through the third flow path 133, the thermal energy remaining in the first flow path 114 may be supplied to the third flow path 133 even if the first heat medium does not flow through the first flow path 114. In this regard, according to the above configuration, the responsiveness of controlling the temperature of the lower electrode 92 can be further improved.

In the third distribution valve 135, the pressure loss of the third heating medium is fixed regardless of the ratio of the third heating medium circulated from the heat exchanger 93 to the third circulation part 133 to the third heating medium circulated from the heat exchanger 93 to the fourth circulation part 134. Therefore, when the third heat medium is circulated in the third circulation circuit 130 by the pump 32, the pump 32 can be driven in a constant driving state without controlling the driving state of the pump 32.

The first embodiment can be modified as described below. The same portions as those of the first embodiment are given the same reference numerals, and thus the description thereof is omitted.

In the third distribution valve 135, the pressure loss of the third heat medium may vary depending on the ratio of the third heat medium flowing from the heat exchanger 93 to the third flow part 133 to the third heat medium flowing from the heat exchanger 93 to the fourth flow part 134. In this case, the driving state of the pump 32 may be appropriately changed.

The control unit 80 can switch the driving state of the first compressor 112 to on or off, and can also control the time for turning on the first compressor 112.

As shown in fig. 2, the first circulation loop 110 may further include: a bypass flow path 118a for circulating the vaporized first heating medium from the flow path 118 to the first condenser 113 while bypassing the first compressor 112; and an opening/closing valve 118b for opening and closing the bypass flow path 118 a. The control unit 80 may stop the first compressor 112 when the on-off valve 118b is opened. The second circulation circuit 120 similarly includes a bypass flow path 128a and an on-off valve 128 b. The controller 80 may stop the second compressor 122 when the on-off valve 128b is opened.

In the above configuration, by closing the on-off valve 118b, the vaporized first heat medium can be made to flow to the first compressor 112 through the flow path 118 without flowing to the bypass flow path 118 a. On the other hand, by opening the on-off valve 118b, the vaporized first heat medium can bypass the first compressor 112 through the bypass flow path 118a and can flow from the flow path 118 to the first condenser 113. When the on-off valve 118b is opened, the control unit 80 stops the first compressor 112. Therefore, when the required heating energy supplied to the first circulation unit 114 is small, the first compressor 112 can be stopped, and the energy consumed by the temperature control system 200 can be reduced. The second circulation circuit 120 can achieve the same effect. In addition, a switching valve that switches the flow of the first heating medium (second heating medium) between the first compressor 112 (second compressor 122) and the first condenser 113 (second condenser 123) may be provided instead of the on-off valve 118b (128 b).

Instead of first fan 115 and second fan 125, first condenser 113 and second condenser 123 may be water-cooled by cooling water.

(second embodiment)

As shown in fig. 3, the temperature control system 300 of the present embodiment adds the first heat storage unit 16 (first heat storage portion) and the second heat storage unit 26 (second heat storage portion) to the temperature control system 200 of the first embodiment.

First circulation circuit 210 is a circuit for circulating the first heating medium. The second circulation circuit 220 is independent from the first circulation circuit 210, and is a circuit for circulating the second heating medium. The third circulation circuit 230 is independent from the first circulation circuit 210 and the second circulation circuit 220, and is a circuit for circulating the third heating medium.

The first circulation circuit 210 includes the first expansion unit 111, the first circulation unit 114, the first compressor 112, the first condenser 113, the first fan 115, the first heat storage circulation unit 16b, and the like.

The first circulating portion 114 and the first heat storage circulating portion 16b are connected by a flow path 218. The first heat storage flowing unit 16b is connected to the first compressor 112 via a flow path 219. The flow channel 117 and the flow channel 218 form a first outward path. The flow path 219 constitutes a first return path.

The B port of the third distribution valve 135 is connected to the first heat release flowing portion 16c through a flow path 235. The first heat radiation circulating portion 16c and the third circulating portion 133 are connected by a flow path 236. The first heat release circulation part 16c is provided inside the first heat storage unit 16, and circulates the third heat medium. The flow path 235 and the flow path 236 form a first intermediate return path.

By flowing the first heat medium at a temperature lower than-10 ℃ to the first heat storage flowing part 16b, the first heat storage material 16a changes to a solid at-10 ℃ (third temperature) and stores latent heat as thermal energy. Then, by flowing the third heat medium having a temperature higher than-10 ℃ to the first heat release flow part 16c, the latent heat (thermal energy) accumulated in the first heat storage material 16a is used for cooling the third heat medium.

The second circulation circuit 220 includes the second expansion unit 121, the second circulation unit 124, the second compressor 122, the second condenser 123, the second fan 125, the second heat storage circulation unit 26b, and the like.

The second circulation unit 124 and the second heat storage circulation unit 26b are connected by a flow path 228. The second heat storage circulation unit 26b and the second compressor 122 are connected by a flow passage 229. The flow path 127 and the flow path 228 form a second outward path. The second return path is constituted by the flow path 229.

The port a of the third distribution valve 135 is connected to the second heat release circulation portion 26c through a flow path 237. The second heat radiation circulating portion 26c and the fourth circulating portion 134 are connected by a flow path 238. The second heat release circulation part 26c is provided inside the second heat storage unit 26, and circulates the third heat medium. Further, the flow path 237 and the flow path 238 constitute a second intermediate return path. The third return path is constituted by the flow paths 135b, 235, 236, 237, and 238.

By flowing the second heat medium at a temperature lower than 100 ℃ to the second heat storage flowing portion 26b, the second heat storage material 26a changes to a solid at 100 ℃ (fourth temperature) and accumulates latent heat as thermal energy. Then, the third heat medium having a temperature higher than 100 ℃ is circulated to the second heat release circulation unit 26c, so that the latent heat (thermal energy) accumulated in the second heat storage material 26a is used for cooling the third heat medium.

The present embodiment described in detail above has the following advantages. In addition, only the advantages different from the first embodiment will be described here.

The first heat storage unit 16 is supplied with the first heat medium, and stores thermal energy based on a change in state of the first heat storage material 16a at-10 ℃. Therefore, the first heat storage unit 16 can store thermal energy in preparation for, for example, changing the temperature of the lower electrode 92. The second circulation circuit 220 has the same configuration as the first circulation circuit 210, and can achieve the same operational effects.

When the third circulating unit 133 receives the thermal energy from the first circulating unit 114 and when the fourth circulating unit 134 receives the thermal energy from the second circulating unit 124, the thermal energy stored in the first heat storage unit 16 and the second heat storage unit 26 can be used. Therefore, the heating energy supplied to the third flow portion 133 and the fourth flow portion 134 can be increased, and the temperature of the third heat medium can be rapidly changed. Therefore, the responsiveness of controlling the temperature of the lower electrode 92 can be further improved.

The third circulation circuit 230 includes passages 235 and 236, and the passages 235 and 236 allow the third heat medium to flow from the heat exchanger 93 to the third flow path 133 through the first heat storage unit 16. Therefore, when the third heat medium is caused to flow from the heat exchanger 93 to the third flow passage 133, the first heat storage unit 16 can directly supply the third heat medium with thermal energy. Similarly, when the third heat medium is caused to flow from the heat exchanger 93 to the fourth flow portion 134, the third heat medium can be directly supplied with the heating energy from the second heat storage unit 26. Therefore, the responsiveness of controlling the temperature of the lower electrode 92 can be further improved.

(third embodiment)

The third embodiment will be described below mainly focusing on differences from the second embodiment. The same portions as those in the first and second embodiments are denoted by the same reference numerals, and description thereof is omitted.

As shown in fig. 4, the temperature control system 400 according to the present embodiment is the temperature control system 300 according to the second embodiment, to which the first distribution valve 12 and the second distribution valve 22 are added. In addition, the temperature control system 400 includes a second circulation circuit 320 that heats the second circulation unit 124, instead of the second circulation circuit 120 that cools the second circulation unit 124.

First circulation circuit 310 is a circuit for circulating the first heating medium. The second circulation circuit 320 is independent from the first circulation circuit 310 and is a circuit for circulating the second heating medium. The third circulation circuit 230 is independent from the first circulation circuit 310 and the second circulation circuit 320, and is a circuit for circulating the third heating medium.

The first compressor 112 and the first condenser 313 are connected by a flow path 116. The water line 315a is connected to an inflow port of the first condenser 313. Cooling water having a first water temperature (for example, 30 ℃) is supplied from a water line 315a to the first condenser 313. The water passage 315b is connected to an outflow port of the first condenser 313. The water passage 315b is provided with a gate valve 315 c. The gate valve 315c controls the flow rate of the cooling water flowing through the water passage 315 b.

The first condenser 313 (first condensing unit) condenses the first heating medium in a gaseous state compressed by the first compressor 112 and supplies the condensed first heating medium to the first expansion unit 111. At this time, the first heat medium flowing through the first condenser 313 is water-cooled. The first condenser 313 and the first expansion unit 111 are connected through the flow path 119.

Since the first compressor 112 compresses the first heat medium in a gas state, if the first heat medium in a liquid state is compressed, there is a possibility that breakage may occur. When the amount of heat exchanged between the first flow portion 114 and the third flow portion 133 is small, there is a possibility that: the first heating medium flowing through the first circulation part 114 is not sufficiently evaporated, and the first heating medium in a liquid state is supplied to the first compressor 112. In addition, when the amount of heat exchanged between the first heat storage flowing portion 16b and the first heat storage material 16a is small, there is a possibility that: the first heat medium flowing through the first heat storage flowing part 16b is not sufficiently evaporated, and the first heat medium in a liquid state is supplied to the first compressor 112.

Thus, the first circulation loop 310 includes: a connection flow path 316 for connecting the first compressor 112 and the first condenser 313, specifically the flow path 116 and the flow path 17a, and for flowing the first heat medium in a gas state compressed by the first compressor 112 to the flow path 17 a; and an on-off valve 314 that opens and closes the connection flow path 316.

The flow path 17a is connected to a common port (COM) of the first distribution valve 12. The first distribution valve 12 (adjustment portion) is a three-way valve including a common port, an a port, and a B port. The channel 17b is connected to the a port. The channel 17d is connected to the B port.

The first distribution valve 12 continuously changes the ratio of the flow rate of the first heat medium flowing from the flow path 17a to the flow path 17b to the flow rate of the first heat medium flowing to the flow path 17 d. The first distribution valve 12 continuously changes the state between a state in which the first heat medium flows from the flow path 17a to the flow path 17b at 100% and a state in which the first heat medium flows from the flow path 17a to the flow path 17d at 100%. That is, the first distribution valve 12 changes the ratio at which the first heat medium supplied from the first expansion unit 111 through the flow path 17a is distributed to the first flow path 114 and the first heat storage flow path 16b of the first heat storage unit 16.

The pressure loss of the first heating medium is fixed in the first distribution valve 12 regardless of the ratio of the first heating medium supplied from the first expansion part 111 to be distributed to the first circulation part 114 and the first heat storage circulation part 16b of the first heat storage unit 16.

The first heat storage circulation unit 16b is connected to the first compressor 112 via a flow passage 319. The first flow path 114 and the flow path 319 are connected by a flow path 318. The flow paths 17a, 17b, and 17d form a first outward path. The flow paths 318 and 319 constitute a first return path.

The second expansion unit 121 and the evaporator 324 are connected by a flow path 127. The water passage 325a is connected to an inflow port of the evaporator 324. The cooling water having a second water temperature (for example, 60 ℃) higher than the first water temperature is supplied from the water passage 325a to the evaporator 324. The water passage 325b is connected to an outflow port of the evaporator 324.

The evaporator 324 (evaporator) evaporates the second heat medium expanded and atomized by the second expansion part 121 and supplies the evaporated second heat medium to the second compressor 122. At this time, the second heating medium flowing through the evaporator 324 is heated by the cooling water of the second water temperature. The evaporator 324 is connected to the second compressor 122 through a flow path 128.

Since the second compressor 122 compresses the second heating medium in a gaseous state, there is a possibility of breakage if the second heating medium in a liquid state is compressed. In the case where the second heating medium is not sufficiently evaporated in the evaporator 324, there is a possibility that the second heating medium in a liquid state is supplied to the second compressor 122.

Thus, the second circulation circuit 320 includes: a connection flow path 326 for connecting the second compressor 122 and the second distribution valve 22, specifically, the flow path 27a and the flow path 127, and for flowing the second heat medium in a gas state compressed by the second compressor 122 to the flow path 127; and an open/close valve 322 for opening and closing the connection flow path 326.

The flow path 27a is connected to the common port (COM) of the second distribution valve 22. The second distribution valve 22 (adjustment portion) is a three-way valve including a common port, an a port, and a B port. The channel 27b is connected to the a port. The channel 27d is connected to the B port.

The second distribution valve 22 continuously changes the ratio of the flow rate of the second heat medium flowing from the flow path 27a to the flow path 27b to the flow rate of the second heat medium flowing to the flow path 27 d. The second distribution valve 22 continuously changes the state between a state in which the second heat medium flows from the flow path 27a to the flow path 27b at 100% and a state in which the second heat medium flows from the flow path 27a to the flow path 27d at 100%. That is, the second distribution valve 22 changes the ratio of the second heat medium supplied from the second compressor 122 through the flow path 27a to be distributed to the second circulation part 124 and the second heat storage circulation part 26b of the second heat storage unit 26. The pressure loss of the second heating medium is fixed in the second distribution valve 22 regardless of the ratio of the second heating medium supplied from the second compressor 122 to be distributed to the second circulation part 124 and the second heat storage circulation part 26b of the second heat storage unit 26.

The second heat storage circulation portion 26b and the second expansion portion 121 are connected by a flow path 329. The second flow passage 124 and the flow passage 329 are connected by a flow passage 328. The flow paths 27a, 27b, and 27d form a second outward path. The second return path is constituted by the flow paths 328 and 329.

When the first heat medium atomized by the first expansion unit 111 is caused to flow to the first flow path 114 through the first distribution valve 12, the controller 80 causes the second heat medium supplied from the second compressor 122 to flow to the second heat storage unit 26 through the second distribution valve 22. On the other hand, when the second heat medium compressed by the second compressor 122 is caused to flow to the second flow path 124 through the second distribution valve 22, the controller 80 causes the first heat medium supplied from the first expansion unit 111 to flow to the first heat storage unit 16 through the first distribution valve 12. When the third heat medium is not caused to flow from the heat exchanger 93 to the third flow path 133 by the third distribution valve 135, the first heat medium supplied from the first expansion unit 111 is caused to flow to the first heat storage unit 16 by the first distribution valve 12. On the other hand, the controller 80 causes the second heat medium supplied from the second compressor 122 to flow to the second heat storage unit 26 through the second distribution valve 22 without causing the third heat medium to flow from the heat exchanger 93 to the fourth flow part 134 through the third distribution valve 135.

The present embodiment described in detail above has the following advantages. In addition, only the advantages different from the first embodiment and the second embodiment will be described here.

The first circulation circuit 310 is provided with a first distribution valve 12, and the first distribution valve 12 changes the ratio of the first heat medium atomized by the first expansion unit 111 to the first circulation unit 114 and the first heat storage unit 16. Therefore, the ratio of the thermal energy supplied from the first expansion unit 111 to the first circulation unit 114 to the thermal energy supplied to the first heat storage unit 16 can be changed by the first distribution valve 12. Therefore, the ratio of the thermal energy used for heat exchange between the first flow portion 114 and the third flow portion 133 to the thermal energy stored in the first heat storage unit 16 can be changed. Similarly, the ratio of the thermal energy used for heat exchange between the second circulating unit 124 and the fourth circulating unit 134 to the thermal energy stored in the second heat storage unit 26 can be changed.

The temperature control system 400 includes a control unit 80, and the control unit 80 controls the first distribution valve 12 and the second distribution valve 22. When the first heat medium atomized by the first expansion unit 111 is caused to flow to the first flow path 114 through the first distribution valve 12, the controller 80 causes the second heat medium supplied from the second compressor 122 to flow to the second heat storage unit 26 through the second distribution valve 22. Therefore, when the first heat medium atomized by the first expansion part 111 is caused to flow to the first circulation part 114, that is, when the need for heat exchange between the second circulation part 124 and the fourth circulation part 134 is small, the thermal energy can be accumulated in the second heat storage unit 26. On the other hand, when the second heat medium supplied from the second compressor 122 is circulated to the second circulation unit 124, that is, when the need for heat exchange between the first circulation unit 114 and the third circulation unit 133 is small, the heat energy can be accumulated in the first heat storage unit 16.

The temperature control system 400 includes a control unit 80, and the control unit 80 controls the first distribution valve 12, the second distribution valve 22, and the third distribution valve 135. Then, the controller 80 causes the first heat medium supplied from the first expansion unit 111 to flow through the first distribution valve 12 to the first heat storage unit 16 without causing the third heat medium to flow through the third distribution valve 135 to the third flow passage 133 from the heat exchanger 93. Therefore, when the third heat medium is not caused to flow from the heat exchanger 93 to the third flow passage 133, that is, when heat exchange between the first flow passage 114 and the third flow passage 133 is not required, the thermal energy can be accumulated in the first heat storage unit 16. On the other hand, when the third heat medium is not caused to flow from the heat exchanger 93 to the fourth flow part 134, that is, when heat exchange between the second flow part 124 and the fourth flow part 134 is not required, the thermal energy can be accumulated in the second heat storage unit 26.

The first circulation loop 310 includes: a connection flow path 316 connecting the first compressor 112 and the first condenser 313 to the flow path 17a, and allowing the first heat medium in a gas state compressed by the first compressor 112 to flow to the flow path 17 a; and an on-off valve 314 that opens and closes the connection flow path 316. With this configuration, the first heat medium in a gaseous state compressed by the first compressor 112 and having an increased temperature can be made to flow through the connection flow path 316 to the flow path 17a by opening the on-off valve 314. Therefore, even when the amount of heat exchanged between the first flow channel 114 and the third flow channel 133 is small, the first heat medium flowing through the first flow channel 114 can be sufficiently evaporated, and the supply of the first heat medium in a liquid state to the first compressor 112 can be suppressed.

The second circulation loop 320 includes: a connection flow path 326 which connects the second expansion unit 121 and the evaporator 324 to the flow path 27a and flows the second heat medium in a gas state compressed by the second compressor 122 to the flow path 127; and an open/close valve 322 for opening and closing the connection flow path 326. According to this configuration, by opening the on-off valve 322, the second heat medium in a gaseous state compressed by the second compressor 122 and having an increased temperature can be made to flow to the flow path 127 through the connection flow path 326. Therefore, the second heat medium flowing through the evaporator 324 can be sufficiently evaporated, and the supply of the second heat medium in a liquid state to the second compressor 122 can be suppressed.

The second circulation circuit 320 includes the second compressor 122, and the second compressor 122 compresses the second heating medium in a gaseous state and supplies the second heating medium to the flow path 27 a. Therefore, the second heat medium in a gaseous state can be made to flow to the second flow passage 124 through the flow passages 27a, 27 b. Further, by causing the second circulation part 124 to function as a condenser and condensing the second heat medium in the second circulation part 124, it is possible to supply thermal energy to the second circulation part 124 (to be more specific, to heat the second circulation part 124).

The second circulation circuit 320 includes: a second expansion part 121 to which the second heat medium that flows through the second flow part 124 and is liquefied is supplied through a flow path 329, and which expands and atomizes the second heat medium in a liquid state; and an evaporator 324 for evaporating the second heating medium atomized by the second expansion part 121 and supplying the same to the second compressor 122. Therefore, the second heat medium liquefied by flowing through the second flow path 124 can be evaporated, and the second heat medium in a gaseous state can be supplied to the second compressor 122.

The first condenser 313 condenses the first heat medium by exchanging heat between the cooling water at the first water temperature and the first heat medium, and the evaporator 324 evaporates the second heat medium by exchanging heat between the cooling water at the second water temperature higher than the first water temperature and the second heat medium. According to this configuration, when cooling water of a plurality of temperatures can be used, cooling water of a first water temperature can be used for the first condenser 313, and cooling water of a second water temperature higher than the first water temperature can be used for the evaporator 324. Therefore, the cooling water of a plurality of temperatures can be effectively used, and thus the energy consumed by the temperature control system 400 can be reduced.

The third embodiment can be modified and implemented as described below. The same portions as those in the third embodiment are given the same reference numerals, and the description thereof is omitted.

The controller 80 may cause the first heat medium supplied from the first expansion unit 111 to flow to the first heat storage unit 16 through the first distribution valve 12 when the third heat medium is caused to flow from the heat exchanger 93 to the third flow path 133 through the third distribution valve 135. The controller 80 may circulate the second heat medium supplied from the second compressor 122 to the second heat storage unit 26 through the second distribution valve 22 when the third heat medium is circulated from the heat exchanger 93 to the fourth circulation unit 134 through the third distribution valve 135.

As shown in fig. 5, the cooling water of the second water temperature may be the cooling water heated by the cooling water of the first water temperature for cooling the planned component 95. The predetermined member 95 may be, for example, a member such as a heating furnace installed in a factory together with the semiconductor manufacturing apparatus 90, or a member for cooling a chamber of the semiconductor manufacturing apparatus 90. The water passage 315a is connected to the predetermined member 95 via a water passage 317. The predetermined member 95 is connected to the evaporator 324 via a water passage 327 a. The water passage 327b is connected to an outflow port of the evaporator 324.

According to the above configuration, the cooling water that has been increased from the first water temperature to the second water temperature by the cooling of the schedule member 95 can be effectively used as the cooling water at the second water temperature. Therefore, even when only the cooling water of the first water temperature is supplied in a factory or the like, the cooling water of the second water temperature can be supplied to the temperature control system 400.

As shown in fig. 6, the temperature control system 400 may further include: a precooler 311 that cools the cooling water supplied to the first condenser 313 by the cooling water flowing through the evaporator 324; and a preheater 321 for heating the cooling water supplied to the evaporator 324 by the cooling water flowing through the first condenser 313. Specifically, the first condenser 313 and the precooler 311 are connected by a water line 315 a. The precooler 311 is connected to the water line 315 via a water line 315 d. The water passage 315 is connected to the preheater 321 through a water passage 315 e. The gate valve 315c is connected to the preheater 321 through a water passage 315 b. The preheater 321 is connected to the water passage 325 via a water passage 325 c. The precooler 311 is connected to the water path 325 through a water path 325 d. Then, the cooling water of the first temperature (for example, 30 ℃) is supplied from the water passage 315, and the circulated cooling water is discharged from the water passage 325.

According to the above configuration, since the first condenser 313 condenses the first heat medium by exchanging heat between the cooling water and the first heat medium, the cooling water having a low temperature is required in the first condenser 313, and the temperature of the cooling water increases (for example, becomes 35 ℃) before and after the cooling water passes through the first condenser 313. Since the evaporator 324 evaporates the second heat medium by exchanging heat between the cooling water and the second heat medium, the evaporator 324 requires the cooling water having a high temperature, and the temperature of the cooling water decreases (e.g., becomes 25 ℃) before and after the cooling water flows through the evaporator 324.

Here, the temperature control system 400 includes a precooler 311, and the precooler 311 cools the cooling water supplied to the first condenser 313 by the cooling water flowing through the evaporator 324. Therefore, the cooling water flowing through the evaporator 324 and having a reduced temperature can be effectively used to cool the cooling water supplied to the first condenser 313. The temperature control system 400 further includes a preheater 321, and the preheater 321 heats the cooling water supplied to the evaporator 324 by the cooling water flowing through the first condenser 313. Therefore, the cooling water having passed through the first condenser 313 and having an increased temperature can be effectively used to heat the cooling water supplied to the evaporator 324. Thus, the energy consumed by the temperature control system 400 can be reduced.

(fourth embodiment)

The fourth embodiment will be described below mainly focusing on differences from the third embodiment. The same portions as those in the first to third embodiments are assigned the same reference numerals, and the description thereof is omitted.

As shown in fig. 7, the temperature control system 500 of the present embodiment changes the third distribution valve 135 to the fourth distribution valve 435 in the temperature control system 400 of the third embodiment.

The fourth distribution valve 435 (adjustment portion) is a four-way valve having a common port, an H port, a B port, and a C port. The channel 235 is connected to the C port. The flow path 235 is connected to the first heat release circulation portion 16c of the first heat storage unit 16. The flow path 239 is connected to the B port. The flow path 239 is connected to the flow path 135a at a confluence point P1. The flow path 239 is provided with a third check valve 138. The third check valve 138 allows the third heating medium to flow from the fourth distribution valve 435 to the confluence point P1 and prohibits the third heating medium from flowing from the confluence point P1 to the fourth distribution valve 435. The flow path 237 is connected to the H port. The flow path 237 is connected to the second heat release flowing unit 26c of the second heat storage unit 26.

The fourth distribution valve 435 continuously changes the ratio of the flow rate of the third heat medium flowing from the flow path 135b to the flow path 235, the flow rate of the third heat medium flowing to the flow path 239, and the flow rate of the third heat medium flowing to the flow path 237. That is, the fourth distribution valve 435 changes the ratio of the third heat medium flowing from the heat exchanger 93 to the first heat-releasing flow part 16c and the third flow part 133, the third heat medium returning from the heat exchanger 93 to the heat exchanger 93 without passing through the third flow part 133 and the fourth flow part 134, and the third heat medium flowing from the heat exchanger 93 to the second heat-releasing flow part 26c and the fourth flow part 134. The fourth distribution valve 435 continuously changes the state among a state in which the third heat medium flows from the flow path 135b to the flow path 235 at 100%, a state in which the third heat medium flows from the flow path 135b to the flow paths 235, 239, a state in which the third heat medium flows from the flow path 135b to the flow path 239 at 100%, a state in which the third heat medium flows from the flow path 135b to the flow paths 239, 237, and a state in which the third heat medium flows from the flow path 135b to the flow path 237 at 100%. In the fourth distribution valve 435, the pressure loss of the third heating medium is fixed regardless of the ratio of the third heating medium supplied from the pump 32 to be distributed to the flow path 235, the flow path 239, and the flow path 237.

Since the load of the pump 32 does not vary regardless of the distribution ratio of the fourth distribution valve 435, the pump 32 is driven in a certain driving state. Thereby, the pump 32 circulates the third heating medium in the third circulation circuit 430. The third circulation circuit 430 does not have a container for storing the third heating medium. The flow path 133a, the flow path 134a, and the flow path 135a form a third outward path. The third return path is constituted by the flow path 135b, the flow path 235, the flow path 236, the flow path 237, and the flow path 238.

The control unit 80 controls the temperature of the lower electrode 92 to a set temperature. The control section 80 controls the distribution ratio of the fourth distribution valve 435 based on the set temperature of the lower electrode 92 and the detection result of the temperature sensor 94.

The present embodiment described in detail above has the following advantages. In addition, only the advantages different from the third embodiment are described here.

The fourth distribution valve 435 can change the ratio of the thermal energy received by the third flow passage 133c from the first flow passage 114, the thermal energy returned to the heat exchanger 93, and the thermal energy received by the fourth flow passage 134 from the second flow passage 124. Further, the third heat medium flowing out of the heat exchanger 93 can be returned to the heat exchanger 93 without flowing the third heat medium from the heat exchanger 93 to the third flow part 133 and the fourth flow part 134.

(fifth embodiment)

The fifth embodiment will be described below mainly focusing on differences from the first embodiment. The same portions as those in the first to fourth embodiments are assigned the same reference numerals, and the description thereof is omitted.

As shown in fig. 8, the temperature control system 600 of the present embodiment changes the second circulation circuit 120 in the temperature control system 200 of the first embodiment to the second circulation circuit 20.

The first circulation circuit 110 is a circuit for circulating the first heating medium. The second circulation circuit 20 is independent from the first circulation circuit 110, and is a circuit for circulating the second heating medium. The second heating medium is, for example, a liquid composed of 60% of ethylene glycol and 40% of water. The third circulation circuit 130 is a circuit for circulating the third heating medium, independently from the first circulation circuit 110 and the second circulation circuit 20.

The second circulation circuit 20 includes a second cooler 21, a second circulation unit 124, and the like.

The second cooler 21 (second adjustment device) includes a tank 21a, a pump 21b, and the like. The second cooler 21 adjusts the temperature of the second heating medium to 90 c (second temperature) higher than the first temperature. The container 21a (second container) stores the second heating medium adjusted to 90 ℃. The pump 21b discharges the second heat medium stored in the tank 21a to the flow path 27. The flow path 27 is connected to the second flow path 124. The second circulation part 124 is disposed inside the heat exchanger 132 and circulates the second heating medium.

The flow path 28 is connected to the second flow path 124. The flow path 28 is connected to the tank 21a of the second cooler 21. In addition, the flow path 27 constitutes a second outward path. The second return path is constituted by the flow path 28.

The present embodiment described in detail above has the following advantages. In addition, only the advantages different from the first embodiment will be described here.

The second circulation circuit 20 includes a second cooler 21. The second cooler 21 supplies a second heating medium of a second temperature higher than the first temperature. Therefore, the second heating medium of the second temperature for heat exchange can be supplied. The second circulation circuit 20 includes: a second circulation part 124 for circulating the second heating medium; a flow path 27 for flowing the second heat medium supplied from the second cooler 21 to the second flow path 124; and a flow path 28 for circulating the second heat medium flowing through the second circulation unit 124 to the second cooler 21. Therefore, the heat energy can be supplied to the second circulation part 124 through the second heat medium. Here, since the second heat medium having a smaller usable temperature range than the third heat medium is used, a low-priced heat medium can be used as the second heat medium.

The tank 21a of the second cooler 21 may be omitted.

(sixth embodiment)

The sixth embodiment will be described below mainly focusing on differences from the first embodiment. The same portions as those in the first to fifth embodiments are given the same reference numerals, and the description thereof is omitted.

As shown in fig. 9, the temperature control system 700 of the present embodiment changes the second circulation circuit 120 in the temperature control system 200 of the first embodiment to a second circulation circuit 620.

The first circulation circuit 110 is a circuit for circulating the first heating medium. Second circulation circuit 620 is a separate circuit from first circulation circuit 110 for the second heating medium circulation. The second heating medium is, for example, a liquid composed of 60% of ethylene glycol and 40% of water. The price of the second heating medium is low. The third circulation circuit 130 is a circuit for circulating the third heating medium, independently from the first circulation circuit 110 and the second circulation circuit 620.

The lower limit temperature of the third heat medium that can be used is lower than the lower limit temperature of the second heat medium that can be used. The upper limit temperature of the third heat medium that can be used is higher than the upper limit temperature of the second heat medium that can be used. That is, the usable temperature range of the third heat medium is wider than the usable temperature range of the second heat medium. Therefore, the price of the third heating medium is higher than that of the second heating medium.

The second circulation circuit 620 includes a heater 621, a second flow passage 124, and the like.

The heater 621 (second adjusting means) is a heater capable of controlling the amount of heat generation. The heater 621 includes a heating wire heater, a ceramic heater, or the like (not shown), and a flow path through which the second heat medium flows, and heats the second heat medium flowing through the flow path. The heating state of the heater 621 is controlled by the control unit 80.

The flow path of the heater 621 and the second flow path 124 are connected by a flow path 627. The pump 622 discharges the second heating medium from the flow path of the heater 621 to the second circulation unit 124 through the flow path 627. The second circulation part 124 is provided inside the heat exchanger and circulates the second heating medium. The second flow passage 124 is connected to the flow path of the heater 621 via a flow path 628. In addition, the flow path 627 constitutes a second outward path. The second return is constituted by the flow path 628.

The present embodiment described in detail above has the following advantages. In addition, only the advantages different from the first embodiment will be described here.

Since the second circulation circuit 620 includes the heater 621 capable of controlling the amount of heat generation, the temperature of the second heat medium can be adjusted to the second temperature and supplied. In this case, in the second circulation circuit 620, since the heat medium heated by the heater 621 and the heat medium flowing through the second circulation unit 124 can be made to be the same second heat medium, a configuration for exchanging heat between the heat medium compressed, atomized, and vaporized and the second heat medium is not necessary. Therefore, the configuration of the second circulation circuit 620 can be simplified. Here, since the second heat medium having a usable temperature range narrower than that of the third heat medium is used, a low-cost heat medium can be used as the second heat medium.

(seventh embodiment)

The seventh embodiment will be described below focusing on differences from the first embodiment. The same portions as those in the first to sixth embodiments are assigned the same reference numerals, and the description thereof is omitted.

As shown in fig. 10, the temperature control system 800 of the present embodiment includes a heater 96 that directly heats the lower electrode 92, instead of the second circulation circuit 120 of the temperature control system 200 of the first embodiment.

The first circulation circuit 110 is a circuit for circulating the first heating medium. The third circulation circuit 130 is a circuit for circulating the third heating medium, independently from the first circulation circuit 110.

The heater 96 is a heater capable of controlling the amount of heat generation. The heater 96 is provided with a heating wire heater, a ceramic heater, or the like, and is integrated with the lower electrode 92. The heating state of the heater 96 is controlled by the control unit 80 (adjustment unit).

The fifth distribution valve 35 (adjustment portion) is a three-way valve including a common port, an a port, and a B port. The third flow channel 133 is connected to the common port of the fifth distribution valve 35 via a flow channel 36. The a port of the fifth distribution valve 35 and the inflow port of the heat exchanger 93 are connected by a flow path 37. The flow path 37 is provided with a flow meter 33. The flow meter 33 measures the flow rate of the third heating medium flowing through the flow path 37.

The outflow port of the heat exchanger 93 is connected to the third flow passage 133 through the flow path 39. The B port of the fifth distribution valve 35 is connected to the flow path 39 via a flow path 38. The pump 32 is provided in the flow path 39. The pump 32 sucks the third heat medium from the heat exchanger 93 side in the flow path 39 and discharges the third heat medium to the third flow path 133 side.

The fifth distribution valve 35 continuously changes the ratio of the flow rate of the third heat medium flowing from the flow path 36 to the flow path 37 to the flow rate of the third heat medium flowing to the flow path 38. That is, the fifth distribution valve 35 changes the ratio of the third heat medium flowing from the third flow channel 133 to the heat exchanger 93 to the third heat medium not flowing from the third flow channel 133 through the heat exchanger 93 and returning to the third flow channel 133. The fifth distribution valve 35 continuously changes the state between a state in which the third heat medium flows 100% from the third flow path 133 to the heat exchanger 93 and a state in which the third heat medium returns 100% from the third flow path 133 to the third flow path 133 without flowing through the heat exchanger 93. The pressure loss of the third heating medium is fixed in the fifth distribution valve 35 regardless of the ratio of the third heating medium supplied from the third flow path 133 to the heat exchanger 93.

Since the load of the pump 32 is not changed regardless of the distribution ratio of the fifth distribution valve 35, the pump 32 is driven in a certain driving state. Thereby, the pump 32 circulates the third heating medium in the third circulation circuit 730. The third circulation loop 730 does not have a container for storing the third heating medium. The flow path 36 and the flow path 37 constitute a third outward path. The third return path is constituted by the flow path 39.

The present embodiment described in detail above has the following advantages. In addition, only the advantages different from the first embodiment will be described here.

The heater 96 can heat the lower electrode 92 and can control the amount of heat generation. Therefore, the lower electrode 92 can be directly heated without using a heat medium, and the configuration can be simplified.

The temperature control system 800 includes the fifth distribution valve 35, and the fifth distribution valve 35 adjusts the amount of heat exchanged between the first flow passage 114 and the third flow passage 133. Therefore, the fifth distribution valve 35 can adjust the heating energy supplied to the third flow channel 133. The temperature control system 800 includes a control unit 80 that adjusts the amount of heat generated by the heater 96. Therefore, the control unit 80 can adjust the thermal energy directly supplied from the heater 96 to the lower electrode 92. Therefore, the temperature of the lower electrode 92 can be controlled. Here, as described above, the amount of the third heating medium circulated in the third circulation circuit 730 can be reduced. Therefore, the temperature of the third heat medium can be changed quickly, and the responsiveness of controlling the temperature of the lower electrode 92 can be improved.

(eighth embodiment)

The eighth embodiment will be described below mainly focusing on differences from the fifth embodiment. The same portions as those in the first to seventh embodiments are assigned the same reference numerals, and the description thereof is omitted.

As shown in fig. 11, the integrated temperature control system 900 of the present embodiment includes three (a plurality of) temperature control systems 600 of the fifth embodiment. However, the integrated temperature control system 900 includes a large-scale first expansion unit 811, a first compressor 812, a first condenser 813, and a first fan 815 in one set instead of the first expansion unit 111, the first compressor 112, the first condenser 113, and the first fan 115 in three sets.

The first expansion unit 811, the first compressor 812, the first condenser 813, and the first fan 815 have 10 to 100 times the cooling capacity of the first expansion unit 111, the first compressor 112, the first condenser 113, and the first fan 115. The first expansion part 811 discharges the atomized first heating medium to the common flow path 816 through the flow path 817 (first outward path). The common channel 816 (first outgoing channel) branches into three (or more) channels 117 described above. Each flow channel 117 is connected to the first flow passage 114 of each temperature control system 600.

The flow path 118 of each temperature control system 600 is connected to a common flow path 814 (first return). The common flow path 814 is connected to the first compressor 812 via a flow path 818 (first return).

The present embodiment described in detail above has the following advantages. In addition, only the advantages different from the fifth embodiment will be described here.

The first expansion part 811 for supplying the first heat medium at the atomized first temperature, the first compressor 812, and the first condenser 813 can be combined into one set in the plurality of temperature control systems 600. Therefore, the configuration of the integrated temperature control system 900 including the plurality of temperature control systems 600 can be simplified. Further, in some cases, the integrated temperature control system 900 includes several tens to several hundreds of temperature control systems 600, and in such cases, the above-described effects become remarkable.

The temperature control system 600 controls the temperature of the lower electrode 92 by adjusting the amount of heat exchanged between the first flow portion 114 and the third flow portion 133 through the third distribution valve 135. Therefore, the first expansion part 811 may supply the atomized first heat medium of a constant first temperature without changing the temperature of the first heat medium according to the change in the target temperature of the lower electrode 92. Therefore, even with the configuration in which the first expansion part 811, the first compressor 812, and the first condenser 813 are provided in a single set for the plurality of temperature control systems 600, the temperature of the lower electrode 92 of each temperature control system 600 can be controlled.

Instead of three (a plurality of) control units 80, a single integrated control unit may be provided. In this case, the integrated control unit can control the driving state of the first compressor 812 based on the set temperature of each temperature control system 600 and the detection result of the temperature sensor 94.

Further, a container for storing the first heating medium may be provided between the first condenser 813 and the first expansion part 811. As in the first circulation circuit 110 of fig. 2, the first compressor 812 may be bypassed to perform natural cooling.

The above embodiments may be modified as described below. The same portions as those in the above embodiments are given the same reference numerals, and the description thereof is omitted.

The second heat storage material 26a of the second heat storage unit 26 may change its state between solid and liquid at 80 ℃ (fourth temperature) lower than 90 ℃ (second temperature). In this case, the controller 80 can change the second heat storage material 26a into a liquid at 80 ℃ by circulating the second heat medium having a temperature higher than 80 ℃ to the second heat storage unit 26 through the second distribution valve 22, and can store latent heat (thermal energy) in the second heat storage unit 26. When the second heat medium (third heat medium) having a temperature lower than 80 ℃ is caused to flow into the second heat radiation circulation unit 26c, the thermal energy accumulated in the second heat storage material 26a can be used for heating the second heat medium (third heat medium).

The control target is not limited to the lower electrode 92, and may be the upper electrode 91 of the semiconductor manufacturing apparatus 90. The object to which each of the temperature control systems described above is applied is not limited to the semiconductor manufacturing apparatus 90, and may be other manufacturing apparatuses, processing apparatuses, and the like.

The present disclosure is described based on the embodiments, but the present disclosure should not be construed as being limited to the embodiments and the structures. The present disclosure also includes various modifications and variations within an equivalent range. In addition, various combinations and modes, and further, other combinations and modes including only one element or more than one element or less than one element also fall within the scope and the idea of the present disclosure.

Description of the reference numerals

12 … first distribution valve (adjustment portion), 14 … first circulation portion, 16 … first heat storage unit (first heat storage portion), 16a … first heat storage material, 16b … first heat storage circulation portion, 16c … first heat release circulation portion, 20 … second circulation circuit, 21 … second cooler (second adjustment device), 21a … container (second container), 22 … second distribution valve (adjustment portion), 24 … second circulation portion, 26 … second heat storage unit (second heat storage portion), 26a … second heat storage material, 26b … second heat storage circulation portion, 26c … second heat release circulation portion, 35 … fifth distribution valve (adjustment portion), 80 … control portion (control portion, adjustment portion), 90 … semiconductor manufacturing apparatus, 92 … lower electrode (control object), 3693 93 … heat exchanger (heat exchange portion), 95 … predetermined means, 3996, 96 …, 110 … first circulation heater circuit, 111 … first expansion section, 112 … first compressor (first expansion section), 113 … first condenser (first condensation section), 114 … first circulation section, 118a … bypass flow path, 118b … on-off valve, 120 … second circulation circuit, 121 … second expansion section, 122 … second compressor (second compression section), 123 … second condenser (second condensation section), 124 … second circulation section, 128a … bypass flow path, 128b … on-off valve, 130 … third circulation circuit, 131 … heat exchanger, 132 … heat exchanger, 133 … third circulation section, 134 … fourth circulation section, 135 … third distribution valve (adjustment section), 200 … temperature control system, 210 … first circulation circuit, 220 … second circulation circuit, 36230 … third circulation circuit, 300 … temperature control system, 310 first circulation circuit, 36311 … first circulation circuit, … pre-cooler 36314 pre-cooler … switching valve, … second circulation circuit, 321 … preheater, 322 … on/off valve, 324 … evaporator (evaporation part), 326 … connecting flow path, 400 … temperature control system, 430 … third circulation circuit, 435 … fourth distribution valve (adjustment part), 500 … temperature control system, 600 … temperature control system, 621 … heater (second adjustment part), 700 … temperature control system, 800 … temperature control system, 811 … first expansion part, 812 … first compressor (first compression part), 813 … first condenser (first condensation part), 900 … integrated temperature control system.