阅读说明：本技术 一种特殊的二轴联动十字运动矩形滑台模组 (Special two-axis linkage cross motion rectangular sliding table module ) 是由 谷秋梅 于 2020-12-25 设计创作，主要内容包括：本发明涉及一种超精密二轴联动十字运动装置,具体为一种特殊的二轴联动十字运动矩形滑台模组,包括载体部分、中间部分和底座部分,所述载体部分的下侧设置有中间部分,且中间部分的下侧设置有底座部分,所述载体部分包括载台面板,所述载台面板的中心位置固定安装有Y轴直线电机线圈,所述载台面板上固定安装有第一极限位置开关和第一撞块,所述载台面板上对称安装有两组Y轴直线导轨,所述中间部分包括预压座,所述预压座共设置有两组。本发明采用UMAC运动控制器控制直驱电机,并使用光栅系统实现最终的精度要求,关键轴系X、Y的线型运动采用交叉滚子导轨进行导向运动,可以保证高速运动和频繁加减速运动,实现精确的位置步进和快速的响应。(The invention relates to an ultra-precise two-axis linkage cross motion device, in particular to a special two-axis linkage cross motion rectangular sliding table module which comprises a carrier part, a middle part and a base part, wherein the middle part is arranged on the lower side of the carrier part, the base part is arranged on the lower side of the middle part, the carrier part comprises a carrier panel, a Y-axis linear motor coil is fixedly arranged at the center position of the carrier panel, a first limit position switch and a first collision block are fixedly arranged on the carrier panel, two groups of Y-axis linear guide rails are symmetrically arranged on the carrier panel, the middle part comprises a prepressing seat, and the prepressing seats are arranged in two groups. The invention adopts the UMAC motion controller to control the direct drive motor, and uses the grating system to realize the final precision requirement, the linear motion of the key shafting X, Y adopts the crossed roller guide rail to carry out the guide motion, thereby ensuring the high-speed motion and the frequent acceleration and deceleration motion, and realizing the precise position stepping and the rapid response.)

1. The utility model provides a special two-axis linkage cross motion rectangle slip table module, includes carrier part (1), mid portion (2) and base portion (3), its characterized in that: the carrier comprises a carrier part (1), wherein a middle part (2) is arranged on the lower side of the carrier part (1), a base part (3) is arranged on the lower side of the middle part (2), the carrier part (1) comprises a carrier panel (101), a Y-axis linear motor coil (102) is fixedly arranged at the center position of the carrier panel (101), a first limit position switch (104) and a first collision block (105) are fixedly arranged on the carrier panel (101), two groups of Y-axis linear guide rails (106) are symmetrically arranged on the carrier panel (101), the middle part (2) comprises pre-pressing seats (201), the pre-pressing seats (201) are arranged in two groups, the two groups of pre-pressing seats (201) are symmetrically arranged on two sides of a middle connecting plate (203), pre-pressing blocks (202) are arranged on the pre-pressing seats (201), the Y-pressing blocks (202) are attached to the Y-pressing blocks (202), and the lower end of the Y-axis linear guide rails (106) is, the central point of middle even board (203) puts fixed mounting with X axle linear electric motor coil (204), the middle one side of even board (203) is installed the second and is collided piece (205) and second limit switch (206), Y axle linear electric motor track (208) and first limiting plate (209) are installed to the opposite side of middle even board (203), base part (3) are including X axle linear electric motor track (301), X axle linear electric motor track (301) fixed mounting is put at the central point of base mounting panel (302), X axle linear electric guide (303) are installed to the symmetry on base mounting panel (302), and X axle linear electric guide (303) are parallel with X axle linear electric motor coil (204), second hydraulic buffer (305) and second limiting plate (306) are installed to the symmetry on base mounting panel (302).

2. The special rectangular sliding table module with the two-shaft linkage and the cross motion as claimed in claim 1, wherein: the microscope carrier comprises a carrier panel (101), and is characterized in that a first grating feedback reading head (103) is installed on the carrier panel (101), a first grating ruler (211) parallel to a Y-axis linear guide rail (106) is installed on an intermediate connecting plate (203), a second grating feedback reading head (207) is installed on the intermediate connecting plate (203), and a second grating ruler (304) parallel to an X-axis linear guide rail (303) is installed on a base installation plate (302).

3. The special rectangular sliding table module with the two-shaft linkage and the cross motion as claimed in claim 1, wherein: the prepressing seat (201) is provided with a screw hole, the prepressing block (202) is installed on the prepressing seat (201) through a jackscrew knob, and the jackscrew knob is inserted in the screw hole.

4. The special rectangular sliding table module with the two-shaft linkage and the cross motion as claimed in claim 1, wherein: holes are formed in the first collision block (105) and the second collision block (205) at equal intervals, and the cross sections of the holes are circular.

5. The special rectangular sliding table module with the two-shaft linkage and the cross motion as claimed in claim 1, wherein: rubber pads are glued on the first limiting plate (209) and the second limiting plate (306), and anti-skid grains are arranged on the surfaces of the rubber pads.

6. The special rectangular sliding table module with the two-shaft linkage and the cross motion as claimed in claim 1, wherein: install first hydraulic buffer (210) on middle even board (203), and first hydraulic buffer (210) symmetry is installed in the both sides of first grating chi (211), install second hydraulic buffer (305) on base mounting panel (302), and second hydraulic buffer (305) symmetry is installed in the both sides of second grating chi (304).

Technical Field

The invention relates to an ultra-precise two-axis linkage cross motion device, in particular to a special two-axis linkage cross motion rectangular sliding table module.

Background

Along with the continuous development of science and technology in China, ultra-precision subjects are more and more widely applied to high-precision industries, particularly, the application of a multi-axis ultra-precision motion table is increased day by day, for example, the adjustment of a small turntable, the debugging of an ultra-precision optical path system, the application of nuclear energy, the detection of a wafer, the detection of a gene sequence and the like, the ultra-precision multi-axis adjustment table is required to be used, a mechanical joint arm cannot meet the requirements of some special industries from the aspects of rigidity and precision, the corresponding functions cannot be realized by the speed and variable-speed motion of the traditional pure mechanical adjustment table, and therefore a special two-axis linkage cross motion rectangular sliding table module is provided for solving the problems.

Disclosure of Invention

The invention aims to provide a special two-axis linkage cross motion rectangular sliding table module to solve the problem that the speed and variable speed motion of the traditional purely mechanical adjusting table in the background technology cannot realize corresponding functions.

In order to achieve the purpose, the invention provides the following technical scheme: a special two-axis linkage cross motion rectangular sliding table module comprises a carrier part, a middle part and a base part, wherein the middle part is arranged on the lower side of the carrier part, the base part is arranged on the lower side of the middle part, the carrier part comprises a carrier panel, Y-axis linear motor coils are fixedly arranged at the central position of the carrier panel, a first limit position switch and a first collision block are fixedly arranged on the carrier panel, two groups of Y-axis linear guide rails are symmetrically arranged on the carrier panel, the middle part comprises pre-pressing seats, the pre-pressing seats are provided with two groups, the two groups of pre-pressing seats are symmetrically arranged on two sides of a middle connecting plate, pre-pressing blocks are arranged on the pre-pressing seats, the Y-axis linear guide rails are attached to the pre-pressing blocks, the lower ends of the Y-axis linear guide rails are connected with the middle connecting plate, and X-axis linear motor coils are fixedly arranged at the central, the second is installed to one side of middle even board and is collided piece and second limit switch, Y axle linear electric motor magnetic track and first limiting plate are installed to the opposite side of middle even board, the base part includes X axle linear electric motor magnetic track, X axle linear electric motor magnetic track fixed mounting puts at the central point of base mounting panel, X axle linear guide is installed to the symmetry on the base mounting panel, and X axle linear guide is parallel with X axle linear electric motor coil, second hydraulic buffer and second limiting plate are installed to the symmetry on the base mounting panel.

Preferably, a first grating feedback reading head is installed on the platform deck panel, a first grating ruler parallel to the Y-axis linear guide rail is installed on the intermediate connecting plate, a second grating feedback reading head is installed on the intermediate connecting plate, and a second grating ruler parallel to the X-axis linear guide rail is installed on the base installation plate.

Preferably, the prepressing seat is provided with a screw hole, the prepressing block is mounted on the prepressing seat through a jackscrew knob, and the jackscrew knob is inserted in the screw hole.

Preferably, holes are formed in the first collision block and the second collision block at equal intervals, and the cross section of each hole is circular.

Preferably, rubber pads are glued on the first limiting plate and the second limiting plate, and anti-skid grains are arranged on the surfaces of the rubber pads.

Preferably, the middle connecting plate is provided with a first hydraulic buffer which is symmetrically arranged at two sides of the first grating ruler, the base mounting plate is provided with a second hydraulic buffer which is symmetrically arranged at two sides of the second grating ruler.

Compared with the prior art, the invention has the beneficial effects that: according to the two-axis linkage cross motion rectangular sliding table module, the UMAC motion controller is adopted to control the direct drive motor, the grating system is used to achieve the final precision requirement, the linear motion of the key shaft system X, Y adopts the cross roller guide rail to conduct guiding motion, high-speed motion and frequent acceleration and deceleration motion can be guaranteed, and accurate position stepping and quick response are achieved;

the X, Y shaft system adopts the crossed roller guide rail, so that the rigidity is ensured, the gravity center is reduced, the whole device is of a stacked structure, the error amplification is reduced to the maximum extent, the initial position is a rectangular outline, the space occupation ratio is reduced, in addition, the device can realize high-frequency variable-speed motion and can also adopt an interpolation mode for motion, simultaneously, the X, Y shaft adopts a mode that a motor is matched with a grating ruler for accurate positioning, and the three-shaft linkage can be realized.

Description of the drawings:

in order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic front view of the structure of the present invention;

FIG. 2 is a schematic structural view of a structural support portion of the present invention;

FIG. 3 is a schematic top view of the structure of the intermediate portion of the structure of the present invention;

FIG. 4 is a schematic bottom view of the structure of the middle part of the structure of the present invention

Fig. 5 is a schematic structural view of a structural base part of the present invention.

In the figure: 1. a carrier moiety; 101. a platform panel; 102. a Y-axis linear motor coil; 103. a first grating feedback reading head; 104. a first extreme position switch; 105. a first bump; 106. a Y-axis linear guide rail; 2. a middle portion; 201. prepressing a seat; 202. pre-briquetting; 203. a middle connecting plate; 204. an X-axis linear motor coil; 205. a second bump block; 206. a second limit position switch; 207. a second grating feedback reading head; 208. a Y-axis linear motor magnetic track; 209. a first limit plate; 210. a first hydraulic buffer; 211. a first grating scale; 3. a base portion; 301. an X-axis linear motor magnetic track; 302. a base mounting plate; 303. an X-axis linear guide rail; 304. a second grating scale; 305. a second hydraulic buffer; 306. and a second limiting plate.

The specific implementation mode is as follows:

the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-5, an embodiment of the present invention is shown: a special two-axis linkage cross motion rectangular sliding table module comprises a carrier part 1, a middle part 2 and a base part 3, wherein the lower side of the carrier part 1 is provided with the middle part 2, the lower side of the middle part 2 is provided with the base part 3, the carrier part 1 comprises a platform panel 101, a Y-axis linear motor coil 102 is fixedly arranged at the central position of the platform panel 101, a first limit position switch 104 and a first collision block 105 are fixedly arranged on the platform panel 101, two groups of Y-axis linear guide rails 106 are symmetrically arranged on the platform panel 101, the middle part 2 comprises two pre-pressing seats 201, the two groups of pre-pressing seats 201 are symmetrically arranged at two sides of a middle connecting plate 203, a pre-pressing block 202 is arranged on the pre-pressing seat 201, the Y-pressing block 202 is attached to the Y-axis linear guide rails 106, the lower end of the Y-axis linear guide rails 106 is connected with the middle connecting plate 203, an X-axis linear motor coil 204 is fixedly, a second collision block 205 and a second limit position switch 206 are installed on one side of the middle connecting plate 203, a Y-axis linear motor magnetic track 208 and a first limit plate 209 are installed on the other side of the middle connecting plate 203, the base part 3 comprises an X-axis linear motor magnetic track 301, the X-axis linear motor magnetic track 301 is fixedly installed in the center of the base installing plate 302, X-axis linear guide rails 303 are symmetrically installed on the base installing plate 302, the X-axis linear guide rails 303 are parallel to the X-axis linear motor coils 204, and a second hydraulic buffer 305 and a second limit plate 306 are symmetrically installed on the base installing plate 302;

further, a first grating feedback reading head 103 is installed on the stage panel 101, a first grating ruler 211 parallel to the Y-axis linear guide rail 106 is installed on the intermediate connecting plate 203, a second grating feedback reading head 207 is installed on the intermediate connecting plate 203, and a second grating ruler 304 parallel to the X-axis linear guide rail 303 is installed on the base installation plate 302, as shown in fig. 2, the structure is used for accurately positioning both X, Y axes through the grating ruler.

Further, a screw hole is formed in the prepressing seat 201, the prepressing block 202 is mounted on the prepressing seat 201 through a jackscrew knob, and the jackscrew knob is inserted into the screw hole, as shown in fig. 3, and the structure is used for adjusting the straightness of the guide rail by rotating the jackscrew knob.

Furthermore, holes are formed in the first collision block 105 and the second collision block 205 at equal intervals, the cross sections of the holes are circular, and as shown in fig. 2 and 3, the collision block can be internally deformed through the holes when being impacted by the structure, so that the deformable area of the collision block is increased, and the bearing capacity of the collision block is enhanced.

Further, rubber pads are glued on the first limiting plate 209 and the second limiting plate 306, anti-skid grains are arranged on the surfaces of the rubber pads, and the structure is used for isolating the first limiting plate 209 and the second limiting plate 306 from being impacted when the structure is used.

Further, the intermediate connecting plate 203 is provided with a first hydraulic buffer 210, the first hydraulic buffer 210 is symmetrically installed on two sides of the first grating ruler 211, the base mounting plate 302 is provided with a second hydraulic buffer 305, and the second hydraulic buffer 305 is symmetrically installed on two sides of the second grating ruler 304, as shown in fig. 4 and 5, the structure is used for buffering the device to avoid collision.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.