阅读说明：本技术 轮毂型划片刀及其制备方法与在砷化镓材料加工中的应用 (Hub type scribing cutter, preparation method thereof and application thereof in gallium arsenide material processing ) 是由 陈昱 刘学民 李威 冉隆光 于 2020-12-28 设计创作，主要内容包括：本发明公开了轮毂型划片刀及其制备方法与在砷化镓材料加工中的应用,将铝合金基体研磨处理后进行化学处理,再放入金刚石电镀液进行电镀,得到电镀后的刀片；将电镀后的刀片进行外圆修整、车床加工后进行化学出刃,然后进行抛光,得到轮毂型划片刀；所述金刚石电镀液由金刚石、氨基磺酸镍、氨基磺酸钴、硫酸镍、硼酸、水组成。本发明公开了新的划刀片,具有超薄性,厚度在10～15μm,磨料的分散性好,加工砷化镓材料时,切口窄、无崩裂,且切割入膜低。(The invention discloses a hub-type scribing cutter, a preparation method thereof and application thereof in processing gallium arsenide materials, wherein an aluminum alloy substrate is subjected to chemical treatment after being ground, and then is put into diamond electroplating solution for electroplating to obtain an electroplated blade; carrying out excircle trimming and lathe machining on the electroplated blade, then carrying out chemical edge forming, and then polishing to obtain a hub-type scribing cutter; the diamond electroplating solution consists of diamond, nickel sulfamate, cobalt sulfamate, nickel sulfate, boric acid and water. The invention discloses a novel scribing blade which is ultrathin, has the thickness of 10-15 mu m, has good abrasive dispersibility, and has narrow cut, no crack and low film cutting rate when processing a gallium arsenide material.)

1. The hub type scribing knife is characterized in that the preparation method of the hub type scribing knife comprises the following steps of grinding an aluminum alloy matrix, carrying out chemical treatment, and then putting a diamond electroplating solution for electroplating to obtain an electroplated blade; carrying out excircle trimming and lathe machining on the electroplated blade, then carrying out chemical edge forming, and then polishing to obtain a hub-type scribing cutter; the diamond electroplating solution consists of diamond, nickel sulfamate, cobalt sulfamate, nickel sulfate, boric acid and water.

2. The hub type dicing blade according to claim 1, wherein the blade edge thickness of the hub type dicing blade is 10 to 15 μm.

3. The hub type dicing blade according to claim 1, wherein the diamond plating solution contains 300 to 500g/L of nickel sulfamate, 45 to 60g/L of cobalt sulfamate, 10 to 50g/L of nickel sulfate, 30 to 60g/L of boric acid, and 1 to 5g/L of diamond.

4. The hub-type dicing blade of claim 1, wherein the inner hole of the hub-type dicing blade has a roundness of less than 1 μm.

5. Use of the hub-type saw blade of claim 1 for processing gallium arsenide materials.

6. The method for producing a hub-type dicing blade according to claim 1, comprising the steps of subjecting an aluminum alloy substrate to a chemical treatment after grinding treatment, and then subjecting the substrate to electroplating in a diamond electroplating solution to obtain an electroplated blade; carrying out excircle trimming and lathe machining on the electroplated blade, then carrying out chemical edge forming, and then polishing to obtain a hub-type scribing cutter; the diamond electroplating solution consists of diamond, nickel sulfamate, cobalt sulfamate, nickel sulfate, boric acid and water.

7. The method for manufacturing a hub type dicing blade according to claim 6, wherein the aluminum alloy base grinding process is stainless steel grinding disc grinding and damping polishing cloth grinding.

8. The method of manufacturing a hub-type dicing blade according to claim 6, wherein the diamond plating solution is subjected to ball milling treatment.

9. A method for processing gallium arsenide material is characterized in that the method comprises the following steps of carrying out chemical treatment after grinding an aluminum alloy matrix, and then putting a diamond electroplating solution for electroplating to obtain an electroplated blade; carrying out excircle trimming and lathe machining on the electroplated blade, then carrying out chemical edge forming, and then polishing to obtain a hub-type scribing cutter; then processing the gallium arsenide material by using a hub-type scribing cutter to finish the processing of the gallium arsenide material; the diamond electroplating solution consists of diamond, nickel sulfamate, cobalt sulfamate, nickel sulfate, boric acid and water.

10. The method of processing gallium arsenide material as recited in claim 9, wherein the processing is dicing.

Technical Field

The invention belongs to the technology of processing tools, and particularly relates to a hub type scribing cutter, a preparation method thereof and application thereof in processing of gallium arsenide materials.

Background

With the rapid development of the semiconductor industry in recent years, various new semiconductor materials are produced, and gallium arsenide material is one of them. Gallium arsenide (GaAs) materials have a high electron mobility (approximately 5.7 times that of silicon materials) and a wide bandgap structure compared to conventional silicon materials. Under the same conditions, it conducts current more quickly. The microwave device can be prepared by utilizing gallium arsenide semiconductor material, and has a key role in the fields of satellite data transmission, mobile communication, GPS global navigation and the like. However, gallium arsenide materials also have some disadvantages, such as high melting point vapor pressure, difficult composition control, slow single crystal growth rate, weak mechanical strength, poor integrity, high price, etc., which greatly affect the application degree. In the field of semiconductor chips, gallium arsenide materials have higher electron mobility than traditional silicon chip materials, so that the size specifications of gallium arsenide chips are greatly smaller than those of conventional silicon materials, and the mechanical strength of gallium arsenide materials is weaker than that of traditional silicon chips, so that higher requirements are provided for a hub-type scribing knife for processing gallium arsenide.

Disclosure of Invention

The invention discloses a novel scribing blade which is ultrathin, has the thickness of 10-15 mu m, has good abrasive dispersibility, and has narrow cut, no crack and extremely low cut-in film when processing a gallium arsenide material.

The invention adopts the following technical scheme:

the preparation method of the hub-type scribing knife comprises the following steps of grinding an aluminum alloy matrix, performing chemical treatment, and then putting a diamond electroplating solution into the aluminum alloy matrix for electroplating to obtain an electroplated blade; carrying out excircle trimming and lathe machining on the electroplated blade, then carrying out chemical edge forming, and then polishing to obtain a hub-type scribing cutter; the diamond electroplating solution consists of diamond, nickel sulfamate, cobalt sulfamate, nickel sulfate, boric acid and water.

The thickness of the blade of the hub-type scribing knife is 10-15 mu m. Further, the invention discloses an application of the hub type scribing cutter in processing gallium arsenide materials, wherein the processing is cutting.

A method for processing gallium arsenide material comprises the following steps of carrying out chemical treatment after grinding an aluminum alloy matrix, and then putting a diamond electroplating solution for electroplating to obtain an electroplated blade; carrying out excircle trimming and lathe machining on the electroplated blade, then carrying out chemical edge forming, and then polishing to obtain a hub-type scribing cutter; then cutting the gallium arsenide material by using a hub-type scribing cutter to finish the processing of the gallium arsenide material; the diamond electroplating solution consists of diamond, nickel sulfamate, cobalt sulfamate, nickel sulfate, boric acid and water.

In the invention, the chemical treatment is that the ground aluminum alloy matrix is sequentially treated by sodium hydroxide solution, nitric acid and zinc precipitation solution; then putting into diamond electroplating solution for electroplating.

In the invention, the aluminum alloy matrix grinding treatment comprises stainless steel grinding disc grinding and damping polishing cloth grinding; wherein the pressure of the stainless steel grinding disc is 15-35 kg during grinding, 6000# white corundum (with the grain diameter of 0.5-1.5 mu m) is adopted as grinding liquid, the concentration is 200g/L, and the grinding time is 8-12 min; the pressure is 10kg when the damping polishing cloth is ground, the grinding fluid is aluminum alloy polishing fluid, 10-20 ml of grinding fluid is dripped on the damping polishing cloth every minute, and the grinding time is 8-20 min.

In the present invention, the diamond has a particle size of 1 to 2 μm.

In the diamond electroplating solution, the concentrations of diamond, nickel sulfamate, cobalt sulfamate, nickel chloride and boric acid are 300-500 g/L of nickel sulfamate, 45-60 g/L of cobalt sulfamate, 10-50 g/L of nickel sulfate, 30-60 g/L of boric acid and 1-5 g/L of diamond.

In the invention, the diamond electroplating solution is subjected to ball milling treatment, when the ball milling is carried out, 100g of polyurethane ball mill is added into each liter of diamond electroplating solution, the rotating speed of the ball milling is 300rad/min, and the time is 10-20 min.

In the invention, the roundness of the inner hole of the hub-type scribing cutter is less than 1 mu m, and the roundness of the inner hole of the cutter in the prior art has no clear requirement.

The preparation method of the hub type scribing knife comprises the following steps:

(1) after being put into an electroplating clamp, the aluminum alloy matrix is treated by sodium hydroxide solution, nitric acid and zinc precipitation solution in sequence to obtain the surface-treated aluminum alloy matrix;

(2) putting the aluminum alloy substrate with the surface treatment into electroplating solution containing 5000# diamond (diamond granularity is 1-2 mu m) for diamond electroplating;

(3) performing excircle trimming on the electroplated blade by adopting a No. 800 silicon carbide grinding wheel;

(4) processing the leaked required part of the blank body with the excircle processed by a lathe;

(5) chemically edging the lathed blade in 200g/L sodium hydroxide solution to leak out of the cutting edge part at the back of the blade;

(6) and polishing the blade with the edge leaked in the mixed solution of phosphoric acid and sulfuric acid to leak the back diamond, and finishing the finished blade to obtain the hub-type scribing cutter.

Compared with a silicon material, the gallium arsenide material has the advantages that the whole size is greatly reduced, so that the cutting path of the scribing knife is very narrow, the requirement on the cutting path of the conventional gallium arsenide material is very narrow, the thickness of the scribing knife needs to be 10-15 mu m, the higher requirement on the rigidity of the scribing knife is provided, and the existing silicon material scribing knife sold in the market cannot meet the requirement; the strength of the gallium arsenide material is reduced, and the cracking of the common silicon wafer is reflected as cracking on the gallium arsenide material, so that higher requirements are put forward on the dispersion of diamond on the blade and the flatness of the blade, and if the dispersion of the diamond is not uniform, the cracking of the gallium arsenide material is directly caused; in the cutting process of the gallium arsenide material, the cutting-in film of the scribing cutter is extremely low, the cutting-in film of a common silicon wafer blade is about 0.03mm, the cutting-in film of the gallium arsenide blade is about 3-5 microns, after the cutting-in film of the gallium arsenide material is too deep, the cutting edge can be glued to cause the sharpness of the blade to be reduced and the gallium arsenide material to be cracked directly, so the existing hard material cutting blade does not meet the cutting requirement of gallium arsenide.

Compared with the conventional turning method, the scribing cutter obtained by the invention has better rigidity, and avoids the phenomena of snake cutting and cutter breaking caused by insufficient rigidity during high-speed cutting; meanwhile, the nickel-cobalt alloy electroplating mode further improves the performance of the scribing cutter for processing gallium arsenide, and solves the problems of snake cutting and cutter breaking caused by insufficient rigidity of the existing scribing cutter during high-speed cutting. Because of the particularity of processing gallium arsenide materials, diamonds with large particle sizes cannot be suitable, diamonds with small particle sizes have dispersion problems, and diamond agglomeration can occur after long-term suspension in electroplating solution.

Drawings

FIG. 1 is a pictorial view of a ground aluminum alloy substrate;

FIG. 2 is a photomicrograph of the electroplating solution resulting from ball milling;

FIG. 3 is a diagram of a scribing blade according to the present invention;

FIG. 4 is a pictorial view of a machined aluminum alloy substrate;

FIG. 5 is a photograph of a gallium arsenide material after processing in accordance with the present invention;

figure 6 is a photograph of a gallium arsenide material after processing by a comparative saw.

Detailed Description

The raw materials involved in the invention are all conventional products, and meet the application requirements of the hub-type scribing knife; the specific operation method, the electroplating method and the test method are the prior art, for example, the electroplated blade is subjected to excircle trimming, chemical edge cutting after lathe machining, and then polishing according to the prior art.

Adding NaOH into water to prepare 250g/L NaOH alkali liquor; configuring 75wt% of HNO₃The aqueous solution is acid solution; the zinc deposition solution (Shanghai Jian Mei chemical Co., Ltd.) was used according to the instructions given by the manufacturer.

Example one

Putting a commercially available aluminum alloy substrate in a grinding fixture, and sequentially grinding a stainless steel grinding disc and a damping polishing cloth on a conventional grinder, wherein the pressure of the stainless steel grinding disc is 20kg, the grinding liquid is white corundum (with the particle size of 0.5-1.5 mu m) water dispersion liquid, the concentration of the white corundum water dispersion liquid is 200g/L, and the grinding time is 10 min; the pressure of the damping polishing cloth (HSL/Wheatstone) is 10kg during grinding, the grinding fluid is aluminum alloy polishing fluid (a polishing fluid manufacturer: Heider precision aluminum alloy polishing fluid, water is added for dilution according to the mass ratio of 1: 2), 15ml of grinding fluid is dripped on the damping polishing cloth every minute, the grinding time is 15min, and finally, the damping polishing cloth is cleaned and dried by water conventionally; and (3) obtaining a ground aluminum alloy substrate, wherein a material object diagram refers to figure 1, the aperture of an inner hole is 19.0542-19.055 mm, namely the roundness of the inner hole is 0.8 mu m, and the roundness of the inner hole of the prepared hub type scribing knife is less than 1 mu m.

Adding raw materials into water to prepare an initial plating solution according to the following composition:

diamond 3 g/L

Nickel sulfamate 400 g/L

50g/L cobalt sulfamate

Nickel sulfate 35 g/L

Boric acid 45 g/L

The balance of water.

Ball-milling the initial plating solution in a conventional planetary ball mill to obtain plating solution, wherein the photomicrograph is shown in figure 2; during ball milling, 100g of polyurethane ball mill is added into each liter of diamond electroplating solution, the rotating speed of ball milling is 300rad/min, and the time is 15 min.

1. Putting the aluminum alloy matrix after grinding into an electroplating clamp, sequentially immersing into a sodium hydroxide solution of 250g/L of sodium hydroxide for 2min, then washing with water, immersing into 75% nitric acid for 1min, then washing with water, immersing into a zinc precipitation solution for 1min, and then washing with water to obtain the aluminum alloy matrix with the surface treated;

2. adding the surface-treated aluminum alloy substrate into electroplating solution, and carrying out electroplating treatment for 1 hour at 45 ℃ under stirring at a current of 0.6A to obtain an electroplated part for the hub-type scribing cutter; stirring is carried out for 15s at 210rad/min and 1min at 30rad/min in a circulating way;

3. according to a conventional method, after an excircle nickel layer of an electroplated part for the hub-type scribing cutter is ground by adopting a 800# silicon carbide grinding wheel, a cutting edge of a blade is machined by adopting a machining numerical control lathe, an aluminum layer of the cutting edge is thinned, and machining parameters are as follows: the thickness of the cutting edge is 0.15mm, the length of the cutting edge is 0.35mm, then the cutting edge is arranged in a clamp to protect the surface aluminum base, the cutting edge is leaked out, then the cutting edge is placed in a sodium hydroxide solution with the temperature of 90 ℃ and the concentration of 250g/L for reaction, and the aluminum layer of the cutting edge is dissolved in the sodium hydroxide and leaks out of the diamond coating; then the diamond is put into a conductive fixture, and then the fixture is put into a mixed solution of sulfuric acid and phosphoric acid, conventional chemical polishing is carried out by taking the blade as an anode and the lead plate as a cathode, the coating is thinned to fully expose the diamond, the sharpness of the blade is improved, and the prepared hub-type scribing knife is shown in attached figure 3.

Comparative example 1

A commercially available aluminum alloy matrix (commercially available in the same way as in example I) is subjected to conventional machine tool machining to obtain a machined aluminum alloy matrix, which is a conventional machining method of the conventional aluminum alloy matrix, and the physical diagram of the machined aluminum alloy matrix is shown in attached figure 4. Putting the machined aluminum alloy matrix into an electroplating clamp, sequentially immersing the aluminum alloy matrix into a sodium hydroxide solution of 250g/L of sodium hydroxide for 2min, then washing with water, immersing the aluminum alloy matrix into 75% nitric acid for 1min, then washing with water, immersing the aluminum alloy matrix into a zinc deposition solution for 1min, and then washing with water to obtain a surface-treated aluminum alloy matrix; and then, the hub-type scribing knife is obtained by processing according to the electroplating solution and the electroplating method in the first embodiment.

Comparative example No. two

Adding raw materials into water to prepare an initial plating solution according to the following composition:

diamond 3 g/L

Nickel sulfamate 400 g/L

Nickel sulfate 35 g/L

Boric acid 45 g/L

The balance of water

And performing ball milling on the initial plating solution according to the parameters of the first embodiment to obtain the plating solution.

The surface-treated aluminum alloy substrate prepared in the method of example was added to the above-mentioned plating solution, and treated according to the plating method of example one, to obtain a hub-type dicing blade.

Comparative example No. three

The surface-treated aluminum alloy substrate prepared in the method of example a was added to the initial plating solution of example a, and was treated according to the electroplating method of example a, to obtain a hub-type dicing blade.

Comparative example No. four

And (3) grinding the commercially available aluminum alloy substrate according to the method of the first embodiment to obtain a ground aluminum alloy substrate, wherein the aperture of an inner hole is 19.053-19.058 mm, the roundness of the inner hole is 5 mu m, and the ground aluminum alloy substrate is the conventional parameter of the conventional hub type scribing knife. Putting the aluminum alloy matrix after grinding into an electroplating clamp, sequentially immersing into a sodium hydroxide solution of 250g/L of sodium hydroxide for 2min, then washing with water, immersing into 75% nitric acid for 1min, then washing with water, immersing into a zinc precipitation solution for 1min, and then washing with water to obtain the aluminum alloy matrix with the surface treated; and then, the hub-type scribing knife is obtained by processing according to the electroplating solution and the electroplating method in the first embodiment.

Comparative example five

Adding raw materials into water to prepare an initial plating solution according to the following composition:

diamond 3 g/L

Nickel sulfamate 400 g/L

50g/L cobalt sulfamate

Nickel chloride 35 g/L

Boric acid 45 g/L

The balance of water

And performing ball milling on the initial plating solution according to the parameters of the first embodiment to obtain the plating solution.

The surface-treated aluminum alloy substrate prepared in the method of example was added to the above-mentioned plating solution, and treated according to the plating method of example one, to obtain a hub-type dicing blade.

Comparative example six

Adding raw materials into water to prepare an initial plating solution according to the following composition:

diamond 3 g/L

Nickel sulfamate 400 g/L

30 g/L cobalt sulfamate

Nickel sulfate 35 g/L

Boric acid 45 g/L

The balance of water

And performing ball milling on the initial plating solution according to the parameters of the first embodiment to obtain the plating solution.

The surface-treated aluminum alloy substrate prepared in the method of example was added to the above-mentioned plating solution, and treated according to the plating method of example one, to obtain a hub-type dicing blade.

The blade thickness of the hub-type scribing knife is 12-14 μm.

Application examples

The existing gallium arsenide wafer is cut by the parameters of the rotation speed of the main shaft 50000rad/min and the cutting depth of 0.15mm, the cutting speed is 60m/min, and the processing experiment is carried out on the hub type scribing knife to cut 1000 meters.

In the first embodiment, no phenomena of falling off, snake cutting and knife breaking occur; in the comparative example I, after 100 meters, the snake-shaped cutting occurs, and when 300 meters are cut, the knife breaking occurs; comparative example two cutting 560 meters resulted in a knife break; the third comparative example has good early cutting, edge breakage occurs at 665 m, and breakage occurs at 730 m; comparative example four, the blade was not broken, but the gallium arsenide wafer cracked significantly; the fifth comparative example shows that the blade is not broken and does not have snake-cutting, but when 835 meters exists, the gallium arsenide material has edge breakage; comparative example six blades were unbroken, without snake cuts, but 818 meters of gallium arsenide material showed edge chipping.

The hub-type scribing cutter (embodiment I) has good processing performance, and the processed gallium arsenide material has no crack, and is shown in figure 5; the gallium arsenide material processed by the hub-type dicing blade of the comparative example four is obviously cracked, as shown in fig. 6.

The gallium arsenide material has high requirements on the blade in processing, a thin (10-15 mu m) blade is required, the blade is easy to crack, the yield of the existing blade product for cutting the gallium arsenide material is low, the service life is short, and the blade is broken when the cutting is less than 700 meters. The existing scribing knife for processing wafers has a thick cutting edge which is rarely below 20 mu m and can not meet the cutting requirement of gallium arsenide materials. The invention creatively starts from the treatment of the aluminum alloy matrix, the selection of the electroplating formula and the treatment of the electroplating solution, and the obtained hub-type scribing cutter has long service life which can reach more than 1.5 times of the prior art through an integral technical means, and the processed product has good quality and meets the requirements of industrial good products.