阅读说明：本技术 微机电陀螺仪 (Micro-electromechanical gyroscope ) 是由 李世伟 王照勋 于 2020-09-10 设计创作，主要内容包括：本发明是有关一种微机电陀螺仪,其包含多个感测模块感测三轴向的角速度,多个外框设置于该些感测模块的外侧,多个驱动轴分别设置于该些外框之间,该些驱动轴分别以一第一可挠性连接件与一第二可挠性连接件连接二相邻外框,再由该些外框经多个传动元件连接该些感测模块,藉此提供三轴感测。(The invention relates to a micro-electromechanical gyroscope, which comprises a plurality of sensing modules for sensing the angular velocity in the three axial directions, a plurality of outer frames arranged at the outer sides of the sensing modules, a plurality of driving shafts respectively arranged between the outer frames, wherein the driving shafts are respectively connected with two adjacent outer frames through a first flexible connecting piece and a second flexible connecting piece, and the outer frames are connected with the sensing modules through a plurality of transmission elements, thereby providing the three-axis sensing.)

1. A microelectromechanical gyroscope, comprising:

the sensing modules are used for sensing the angular speed in the three axial directions;

the outer frames are arranged outside the sensing modules and are respectively connected with the sensing modules through a transmission element; and

the driving shafts are respectively arranged among the outer frames and are respectively connected with two adjacent outer frames in the outer frames through a first flexible connecting piece and a second flexible connecting piece;

the outer frames are extruded inwards or expanded outwards by the driving shafts to form reciprocating motion, and the two sensing modules are driven to reciprocate along a first axial direction and a second axial direction respectively, wherein the first axial direction is perpendicular to the second axial direction.

2. The microelectromechanical gyroscope of claim 1, wherein the sensing modules each comprise:

a driving structure connected with the corresponding outer frame through the transmission element;

and the mass block is positioned on the inner side of the driving structure and is connected with the driving structure through at least one flexible connecting piece.

3. The microelectromechanical gyroscope of claim 2, wherein: the rigidity of the transmission element is better in the direction parallel to the connection direction of the outer frame and the driving structure, and the transmission element has flexibility in the direction perpendicular to the connection direction of the outer frame and the driving structure.

4. The microelectromechanical gyroscope of claim 2, wherein: a restraining part is arranged between the outer frame and the driving structure, the restraining part is connected with the outer frame and the driving structure, the restraining part has flexibility in the direction parallel to the connecting direction of the outer frame and the driving structure, and the rigidity of the transmission element in the direction perpendicular to the connecting direction of the outer frame and the driving structure is better.

5. The microelectromechanical gyroscope of claim 2, wherein the sensing modules each further comprise:

a first sensing element disposed on the mass block; and

the second sensing element is arranged on the mass block, and the first sensing element and the second sensing element sense angular velocities in different axial directions.

6. The microelectromechanical gyroscope of claim 1, further comprising:

a fixed point, a coupling member is respectively arranged between the fixed point and the sensing modules to provide a buffer space for the sensing modules 4 to be driven to move relative to the fixed point.

7. The microelectromechanical gyroscope of claim 1, wherein:

the driving shafts respectively form an extension part, the extension part extends out of the outer frames adjacent to two sides, and the extension parts are respectively connected with the first flexible connecting piece and the second flexible connecting piece.

8. The microelectromechanical gyroscope of claim 1, wherein:

the different end surfaces of the driving shafts respectively extend to form a first extending part and a second extending part, the distance between the first extending part and the adjacent outer frame is different from the distance between the second extending part and the adjacent other outer frame, the first extending part is connected with the first flexible connecting piece, and the second extending part is connected with the second flexible connecting piece.

9. The microelectromechanical gyroscope of claim 1, wherein:

one of the frames comprises a first frame, an amplification frame and a second frame, one end of the first frame is connected with the first flexible connecting piece, the other end of the first frame is connected with one end of the amplification frame, the other end of the amplification frame is connected with one end of the second frame, and one of the sensing modules is connected with the amplification frame through one of the transmission elements.

10. The microelectromechanical gyroscope of claim 9, wherein:

the connection position of the amplification frame and the transmission element is positioned outside the connection line of the first frame and the second frame.

11. The microelectromechanical gyroscope of claim 9, wherein:

the connection position of the amplification frame and the transmission element is positioned at the outer side and the inner side of the connection of the first frame and the second frame.

12. The microelectromechanical gyroscope of claim 1, further comprising:

and the driving rod pieces are respectively connected with the driving shafts through a third flexible connecting piece and a fourth flexible connecting piece, and each driving rod piece is actuated by the drivers to move along the radial direction of the driving rod piece.

Technical Field

The invention relates to a sensor, in particular to a micro-electromechanical gyroscope, which provides a function of measuring three-axis angular velocity.

Background

Microelectromechanical Systems (MEMS) gyroscopes are commonly used to determine rotational motion of a system in each of x-y-z coordinate axes, wherein a mass induces Coriolis forces when the mass moves linearly in an axial direction and at an angular velocity. The force drives the mass block to displace in the direction perpendicular to the axial direction, so as to sense the angular velocity value borne by the mass block. However, the mass block cannot sense the rotation parallel to the axial direction, so if the triaxial angular velocity is to be sensed, at least two sets of mass blocks moving along different directions must be provided, however, how to stably drive the mass blocks to move along different directions in a micro-electromechanical structure can control the cost of the micro-electromechanical gyroscope within a reasonable range, and meanwhile, the influence of noise and non-ideal signals on the sensing result is also avoided, which becomes a problem to be solved by various manufacturers.

Based on the above problems, the present invention provides a micro-electromechanical gyroscope, which uses an outer frame to couple with an external force borne by the micro-electromechanical gyroscope, so as to improve the accuracy of three-axis measurement and solve the above problems.

Disclosure of Invention

An objective of the present invention is to provide a micro-electromechanical gyroscope, in which a plurality of driving shafts are disposed between a plurality of outer frames, the driving shafts are connected to all the outer frames through flexible connectors, and the outer frames are connected to a plurality of sensing modules through a plurality of transmission members, so that all the outer frames are coupled through the flexible connectors connected to the driving shafts to couple external forces provided by the driving shafts.

The invention discloses a micro-electromechanical gyroscope, which comprises a plurality of sensing modules, a plurality of sensors and a plurality of sensors, wherein the sensing modules are used for sensing the angular speeds in the three axial directions; the outer frames are arranged on the outer sides of the sensing modules and are connected with the sensing modules through a plurality of transmission elements; and the driving shafts are respectively arranged between the outer frames and are respectively connected with two adjacent outer frames of the outer frames through a first flexible connecting piece and a second flexible connecting piece. Therefore, all the outer frames are coupled with the external force provided by the driving shafts through the first flexible connecting piece and the second flexible connecting piece respectively, and the accuracy of triaxial measurement is further improved.

Drawings

FIG. 1: the micro-electromechanical gyroscope is a schematic structural diagram of one embodiment of the micro-electromechanical gyroscope;

FIG. 2: which is a driving schematic diagram of an embodiment of the microelectromechanical gyroscope of the present invention;

FIG. 3: the structure diagram of another embodiment of the micro-electromechanical gyroscope is shown in the figure;

FIG. 4: the structure diagram of another embodiment of the micro-electromechanical gyroscope is shown in the figure;

FIG. 5: the structure diagram of another embodiment of the micro-electromechanical gyroscope is shown in the figure;

FIG. 6: it is a driving schematic diagram of another embodiment of the microelectromechanical gyroscope of the present invention; and

FIG. 7: which is a schematic structural diagram of another embodiment of the microelectromechanical gyroscope of the present invention.

[ brief description of the drawings ]

1 micro-electromechanical gyroscope

2 micro-electromechanical gyroscope

10 sensing module

10A first sensing module

10B second sensing module

12 driving structure

14 mass block

142 flexible connecting piece

16 first sensing element

16A first sensing element

16B first sensing element

18 second sensing element

18A second sensing element

18B second sensing element

20 outer frame

22 drive element

24 inhibitor

30 drive shaft

32 comb unit

M actuating unit

34A first driving rod

34B second driving rod

36A first driver

36B second driver

B1 first buffer member

B2 second buffer member

C fixed point

E extension part

E1 first extension

E2 second extension part

F1A first frame

F2A amplitude frame

F3A second frame

F1B first frame

F2B amplitude frame

F3B second frame

R rotation inhibitor

SUB substrate

X X axle

Y Y axle

Z Z axle

Detailed Description

In order to provide a further understanding and appreciation for the structural features and advantages achieved by the present invention, the following detailed description of the presently preferred embodiments is provided:

although certain terms are used herein to refer to particular elements, those of ordinary skill in the art will understand that various names may be used to refer to the same element, and the description and claims are not intended to distinguish between the elements, but rather are intended to distinguish between the elements as a whole. In the following description and in the claims, the terms "include," have, "and" have "are used in an open-ended fashion, and thus should be interpreted to mean" include, but not limited to. Furthermore, the term "coupled" is used herein to encompass both direct and indirect connections. Thus, if a first device couples to a second device, that connection may be through a direct connection, or through an indirect connection via other devices and other connections.

The characteristics and the associated structure of the micro-electromechanical gyroscope disclosed in the present invention will be further described below:

first, please refer to fig. 1, which is a schematic structural diagram of a micro-electromechanical gyroscope according to an embodiment of the present invention. As shown in the drawings, the mems gyroscope 1 of the present invention includes a plurality of sensing modules 10, a plurality of outer frames 20, and a plurality of driving shafts 30, wherein the sensing modules 10 are provided with mass blocks for sensing angular velocities in three axes, i.e., angular velocities in X-Y-Z axes; the outer frames 20 are respectively disposed outside the sensing modules 10 and are respectively connected to the sensing modules 10 through a plurality of transmission elements 22; and the driving shafts 30 are respectively disposed between the outer frames 20, and the driving shafts 30 are respectively connected to two adjacent outer frames of the outer frames 20 through a first flexible connector C1 and a second flexible connector C2.

As mentioned above, if three-axis angular velocity is to be sensed, at least two sets of masses moving in different directions must be provided, so that the embodiment of the present invention at least has the first sensing module 10A and the second sensing module 10B, and the masses in the first sensing module 10A and the second sensing module B are driven to move linearly along the Y axis and the X axis, respectively. Also, generally speaking, the mems gyroscope usually forms a symmetrical structure, so the embodiment of the present invention preferably further comprises a third sensing module 10C and a fourth sensing module 10D, and the mass blocks in the third sensing module 10C and the first sensing module 10A are driven to move linearly along the Y axis respectively; the masses in the fourth sensing module 10D and the second sensing module B are also urged to move linearly along the X-axis. The outer sides of the first to fourth sensing modules 10A, 10B, 10C, 10D are respectively provided with outer frames 20A, 20B, 20C, 20D, and the four driving shafts 30 are respectively disposed between the outer frames 20A, 20B, 20C, 20D, and pass through the first flexible connecting member C1 and a second flexible connecting member C2 to form the outer frames 20A, 20B, 20C, 20D. Thus, all the outer frames 20 can be connected by the first flexible connectors C1 and the second flexible connectors C2 on the four driving shafts 30 to couple the driving force given by the driving shafts 30 and other external forces borne by the micro-electromechanical gyroscope.

Referring to fig. 1, the sensing modules 10 respectively include a driving structure 12, a mass 14, at least one first sensing element 16, and at least one second sensing element 18, where the driving structure 12 of the present embodiment is illustrated by a frame structure, but not limited thereto. The driving structure 12 is connected to the corresponding housing 20 via a transmission element 22. In the following description of the first sensing module 10A, the other sensing modules 10B, 10C, 10D have similar structures and are only configured differently in different directions, and cannot be repeated one by one. However, in order to enable the frame 20 and the driving structure 12 to effectively drive the mass 14 along the Y axis, in the present embodiment, a transmission element 22 is mainly used to connect the driving structure 12 and the frame 20A of the first sensing module 10A, and the transmission element 22 has better rigidity in the Y axis direction (parallel to the connection direction of the frame 20A and the driving structure 12), and the transmission element 22 has flexibility in the X axis direction and the Z axis direction (perpendicular to the connection direction of the frame 20A and the driving structure 12) perpendicular to the Y axis direction (perpendicular to the connection direction of the frame 20A and the driving structure 12), so that when the frame 20A applies force to the driving structure 12 along the Y axis direction, the mass 14 can be effectively driven along the Y axis direction by the driving structure 12; however, if the outer frame 20A forms undesired displacements in the X-axis or Z-axis, the transmission element 22 can absorb the undesired displacements in a buffering manner to prevent the outer frame 20A from applying a force to the driving structure 12 along the X-axis or Z-axis. The transmission element 22, which is preferably rigid in the Y-axis direction but flexible in a plane perpendicular to the Y-axis direction, may be implemented by several structures, for example, the transmission element 22 shown in fig. 1 includes several long straight structures extending along the Y-axis, so that it is preferably rigid in the Y-axis direction; and the plurality of long straight structures are connected by the plurality of bending parts to form a three-dimensional structure, so that the three-dimensional structure has flexibility on a plane vertical to the Y-axis direction. Alternatively, the transmission element 22 with similar effect can be formed by matching a hard material with a buffer material thinner in the Y-axis direction, and the invention is not limited thereto.

The transmission element 22 is preferably connected to the center of the transmission element 22, and at least one inhibitor 24 may be further disposed between the outer frame 20 and the driving structure 12, the at least one inhibitor 24 may be disposed outside the transmission element 22, and the at least one inhibitor 24 connects the outer frame 20 and the driving structure 12. Still referring to the first sensing module 10A, the at least one inhibitor 24 is flexible in the Y-axis direction and rigid in the X-axis direction and the Z-axis direction. Accordingly, the driving structure 12 and the outer frame 20A of the first sensing module 10A are connected by the additional suppressing member 24, which allows the driving structure 12 and the outer frame 20A to generate relative displacement in the Y-axis direction, but restricts the driving structure 12 and the outer frame 20A from generating relative displacement in the X-axis direction or the Z-axis direction, so as to counteract an external force applied to the outer frame 20A in the X-axis direction or the Z-axis direction. Wherein, the driving shafts 30 on both sides of the outer frame 20A have uneven force application and asynchronous stroke; or the outer frame 20A is subjected to an unexpected external force, it is possible to subject the outer frame 20A to an unexpected external force in the X-axis direction or the Z-axis direction, and the cooperation of the transmission element 22 and the at least one inhibiting member 24 can more effectively absorb the undesired displacement of the outer frame 20A in the X-axis direction or the Z-axis direction. The above-mentioned at least one inhibiting member 24 having flexibility in the Y-axis direction but better rigidity in the plane perpendicular to the Y-axis direction can be implemented by several configurations, such as providing a fixed fulcrum on the outer frame 20 and the driving structure 12, and using a flexible element to connect the outer frame 20 and the fixed fulcrum, and using another flexible element to connect the driving structure 12 and the fixed fulcrum, and the invention is not limited to the detailed configuration of the at least one inhibiting member 24.

Referring to fig. 1, the mass 14 is connected to the driving structure 12 through at least one flexible connecting member 142, for example, two sides of the mass 14 are respectively connected to the driving structure 12 through a flexible connecting member 142, so that the mass 14 can generate displacement relative to the driving structure 12. While the first sensing module 10A is still described below, generally, the flexible connecting member 142 is required to enable the mass 14 of the first sensing module 10A to be displaced in the X-axis direction and the Z-axis direction relative to the driving structure 12, but in order to enable the driving structure 12 to efficiently drive the mass 14 in the Y-axis direction, the flexible connecting member 142 preferably limits the mass 14 to be difficult to displace in the Y-axis direction relative to the driving structure 12. The first sensing elements 16 and the second sensing elements 18 are disposed on the mass 14, and may include induction coils, electrodes or other displacement sensing elements for sensing external forces in different coordinate axes, such as X-axis and Z-axis (the first sensing module 10A, the third sensing module 10C), or Y-axis and Z-axis (the second sensing module 10B, the fourth sensing module 10D). Further, the sensing modules 10 are connected to a fixing point C located at a central position relative to the sensing modules, the fixing point C is further connected to a plurality of rotation stoppers R relative to the driving shafts 30, a coupling member B is further disposed between the fixing point C and the sensing modules 10, the sensing modules 10 are respectively coupled to the fixing point C via the coupling member B, so as to provide a buffer space for the first to fourth sensing modules 10A, 10B, 10C, 10D to be driven to move relative to the fixing point C, the coupling member B of the present embodiment includes flexible buffer members B1, B2 as an example, but other structures may be adopted as the coupling member B according to design requirements. The rotation inhibitor R is composed of a fixed fulcrum and a flexible element, and is used to inhibit the sensing module 10 from rotating relative to the fixed point C.

More specifically, referring to fig. 2, the sensing module of the present embodiment includes a first sensing module 10A and a second sensing module 10B, wherein the first sensing module 10A and the second sensing module 10B both sense an angular velocity of a Z axis perpendicular to a drawing plane, and further sense an angular velocity of an image in different axial directions (i.e., an X axis and a Y axis), respectively, wherein a first sensing element 16A of the first sensing module 10A senses a displacement of a mass 14A in the Z axis direction, and the displacement is formed when the mass 14A is driven along the Y axis direction and bears the angular velocity of the X axis, so that the first sensing element 16A senses the angular velocity of the X axis; the second sensing elements 18A of the first sensing modules 10A sense the displacement of the mass 14A in the X-axis direction, which is formed when the mass 14A is driven in the Y-axis direction and subjected to the angular velocity in the Z-axis direction, so that the second sensing elements 18A sense the angular velocity in the Z-axis direction; the first sensing elements 16B of the second sensing modules 10B sense the displacement of the mass 14B in the Z-axis direction, which is formed when the mass 14B is driven in the X-axis direction and subjected to the angular velocity in the Y-axis direction, so that the first sensing elements 16B sense the angular velocity in the Y-axis direction; the second sensing element 18B of the second sensing module 10B senses the displacement of the mass 14B in the Y-axis direction, which is formed when the mass 14B is driven along the X-axis direction and subjected to the angular velocity of the Z-axis, so that the second sensing element 18B senses the angular velocity of the Z-axis. These are

In the present embodiment, the driving shaft 30 can be driven by the actuating unit M composed of the comb unit 32, the comb unit 32 drives the driving shaft 30 to push inward to apply the external force F, the driving shaft 30 is transmitted to the adjacent outer frames 20A and 20B through the first flexible connecting member C1 and the second flexible connecting member C2, respectively, and thus the force components are transmitted to the first sensing modules 10A and the second sensing modules 10B through the transmission element 22, respectively, the outer frames 20A and 20B of the present embodiment are simultaneously pressed inward by the driving shaft 30, and in addition, the outer frames 20A and 20B can be simultaneously coupled to expand outward to form a reciprocating motion. When the driving shaft 30 on the left side of the figure is pushed inward, the mass 14A of the first sensing element 16A can be driven to move along the Y axis toward the fixing point C through the first flexible connector C1, and although the driving shaft 30 also pushes the outer frame 20A along the X axis, the driving shaft 30 on the right side of the figure simultaneously pushes the outer frame 20A along the X axis to offset the external force in the X axis, so that the mass 14A is not influenced by the driving shaft 30 to generate an improper displacement in the X axis. Conversely, when the drive shaft 30 is extended, the mass 14A is driven away from the fixed point C along the Y-axis. Therefore, by repeated actuation of the driving shafts 30, the mass 14A of the first sensing element 16A reciprocates along the Y-axis, and the mass 14B of the second sensing element 16B reciprocates along the X-axis.

The micro-electromechanical gyroscope in this embodiment can form a symmetrical structure, and the above description has described the operations of the first sensing module 10A, the second sensing module 10B and the corresponding frames 20A, 20B, so the operations of the third sensing module 10C, the fourth sensing module 10D and the corresponding frames 20C, 20D will not be described repeatedly.

In the embodiment, the micro-electromechanical gyroscope activates the sensing module 10 through the outer frame 20 and the driving shaft 30 disposed between the outer frame 20, and compared to the prior art that generally adopts a method of directly driving the sensing module 10, there are several important effects as follows: the design mode that the driving shaft 30 drives, the outer frame 20 transmits and the sensing module 10 only senses makes the design difficulty of the embodiment of the invention greatly reduced and the cost is easy to control; moreover, because the outer frames 20 are additionally arranged, and all the outer frames 20 are connected with the flexible connectors through the flexible connectors on the driving shafts 30, the improper external force born by any one of the outer frames 20 can be mutually coupled, the offset can be easily absorbed by using a buffer structure, and the offset can be easily eliminated through a rear end circuit; moreover, since the driving shaft 30 does not directly drive the sensing module 10, but must be driven through the additionally arranged frame 10, the embodiment of the present invention can arrange the aforementioned driving element 22 or the suppressing member 24 between the frame 20 and the sensing module 10 to effectively absorb the non-ideal displacement on the frame 2, so that the micro-electromechanical gyroscope of the embodiment of the present invention has the advantages of low noise and high accuracy.

Fig. 3 is a schematic structural diagram of a micro-electromechanical gyroscope according to another embodiment of the present invention. Compared with the driving shaft 30 directly connected to the outer frame 20 through the first flexible connector C1 and the second flexible connector C2, the present invention can also form an extension portion E at the front end of the driving shaft 30, where the extension portion E extends beyond the outer frame 20 adjacent to both sides, and the extension portion E connects the first flexible connector C1 and the second flexible connector C2 to the adjacent outer frame 20, so as to increase the moving space of the driving shaft 30, provide a flexible connector with a larger size, and effectively increase the moving range of the first flexible connector C1 and the second flexible connector C2. With the above features, the present embodiment can drive the mass 14 of the sensing module 10 to generate a larger displacement under the condition that the displacement of the driving shaft 30 is not changed.

Fig. 4 is a schematic structural diagram of a micro-electromechanical gyroscope according to another embodiment of the present invention. In this embodiment, a first extending portion E1 and a second extending portion E2 may extend from different end surfaces of the driving shaft 30, and a distance between the first extending portion E1 and the side frame 20 is different from a distance between the second extending portion E2 and the side frame 20, so that the first flexible connecting member C1 and the second flexible connecting member C2 connected to the first extending portion E1 and the second extending portion E2 are different in length and have different moving amplitudes, and therefore even if the first extending portion E1 and the second extending portion E2 are driven by the same driving shaft 30, the sensing modules 10 corresponding to the two side frames 20 may be driven to generate different amplitudes of displacement, so as to improve the design flexibility of the present invention.

Please refer to fig. 5, which is a schematic structural diagram of a micro-electromechanical gyroscope according to another embodiment of the present invention. The difference from the previous embodiments is that: the present invention can further change the partial structure of the outer frame 20 into a flexible structure. For example, the first outer frame 20A disposed outside the first sensing module 10A includes a first frame F1A, an amplification frame F2A, and a second frame F3A, wherein one end of the first frame F1A is connected to the first flexible connecting member C1, the other end of the first frame F1A is connected to one end of the amplification frame F2A, and the other end of the amplification frame F2A is connected to one end of the second frame F3A; the second frame 20B disposed outside the second sensing module 10B includes a first frame F1B, an amplification frame F2B, and a second frame F3B, wherein one end of the first frame F1B is connected to one end of the amplification frame F2B, the other end of the amplification frame F2B is connected to one end of the second frame F3B, and the other end of the second frame F3B is connected to the second flexible connecting element C2. The first sensing module 10A and the second sensing module 10B are respectively connected to the amplification frame F2A and the amplification frame F2B through the transmission element 22, and the amplification frame F2A and the amplification frame F2B are both made of flexible structures, which is different in that: the connection position of the enlarged frame F2A and the transmission element 22 is located outside the connection line of the first frame F1A and the second frame F3A, whereas the connection position of the enlarged frame F2B and the transmission element 22 is located inside the connection line of the first frame F1B and the second frame F3B. Thus, the amplification direction of the amplification frame F2B located in the second frame 20B is different from the amplification direction of the amplification frame F2A located in the first frame 20A.

More specifically, as shown in fig. 6, when the driving shaft 30 is pushed inward to apply the external force F, since the first outer frame 20A is provided with the flexible amplification frame F2A, the first frame F1A and the second frame F3A can generate a displacement extending outward from both sides, and at this time, since the connection position of the amplification frame F2A and the transmission element 22 is located outside the connection line of the first frame F1A and the second frame F3A, the amplification frame F2A itself forms a displacement moving toward the fixed point C along the Y-axis direction, so that the displacement of the mass 14 of the first sensing module 10A moving toward the fixed point C can be further increased. Otherwise; although the second frame 20B is also provided with the flexible amplification frame F2B, so that the first frame F1B and the second frame F3B can generate displacement extending outward from both sides, the connection position of the amplification frame F2B and the transmission element 22 is located inside the connection line of the first frame F1A and the second frame F3A, which causes the amplification frame F2B to generate displacement away from the fixed point C along the X-axis direction, and therefore, the displacement of the mass 14 of the second sensing module 10B towards the fixed point C is reduced. Even more, in some embodiments, if the displacement of the enlarged frame F2B away from the fixed point C along the X-axis is larger, there will be an actuating configuration that can move the mass 14 of the second sensing module 10B away from the fixed point C along the X-axis, so as to move the first sensing module 10A toward the fixed point C and move the second sensing module B away from the fixed point C.

Therefore, by arranging the different forms of the amplification frames, the displacement amount provided by each sensing module 10 to be driven by the driving shaft 30 can be freely controlled, and the invention can be further divided into a first frame 20A and a second frame 20B except for all frames 20 which are linked outwards or inwards, and the first frame 20A and the second frame 20B can respectively move inwards or outwards, so that the counting flexibility of the micro-electromechanical gyroscope of the invention is greatly improved.

Please refer to fig. 7, which is a schematic structural diagram of a micro-electromechanical gyroscope according to another embodiment of the present invention. Compared to the driving shaft 30 in the micro-electromechanical gyroscope 1 driven by the comb unit 32, the micro-electromechanical gyroscope 2 of the present invention can also connect the driving shaft 30 to the corresponding first driving rod 34A and the second driving rod 34B through the third flexible connecting member C3 and the fourth flexible connecting member C4, respectively, and the first driving rod 34A and the second driving rod 34B are respectively provided with the plurality of first drivers 36A and the plurality of second drivers 36B. The first drivers 36A drive the first driving rod 34A to move along the radial direction thereof and the second drivers 36B drive the second driving rod 36B to move along the radial direction thereof, so as to drive the driving shaft 30 to push inward or expand outward, thereby driving the outer frames 20A, 20B. Thus, since the size of the driver required for actuating the first and second driving levers 34A and 34B in the radial direction thereof is smaller than the size of the comb unit 32 required for directly actuating the driving shaft 30 in the radial direction, the cost of the mems gyroscope can be reduced in the embodiment.

In summary, the present invention is a micro-electromechanical gyroscope, which includes a plurality of sensing modules, the sensing modules are connected to a plurality of outer frames through a plurality of transmission elements, a plurality of driving shafts are disposed between the outer frames, and are respectively connected to two adjacent outer frames through a first flexible connector and a second flexible connector, so that all the outer frames are connected in series to couple an external force applied by the driving shafts or other external forces borne by the micro-electromechanical gyroscope.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not intended to limit the scope of the present invention, which is defined by the appended claims.