阅读说明：本技术 一种多用途的掩膜式光面光刻机 (Multipurpose mask type smooth surface photoetching machine ) 是由 刘烽 于 2020-12-08 设计创作，主要内容包括：本发明公开了一种多用途的掩膜式光面光刻机,包括光刻台和伺服移动台,所述光刻台顶面安装有伺服移动台,且伺服移动台顶面安装有晶圆放置板。有益效果：本发明通过转动第二手柄螺栓压住菲林片来固定菲林片,避免菲林片过薄而引起放置不稳定的情况,固定完成后,可向外转动第一手柄螺栓,带动第二滑块向外移动,从而带动捻锁伸缩杆向外移动,进而带动外杆向外移动,从而带动弹簧伸长,拉扯内杆,进而拉扯菲林片四角,完成张拉,避免菲林片出现褶皱弯曲的现象,提高菲林片的平整性,从而提高透光的均匀性,提高使用菲林片时的光刻效率,固定框中也可放入玻璃的四角,完成对玻璃的固定,从而使本装置适合使用菲林片和玻璃片,提高使用的多功能性。(The invention discloses a multipurpose mask type smooth surface photoetching machine which comprises a photoetching table and a servo moving table, wherein the servo moving table is arranged on the top surface of the photoetching table, and a wafer placing plate is arranged on the top surface of the servo moving table. Has the advantages that: according to the device, the film is fixed by rotating the second handle bolt to press the film, so that the situation that the film is unstable due to too thin film is avoided, after the film is fixed, the first handle bolt can be rotated outwards to drive the second sliding block to move outwards, so that the twist lock telescopic rod is driven to move outwards, the outer rod is driven to move outwards, the spring is driven to extend, the inner rod is pulled, the four corners of the film are pulled, tensioning is completed, the phenomenon that the film is folded and bent is avoided, the smoothness of the film is improved, the uniformity of light transmission is improved, the photoetching efficiency when the film is used is improved, the four corners of glass can be placed into the fixing frame, and the glass is fixed, so that the device is suitable for using the film and the glass, and the use versatility is improved.)

1. The multipurpose mask type smooth surface photoetching machine is characterized by comprising a photoetching table (1) and a servo moving table (2), wherein the servo moving table (2) is installed on the top surface of the photoetching table (1), a wafer placing plate (3) is installed on the top surface of the servo moving table (2), a track (4) is fixedly installed at the diagonal position of the outer side of the servo moving table (2), a second slider (21) is connected to the inside of the track (4) in a sliding manner, a twist locking telescopic rod (7) is fixedly installed on the top surface of the second slider (21) in a vertical manner, a fixing ring (8) is fixedly sleeved at the top end of the twist locking telescopic rod (7), an outer rod (13) is fixedly connected to the surface of one side of the fixing ring (8) in a transverse manner, an inner rod (11) is inserted into the outer rod (13), one end of the inner rod (11) is fixedly connected with, and interior pole (11) other end fixed mounting has fixed frame (10) to fixed frame (10) top surface central point puts and runs through threaded connection and has second handle bolt (16), second handle bolt (16) bottom surface is rotated through swivelling joint seat (17) and is connected with clamp plate (18), and clamp plate (18) bottom surface bonds and have silica gel pad (19), the inside threaded connection that runs through of track (4) has first handle bolt (5), and first handle bolt (5) one end rotates with track (4) one end to first handle bolt (5) other end runs through the track (4) other end, first handle bolt (5) run through second slider (21) and with second slider (21) threaded connection.

2. The multipurpose mask type smooth surface photoetching machine according to claim 1, wherein the vertical cross sections of the track (4) and the second sliding block (21) are both in a convex shape, ball grooves are formed in the inner wall of the track (4) and the outer wall of the second sliding block (21), and balls (22) are connected in the ball grooves in a rolling manner.

3. The multipurpose mask type smooth surface photoetching machine according to claim 1, wherein an air box (14) is fixedly installed on the bottom surface of the fixing frame (10), a connecting hose (15) is connected to the bottom surface of the air box (14) through a connector (20), an air outlet (25) is formed in one side surface of the air box (14), a mini air blower (6) is installed on one side of the track (4) on the top surface of the photoetching table (1), and the air outlet end of the mini air blower (6) is connected with the other end of the connecting hose (15) in a through mode.

4. The multi-purpose mask type smooth surface lithography machine according to claim 1, wherein the silica gel pad (19) is circular, and the bottom surface of the silica gel pad (19) is provided with friction lines.

5. The multi-purpose mask type plain lithography machine according to claim 1, wherein the inner wall of the outer rod (13) is in interference fit with the outer wall of the inner rod (11), and the inner rod (11) and the outer rod (13) are made of a non-deformable material.

6. A multi-purpose mask-type optical lithography machine according to claim 3, wherein the air outlet direction of the air outlet (25) is inclined upward, and the opening height of the air outlet (25) is not less than 2 mm.

7. The multipurpose mask type smooth surface photoetching machine according to claim 1, wherein a sliding groove (23) is formed in the bottom surface of the inner rod (11), a first sliding block (12) is connected inside the sliding groove (23) in a sliding manner, and the bottom surface of the first sliding block (12) is fixedly connected with the outer wall of the top end of the twist lock telescopic rod (7) through an inclined strut (9).

8. The multipurpose mask type smooth surface photoetching machine according to claim 7, wherein the vertical cross-sectional shapes of the first sliding block (12) and the sliding groove (23) are both in a convex shape, the inner wall of the sliding groove (23) is in a smooth structure, and the first sliding block (12) and the sliding groove (23) are in interference fit.

9. A multi-purpose masked smooth lithography machine according to claim 1, characterized in that said inner rod (11) is a rectangular solid rod and said outer rod (13) is a rectangular tube.

10. The multi-purpose masked photolithography machine according to claim 1, wherein the pressing plate (18) is a metal circular plate that is not easily deformed, and the surface of the pressing plate (18) is painted with black paint.

Technical Field

The invention relates to the technical field of photoetching machines, in particular to a multipurpose mask type smooth surface photoetching machine.

Background

The common photoetching machine is mask aligning photoetching, general photoetching process includes the procedures of cleaning and drying silicon chip surface, coating bottom, spinning photoresist, soft drying, aligning exposure, post-drying, developing, hard drying and etching, the high-end projection photoetching machine can be divided into two kinds of step projection photoetching machine and scanning projection photoetching machine, its resolution ratio is generally between seven nanometers and several micrometers, and its high-end photoetching machine is called the most precise instrument in the world, and its world has 1.2 hundred million of Meijin one photoetching machine, and said high-end photoetching machine can be used in modern optical industry, and its production difficulty is large, and only a few companies can make the high-end photoetching machine.

Mask type photoetching machine adopts the glass piece as the mask version usually, the mask version fixing base also designs to glass piece or quartz plate, when needs use the film piece that the cost is lower, because the film piece is comparatively frivolous, traditional fixing base can't stable installation film piece, cause the film piece to arch up easily, it is not level enough, influence light and pass efficiency, thereby influence photoetching efficiency, and simultaneously, the resistant heat altered shape ability of film piece is far less than the glass piece, the heat of traditional photoetching machine when carrying out the photoetching can stop on film piece surface, thereby cause the film piece to receive the heat altered shape, also can restrict film piece's service function, can further make the improvement, and simultaneously, traditional fixing base is mostly fixed dimension, inconvenient size and altitude mixture control carry out, the convenience of use has also been influenced, also can further make the improvement.

An effective solution to the problems in the related art has not been proposed yet.

Disclosure of Invention

Technical problem to be solved

Aiming at the defects of the prior art, the invention provides a multipurpose mask type smooth surface photoetching machine which has the advantages of convenience for use of film sheets and glass sheets, improvement of the versatility of use, convenience for adjustment and convenience for use, and further solves the problems in the background technology.

(II) technical scheme

In order to realize the advantages of convenient use of the film and the glass sheet, improved use versatility, convenient adjustment and convenient use, the invention adopts the following specific technical scheme:

a multipurpose mask type smooth surface photoetching machine comprises a photoetching table and a servo moving table, wherein the servo moving table is installed on the top surface of the photoetching table, a wafer placing plate is installed on the top surface of the servo moving table, a track is fixedly installed at the diagonal position of the outer side of the servo moving table, a second sliding block is connected inside the track in a sliding mode, a twist lock telescopic rod is fixedly installed on the top surface of the second sliding block in a vertical mode, a fixing ring is fixedly sleeved at the top end of the twist lock telescopic rod, an outer rod is fixedly connected to one side surface of the fixing ring in a transverse mode, an inner rod is inserted inside the outer rod, one end of the inner rod is fixedly connected with the inner wall of the outer rod through a spring, a fixing frame is fixedly installed at the other end of the inner rod, a second handle bolt is connected to the center position of the top surface, the inside through thread connection of track has first handle bolt, and first handle bolt one end is rotated with track one end and is connected to the first handle bolt other end runs through the track other end, first handle bolt run through the second slider and with second slider threaded connection.

Furthermore, the vertical cross section of the track and the vertical cross section of the second sliding block are both in a convex shape, the inner wall of the track and the outer wall of the second sliding block are both provided with ball grooves, and balls are connected inside the ball grooves in a rolling mode.

Further, fixed frame bottom surface fixed mounting has bellows, and bellows underrun through connects there is coupling hose to bellows side surface has seted up the air exit, track one side is located the photoetching platform top surface and installs mini air-blower, and mini air-blower air-out end and coupling hose other end through connection.

Furthermore, the silica gel pad is circular, and the bottom surface of the silica gel pad is provided with friction lines.

Furthermore, the inner wall of the outer rod is in interference fit with the outer wall of the inner rod, and the inner rod and the outer rod are made of materials which are not easy to deform.

Furthermore, the air outlet direction of the air outlet is inclined upwards, and the opening height of the air outlet is not less than 2 mm.

Furthermore, a sliding groove is formed in the bottom surface of the inner rod, a first sliding block is connected to the inside of the sliding groove in a sliding mode, and the bottom surface of the first sliding block is fixedly connected with the outer wall of the top end of the twist lock telescopic rod through an inclined support rod.

Furthermore, the vertical section shapes of the first sliding block and the sliding groove are both in a convex shape, the inner wall of the sliding groove is of a smooth structure, and the first sliding block and the sliding groove are in interference fit.

Further, the inner rod is a rectangular solid rod, and the outer rod is a rectangular pipe.

Furthermore, the pressing plate is a metal circular plate which is not easy to deform, and the surface of the pressing plate is coated with black paint.

(III) advantageous effects

Compared with the prior art, the invention provides a multipurpose mask type smooth surface photoetching machine, which has the following beneficial effects:

(1) the film is fixed by rotating the second handle bolt to press the film, so that unstable placement caused by the fact that the film is too thin is avoided, when the film is installed, the four corners of the film can be placed in the fixing frame, the pressing plate can be driven to move downwards by rotating the second handle bolt downwards, so that the silica gel pad is driven to deform to press the four corners of the film, so that the four corners of the film are fixed, after the fixation is completed, the first handle bolt can be rotated outwards to drive the second sliding block to move outwards, so that the twist lock telescopic rod is driven to move outwards, the outer rod is driven to move outwards, so that the spring is driven to extend, the inner rod is pulled, the four corners of the film are pulled, the stretching is completed, the phenomenon that the film is folded and bent is avoided, the smoothness of the film is improved, the uniformity of light transmission is improved, the photoetching efficiency when the film is used is improved, and meanwhile, the four corners of glass can also be placed in the fixing, the completion is fixed to glass to make this device be fit for using film and glass piece, improve the multifunctionality of using.

(2) The height of the fixing frames is adjusted through the telescopic rod of the twist lock, so that different installation height requirements are met, the distance between the fixing frames can be adjusted through rotating the first handle bolt, the use requirements of films and glass sheets with different sizes are met, the universality of the device is improved, and the use convenience of the device is improved.

(3) According to the invention, air is injected into the air box through the mini blower, the air is exhausted through the air outlet formed in the surface of one side of the air box, and the air is blown out from the corners of the bottom surface of the film in a cross mode, so that the air flow is increased, the heat accumulation on the lower surface of the film is reduced, the heat dissipation of the film is further facilitated, the fault caused by the thermal deformation of the film is avoided, and the stability of the film in photoetching is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic structural diagram of a multi-purpose masked-type optical lithography machine according to an embodiment of the present invention;

FIG. 2 is a schematic view of the connection of a fixing frame and a twist lock telescopic bar according to an embodiment of the present invention;

FIG. 3 is a top view of a multi-purpose masked-smooth lithography machine according to an embodiment of the present invention;

FIG. 4 is a schematic view of a second slider and track connection according to an embodiment of the present invention;

FIG. 5 is a schematic view of the connection of the first slider and the inner rod according to an embodiment of the present invention;

figure 6 is a schematic structural view of a fixing frame according to an embodiment of the invention;

FIG. 7 is an enlarged view of node A of a multi-purpose mask-type optical lithography machine according to an embodiment of the present invention;

FIG. 8 is a schematic external structural view of a windbox according to an embodiment of the present invention.

In the figure:

1. a lithography stage; 2. a servo mobile station; 3. a wafer placing plate; 4. a track; 5. a first handle bolt; 6. a mini blower; 7. twisting and locking the telescopic rod; 8. a fixing ring; 9. a diagonal brace; 10. a fixing frame; 11. an inner rod; 12. a first slider; 13. an outer rod; 14. an air box; 15. a connecting hose; 16. a second handle bolt; 17. a rotating connecting seat; 18. pressing a plate; 19. a silica gel pad; 20. a joint; 21. a second slider; 22. a ball bearing; 23. a chute; 24. a spring; 25. an air outlet.

Detailed Description

For further explanation of the various embodiments, the drawings which form a part of the disclosure and which are incorporated in and constitute a part of this specification, illustrate embodiments and, together with the description, serve to explain the principles of operation of the embodiments, and to enable others of ordinary skill in the art to understand the various embodiments and advantages of the invention, and, by reference to these figures, reference is made to the accompanying drawings, which are not to scale and wherein like reference numerals generally refer to like elements.

According to an embodiment of the invention, a multipurpose mask type plain lithography machine is provided.

Referring to the drawings and the detailed description, as shown in fig. 1-8, a multi-purpose mask type smooth lithography machine according to an embodiment of the present invention includes a lithography table 1 and a servo moving table 2, the servo moving table 2 is installed on the top surface of the lithography table 1, a wafer placing plate 3 is installed on the top surface of the servo moving table 2, which is a common lithography machine structure and not described herein, the lithography machine is a common device, not all of which are shown in the drawings, a track 4 is fixedly installed at a diagonal position outside the servo moving table 2, a second slider 21 is slidably connected inside the track 4, a twist lock telescopic rod 7 is vertically and fixedly installed on the top surface of the second slider 21, a fixing ring 8 is fixedly sleeved at the top end of the twist lock telescopic rod 7, the twist lock telescopic rod 7 is a common device, the height can be adjusted and locked up and down, and an outer rod 13 is fixedly connected on one side surface of the fixing ring, an inner rod 11 is inserted into the outer rod 13, one end of the inner rod 11 is fixedly connected with the inner wall of the outer rod 13 through a spring 24, a fixed frame 10 is fixedly installed at the other end of the inner rod 11, a second handle bolt 16 penetrates through the center of the top surface of the fixed frame 10 and is connected with the bottom surface of the second handle bolt 16 through a rotary connecting seat 17 in a rotating mode, a pressing plate 18 is bonded to the bottom surface of the pressing plate 18, a silica gel pad 19 is bonded to the bottom surface of the pressing plate 18, the silica gel pad 19 plays a role in buffering and protecting to prevent the pressing plate 18 from crushing a film or a glass sheet, a first handle bolt 5 penetrates through the inside of the track 4 in a threaded mode, one end of the first handle bolt 5 is rotatably connected with one end of the track 4, the other end of the first handle bolt 5 penetrates through the other end of the track 4, the first handle bolt 5 penetrates through the, the second handle bolt 16 is rotated downwards to drive the pressing plate 18 to move downwards, thereby driving the silica gel pad 19 to deform and press the four corners of the film sheet, thereby fixing the four corners of the film, after the fixation is finished, the first handle bolt 5 can be rotated outwards to drive the second slide block 21 to move outwards, thereby driving the twist lock telescopic rod 7 to move outwards, thereby driving the outer rod 13 to move outwards, thereby driving the spring 24 to extend, pulling the inner rod 11, further pulling the four corners of the film to complete the stretching, avoiding the film from folding and bending, improving the smoothness of the film, thereby improving the uniformity of light transmission and the photoetching efficiency when the film is used, meanwhile, four corners of glass can be placed in the fixing frame 10, the second handle bolt 16 is rotated to drive the silica gel pad 19 to extrude the glass sheet, so that the glass is fixed, the device is suitable for using the film and the glass sheet, and the use versatility is improved.

In an embodiment, track 4 and second slider 21's vertical cross-section is the type of dogbone, and the ball groove has all been seted up to track 4 inner wall and second slider 21 outer wall, and the inside roll connection of ball groove has ball 22, ball 22 reduces the friction between track 4 and the second slider 21, thereby be convenient for second slider 21 steady movement, the fixed frame 10 height is adjusted to staff's accessible lock telescopic link 7, thereby adapt to the different installation height demands, through rotating the distance between the adjustable fixed frame 10 of first handle bolt 5, thereby adapt to the operation requirement of not unidimensional film piece and glass piece, the commonality that this device used has been improved, the convenience that this device used has been improved.

In one embodiment, an air box 14 is fixedly installed on the bottom surface of the fixed frame 10, a connection hose 15 is connected to the bottom surface of the air box 14 through a connector 20 in a penetrating manner, the connection hose 15 does not affect the movement of the fixed frame 10, an air outlet 25 is formed in one side surface of the air box 14, a mini air blower 6 is installed on one side of the rail 4 and located on the top surface of the photolithography table 1, an air outlet end of the mini air blower 6 is connected with the other end of the connection hose 15 in a penetrating manner, air is injected into the air box 14 from the mini air blower 6, the air is exhausted through the air outlet 25 formed in one side surface of the air box 14, air is blown out from corners of the bottom surface of the film in a crossing manner, air flow is increased, heat accumulation on the lower surface of the film is reduced, heat dissipation of.

In one embodiment, the silicone pad 19 is circular, and the bottom surface of the silicone pad 19 is provided with friction lines to improve friction force, thereby improving stability during pressing.

In one embodiment, the inner wall of the outer rod 13 is in interference fit with the outer wall of the inner rod 11, and the inner rod 11 and the outer rod 13 are both made of materials which are not easy to deform, so that the generation of shaking which affects the stability of film installation is avoided.

In one embodiment, the air outlet direction of the air outlet 25 is inclined upwards, and the opening height of the air outlet 25 is not less than 2mm, so that the film is prevented from being blown due to the fact that the air speed is increased due to the fact that the opening is too narrow, and the film is prevented from being interfered.

In one embodiment, the sliding groove 23 is formed in the bottom surface of the inner rod 11, the first sliding block 12 is slidably connected inside the sliding groove 23, the bottom surface of the first sliding block 12 is fixedly connected with the outer wall of the top end of the twist lock telescopic rod 7 through the inclined strut 9, the inclined strut 9 obliquely supports the inner rod 11, the inner rod 11 is prevented from sagging and deforming, and therefore the installation stability is improved.

In one embodiment, the vertical cross-sectional shapes of the first sliding block 12 and the sliding groove 23 are both in a convex shape, so that the first sliding block 12 is prevented from falling off, the inner wall of the sliding groove 23 is in a smooth structure, the first sliding block 12 and the sliding groove 23 are in interference fit, gaps are reduced, shaking is reduced, and the structure is more stable and reliable.

In one embodiment, the inner rod 11 is a rectangular solid rod, and the outer rod 13 is a rectangular tube, so that the inner rod 11 is prevented from rotating to cause the fixed frame 10 to rotate, and the inner rod 11 can be moved smoothly.

In one embodiment, the pressing plate 18 is a metal circular plate that is not easily deformed, and the surface of the pressing plate 18 is painted with black paint to prevent reflected light from interfering with photolithography.

The working principle is as follows:

when the fixing frame is installed, the four corners of the film can be placed into the fixing frame 10, the pressing plate 18 can be driven to move downwards by rotating the second handle bolt 16 downwards, the silica gel pad 19 is driven to deform and press the four corners of the film, so that the four corners of the film are fixed, after the fixing is completed, the first handle bolt 5 can be rotated outwards to drive the second sliding block 21 to move outwards, so that the twist lock telescopic rod 7 is driven to move outwards, the outer rod 13 is driven to move outwards, the spring 24 is driven to extend, the inner rod 11 is pulled, the four corners of the film are pulled, the tensioning is completed, the phenomenon that the film is folded and bent is avoided, the smoothness of the film is improved, the light transmission uniformity is improved, the photoetching efficiency when the film is used is improved, meanwhile, the four corners of glass can also be placed into the fixing frame 10, the silica gel pad 19 is driven to extrude the glass by rotating the second handle bolt 16, so that the fixing of the glass is completed, thereby the device is suitable for using film and glass sheets, the versatility of the use is improved, meanwhile, the worker can adjust the height of the fixing frame 10 by twisting and locking the telescopic rod 7, thereby adapting to different installation height requirements, the distance between the fixed frames 10 can be adjusted by rotating the first handle bolt 5, thereby meeting the use requirements of films and glass sheets with different sizes, improving the universality of the device and the convenience of the device, in addition, in the process of using the film photo-etching, the mini-blower 6 injects air into the air box 14, the air is exhausted through the air outlet 25 arranged on the surface of one side of the air box 14, the air is blown out from the corners of the bottom surface of the film in a cross mode, the air flow is increased, so that the heat accumulation on the lower surface of the film is reduced, and then the film sheet heat dissipation of being convenient for avoids the film sheet to cross the trouble that thermal deformation arouses to stability when using the film sheet to carry out the photoetching improves.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "disposed," "connected," "secured," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate, and may be communication between two elements or interaction relationship between two elements, unless otherwise specifically limited, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to specific situations.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.