阅读说明：本技术 一种三氟化氮生产中电解液转运槽 (Electrolyte transfer tank in nitrogen trifluoride production ) 是由 马朝选 纪振红 王振宇 林坤 赵志刚 贾炜冬 赵勇琪 张延远 于 2020-12-18 设计创作，主要内容包括：本发明公开了一种三氟化氮生产中电解液转运槽,包括槽体,槽体的底部壁内设有多个安装槽,每个安装槽内均设有用于给槽体内电解液加热的电热丝,电热丝与控制机构电连接；所述槽体的上端面设有电机,所述槽体内设有用于搅拌电解液的搅拌机构；所述电机的转轴贯穿槽体内连接所述搅拌机构,为搅拌机构提供动力；所述槽体的壁内嵌设有多根互相连通的加热水管,加热水管连接设置在槽体外部的热水循环供应组件；热水循环供应组件通过第一传动组件连接提供所需动力的电机。使用本发明能够在槽体内的电解液温度低时自动加温,同时还能通过热水循环进行电解液的保温。(The invention discloses an electrolyte transfer tank in nitrogen trifluoride production, which comprises a tank body, wherein a plurality of mounting grooves are formed in the bottom wall of the tank body, an electric heating wire for heating electrolyte in the tank body is arranged in each mounting groove, and the electric heating wire is electrically connected with a control mechanism; the upper end face of the tank body is provided with a motor, and a stirring mechanism for stirring electrolyte is arranged in the tank body; a rotating shaft of the motor penetrates through the tank body and is connected with the stirring mechanism to provide power for the stirring mechanism; a plurality of mutually communicated heating water pipes are embedded in the wall of the tank body and are connected with a hot water circulation supply assembly arranged outside the tank body; the hot water circulation supply assembly is connected with a motor for providing required power through a first transmission assembly. The invention can automatically heat when the temperature of the electrolyte in the cell body is low, and can also preserve the temperature of the electrolyte through hot water circulation.)

1. An electrolyte transfer tank in nitrogen trifluoride production comprises a tank body (1), and is characterized in that a feeding pipeline (3), a liquid outlet pipeline (5) and a gas release valve (4) penetrate through the tank body (1); an anticorrosive layer (6) is arranged on the inner side wall of the tank body (1); the outer side wall of the tank body (1) is provided with a heat-insulating layer (7); a plurality of mounting grooves (15) are formed in the bottom wall of the tank body (1), an electric heating wire (16) used for heating electrolyte in the tank body (1) is arranged in each mounting groove (15), and the electric heating wire (16) is electrically connected with a control mechanism;

a motor (8) is arranged on the upper end face of the tank body (1), and a stirring mechanism for stirring electrolyte is arranged in the tank body (1); a rotating shaft of the motor (8) penetrates through the tank body (1) to be connected with the stirring mechanism, so that power is provided for the stirring mechanism;

a plurality of mutually communicated heating water pipes (12) are embedded in the wall of the tank body (1), and the heating water pipes (12) are connected with a hot water circulation supply assembly arranged outside the tank body (1); the hot water circulation supply assembly is connected with a motor (8) for providing required power through a first transmission assembly.

2. The electrolyte transport tank for nitrogen trifluoride production according to claim 1, wherein the control mechanism comprises a controller (34) and a temperature sensor (33) disposed in the tank body (1); the temperature sensor (33) and the controller (34) are electrically connected with the electric heating wire (16) and are connected with a power supply in series.

3. The electrolyte transfer tank for nitrogen trifluoride production according to claim 1, wherein the stirring mechanism comprises a power box fixedly connected in the tank body (1), and a second gear (20) and two first gears (19) engaged with the second gear (20) are arranged in the power box;

an output shaft of the motor (8) is coaxially and fixedly connected with the second gear (20); the two first gears (19) are respectively and coaxially fixedly connected with a power shaft (18); an output shaft of the motor (8) and two power shafts (18) penetrate through the power box, and the three shafts are uniformly distributed in the space in the trough body (1); the output shafts of the two power shafts (18) and the motor (8) are provided with stirring blades (21).

4. The electrolyte transfer tank for nitrogen trifluoride production according to claim 1, wherein the hot water circulation supply unit comprises a water tank (23), a water pumping mechanism and a heating device (24); the water tank (23) is connected with the water pumping mechanism through a water inlet pipe, the water pumping mechanism is connected with the heating device (24) through a water outlet pipe, and a hot water output pipeline of the heating device (24) is connected with an inlet of the heating water pipe (12) in the connecting groove body; the outlet of the heating water pipe (12) is connected with a water tank (23) through a connecting pipeline; and a power input shaft (11) of the water pumping mechanism is connected with the motor (8) through the first transmission component.

5. The electrolyte transport tank for nitrogen trifluoride production according to claim 4, wherein the water pumping mechanism comprises a mounting cylinder (13), a piston (22) sealingly slidably coupled in the mounting cylinder (13); one side of the mounting cylinder (13) is connected with the water tank (23) through the water inlet pipe, and the other side of the mounting cylinder is connected with the heating device (24) through the water outlet pipe; the water inlet pipe and the water outlet pipe are both provided with one-way valves; the rod part of the piston (22) is connected with the power input shaft (11) through a second transmission assembly.

6. The electrolyte transfer tank for nitrogen trifluoride production according to claim 5, wherein said water pumping mechanism further comprises a mounting plate (9), a shaft mounting block (10) and said mounting cylinder (13) are fixedly mounted on the mounting plate (9); the power input shaft (11) penetrates through the rotating shaft mounting block (10) and can rotate; a worm (26) is fixedly connected to the power input shaft (11);

three gears which are meshed with each other are rotatably arranged on the mounting plate (9), the gear positioned in the middle is called a third gear (27), and the two gears positioned on the left and the right are called fourth gears (28); a third gear (27) is coaxially and fixedly connected with a worm wheel (25) matched with the worm (26); two fourth gears (28) are respectively and coaxially fixedly connected with a half gear (29);

the rod part of the piston (22) extends out of the mounting cylinder and is fixedly connected with a toothed plate (30), and the toothed plate (30) is meshed with the two half gears (29); the two half-gears (29) are oriented in the same direction and alternately mesh with the toothed plate (30).

7. Electrolyte transport tank for nitrogen trifluoride production according to claim 1, characterized in that the first transmission assembly comprises two belt pulleys (31) fixedly connected to the output shaft of the motor (8) and the power input shaft (11), and the two belt pulleys (31) are connected by a belt (32).

8. The electrolyte transfer tank for nitrogen trifluoride production according to claim 1, wherein the feed line (3) is provided through the upper end surface of the tank body (1), and a solenoid valve is provided in the feed line (3); the upper end of the tank body (1) is provided with the air release valve (4) in a penetrating manner, and the right side wall of the tank body (1) is provided with the liquid outlet pipeline (5) in a penetrating manner; the bottom of the tank body (1) is connected with a base (2).

9. The electrolyte transport tank for nitrogen trifluoride production according to claim 1, wherein a diaphragm pump (35) is installed on the outlet line (5).

10. The electrolyte transfer tank in nitrogen trifluoride production according to claim 1, wherein one end of the heating wire (16) in the mounting tank (15) is fixedly connected with a fixing block (17).

Technical Field

The invention relates to the technical field of nitrogen trifluoride preparation, in particular to an electrolyte transfer tank in nitrogen trifluoride production.

Background

Nitrogen trifluoride is used as an excellent plasma etching gas in the microelectronics industry. Electrolyte is needed in nitrogen trifluoride production, and an electrolyte transfer tank in nitrogen trifluoride production is needed.

Electrolyte transfer tank normal electrolyte is transported in mainly used nitrogen trifluoride production, or temporary storage electrolyte when the electrolysis trough is prorupted to be leaked prevents environmental pollution, reduces the production loss, need keep its temperature in the transportation of current electrolyte simultaneously, avoids heat loss electrolyte to solidify, so need an electrolyte transfer tank in the nitrogen trifluoride production that heat preservation performance is good to satisfy this condition.

Disclosure of Invention

In view of the above, the present invention provides an electrolyte transfer tank for nitrogen trifluoride production, which can automatically heat the electrolyte in the tank body when the temperature of the electrolyte is low, and can also preserve the temperature of the electrolyte by hot water circulation.

In order to solve the above-mentioned technical problems, the present invention has been accomplished as described above.

An electrolyte transfer tank in nitrogen trifluoride production comprises a tank body, wherein a feeding pipeline, a liquid outlet pipeline and a vent valve are arranged on the tank body in a penetrating manner; an anticorrosive layer is arranged on the inner side wall of the tank body; the outer side wall of the tank body is provided with a heat-insulating layer; a plurality of mounting grooves are formed in the bottom wall of the tank body, an electric heating wire for heating electrolyte in the tank body is arranged in each mounting groove, and the electric heating wire is electrically connected with the control mechanism;

the upper end face of the tank body is provided with a motor, and a stirring mechanism for stirring electrolyte is arranged in the tank body; a rotating shaft of the motor penetrates through the tank body and is connected with the stirring mechanism to provide power for the stirring mechanism;

a plurality of mutually communicated heating water pipes are embedded in the wall of the tank body and are connected with a hot water circulation supply assembly arranged outside the tank body; the hot water circulation supply assembly is connected with a motor for providing required power through a first transmission assembly.

Preferably, the control mechanism comprises a controller and a temperature sensor arranged in the groove body; the temperature sensor, the controller and the electric heating wire are electrically connected and are connected in series with a power supply.

Preferably, the stirring mechanism comprises a power box fixedly connected in the tank body, and a second gear and two first gears meshed with the second gear are arranged in the power box;

an output shaft of the motor is coaxially and fixedly connected with the second gear; the two first gears are respectively and coaxially fixedly connected with a power shaft; the output shaft of the motor and the two power shafts penetrate through the power box, and the three shafts are uniformly distributed in the space in the groove body; and stirring blades are arranged on the two power shafts and the output shaft of the motor.

Preferably, the hot water circulation supply assembly comprises a water tank, a water pumping mechanism and a heating device; the water tank is connected with the water pumping mechanism through a water inlet pipe, the water pumping mechanism is connected with the heating device through a water outlet pipe, and a hot water output pipeline of the heating device is connected with an inlet of the heating water pipe in the connecting groove body; the outlet of the heating water pipe is connected with the water tank through a connecting pipeline; and a power input shaft of the water pumping mechanism is connected with a motor through the first transmission assembly.

Preferably, the water pumping mechanism comprises a mounting cylinder and a piston which is connected in the mounting cylinder in a sealing and sliding manner; one side of the mounting cylinder is connected with the water tank through the water inlet pipe, and the other side of the mounting cylinder is connected with the heating device through the water outlet pipe; the water inlet pipe and the water outlet pipe are both provided with one-way valves; the rod part of the piston is connected with the power input shaft through a second transmission assembly.

Preferably, the water pumping mechanism further comprises a mounting plate, and a rotating shaft mounting block and the mounting cylinder are fixedly mounted on the mounting plate; the power input shaft penetrates through the rotating shaft mounting block and can rotate; a worm is fixedly connected to the power input shaft;

three gears which are meshed with each other are rotatably arranged on the mounting plate, the gear positioned in the middle is called a third gear, and the two gears positioned on the left and the right are called fourth gears; the third gear is coaxially and fixedly connected with a worm wheel matched with the worm; two fourth gears are respectively and fixedly connected with a half gear in a coaxial manner;

the rod part of the piston extends out of the mounting cylinder to be fixedly connected with a toothed plate, and the toothed plate is meshed with the two half gears; the two half gears are in the same direction and are alternately meshed with the toothed plates.

Preferably, the first transmission assembly comprises two belt wheels fixedly connected to the output shaft of the motor and the power input shaft, and the two belt wheels are connected through a belt.

Preferably, the feeding pipeline penetrates through the upper end face of the groove body, and an electromagnetic valve is arranged in the feeding pipeline; the upper end of the tank body is provided with the air release valve in a penetrating way, and the right side wall of the tank body is provided with the liquid outlet pipeline in a penetrating way; the bottom of the tank body is connected with the base.

Preferably, a diaphragm pump is installed on the liquid outlet pipe.

Preferably, one end of the heating wire in the mounting groove is fixedly connected with a fixing block.

Compared with the prior art, the invention has the beneficial effects that:

1. through setting up control mechanism and heating wire, realize when the electrolyte temperature in the cell body is lower, the temperature-sensing ware responds to automatically, then many heating wires of controller control circular telegram realize the intensification of electrolyte.

2. Through setting up rabbling mechanism, realize when the motor rotates, two power shafts also rotate to make a plurality of stirring leaves rotate, realize the stirring of electrolyte in the cell body, make the inside heat absorption of electrolyte more even.

3. Through setting up anticorrosive coating, heat preservation, avoid electrolyte to corrode the cell body, the life of greatly increased cell body, the heat of avoiding electrolyte runs off fast simultaneously in the setting of heat preservation, realizes the heat preservation of electrolyte.

4. Through setting up the pump water mechanism, realize taking out into heating device with the water in the water tank in, then enter into the water pipe, get back to the water tank in at last, realize hydrothermal circulation, further increase the heat preservation effect of cell body.

5. Through setting up first drive mechanism and second drive mechanism, realize sharing the power of stirring to the pumping mechanism on, realize the saving of power resource, make holistic linkage nature stronger simultaneously.

Drawings

FIG. 1 is a schematic front view of an electrolyte transfer tank for nitrogen trifluoride production according to the present invention;

FIG. 2 is a schematic view of the interior of the electrolytic solution transferring tank in nitrogen trifluoride production according to the present invention;

FIG. 3 is an enlarged schematic view of the structure at the position A of an electrolyte transfer tank in nitrogen trifluoride production according to the present invention;

FIG. 4 is an enlarged schematic view of the structure at the position B of the electrolyte transfer tank in the production of nitrogen trifluoride according to the present invention.

In the figure: the device comprises a tank body 1, a base 2, a feeding pipeline 3, an air release valve 4, a liquid outlet pipeline 5, an anticorrosive coating 6, a heat preservation layer 7, a motor 8, a mounting plate 9, a rotating shaft mounting block 10, a power input shaft 11, a heating water pipe 12, a mounting barrel 13, a mounting groove 15, an electric heating wire 16, a fixing block 17, a power shaft 18, a first gear 19, a second gear 20, a stirring blade 21, a piston 22, a water tank 23, a heating device 24, a worm gear 25, a worm 26, a third gear 27, a fourth gear 28, a half gear 29, a toothed plate 30, a belt wheel 31, a diaphragm pump 32, a temperature sensor 33, a controller 34 and a diaphragm pump 35.

Detailed Description

The invention is described in detail below by way of example with reference to the accompanying drawings.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.

Referring to fig. 1 to 4, an electrolyte transfer tank for nitrogen trifluoride production comprises a tank body 1; the base 2 can be installed to the bottom surface of the tank body 1, and is fixed on the ground through the base 2, so that the stability of the tank body is guaranteed.

The tank body 1 is provided with a feed pipeline 3, a liquid outlet pipeline 5 and a vent valve 4 in a penetrating way. In this embodiment, the upper end surface of the tank body 1 is provided with a feed line 3 in a penetrating manner, the feed line 3 is internally provided with an electromagnetic valve, the upper end of the tank body 1 is provided with a gas valve 4 in a penetrating manner, and the right side wall of the tank body 1 is provided with a liquid outlet line 5 in a penetrating manner. The liquid outlet pipe 5 is provided with a diaphragm pump 35.

Be equipped with anticorrosive coating 6 on the inside wall of cell body 1, be equipped with heat preservation 7 on the lateral wall of cell body 1, through setting up anticorrosive coating 6, heat preservation 7, avoid electrolyte to corrode cell body 1, greatly increased cell body 1's life, the heat of avoiding electrolyte runs off fast simultaneously in the setting of heat preservation 6, realizes the heat preservation of electrolyte.

A plurality of mounting grooves 15 are arranged in the bottom wall of the tank body 1, a heating wire 16 used for heating electrolyte in the tank body 1 is arranged in each mounting groove 15, and the heating wire 16 is electrically connected with a control mechanism. Preferably, one end of the heating wire 16 in the mounting groove 15 is abutted against the inner end face of the groove body, and the other end is fixedly connected with a fixing block 17 for fixing the position of the heating wire. The control mechanism comprises a controller 34 and a temperature sensor 33 arranged in the tank body 1; the controller 34 may be mounted on the base 2. The temperature sensor 33 and the controller 34 are electrically connected to the heating wire 16 and are connected in series to a power source. By providing the control mechanism and the heating wires, the temperature sensor 33 automatically senses when the temperature of the electrolyte in the cell body 1 is low, and then the controller 34 controls the plurality of heating wires 16 to be energized to increase the temperature of the electrolyte.

The upper end surface of the tank body 1 is provided with a motor 8. The upper end surface of the tank body 1 can be provided with an L-shaped plate, and the motor 8 can be arranged on the inner side wall of the L-shaped plate. A stirring mechanism for stirring the electrolyte is arranged in the tank body 1; the rotating shaft of the motor 8 penetrates through the tank body 1 to be connected with the stirring mechanism, and power is provided for the stirring mechanism.

The stirring mechanism comprises a power box fixedly connected in the tank body 1, and a second gear 20 and two first gears 19 meshed with the second gear 20 are arranged in the power box. The output shaft of the motor 8 is coaxially and fixedly connected with the second gear 20; two first gears 19 are coaxially and fixedly connected with a power shaft 18 respectively; an output shaft of the motor 8 and two power shafts 18 penetrate through the power box, and the three shafts are uniformly distributed in the space in the tank body 1; the two power shafts 18 and the output shaft of the motor 8 are provided with stirring blades 21. Through setting up rabbling mechanism, realize when motor 8 rotates, two power shafts 18 also rotate to make a plurality of stirring leaves 21 rotate, realize the stirring of electrolyte in the cell body 1, make the inside heat absorption of electrolyte more even.

The hot water circulation supply assembly comprises a water tank 23, a water pumping mechanism and a heating device 24; the water tank 23 is connected with the water pumping mechanism through a water inlet pipe, the water pumping mechanism is connected with the heating device 24 through a water outlet pipe, and a hot water output pipeline of the heating device 24 is connected with an inlet of the heating water pipe 12 in the connecting groove body; the outlet of the heating water pipe 12 is connected with a water tank 23 through a connecting pipeline; and a power input shaft 11 of the water pumping mechanism is connected with the motor 8 through the first transmission assembly. Through setting up the water pumping mechanism, realize taking the water in the water tank 23 into heating device 24 in, then enter into water pipe 12, get back to the water tank 23 at last in, realize hydrothermal circulation, further increase the heat preservation effect of cell body 1.

The water pumping mechanism comprises a mounting cylinder 13 and a piston 22 which is connected in the mounting cylinder 13 in a sealing and sliding manner; for the space below the piston 22 in the installation cylinder 13, one side of the space is connected with the water tank 23 through the water inlet pipe, and the other side of the space is connected with the heating device 24 through the water outlet pipe; the water inlet pipe and the water outlet pipe are both provided with one-way valves; the rod part of the piston 22 is connected with the power input shaft 11 through the second transmission assembly, and the power input shaft 11 is connected with the first transmission assembly.

The water pumping mechanism further comprises a mounting plate 9, and a rotating shaft mounting block 10 and the mounting cylinder 13 are fixedly mounted on the mounting plate 9; the power input shaft 11 penetrates through the rotating shaft mounting block 10 and can rotate; a worm 26 is fixedly connected to the power input shaft 11. Three gears which are meshed with each other are rotatably arranged on the mounting plate 9, the gear positioned in the middle is called a third gear 27, and the two gears positioned on the left and the right are called fourth gears 28; a third gear 27 is coaxially and fixedly connected with the worm wheel 25 matched with the worm 26; two fourth gears 28 are respectively and coaxially fixedly connected with a half gear 29; the rod part of the piston 22 extends out of the mounting cylinder and is fixedly connected with a toothed plate 30, and the toothed plate 30 is meshed with the two half gears 29; the two half-gears 29 are oriented identically and alternately mesh with the toothed plate 30.

The left side fixedly connected with mounting panel 9 of cell body 1, fixedly connected with installation piece 10 on the mounting panel 9, run through and swivelling joint has pivot 11 on the installation piece 10, the embedded condenser tube 12 that is equipped with many intercommunications of each other of wall of cell body 1, fixedly connected with installation section of thick bamboo 13 on the lateral wall of mounting panel 9, be equipped with the pump water mechanism that is used for making water pipe 12 inner water circulation in the installation section of thick bamboo 13, it is connected with transmission shaft 14 to rotate on the mounting panel 9, be equipped with the first drive mechanism that is used for providing pump water mechanism needs power on the transmission shaft 14, be equipped with the second drive mechanism that is used for providing pump water mechanism needs power on motor 8's the output shaft, be equipped with a plurality of mounting grooves 15 in the bottom wall of cell body 1, all be equipped with the heating wire 16 that is used for giving the interior electrolyte heating of cell body 1 in. In a preferred embodiment, the first transmission assembly comprises two belt pulleys 31 fixedly connected to the output shaft of the motor 8 and the power input shaft 11, and the two belt pulleys 31 are connected with each other through a belt 32. Through setting up first drive mechanism and second drive mechanism, realize sharing the power of stirring to the pumping mechanism on, realize the saving of power resource, make holistic linkage nature stronger simultaneously.

When the electrolytic bath is used, firstly, electrolyte is put into the bath body 1 through the feeding pipeline 3. The temperature of electrolyte this moment is lower, temperature-sensing ware 33 responds to, temperature-sensing ware 33's model here is DS18B20, make controller 34 work, thereby make many heating wires 16 circular telegrams generate heat, make electrolyte heat up, then open motor 8, motor 8 output shaft rotates and drives second gear 20 and rotate, thereby drive two first gears 19 rotations that mesh with it, thereby make two power shaft 18 rotate, make a plurality of stirring leaf 21 rotations on motor 8 output shaft and the power shaft 18 stir, make to be heated more evenly, anticorrosive coating 6 inside cell body 1 prevents that electrolyte from corroding cell body 1, the outside heat preservation 7 of cell body 1 avoids heat loss electrolyte to solidify.

The output shaft of the motor 8 rotates and simultaneously drives the belt wheel 31 at the right end to rotate, the belt wheel 31 at the left end is driven to rotate through the belt 32, the rotating shaft 11 is rotated, the worm 26 is further rotated, the worm 26 rotates to rotate the worm wheel 25, the transmission shaft 14 rotates to rotate the third gear 27, the two fourth gears 28 are further driven to rotate, the two supporting shafts are rotated to rotate the two half gears 29, the two half gears 29 rotate, the toothed plate 30 reciprocates up and down, the piston 22 reciprocates up and down through the up and down reciprocating motion of the toothed plate 30, so that water in the water tank 23 is pumped into the mounting cylinder 13 and then enters the heating device 24, the water is heated by the heating device 24 and then enters the water pipe 12, water bath heat preservation is realized, then the water in the water pipe 12 returns to the water tank 23, hot water circulation is realized, and in the process, the effect of the two one-way valves avoids backflow of water, when the use of the electrolyte is required, the diaphragm pump 35 is opened and the electrolyte is drawn into the electrolytic bath.

The above embodiments only describe the design principle of the present invention, and the shapes and names of the components in the description may be different without limitation. Therefore, a person skilled in the art of the present invention can modify or substitute the technical solutions described in the foregoing embodiments; such modifications and substitutions do not depart from the spirit and scope of the present invention.