阅读说明：本技术 用于测试半导体器件的接触器及插座装置 (Contactor and socket device for testing semiconductor device ) 是由 黄东源 黄路建载 黄裁白 于 2018-10-24 设计创作，主要内容包括：本发明涉及用于测试半导体器件的混合型接触器及插座装置,本发明的混合型接触器包括：将冲压形成有预定形状的带状图案的金属板材轧制成圆柱形而一体构成的第一接触器单元；插入到该第一接触器单元中并具有导电性和弹性的第二接触器单元；将第一接触器单元和第二接触器单元固定为一体的具有绝缘性的弹性材料、即模制部,所述混合型接触器能够克服一般的针型和橡胶型的接触器的缺点,根据测试设备的要求容易实现机械特性和电特性的最优化,适合微小间距用设备的测试。(The present invention relates to a hybrid contactor and a socket device for testing a semiconductor device, the hybrid contactor of the present invention includes: a first contactor unit integrally formed by rolling a metal plate material, on which a band-shaped pattern of a predetermined shape is formed by punching, into a cylindrical shape; a second contact unit inserted into the first contact unit and having conductivity and elasticity; the hybrid contactor can overcome the disadvantages of general needle-type and rubber-type contactors, easily optimize mechanical and electrical characteristics according to the requirements of test equipment, and is suitable for testing fine-pitch equipment.)

1. A hybrid contactor, comprising:

a first contactor unit integrally formed by rolling a metal plate material formed with a band-shaped pattern by stamping into a cylindrical shape;

a second contactor unit inserted into the first contactor unit and having conductivity and elasticity; and

and a mold part having an insulating elastic material and integrally fixing the first contactor unit and the second contactor unit.

2. The hybrid contactor as claimed in claim 1,

the second contact unit is a cylindrical elastic material mixed with conductive particles.

3. The hybrid contactor as claimed in claim 1,

the second contactor unit is a coil spring.

4. The hybrid contactor as claimed in claim 1,

the second contactor unit is integrally formed by punching and rolling a metal plate into a cylindrical shape.

5. The hybrid contactor as claimed in claim 1,

and a third contactor unit having conductivity and elasticity, inserted into the second contactor unit and fixed integrally by the molding part.

6. The hybrid contactor as claimed in claim 5,

the third contactor unit is disposed at an upper end and/or a lower end of the second contactor unit.

7. The hybrid contactor as claimed in claim 1,

the contactor further includes a buffer contact portion made of an elastic material into which conductive particles are mixed, and integrally fixed to an upper end of the first contactor unit and an upper end of the second contactor unit by the molding portion.

8. The hybrid contactor as claimed in claim 1,

the first contactor unit includes:

an elastic part connected in a zigzag pattern by unit bands and bent in a cylindrical shape, the unit bands being composed of a horizontal band and a vertical band shorter than the horizontal band and extending vertically along one end of the horizontal band;

an upper head part having an upper tip part formed to protrude upward, extending from the uppermost end of the elastic part and bent into a cylindrical shape; and

and a lower head part having a lower tip part formed to protrude downward, extending from the lowermost end of the elastic part, and bent into a cylindrical shape.

9. A test socket including the hybrid contactor of claim 1, comprising:

a fixing part formed with a plurality of through holes, the fixing part corresponding to a terminal of a device and receiving the hybrid contactor; and

and an insulating main body portion having elasticity and fixing the hybrid contactor and the fixing portion as a single body.

10. The test socket of claim 9,

the fixing portion includes an insulating plate-like member having a hole for fixing and a hole for guiding an assembly position.

11. The test socket of claim 9,

the fixing portion includes: an insulating first fixing portion in which the through hole is formed and which is supported by the insulating main body portion; and

a second fixing portion mounted on an upper portion of the first fixing portion,

the first fixing portion and the second fixing portion are respectively formed with a hole for fixing and a hole for guiding an assembling position in a penetrating manner.

12. The test socket of claim 9,

the insulating body further includes a fixing piece having an insulating property on an upper surface thereof, and the fixing piece is formed with a through hole corresponding to the through hole of the fixing portion.

13. The test socket of claim 12,

the hybrid contactor has a lower tip portion protruding toward an outside of the through hole, and an upper tip portion protruding toward an outside of the fixing piece facing an upper surface of the device.

14. The test socket of claim 12,

an upper tip portion in the hybrid contactor is located at a position lower than an upper surface of the stationary sheet facing the equipment.

15. The test socket of claim 9,

the hybrid contactor further includes a buffer contact having conductivity and elasticity at an upper end.

16. The test socket of claim 9,

the hybrid type contactor is composed of a plurality of contactors having different lengths, and is used for testing a composite type device having different kinds of terminals.

Technical Field

The present invention relates to a contactor and a socket device for testing a semiconductor device, and more particularly, to a contactor and a socket device for electrically connecting a contact point and a terminal. For example, a test socket is built in an IC for testing, and a terminal (lead) of the IC and a pad (pad) of a PCB are electrically connected, or a PCB in an electronic product such as a Personal Computer (PC) or a mobile phone and a terminal of an IC such as a CPU are electrically connected.

Background

The test socket is a part for inspecting defects of a semiconductor device at a post-processing stage of the semiconductor device, and is a part which makes contact with equipment at the very end and transmits signals transmitted through a test apparatus and a test board to the equipment in a test process.

The test socket requires accurate mechanical contact characteristics and stable electrical contact characteristics so that each device moves to an accurate position and makes accurate contact with the test board, and can transmit at a contact point without signal deviation when transmitting a signal.

Since such a test socket is a consumable part whose mechanical and electrical characteristics are degraded by repeated test processes, it is urgently required to increase the usable number of times by extending the life thereof, thereby reducing the cost of the test processes.

On the other hand, two reasons are listed for determining the maximum life of the test socket. The first reason is a problem of damage of the socket due to unstable contact at the mechanical portion, and the second reason is a problem of unstable electrical characteristics due to contamination of the contact portion due to continuous contact to increase contact resistance.

Generally used test sockets may be classified into a pin (pin) type and a rubber (rubber) type according to the form of a conductive method of connecting a semiconductor device and a test apparatus.

Fig. 1 and 2 are sectional views of a general needle type and a rubber type test socket, respectively.

Referring to fig. 1, a pin-type test socket 10 includes: a socket body 11 having a plurality of contact pins 12 formed by bending and having elasticity; a cover 13 which is movable up and down on the upper part of the socket body 11; and a latch 14 rotatably assembled to the socket main body 11 to be interlocked with the up-and-down movement of the cover 13 to fix or release the device 20.

The contact pin 12 has elasticity in the vertical direction and functions to electrically connect the terminal of the device and the pad of the testing apparatus, and various contact pins, for example, a pogo pin including a plunger, a barrel (barrel), and a spring, are available depending on the material and the form of the terminal of the device and the pad of the testing apparatus.

The latch 14 is formed with a guide groove 14a, to which a guide pin 15a is fastened at the guide groove 14a, and one end of the guide pin 15a is fixed to a drive chain 15 hinge-fastened to the cover 13. The cover 13 is elastically supported by a coil spring 16.

When the needle-type test socket 10 thus constructed presses the cover 13, the latches 14 are opened outward to enable loading of the device 20, and when the cover 13 is released, the needle-type test socket is fixed by pressing the latches 14 of the upper portion of the device 20 by the elastic restoring force of the coil spring 15.

However, in the pin-type test socket, since the contact pin 12 has a spiral or curved structure to have elasticity, a current path (current path) becomes long, which causes a problem of signal loss, and is disadvantageous to an ultra high frequency band. In addition, in the test socket with a fine pitch, the manufacturing process of the housing structure for accommodating the contact pins 12 is complicated, and the cost is greatly increased.

Next, referring to fig. 2, the rubber-type test socket 30 includes: a connector body 31 having elasticity by solidifying the insulating silicon powder; a conductive silicon portion 32 formed to penetrate vertically to the connector main body 31 in correspondence with the solder ball (terminal) 21 of the device 20. The conductive silicon portion 32 vertically penetrates the connector body 31 and has a substantially cylindrical shape.

A method for manufacturing such a rubber-type test socket will be described, in which a silicon mixture in which insulating silicon and conductive powder are mixed at a predetermined ratio is charged into a metal mold, and when a magnetic field is formed at a position where the conductive silicon portion 32 is formed, the conductive powder of the silicon mixture is gathered at the position where the magnetic field is formed, and finally the molten silicon mixture is solidified to obtain the test socket 30 in which the conductive silicon portion 32 is formed.

In the test socket 30 thus manufactured, the test device is positioned at the bottom, the lower end of the conductive silicon part 32 is brought into contact with the pad, and the upper end of the conductive silicon part 32 is brought into electrical contact with the solder ball 21 by applying a predetermined pressure from the upper end by the apparatus 20.

This rubber type test socket 30 is a soft material and has elasticity, so that the upper surface of the conductive silicon part 32 surrounds the solder ball 21 to achieve stable electrical contact, while the central portion of the conductive silicon part 32 protrudes in an expanded manner.

However, such a rubber-type test socket 30 has a disadvantage in that the service life is significantly reduced due to loss of elasticity during repeated tests, and thus the number of use is short and the cost is increased due to frequent replacement.

In particular, the rubber-type test socket cannot easily secure a sufficient insulation distance L between adjacent conductive silicon portions 32 in a device having a small pitch, and the possibility of occurrence of short circuits is high.

Specifically, in a test socket for a device with a fine pitch, in the case where the distance between the conductive silicon parts 32 becomes very short, it is very important to ensure a sufficient insulation distance L between the conductive silicon parts 32.

However, as described above, since rubber-type test socket 30 applies a magnetic field to a silicon melt mixture in which insulating silicon and conductive powder are mixed, and the conductive powder is aggregated along a magnetic path (magnetic path) to form conductive silicon portion 32, the conductive powder aggregated along the magnetic path cannot be distributed within accurately defined dimension D, and density D of the conductive powder has a continuously decreasing portion δ.

Therefore, the rubber-type test socket 30 has a predetermined reduced portion δ instead of the diameter d of the conductive silicon portion 32 defined accurately, and thus there is a problem in that the insulation distance L between the adjacent conductive silicon portions 32 becomes very short, which is not very useful as a test socket for fine pitches.

In addition, the rubber type test socket has a disadvantage that a manufacturing process is lengthened because a magnetic field is applied to the mixed silicon melt during the manufacturing process and the magnetic field needs to be applied for a considerable time in order to obtain a sufficient conductive powder density along a magnetic path in which the magnetic field is concentrated.

In a burn-in test of thermal stress of a test device, a test is performed at a temperature of 100 ℃ or more for several tens of hours to 1000 hours at maximum, and thus the elasticity of silicon is lowered in the test socket of a rubber type during the burn-in test, and a poor electrical contact between the device and a contactor may occur.

Accordingly, the present inventors have developed a novel hybrid contactor and test socket device that can overcome the disadvantages of the pin and rubber type of the related art and can combine the advantages.

Documents of the prior art

Patent document

Korean laid-open patent publication No. 10-2006-0062824 (published: 2006.06.12)

Korean granted patent publication No. 10-1860923 (publication No.: 2018.05.24.)

Disclosure of Invention

The present invention provides a test socket device which can improve the problems of the prior art, overcome the disadvantages of the needle-type and rubber-type test socket devices of the prior art, improve the problem of the self-durability reduction of the rubber-type contact during the aging test, have excellent electrical characteristics, can prolong the service life, and is suitable for the equipment with a fine pitch.

In addition, the present invention provides a hybrid contactor having a structure suitable for such a test socket device for a device with a fine pitch.

A hybrid contactor according to an aspect of the present invention includes: a first contactor unit integrally formed by rolling a metal plate material formed with a belt-shaped pattern by stamping into a cylindrical shape; a second contactor unit inserted into the first contactor unit and having conductivity and elasticity; and a molded part which is an insulating elastic material and fixes the first contact unit and the second contact unit together.

In addition, a test socket according to the present invention relates to a test socket including the hybrid contactor described above, including: a fixing part corresponding to a terminal of the device, accommodating the hybrid contactor, and having a plurality of through holes formed therein; and an insulating main body part which fixes the hybrid contactor and the fixing part into a whole and has elasticity.

The hybrid contactor of the present invention comprises: a first contactor unit integrally formed by rolling a metal plate material, on which a band-shaped pattern of a predetermined shape is formed by punching, into a cylindrical shape; a second contactor unit inserted into the first contactor unit and having conductivity and elasticity; and an elastic material, i.e., a molded part, which fixes the first contactor unit and the second contactor unit as one body and has insulation, thereby overcoming the disadvantages of the needle type and rubber type contactors of the prior art, easily optimizing mechanical and electrical characteristics according to the requirements of the test equipment, and being suitable for the test of the equipment for fine pitches.

In addition, according to the hybrid contactor of the present invention, stable characteristics can be secured even in a high temperature environment for a long time of a burn-in test, and thus the problem of operational reliability of a general rubber type test socket device can be improved.

Drawings

Fig. 1 and 2 are sectional views of a general needle type and a rubber type test socket, respectively.

Fig. 3 and 4 are a longitudinal sectional view and a plan view of a hybrid type contactor according to a first embodiment of the present invention, respectively.

Fig. 5 to 7 are views showing a first contactor unit of the hybrid contactor according to the first embodiment of the present invention.

Fig. 8 and 9 are a longitudinal sectional view and a plan view of a hybrid type contactor according to a second embodiment of the present invention, respectively.

Fig. 10 and 11 are a longitudinal sectional view and a plan view of a hybrid type contactor according to a third embodiment of the present invention, respectively.

Fig. 12 is a longitudinal sectional view of a hybrid type contactor according to a fourth embodiment of the present invention.

Fig. 13 is a longitudinal sectional view showing another modification of the hybrid type contactor according to the fourth embodiment of the present invention.

Fig. 14 is a longitudinal sectional view of a hybrid type contactor according to a fifth embodiment of the present invention.

Fig. 15 is a longitudinal sectional view showing another modification of the hybrid type contactor according to the fifth embodiment of the present invention.

Fig. 16 is a longitudinal sectional view of a hybrid type contactor according to a sixth embodiment of the present invention.

Fig. 17 is a plan view of a test socket according to a first embodiment of the present invention.

Fig. 18 is a sectional view taken along line a-a of fig. 17.

Fig. 19 is a cross-sectional view of a test socket according to a second embodiment of the present invention.

Detailed Description

First, the terms and words used in the present specification and claims should not be construed as being limited to general meanings or dictionary meanings, and the terms and words are to be construed as meanings and concepts conforming to the technical idea of the present invention in principle that the inventor can appropriately define the concept of the terms in order to explain his invention in a best way.

Therefore, the embodiment described in the present specification and the structure shown in the drawings are only the most preferable embodiment of the present invention and do not represent the entire technical idea of the present invention, and it should be understood from the point of view of the present application that various equivalents and modifications may be substituted for them.

The present invention is mainly characterized by a hybrid type contactor comprising: a first contactor unit integrally formed by rolling a metal plate material, on which a band-shaped pattern of a predetermined shape is formed by punching, into a cylindrical shape; a second contact unit inserted into the first contact unit and having conductivity and elasticity; and a molded part made of an insulating elastic material for integrally fixing the first contactor unit and the second contactor unit. Hereinafter, a hybrid type contactor according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

First embodiment

Fig. 3 and 4 are a longitudinal sectional view and a plan view of a hybrid type contactor according to a first embodiment of the present invention, respectively.

Referring to fig. 3 and 4, the hybrid contactor 100 according to the present embodiment includes: a first contactor unit 110 integrally formed by rolling a metal plate material, on which a band pattern is formed by punching, into a cylindrical shape; a second contactor unit 120 inserted into the first contactor unit 110 and having conductivity and elasticity; the first and second contact units 110 and 120 are integrally fixed to a mold 130 which is an insulating elastic material.

The first contact unit 110 is a cylindrical needle-type contact having a predetermined radius (<1mm) that is rolled from a metal plate material having a band pattern of a predetermined shape obtained by stamping, and has elasticity in the axial direction C1.

Fig. 5 to 7 are views showing a first contactor unit of a hybrid type contactor according to a first embodiment of the present invention, fig. 5 is a band pattern in a spread state, fig. 6 is a side view of the band pattern, and fig. 7 is a front view of the first contactor unit rolled in a cylindrical shape.

Referring to fig. 5 and 6, the band pattern 110' of the first contactor unit includes: an elastic part 111 composed of a horizontal band 111a and a vertical band 111b, and unit bands 111a, 111b connected in a zigzag pattern; an upper head 112 having an upper tip 112a formed to protrude upward and extending from the uppermost end of the elastic part 111; and a lower head portion 113 having a lower tip portion 113a formed to protrude downward and extending from the lowermost end of the elastic portion 111.

The first contactor unit is manufactured by mainly pressing a plate material made of beryllium copper (BeCu), a copper alloy, stainless steel (SUS), or the like into a predetermined pattern and bending the same into a cylindrical shape, and the surface may be plated with gold, palladium (Pd), palladium nickel (PdNi), palladium cobalt (PdCo), or the like.

The elastic part 111 includes unit bands 111a and 111b, the unit bands 111a and 111b are formed of a horizontal band 111a and a vertical band 111b, the vertical band 111b extends vertically along one end of the horizontal band 111a and has a shorter length than the horizontal band 111a, and the plurality of unit bands 111a and 111b are connected in a zigzag pattern.

The upper head 112 and the lower head 113 have upper and lower pointed ends 112a and 113b, respectively, which are formed in a plurality of zigzags along the edge, and are in contact with the terminals of the device and the pads of the test apparatus.

Although the upper head 112 and the lower head 113 are illustrated as being identical to the horizontal band 111a of the elastic part 111 in the present embodiment, it is not limited thereto and may be different in width and length.

Such a plate-like band pattern 110' is bent in a cylindrical shape with the center of the horizontal band 111a as the vertical axis C2, thereby being bent in a cylindrical shape.

Fig. 7 is a front view of a first contactor unit rolled in a cylindrical shape, partially cut away.

On the other hand, the first contact unit 110 in the present embodiment may be provided in various band patterns, for example, a plurality of closed rings are connected in a portion of the elastic portion in a length direction, or there may be various modifications such as a band pattern of a spiral shape, or the like.

Next, referring to fig. 3 and 4, the second contact unit 120 is a member having conductivity and elasticity inserted into the first contact unit 110, and preferably has a cylindrical shape mixed with conductive particles and having elasticity and insulation properties. For example, the second contactor unit 120 is made in the following manner: the mixture of the conductive powder and the insulating silicon powder is filled in a cylindrical mold, and is solidified after being melted, so that the second contact unit 120 having a cylindrical shape and having conductivity and elasticity can be obtained.

The particles having conductivity may be particles of a metal substance, or particles obtained by plating gold (Au), silver (Ag), palladium (Pd), palladium nickel (PdNi), palladium cobalt (PdCo), or the like on the surface of metal or nonmetal particles, or carbon nanotubes or the like may be mixed.

The insulating material constituting the second contact unit 120 may be an elastic polymer substance, and typically, silicon may be used.

After the second contactor unit 120 manufactured as described above is inserted into the first contactor unit 110 and temporarily assembled, the first contactor unit 110 and the second contactor unit 120 are fixed to be integrated by the mold 130. As the material of the mold part 130, a material having elasticity and insulation properties can be used, and for example, silicon can be used, but the material is not limited thereto.

On the other hand, the first and second contact units 110 and 120 may be manufactured as a unit hybrid type contact using a mold or a metal mold, or may be manufactured as a socket unit by molding the mold part 130 integrally with the socket body in a state where a plurality of first and second contact units are temporarily assembled to another socket body.

As shown in fig. 3, the second contactor unit 120 has an outer diameter smaller than an inner diameter of the first contactor unit 110, and the second contactor unit 120 is spaced apart from the first contactor unit 110 by a predetermined distance d and is positioned on a concentric axis, so that an insertion step of inserting the second contactor unit 120 into the first contactor unit 110 is easily performed. On the other hand, since the second contactor unit 120 has certain elasticity and is assembled with the first contactor unit 110, the second contactor unit 120 is manufactured to have the same outer diameter as the inner diameter of the first contactor unit 110, and is press-fitted into the first contactor unit 110 to be assembled with the first contactor unit 110.

Although fig. 3 illustrates that the height of the mold part 130 corresponds to the height from the upper head part 112 to the lower head part 113 of the first contact unit 110, the mold part may be provided only in an elastic part that generates a relatively large electric resistance, other than the upper head part and the lower head part, as needed.

In particular, in the present embodiment, the second contact unit 120 mixed with the conductive particles is inserted only to the inside of the first contact unit 110, and thus only the mold part 130, which is an elastic material, is provided in the compressed part of the first contact unit 110 having elasticity in the axial direction C, thereby preventing interference caused by elastic deformation of the first contact unit 110 of the conductive particles.

Second embodiment

Fig. 8 and 9 are a longitudinal sectional view and a plan view of a hybrid type contactor according to a second embodiment of the present invention, respectively. For reference, the same reference numerals are used for the same configurations as those of the first embodiment, and overlapping descriptions are omitted.

Referring to fig. 8 and 9, the hybrid contactor 200 according to the present embodiment includes: a first contactor unit 110 integrally formed by rolling a metal plate material, on which a band pattern is formed by punching, into a cylindrical shape; a coil spring 220 inserted into the first contact unit 110 and having conductivity and elasticity in the axial direction C1; the first contact unit 110 and the coil spring 220 are fixed to a mold 230, which is an insulating elastic material, integrally.

Preferably, the coil spring 220 is made of stainless steel (SUS) excellent in mechanical characteristics. Such a coil spring 220 is inserted into the first contactor unit 110 and elastically supports the terminal of the device and the pad of the test apparatus together with the first contactor unit 110, thereby functioning as a transmission path for transmitting signals. In particular, the stainless steel coil spring 220 has excellent mechanical characteristics, and can maintain stable characteristics (elasticity) even in a high-temperature environment such as a burn-in test or the like, thereby overcoming mechanical characteristics that cannot be obtained only by the first contactor unit 110 and the mold part 230, and improving reliability.

Preferably, the coil spring 220 has an outer diameter smaller than an inner diameter of the first contactor unit 110 with a predetermined interval d from the first contactor unit 110, and thus has a sufficient gap during the temporary assembly of the coil spring 220 inserted into the first contactor unit 110, thereby being capable of preventing interference between the coil spring 220 and the first contactor unit 110 from occurring during operation.

After the coil spring 220 thus manufactured is inserted into the first contactor unit 110 and temporarily assembled, the first contactor unit 110 and the coil spring 220 are fixed to be integrated by the mold 230. This assembly process is the same as the first embodiment.

Third embodiment

Fig. 10 and 11 are a longitudinal sectional view and a plan view of a hybrid type contactor according to a third embodiment of the present invention, respectively. The same reference numerals are used for the same components as those of the above-described embodiment, and redundant description is omitted.

As shown in fig. 10 and 11, the hybrid type contactor 300 according to the present embodiment includes: a first contactor unit 110 integrally formed by rolling a metal plate material, on which a band pattern is formed by punching, into a cylindrical shape; a second contactor unit 320 which is inserted into the first contactor unit 110 and integrally formed by punching and rolling a metal plate into a cylindrical shape; the mold 330, which is an insulating elastic material, integrally fixes the first contact unit 110 and the second contact unit 320.

In the case where the second contact unit 320 is a pin-type contact in which a strip pattern is bent into a cylindrical shape, as in the case of the first contact unit 110, the first contact unit 110 and the second contact unit 320 may be pin-type contacts having the same strip pattern, or may be pin-type contacts having strip patterns different from each other.

After such a second contactor unit 320 is temporarily assembled while being inserted into the first contactor unit 110, the first contactor unit 110 and the second contactor unit 320 are fixed as one body by the molding part 330, and the assembly process is the same as the first embodiment.

Fourth embodiment

Fig. 12 is a longitudinal sectional view of a hybrid type contactor according to a fourth embodiment of the present invention.

Referring to fig. 12, the hybrid contactor 400 according to the present embodiment includes: a first contactor unit 110 integrally formed by rolling a metal plate material, on which a band pattern is formed by punching, into a cylindrical shape; a second contact unit 420 inserted into the first contact unit 110 and having conductivity and elasticity; a third contactor unit 430 inserted into the second contactor unit 420 and having conductivity and elasticity; the first contact unit 110, the second contact unit 420, and the third contact unit 430 are integrally fixed to a mold 440, which is an insulating elastic material.

In the present embodiment, the second contact unit 420 is a coil spring, and a cylindrical third contact unit 430 having elasticity and insulation, in which conductive particles are mixed, is inserted into the inside of the coil spring. The third contactor unit 430 is the same as the first embodiment, and thus, a repetitive description thereof will be omitted.

The hybrid type contactor 400 thus constructed is combined with the coil spring having excellent mechanical characteristics to form the third contactor unit 430 having elasticity and conductivity, and excellent electrical characteristics and operational reliability can be obtained even under high temperature environments such as a burn-in test.

Fig. 13 is a longitudinal sectional view showing another modification of the hybrid type contactor according to the fourth embodiment of the present invention.

As shown in fig. 13, in the hybrid type contactor 400' of the present embodiment, the third contactor units 431 and 432 are inserted inside the second contactor unit 420, as in the above-described embodiment, and the third contactor units 431 and 432 are disposed only at the upper and lower ends of the second contactor unit 420 contacting the terminal of the device and the pad of the testing apparatus, respectively, and the central portion is filled with the mold part 440.

On the other hand, although the case where the third contactor units 431 and 432 are provided at both the upper and lower ends of the second contactor unit 420 is exemplified in the present embodiment, the third contactor unit may be provided only at either the upper or lower end.

Fifth embodiment

Fig. 14 is a longitudinal sectional view of a hybrid type contactor according to a fifth embodiment of the present invention.

Referring to fig. 14, the hybrid contactor 500 according to the present embodiment includes: a first contactor unit 110 integrally formed by rolling a metal plate material, on which a band pattern is formed by punching, into a cylindrical shape; a second contact unit 520 inserted into the first contact unit 110 and having conductivity and elasticity; a third contactor unit 530 inserted into the second contactor unit 520 and having conductivity and elasticity; the first contact unit 110, the second contact unit 520, and the third contact unit 530 are integrally fixed to a mold 540 which is an elastic material having insulation properties.

In the present embodiment, the second contact unit 520 is a pin-type contact integrally formed by press-bending a metal plate material into a cylindrical shape, and the first contact unit 110 and the second contact unit 520 may be pin-type contacts having the same strip-shaped pattern or pin-type contacts having strip-shaped patterns different from each other.

A third contact unit 530 having a cylindrical shape with elasticity and insulation, into which conductive particles are mixed, is inserted into the second contact unit 520. The third contactor unit 530 is the same as the first embodiment, and thus, a repetitive description thereof will be omitted.

The hybrid type contactor 500 thus constructed is combined with the pin type second contactor unit 520 having excellent electrical characteristics to form the third contactor unit 530 having elasticity and conductivity, and is particularly effective for testing of devices requiring excellent electrical characteristics.

Fig. 15 is a longitudinal sectional view showing another modification of the hybrid type contactor according to the fifth embodiment of the present invention.

Referring to fig. 15, in the hybrid type contactor 500' of the present embodiment, third contactor units 531, 532 are inserted into the inside of the second contactor unit 520, and particularly, the third contactor units 531, 532 are disposed only at the upper and lower ends of the second contactor unit 520 contacting the terminals of the device and the pads of the testing apparatus, respectively, with a molding part 540 filled in the center.

On the other hand, although the case where the third contactor units 531, 532 are provided at both the upper and lower ends of the second contactor unit 520 is exemplified in the present embodiment, the third contactor unit may be provided only at either the upper or lower end.

Sixth embodiment

Fig. 16 is a longitudinal sectional view of a hybrid type contactor according to a sixth embodiment of the present invention.

Referring to fig. 16, the hybrid contactor 600 according to the present embodiment further includes: a first contactor unit 110; a second contactor unit 120 and a mold part 130 substantially the same as the first embodiment; a buffer contact (bump contact)610, which is an elastic material in which conductive particles are mixed, is integrally fixed to the upper ends of the first and second contact units 110 and 120 by a mold 130.

The buffer contact 610 may be obtained by melting and solidifying a mixture of conductive powder and silicon powder in a mold, as in the process of manufacturing the second contactor unit 120, and the manufactured buffer contact 610 is integrally fixed by the mold 130 in a state of being disposed at the upper ends of the first contactor unit 120 and the second contactor unit 120 which are temporarily assembled.

In this way, the hybrid contactor 600 having the buffer contact portion 610 at the upper end can reduce the wear of the upper tip portion by the contact with the terminal of the device through the medium.

Although the case where the buffer contact portion is provided only at one end of the contactor is disclosed in the present embodiment, the buffer contact portion may be provided at both ends of the contactor for the same purpose. Further, the hybrid contactor of the first embodiment is provided with the buffer contact portion, but the hybrid contactors of the second to fifth embodiments may be similarly provided with the buffer contact portion.

As such, the hybrid contactor of the present invention mainly includes: a needle-shaped first contactor unit formed by bending a metal plate material, on which a band-shaped pattern of a predetermined shape is formed by stamping, into a cylindrical shape; a second contact unit inserted into the first contact unit and having conductivity and elasticity; the first contactor unit and the second contactor unit are fixed to a mold portion, which is an insulating elastic material integrally, and the first contactor unit and the second contactor unit are combined in various forms or a third contactor unit is added to the second contactor unit in consideration of a required pitch (pitch), a contact stroke (contact stroke), a contact force (contact force), a contact resistance (contact resistance), a signal band (bandwidth), a temperature condition, and the like of a test equipment, thereby obtaining an optimal contactor.

A test socket using such a hybrid contactor (hereinafter also simply referred to as "contactor") will be described in detail below.

First embodiment

Fig. 17 is a plan view of a test socket according to a first embodiment of the present invention, and fig. 18 is a sectional view taken along line a-a of fig. 17.

Referring to fig. 17 and 18, the test socket 700 according to the present embodiment includes: a fixing portion 710 formed with a plurality of through holes 711a corresponding to the terminals 41 of the device 40, the through holes 711a receiving the contactors 300; and an insulating body 720 having elasticity for integrally fixing the contactor 300 and the fixing part 710.

The fixing portion 710 is a plate-like member having a plurality of through holes 711a corresponding to the terminals 41 of the device 40, into which a part of the lower end of the contact 300 is inserted, and an insulating main body portion 720 on the upper surface. The fixing part 710 may have a plurality of fixing holes 701 for mounting the test socket and a plurality of guide holes 702 functioning to guide an assembling position of the test socket.

In this embodiment, the fixing part 710 may include: the first fixing portion 711 is made of an insulating material such as resin, and the second fixing portion 712 is made of metal (SUS) or resin and is configured as a socket base, but the first fixing portion 711 may be used alone.

The insulating body 720 is an insulating member having elasticity, and integrally fixes the contactor 300 and the fixing portion 710, thereby mounting the device 40 on the upper surface.

On the other hand, the insulating main body 720 may be provided with a fixing piece 730 on the upper surface thereof for directly attaching the device 40 thereto, or the insulating main body 720 may be made of an insulating resin.

The insulating body portion 720 may be made of insulating silicon. The insulating main body portion 720 is formed with receiving holes 721 for receiving the respective contacts 300, and the receiving holes 721 may be formed in the insulating main body portion 720 by injecting a silicon liquid into a separate mold and removing the mold after curing. Next, the fixing portion 710, the insulating body portion 720, and the fixing piece 730 are stacked and molded as one body after the contactor 300 is inserted, thereby manufacturing the test socket.

Preferably, the lower tip portion of the contactor 300 protrudes toward the outside of the through hole 711a by a predetermined length b1, which may improve the contact with the pad of the test device.

The upper tip portion of the contactor 300 is protruded by a predetermined length b2 toward the outside of the insulating main body portion 720 facing the upper surface of the device 40, and the contact with the terminal 41 of the device 40 can be improved. On the other hand, the fixing piece 730 provided at the upper portion of the insulating body portion 720 allows the apparatus 40 to be directly mounted, in which case the height of the fixing piece 730 may be higher than the upper end of the contactor 300, but the fixing piece 730 is compressed when the apparatus is fixed, thereby allowing the terminal 41 of the apparatus 40 to be in contact with the upper end of the contactor 300.

In this embodiment, a contactor according to a third embodiment is exemplified as the contactor 300 (see fig. 10), and contactors according to other embodiments are also applicable.

Second embodiment

Fig. 19 is a sectional view of a test socket according to a second embodiment of the present invention, showing a test socket suitable for a composite type device 50 in which ball type (ball type) and ground type (land type) terminals 51, 52 are mixed.

Referring to fig. 19, according to the test socket 800 of the present embodiment, the terminals 51, 52 according to the device 50 may have the same kind (or different kinds) of contactors 300A, 300B with different heights.

According to this device, in the case of the composite device 50 in which the ball-type terminals 51 and the ground-type terminals 52 are mixed, the contacts 300A and 300B suitable for the respective terminals may be provided, and in this case, the contacts 300A and 300B may be BGA-type or LGA-type contacts, and as described in the above embodiment, the contacts suitable for the respective terminals may be integrally fixed to the fixing portion 810 together with the insulating main body portion 820 and the fixing piece 830.

Although the example of using the same type of contactors with different heights for the contactors 300A, 300B is illustrated in the present embodiment, different types of contactors may be combined.

As described above, the present invention is described by the embodiments and drawings, but the present invention is not limited thereto, and it is obvious that a person having ordinary knowledge in the art to which the present invention belongs can make various modifications and variations within the technical idea of the present invention and the equivalent scope of the claims to be described below.

Description of the reference numerals

100. 200, 300, 400, 500, 600: hybrid contactor

110: first contactor unit

120. 320, 420, 520: second contactor unit

130. 230, 330, 440, 540: molding section

430. 530: third contactor unit

220: spiral spring

610: buffer contact part

700. 800: test socket

710. 810: fixing part

720. 820: insulating body portion

730. 830: fixing sheet