阅读说明：本技术 炉体设备 (Furnace body equipment ) 是由 左国军 磨建新 唐洪湘 吴勇茂 危建 于 2021-07-14 设计创作，主要内容包括：本发明提供了一种炉体设备,包括：架体,具有在长度方向上相对设置的第一端和第二端；第一光辐射机构,设于架体,第一光辐射机构靠近第一端；第二光辐射机构,设于架体,第二光辐射机构靠近第二端,第一光辐射机构和第二光辐射机构沿架体的长度方向布置；传输机构,设于架体,传输机构用于将物料由架体的第一端输送至第二端,传输机构穿设于第一光辐射机构和第二光辐射机构,第一光辐射机构对物料进行单面和/或双面照射,第二光辐射机构对物料进行单面照射。本发明的技术方案中,物料在经过第二光辐射机构之前,会先经过第一光辐射机构,第一光辐射机构能够对物料的正反面进行全方位红外光线的辐射注入,经过辐射退火处理后的物料可以提效0.3％。(The invention provides a furnace body device, comprising: the rack body is provided with a first end and a second end which are oppositely arranged in the length direction; the first light radiation mechanism is arranged on the frame body and is close to the first end; the second light radiation mechanism is arranged on the frame body and close to the second end, and the first light radiation mechanism and the second light radiation mechanism are arranged along the length direction of the frame body; the transmission mechanism is arranged on the frame body and used for conveying the materials to the second end from the first end of the frame body, the transmission mechanism penetrates through the first optical radiation mechanism and the second optical radiation mechanism, the first optical radiation mechanism conducts single-side and/or double-side irradiation on the materials, and the second optical radiation mechanism conducts single-side irradiation on the materials. According to the technical scheme, the material passes through the first optical radiation mechanism before passing through the second optical radiation mechanism, the first optical radiation mechanism can perform omnibearing infrared ray radiation injection on the front side and the back side of the material, and the efficiency of the material subjected to radiation annealing treatment can be improved by 0.3%.)

1. A furnace apparatus (100), comprising:

a frame body (110) having a first end (111) and a second end (112) which are oppositely arranged in the length direction;

the first light radiation mechanism (120) is arranged on the frame body (110), and the first light radiation mechanism (120) is close to the first end (111);

the second light radiation mechanism (130) is arranged on the frame body (110), the second light radiation mechanism (130) is close to the second end (112), and the first light radiation mechanism (120) and the second light radiation mechanism (130) are arranged along the length direction of the frame body (110);

the transmission mechanism (140) is arranged on the frame body (110), the transmission mechanism (140) is used for conveying the materials (200) from the first end (111) to the second end (112) of the frame body (110), the transmission mechanism (140) is arranged on the first optical radiation mechanism (120) and the second optical radiation mechanism (130) in a penetrating manner,

wherein the first light radiation mechanism (120) is used for performing single-side and/or double-side irradiation on the material (200), and the second light radiation mechanism (130) is used for performing single-side irradiation on the material (200).

2. The furnace apparatus (100) according to claim 1, wherein the first light radiation mechanism (120) comprises:

two first furnace body structures (121), the heights of the two first furnace body structures (121) are different, each first furnace body structure (121) is provided with a first furnace cavity (1211), at least one first furnace cavity (1211) is internally provided with a plurality of infrared lamp tubes (1215),

wherein the transport mechanism (140) is located between the two first furnace structures (121).

3. The furnace body apparatus (100) according to claim 1, wherein the second light radiation mechanism (130) comprises:

the second furnace body structure (131) is provided with a second furnace chamber (1311), and a plurality of LED lamp panels (1312) are arranged in the second furnace chamber (1311);

a third furnace body structure (132) arranged below the second furnace body structure (131), wherein the third furnace body structure (132) is provided with a third furnace chamber (1321), an air supply component (1322) is arranged in the third furnace chamber (1321),

the second furnace body structure (131) and the third furnace body structure (132) are arranged at intervals to form a fourth furnace chamber (133), the transmission mechanism (140) is arranged in the fourth furnace chamber (133) in a penetrating manner, and at least one side of the fourth furnace chamber (133) is provided with an opening.

4. The furnace apparatus (100) according to claim 1, wherein the transport mechanism (140) comprises:

the conveying assemblies (141) are oppositely arranged, the length directions of the two conveying assemblies (141) are consistent, and a space exists between the two conveying assemblies (141);

the carrier (142) is positioned between the two conveying assemblies (141), the carrier (142) is used for carrying materials (200), and the carrier (142) moves along the length direction of the rack body (110) through the two conveying assemblies (141).

5. The furnace apparatus (100) according to claim 4, wherein the carrier (142) is a hollowed-out carrier plate comprising:

the frame structure (1421) is arranged between the two transmission assemblies (141), and the frame structure (1421) is provided with a hollow groove (1422) with a square cross section;

the supporting structures (1423) are connected with the frame structure (1421), each supporting structure (1423) is located at a position, close to a corner of the hollow groove (1422), in the frame structure (1421), and the supporting structures (1423) are used for supporting the material (200) so that the material (200) is opposite to the hollow groove (1422).

6. The furnace apparatus (100) according to claim 4, wherein the carrier (142) is a flower basket comprising:

at least two spaced apart end plates (1424);

a connecting bar (1425) for connecting the end plates (1424);

wherein the material (200) is stacked between the two end plates (1424).

7. The furnace apparatus (100) according to claim 4, wherein the transport assembly (141) comprises:

a first transmission section (143) located within the first optical radiation mechanism (120);

a second transmission segment (144) located within the second optical radiation mechanism (130);

wherein the first transport section (143) is adapted to transport the material (200) past the first light radiation means (120) and the second transport section (144) is adapted to transport the material (200) past the second light radiation means (130).

8. The furnace apparatus (100) according to claim 7, wherein the transport mechanism (140) further comprises:

a first drive assembly (145) in driving connection with the first transmission section (143);

a second drive assembly (146) in driving connection with the second transmission section (144).

9. The furnace apparatus (100) according to claim 1, wherein the material (200) is a silicon wafer, and the silicon wafer is a whole wafer or a half wafer.

10. The furnace apparatus (100) according to claim 1, further comprising:

the feeding mechanism (150) is arranged at the first end (111) of the frame body (110);

and the blanking mechanism (160) is arranged at the second end (112) of the frame body (110).

Technical Field

The embodiment of the invention relates to the technical field of solar cell processing and production, in particular to furnace body equipment.

Background

In the related art, only the LED light radiation mechanism is arranged in the furnace body equipment, and the solar cell is injected by adopting single-sided light radiation, so that the efficiency of the processed solar cell is not very high.

Disclosure of Invention

In order to solve at least one of the above technical problems, an embodiment of the present invention is directed to a furnace apparatus.

In order to achieve the above object, the present invention provides a furnace body apparatus comprising: the rack body is provided with a first end and a second end which are oppositely arranged in the length direction; the first light radiation mechanism is arranged on the frame body and is close to the first end; the second light radiation mechanism is arranged on the frame body and close to the second end, and the first light radiation mechanism and the second light radiation mechanism are arranged along the length direction of the frame body; the transmission mechanism is arranged at the frame body and used for conveying the materials to the second end from the first end of the frame body, the transmission mechanism penetrates through the first optical radiation mechanism and the second optical radiation mechanism, the first optical radiation mechanism is used for performing single-side and/or double-side irradiation on the materials, and the second optical radiation mechanism is used for performing single-side irradiation on the materials.

According to the embodiment of the furnace body equipment provided by the invention, the material passes through the first light radiation mechanism before passing through the second light radiation mechanism, the first light radiation mechanism can perform omnibearing infrared ray radiation injection on the front side and the back side of the material, and the efficiency of the material after radiation annealing treatment can be improved by 0.3%.

Specifically, the furnace body equipment comprises a frame body, a first light radiation mechanism, a second light radiation mechanism and a transmission mechanism. Wherein, the support body mainly plays the effect of installation carrier, and the support body has first end and the second end that sets up relatively in length direction. The first light radiation mechanism is arranged on the frame body and is close to the first end of the frame body. The second light radiation mechanism is arranged on the frame body and is close to the second end of the frame body. In other words, the first and second light radiation mechanisms are arranged along the length direction of the frame body, the first light radiation mechanism is located at a position of the frame body near the first end, and the second light radiation mechanism is located at a position of the frame body near the second end.

Further, transmission device locates the support body, and transmission device is used for bearing the weight of the material, and transmission device can carry the material to the second end by the first end of support body. The transmission mechanism penetrates through the first optical radiation mechanism and the second optical radiation mechanism, and the material firstly passes through the first optical radiation mechanism and then passes through the second optical radiation mechanism in the process that the material moves from the first end of the frame body to the second end.

Further, the first light radiation mechanism can perform double-sided irradiation on the material; or the first light radiation mechanism irradiates the single side of the material. The second light radiation mechanism can irradiate a single side of the material. It should be noted that the material in the present application may specifically be a solar cell, also referred to as a silicon wafer or a crystalline silicon solar cell.

Specifically, the first light radiation mechanism is an infrared IR light radiation mechanism, and the front side and the back side of the material are radiated by infrared light, namely the solar cell is uniformly heated. The positive and negative surfaces of the material on the transmission mechanism are not shielded, so that the possibility of shadow after illumination radiation is greatly reduced. The temperature of the material rises after passing through the first light radiation mechanism. Further, second light radiation mechanism is LED light radiation mechanism, adopts the single-sided light radiation to inject into, and second light radiation mechanism includes the air supply subassembly, and the air supply subassembly can be to the interior source of furnace chamber constantly send into cold fresh air to lower the temperature to the material, the material temperature reduction after passing through second light radiation mechanism promptly.

For a crystalline silicon solar cell, whether a high-efficiency PERC cell (single crystal) or a novel HJT cell (heterojunction) exists, the efficiency attenuation phenomenon occurs in the initial stage of use under the sunlight irradiation environment due to the existence of boron-oxygen pairs. The battery piece is subjected to irradiation annealing treatment under a certain temperature condition by using a specific light source in advance, so that the phenomenon can be effectively prevented. In the related art, only the LED light radiation mechanism is arranged in the furnace body equipment, and the solar cell is injected by adopting single-sided light radiation, so that the efficiency of the processed solar cell is not very high.

Among the technical scheme that this application was injectd, the material can be earlier through first optical radiation mechanism before through second optical radiation mechanism, and first optical radiation mechanism can carry out the radiation injection of all-round infrared light to the positive and negative of material, and the material after radiation annealing can improve and imitate 0.3%.

In addition, the technical scheme provided by the invention can also have the following additional technical characteristics:

in the above technical solution, the first optical radiation mechanism includes: two first furnace body structures, two first furnace body structures highly different, every first furnace body structure all is equipped with first furnace chamber, is equipped with a plurality of infrared fluorescent tubes in the first furnace chamber, and transmission device is located between two first furnace body structures.

In this solution, the first light radiation means comprise two first furnace body structures. Specifically, the two first furnace body structures have different heights, namely one of the first furnace body structures is arranged above the other first furnace body structure. Furthermore, in the two first furnace body structures, each first furnace body structure is provided with a first furnace chamber, at least one first furnace chamber is internally provided with a plurality of infrared lamp tubes, and when the two furnace chambers are internally provided with a plurality of infrared lamp tubes, double-sided radiation of materials can be realized; preferably, in order to realize uniform and effective radiation, the plurality of infrared lamp tubes in each first furnace chamber are uniformly arranged at equal intervals along the material conveying direction. The infrared lamp tube can radiate infrared light outwards. The transmission mechanism is located between two first furnace body structures, and when the material passes through two first furnace body structures of the first optical radiation mechanism through the transmission mechanism, the infrared lamp tube located in the first furnace cavity can inject the radiation of all-round infrared light into the front and back of the material, and then the material enters the second optical radiation mechanism.

It is worth to say that, two first furnace body structures in the first light radiation mechanism are the symmetry setting from top to bottom, are favorable to carrying out the illumination radiation to the positive and negative of material, even heating.

In the above technical solution, the second optical radiation mechanism includes: the second furnace body structure is provided with a second furnace chamber, a plurality of light emitting diodes are arranged in the second furnace chamber, one of the light emitting diodes is an LED lamp tube or an LED lamp panel, and the light emitting diodes are preferably uniformly distributed at equal intervals along the horizontal direction; the third furnace body structure is arranged below the second furnace body structure, the third furnace body structure is provided with a third furnace chamber, an air supply assembly is arranged in the third furnace chamber, the second furnace body structure and the third furnace body structure are arranged at intervals to form a fourth furnace chamber, the transmission mechanism is arranged in the fourth furnace chamber in a penetrating mode, an opening is formed in at least one side of the fourth furnace chamber, the distance between the LED lamp panel and the materials is a first distance, and the first distance is 50mm to 100 mm.

In this technical solution, the second optical radiation mechanism includes a second furnace structure and a third furnace structure. Specifically, second furnace body structure is equipped with the second furnace chamber, is equipped with a plurality of LED lamp plates in the second furnace chamber, and when the material passed through second light radiation mechanism, the LED lamp plate can carry out the unifacial light radiation to the material and pour into.

Furthermore, the third furnace body structure is arranged below the second furnace body structure, the third furnace body structure is provided with a third furnace chamber, and an air supply assembly is arranged in the third furnace chamber. Through set up the air supply subassembly at third furnace body structure, can send into cold fresh air to the third furnace chamber constantly, increase air flow rate and accelerate the heat dissipation to be favorable to realizing that temperature is even, invariable in the second light radiation mechanism.

Furthermore, the second furnace body structure and the third furnace body structure are arranged at intervals to form a fourth furnace chamber, and the transmission mechanism is arranged in the fourth furnace chamber in a penetrating mode. In other words, the fourth furnace chamber is a space between the second furnace body structure and the third furnace body structure, and the fourth furnace chamber is used for materials on the conveying mechanism to pass through. Furthermore, at least one side of the fourth furnace chamber is provided with an opening, so that the fourth furnace chamber is open and not closed, the materials can directly exchange heat with the atmosphere in the light attenuation process, uniform heat dissipation is facilitated, the air supply assembly supplies air to the fourth furnace chamber, the air flow rate is increased, heat dissipation is accelerated, and the effect of irradiation annealing treatment is improved. Further, the interval of LED lamp plate and material is first interval, and first interval is 50mm to 100mm, through the interval between control LED lamp plate and the material, can improve the light decay efficiency, shortens process time.

In the above technical solution, the transmission mechanism includes: the two transmission assemblies are arranged on the frame body, a space exists between the two transmission assemblies, and the length directions of the two transmission assemblies are consistent with the length direction of the frame body; the carrier is located between the two conveying assemblies and used for carrying materials, and the carrier moves along the length direction of the rack body through the two conveying assemblies.

In this solution, the transport mechanism comprises two transport assemblies and a carrier. Specifically, two transmission assembly locate the support body, have the interval between two transmission assembly, and every carrier all locates between two transmission assembly. The length direction of the two transmission assemblies is consistent with the length direction of the rack body, and the plurality of carriers are arranged along the length direction of the transmission assemblies. Further, the carrier is connected with a corresponding transmission assembly on two sides perpendicular to the length direction of the transmission assemblies. In other words, the carrier is connected to or against one of the transport elements on one of its two sides perpendicular to the longitudinal direction of the transport elements and connected to or against the other transport element on the other side. The carrier is used for bearing the weight of the material, and two transmission assemblies can carry the carrier, and the carrier is moved to the other end by the length direction's of transmission assembly one end. Because the carrier carries the material, so the material can move along the length direction of the transmission assembly along with the carrier. Through setting up the carrier, and there is certain interval between two transmission assembly, also can make the material through the illumination radiation zone time at to a great extent, the tow sides of material can not sheltered from. In the material movement process, the illumination radiation device in the heat treatment equipment can carry out illumination radiation on the front side and the back side of the material, so that the possibility that the material generates shadows after the material is subjected to illumination radiation is greatly reduced.

In above-mentioned technical scheme, the carrier is the fretwork support plate, and the fretwork support plate includes: the frame structure is arranged between the two transmission assemblies and is provided with a hollow groove with a square cross section; a plurality of bearing structure links to each other with frame construction, and every bearing structure all is in the frame construction and is close to the position at the turning of fretwork groove, and bearing structure is used for supporting the material to make the material just to the fretwork groove.

In this technical scheme, the carrier is the fretwork support plate, and the fretwork support plate includes frame construction and a plurality of bearing structure. Specifically, the frame structure is arranged between the two transmission assemblies and is provided with a hollow groove with a square cross section. It is worth to be noted that the number of the hollow-out grooves can be one, two or more, and the hollow-out grooves can be flexibly arranged according to actual requirements. Further, a plurality of support structures are connected to the frame structure, each support structure being located in the frame structure near a corner of the hollowed out groove. Through setting up bearing structure, can support the material, make the material just to frame construction's fretwork groove. When the material passes through the illumination radiation zone time along with the fretwork support plate, the illumination radiation device can shine on the material through the fretwork groove, makes the positive and negative of material can not shelter from, greatly reduced frame construction and sheltered from the possibility of light, and then reduced the possibility that the shadow appears after the illumination radiation.

Further, the frame structure comprises a plurality of support beams and a plurality of partition beams interconnected. Specifically, the plurality of support beams includes a first support beam, a second support beam, and a third support beam. The quantity of first supporting beam is two, and two first supporting beams set up relatively. The number of the second supporting beams is also two, and the two second supporting beams are oppositely arranged. The first supporting beam and the second supporting beam are connected end to end at intervals to form a rectangular frame. The quantity of separating the roof beam is a plurality of, and a plurality of separating roof beams parallel arrangement. Two ends of each separating beam are respectively connected with two first supporting beams which are oppositely arranged. Furthermore, the number of the third supporting beams is one, the third supporting beams are connected with the plurality of partition beams, and two ends of each third supporting beam are respectively connected with the two second supporting beams which are arranged oppositely. Through setting up the third supporting beam, can support a plurality of partition roof beams, can also play firm rectangular frame's effect. The supporting beam and the separating beam are surrounded by a hollow groove, and the supporting structure is arranged on the separating beam on the peripheral side of the hollow groove.

In the above technical solution, the carrier is a flower basket, the flower basket is also called a carrier, at least two ends are arranged at intervals, and a connecting portion is used for connecting the ends, the material is stacked between the two ends, for example, the ends may be end plates, and the connecting portion may be a connecting rod. Specifically, there is certain interval between two end plates, and the one end of connecting rod links to each other with one of them end plate, and the other end of connecting rod links to each other with another end plate, and the both ends of connecting rod link to each other with two end plates respectively promptly, and parallel arrangement between the connecting rod. The material is piled up between two end plates of basket of flowers, in same basket of flowers, can deposit a plurality of materials simultaneously to improve work efficiency. It is worth explaining that the number of the connecting rods is at least four, and the connecting rods can play a limiting role to a certain extent, so that the materials are prevented from falling out of the flower basket.

The length direction of the flower basket is consistent with the length direction of the connecting rod. The length direction of the flower basket is consistent with that of the frame body, or the length direction of the flower basket is perpendicular to that of the frame body. In other words, the flower basket can be transversely arranged or longitudinally arranged.

In the above technical solution, the transmission assembly includes: a first transmission section located within the first optical radiation mechanism; the second transmission section is located the second light radiation mechanism, and first transmission section is used for transmitting the material through first light radiation mechanism, and the second transmission section is used for transmitting the material through second light radiation mechanism.

In this solution, the transmission assembly comprises a first transmission segment and a second transmission segment. Specifically, the first transmission section is located first light radiation mechanism, and the material passes through first light radiation mechanism through first transmission section. The second transmission section is located in the second light radiation mechanism, and the materials pass through the second light radiation mechanism through the second transmission section. Through dividing transmission assembly into two sections, when the material passes through first light radiation mechanism and second light radiation mechanism, can the independent control, be favorable to improving transmission efficiency, the effect of reinforcing illumination radiation.

In the above technical solution, the transmission mechanism further includes: the first driving assembly is in transmission connection with the first transmission section; and the second driving assembly is in transmission connection with the second transmission section.

In this solution, the transmission mechanism further includes a first driving assembly and a second driving assembly. Specifically, the first driving assembly is in transmission connection with the first transmission section, and the second driving assembly is in transmission connection with the second transmission section. The first driving assembly comprises a first motor, the second driving assembly comprises a second motor, and the rotating speed of the first motor is different from that of the second motor so as to realize the segmented speed regulation of the transmission mechanism.

The section penetrating through the first light radiation mechanism and the section penetrating through the second light radiation mechanism are separately arranged, so that the time of the material staying in the first light radiation mechanism and the second light radiation mechanism can be controlled, and the process control of infrared IR light radiation and LED light radiation on the material is facilitated. Different sections in the transmission mechanism are driven by different motors to regulate and control the conveying speed of the carrier in sections.

In the above technical solution, the transmission mechanism includes: two transmission assembly that set up relatively, two transmission assembly's length direction are unanimous, have the interval between two transmission assembly, and the material passes through the length direction motion of two transmission assembly along the support body.

In this solution, the transfer mechanism comprises two transfer assemblies. Specifically, two transmission assembly locate the support body, have the interval between two transmission assembly, and every carrier all locates between two transmission assembly. The length direction of the two transmission assemblies is consistent with the length direction of the rack body, and the plurality of carriers are arranged along the length direction of the transmission assemblies. It can be understood that the material moves along the length direction of the rack body directly through the two transmission assemblies. In the material movement process, the illumination radiation device in the heat treatment equipment can carry out illumination radiation on the front side and the back side of the material, so that the possibility that the material generates shadows after the material is subjected to illumination radiation is greatly reduced.

In the above technical solution, the method further comprises: the feeding mechanism is arranged at the first end of the frame body; and the blanking mechanism is arranged at the second end of the frame body.

In the technical scheme, the material is a silicon wafer which is a whole wafer or a half wafer.

It can also be understood that: the ratio of the length to the width of the silicon wafer is 1, or the ratio of the length to the width of the silicon wafer is 2.

In the technical scheme, when the material is a silicon wafer, the ratio of the length to the width of the silicon wafer is 1, and the silicon wafer is half and square; or, the ratio of the length to the width of the silicon wafer is 2, and the silicon wafer is a whole wafer, namely two and a half wafers, and is rectangular. It should be noted that some silicon wafers are chamfered at the corners thereof according to the size of the silicon wafer.

In the technical scheme, the furnace body equipment further comprises a feeding mechanism and a discharging mechanism. Specifically, feed mechanism locates the first end of support body, and the second end of support body is located to the unloading mechanism. In other words, the feeding mechanism and the discharging mechanism are respectively arranged at two ends of the frame body in the length direction. After the material gets into feed mechanism, promote the position to the take the altitude by feed mechanism's material loading lifting unit, the material enters into corresponding carrier in, for example the carrier is fretwork support plate staff can be according to the size of material, adjusts bearing structure's position in the fretwork support plate in advance to the size of adaptation material. The material passes through first optical radiation mechanism and second optical radiation mechanism through transmission device successively, and first optical radiation mechanism is used for carrying out two-sided irradiation to the material, and second optical radiation mechanism is used for carrying out the single face to the material and shines. The first light radiation mechanism can uniformly heat the material, the material has a high temperature of 200 ℃ when entering the second light radiation mechanism after being heated, the second light radiation mechanism is of an open type furnace body structure, and the temperature of the material is reduced when the material passes through the second light radiation mechanism. The materials are transmitted in the open furnace body structure, are continuously cooled and cooled in the process of receiving light attenuation, and are already cooled to the temperature capable of being butted with the blanking when being conveyed out of the second light radiation mechanism, so that the process time required by cooling the equipment in the past is saved in the whole system.

The first optical radiation mechanism mentioned above performs double-sided heating, infrared lamp tubes are uniformly arranged in two first furnace body structures of the first optical radiation mechanism, the first optical radiation mechanism can perform single-sided heating, a plurality of infrared lamp tubes can be arranged in one first furnace body structure of the first optical radiation mechanism, or lamp tubes are uniformly arranged in two first optical radiation furnaces of the two first optical radiation mechanisms, and when actually performing process treatment, the infrared lamp tubes in one first furnace body structure can be started as required to realize single-sided radiation of materials, preferably, the infrared lamp tubes are uniformly arranged at equal intervals in the horizontal direction.

Further, furnace body equipment still includes cooling body, and cooling body locates on the support body, and cooling body is located between unloading mechanism and the second light radiation mechanism. The material conveyed out of the second light radiation mechanism firstly passes through the cooling mechanism and then enters the blanking mechanism. The cooling mechanism cools the materials, then the materials are lowered to a certain height through the blanking lifting assembly in the blanking mechanism, the materials are continuously transmitted to the next station through the transmission guide rail, and the empty carriers return to the feeding mechanism through the lower part of the equipment to continuously convey the next batch of materials.

Furthermore, a plurality of driving structures are arranged in the transmission mechanism, and the conveying speed of the transmission mechanism in each section is independently adjustable and does not influence each other. In the transmission mechanism, the section penetrating through the first light radiation mechanism and the section penetrating through the second light radiation mechanism are separately arranged, so that the time of the material staying in the first light radiation mechanism and the second light radiation mechanism can be controlled, and the process control of infrared IR light radiation and LED light radiation on the material is facilitated. Different sections in the transmission mechanism are driven by different motors to regulate and control the conveying speed of the carrier in sections.

Specifically, the carrier enters the first optical radiation mechanism from the feeding mechanism, and the speed is changed from high speed to low speed; the speed of the carrier entering the second light radiation mechanism is kept constant or is changed from slow to fast; after the carrier enters the cooling mechanism, the speed is changed from slow to fast. And finally, after the processed materials are put down in the blanking mechanism by the carrier, the processed materials are transmitted back to the feeding mechanism from the bottom of the equipment so as to convey the next batch of materials.

In addition, the carrier loaded with materials enters the first light source radiation mechanism, the second light source radiation mechanism, the cooling structure and the blanking mechanism from the feeding mechanism, the materials are transported away through the blanking mechanism, the unloaded carriers are returned to the feeding mechanism through the return mechanisms arranged below the first light source radiation mechanism and the second light source radiation mechanism, then the materials are placed on the returned carriers through the feeding mechanism, and then the materials enter the first furnace body structure and the second furnace body structure for process treatment.

During the above-mentioned well material conveying, also can be from the feed mechanism material loading after, first pass the second about radiation mechanism, pass through first light source radiation mechanism again.

In addition, after the feeding mechanism feeds the material, the material may pass through two first light radiation mechanisms or two second light radiation mechanisms, or may pass through at least one first light radiation mechanism and/or at least one second light radiation mechanism.

Additional aspects and advantages of embodiments of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a schematic structural view showing a furnace apparatus according to an embodiment of the present invention;

fig. 2 shows a first schematic view of a first optical radiation mechanism according to an embodiment of the invention;

fig. 3 shows a second schematic view of a first optical radiation mechanism according to an embodiment of the invention;

fig. 4 shows a third schematic view of a first optical radiation mechanism according to an embodiment of the invention;

fig. 5 shows a fourth schematic view of a first optical radiation mechanism according to an embodiment of the invention;

fig. 6 shows a first schematic view of a second optical radiation mechanism according to an embodiment of the invention;

fig. 7 shows a second schematic view of a second optical radiation mechanism according to an embodiment of the invention;

FIG. 8 shows a schematic structural diagram of a transport mechanism according to one embodiment of the present invention;

fig. 9 is a schematic structural diagram of a hollow carrier according to an embodiment of the present invention;

FIG. 10 shows a schematic structural view of a loading mechanism according to an embodiment of the present invention;

FIG. 11 shows a schematic structural view of a blanking mechanism according to an embodiment of the invention;

FIG. 12 illustrates a schematic structural view of a loading riser assembly according to one embodiment of the present invention;

fig. 13 shows a schematic structural view of a flower basket according to an embodiment of the present invention.

Wherein, the correspondence between the reference numbers and the component names in fig. 1 to 13 is:

100: furnace body equipment; 110: a frame body; 111: a first end; 112: a second end; 120: a first optical radiation mechanism; 121: a first furnace body structure; 1211: a first furnace chamber; 1212: a hot air uniform flow cavity; 1213: a process chamber; 1214: a hot gas withdrawal port; 1215: an infrared lamp tube; 1216: a waste discharge pipe; 1217: an air inlet pipe; 1218: a hot air motor; 122: a wind equalizing plate; 1221: a first through hole; 1222: a second through hole; 130: a second optical radiation mechanism; 131: a second furnace body structure; 1311: a second furnace chamber; 1312: an LED lamp panel; 1313: a cooling water tank; 1314: a groove; 1315: a fin; 132: a third furnace body structure; 1321: a third furnace chamber; 1322: an air supply assembly; 133: a fourth furnace chamber; 140: a transport mechanism; 141: a transmission assembly; 142: a carrier; 1421: a frame structure; 1422: hollowing out the grooves; 1423: a support structure; 1424: an end plate; 1425: a connecting rod; 143: a first transmission section; 144: a second transmission segment; 145: a first drive assembly; 146: a second drive assembly; 150: a feeding mechanism; 151: a feeding lifting assembly; 160: a blanking mechanism; 161: a blanking lifting component; 170: a cooling mechanism; 200: and (3) feeding.

Detailed Description

In order that the above objects, features and advantages of the embodiments of the present invention can be more clearly understood, embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and detailed description. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, embodiments of the present invention may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited to the specific embodiments disclosed below.

A furnace apparatus 100 provided according to some embodiments of the present invention is described below with reference to fig. 1 to 13.

Example one

As shown in fig. 1, an embodiment of the present invention provides a furnace apparatus 100 including a frame 110, a first optical radiation mechanism 120, a second optical radiation mechanism 130, and a transmission mechanism 140. The frame body 110 mainly serves as a mounting carrier, and the frame body 110 has a first end 111 and a second end 112 opposite to each other in a length direction. The first optical radiation mechanism 120 is disposed on the frame 110, and the first optical radiation mechanism 120 is close to the first end 111 of the frame 110. The second optical radiation mechanism 130 is disposed on the frame 110, and the second optical radiation mechanism 130 is close to the second end 112 of the frame 110. In other words, the first and second light radiation mechanisms 120 and 130 are disposed along the length direction of the frame body 110, the first light radiation mechanism 120 is located at a position of the frame body 110 near the first end 111, and the second light radiation mechanism 130 is located at a position of the frame body 110 near the second end 112.

Further, the conveying mechanism 140 is disposed on the rack 110, the conveying mechanism 140 is used for carrying the material 200, and the conveying mechanism 140 is capable of conveying the material 200 from the first end 111 to the second end 112 of the rack 110. The transmission mechanism 140 is disposed through the first optical radiation mechanism 120 and the second optical radiation mechanism 130, and it can be understood that in the process of moving the material 200 from the first end 111 to the second end 112 of the frame 110, the material 200 firstly passes through the first optical radiation mechanism 120 and then passes through the second optical radiation mechanism 130.

Further, the first light radiation mechanism 120 can perform double-sided irradiation on the material 200, and the second light radiation mechanism 130 can perform single-sided irradiation on the material 200. It should be noted that the material 200 in the present application may specifically be a solar cell, also referred to as a silicon wafer or a crystalline silicon solar cell.

Specifically, the first optical radiation mechanism 120 is an infrared IR optical radiation mechanism, and uses infrared light to radiate the front and back surfaces of the material 200, that is, to uniformly heat the solar cell. The material 200 on the transmission mechanism 140 has no shielding on the front and back surfaces, so that the possibility of shadow after illumination radiation is greatly reduced. The temperature of the material 200 increases after passing through the first light radiation means 120. Further, second light radiation mechanism 130 is LED light radiation mechanism, adopts the single-sided light radiation to inject into, and second light radiation mechanism 130 includes the air supply subassembly, and the air supply subassembly can be to the interior source of furnace chamber constantly send into cold fresh air to lower the temperature to material 200, material 200 temperature reduction behind second light radiation mechanism 130 promptly.

For a crystalline silicon solar cell, whether a high-efficiency PERC cell (single crystal) or a novel HJT cell (heterojunction) exists, the efficiency attenuation phenomenon occurs in the initial stage of use under the sunlight irradiation environment due to the existence of boron-oxygen pairs. The battery piece is subjected to irradiation annealing treatment under a certain temperature condition by using a specific light source in advance, so that the phenomenon can be effectively prevented. In the related art, only the LED light radiation mechanism is disposed in the furnace body 100, and the solar cell is injected with the single-sided light radiation, and the efficiency of the processed solar cell is not very high.

In the technical scheme that this application was injectd, material 200 can be earlier through first optical radiation mechanism 120 before second optical radiation mechanism 130, and first optical radiation mechanism 120 can carry out the radiation injection of all-round infrared ray to the positive and negative of material 200, and material 200 after radiation annealing can improve and imitate 0.3%.

In another embodiment, the first optical radiation mechanism 120 irradiates the material 200 on a single side.

Example two

As shown in fig. 2, 3, 4 and 5, the first optical radiation mechanism 120 comprises two first furnace body structures 121. Specifically, the two first furnace body structures 121 have different heights, that is, one of the first furnace body structures 121 is disposed above the other first furnace body structure 121. Further, in the two first furnace body structures 121, each first furnace body structure 121 is provided with a first furnace cavity 1211, and a plurality of infrared light tubes 1215 are arranged in the first furnace cavity 1211, and the infrared light tubes 1215 can radiate infrared light outwards. The transmission mechanism 140 is located between the two first furnace body structures 121, when the material 200 passes through the two first furnace body structures 121 of the first light radiation mechanism 120 through the transmission mechanism 140, the infrared lamp 1215 located in the first furnace cavity 1211 can inject the material 200 with radiation of all-around infrared light into the front and back sides, and then the material 200 enters the second light radiation mechanism 130.

It should be noted that the two first furnace structures 121 in the first optical radiation mechanism 120 are disposed in an up-down symmetrical manner, which is beneficial to performing illumination radiation on the front and back sides of the material 200 and uniformly heating the material.

Further, as shown in fig. 4 and 5, the first optical radiation mechanism 120 further includes two air-equalizing plates 122. Specifically, each of the air equalizing plates 122 is disposed in a corresponding one of the first furnace chambers 1211. The air-equalizing plate 122 divides the first furnace 1211 into a hot air equalizing chamber 1212 and process chambers 1213, and the two process chambers 1213 of the two first furnace structures 121 are close to each other. Further, an infrared lamp 1215 is disposed within the process chamber 1213 of the first furnace chamber 1211.

Further, as shown in fig. 4, a plurality of first through holes 1221 are provided on the air-equalizing plate 122, and the gas in the hot air equalizing chamber 1212 can enter the process chamber 1213 through the first through holes 1221. Specifically, the first furnace body structure 121 located at the upper position is further provided with an air inlet pipe 1217 and a hot air motor 1218, the cold air enters the hot air flow equalizing chamber 1212 through the hot air motor 1218 and the air inlet pipe 1217, and then the gas with pressure in the hot air flow equalizing chamber 1212 can enter the process chamber 1213 through the first through hole 1221, so as to maintain a constant temperature in the process chamber 1213.

Further, a plurality of temperature detection devices are arranged in the process chamber 1213, and the temperature values are fed back to the temperature controller for accurately controlling the process temperature of the process chamber 1213.

It is worth to be noted that the plurality of first through holes 1221 are uniformly distributed in the central area of the air-equalizing plate 122, the first through holes 1221 are Y-shaped holes, and the first through holes 1221 have the functions of uniformly dispersing hot air and reducing flow resistance.

Further, as shown in fig. 5, the inner wall of the process chamber 1213 is provided with a hot air withdrawal port 1214, the edge of the air-equalizing plate 122 is provided with a first through hole 1221, and the air in the process chamber 1213 can flow back to the hot air equalizing chamber 1212 through the second through hole 1222 and the hot air withdrawal port 1214. The hot air can be reflowed by flowing the gas in the process chamber 1213 back into the hot air flow equalizing chamber 1212, so as to achieve the purpose of recycling the hot air.

Further, as shown in fig. 3 and 5, a waste discharge pipe 1216 is disposed on the first furnace body structure 121 located at the lower position, the waste discharge pipe 1216 is communicated with the hot air flow equalizing cavity 1212 in the first furnace body structure 121 located at the lower position, and by disposing the waste discharge pipe 1216, a part of the waste gas can be discharged out of the furnace, so as to ensure the air quality in the first furnace cavity 1211.

EXAMPLE III

As shown in fig. 6 and 7, the second optical radiation mechanism 130 includes a second furnace structure 131 and a third furnace structure. Specifically, be equipped with second furnace chamber 1311 in the second furnace body structure 131, be equipped with a plurality of LED lamp plates 1312 in the second furnace chamber 1311, when material 200 passes through second light radiation mechanism 130, LED lamp plate 1312 can carry out the unifacial light radiation to material 200 and pour into.

Further, the third furnace body structure is arranged below the second furnace body structure 131, the third furnace body structure is provided with a third furnace chamber, and an air supply assembly is arranged in the third furnace chamber. Through setting up the air supply subassembly at third furnace body structure, can send into cold fresh air to the third furnace chamber constantly, increase air flow rate and accelerate the heat dissipation to be favorable to realizing that temperature is even, invariable in second light radiation mechanism 130.

Further, a plurality of cooling water tanks 1313 are provided in the second cavity 1311. Through set up a plurality of cooling water tank 1313 in second furnace chamber 1311, and be equipped with recess 1314 on the cooling water tank 1313, LED lamp plate 1312 locates in the recess 1314 to realize LED lamp plate 1312 and cooling water tank 1313's being connected. Specifically, cooling water tank 1313 is the aluminium water tank, and it has the cooling circulation water to trickle in the aluminium water tank constantly, takes away most heat of LED lamp plate 1312, still is equipped with one deck microcrystalline glass in the below of LED lamp plate 1312 in second furnace chamber 1311, and the heat that isolated LED lamp plate 1312 produced to furthest under the prerequisite that does not block the light wave ensures that the light radiation is abundant, even, can also promote the life of LED lamp plate 1312.

Further, cooling water tank 1313 is provided with cooling fins 1315, which is beneficial to increasing the heat dissipation area and improving the heat dissipation efficiency.

Further, the second furnace structure 131 and the third furnace structure 132 are spaced apart to form a fourth furnace chamber 133, and the conveying mechanism 140 is disposed through the fourth furnace chamber 133. In other words, the fourth furnace chamber 133 is a space between the second furnace structure 131 and the third furnace structure 132, and the fourth furnace chamber 133 is used for passing the material 200 on the conveying mechanism 140. Further, at least one side of the fourth furnace chamber 133 is provided with an opening, which can be understood that the fourth furnace chamber 133 is open and not closed, the material 200 can directly exchange heat with the atmosphere in the light attenuation process, which is beneficial to uniform heat dissipation, and in addition, the air supply assembly 1322 supplies air to the fourth furnace chamber 133, so that the air flow rate is increased to accelerate heat dissipation, thereby improving the effect of the radiation annealing treatment. Further, the interval of LED lamp plate 1312 and material 200 is first interval, and first interval is 50mm to 100mm, through the interval between control LED lamp plate 1312 and the material 200, can improve the light decay efficiency, shortens process time.

Example four

As shown in fig. 8, the transfer mechanism 140 includes two transfer assemblies 141 and a carrier 142. Specifically, two transmission assemblies 141 are disposed on the frame body 110, a space exists between the two transmission assemblies 141, and each carrier 142 is disposed between the two transmission assemblies 141. The length direction of the two transfer units 141 is identical to the length direction of the rack 110, and the plurality of carriers 142 are arranged along the length direction of the transfer units 141. Further, the carrier 142 is connected to or abutted against a corresponding one of the transfer units 141 at both sides perpendicular to the length direction of the transfer unit 141. In other words, the carrier 142 is connected to or abutted against one of the transfer units 141 on one side and connected to the other transfer unit 141 on the other side of the two sides perpendicular to the length direction of the transfer units 141. The carrier 142 is used for carrying the material 200, and the two conveying assemblies 141 can convey the carrier 142, and the carrier 142 moves from one end to the other end of the conveying assemblies 141 in the length direction. Since the carrier 142 carries the material 200, the material 200 can move along the length direction of the conveying assembly 141 along with the carrier 142. Through setting up carrier 142, and there is certain interval between two transmission assembly 141, also can make material 200 pass through the illumination radiation zone time to a great extent, the tow sides of material 200 can not be sheltered from. In the movement process of the material 200, the illumination radiation device in the heat treatment equipment can perform illumination radiation on the front side and the back side of the material 200, so that the possibility that the material 200 generates shadows after the illumination radiation is greatly reduced.

Further, as shown in fig. 9, the carrier 142 is a hollow carrier. The hollow carrier includes a frame structure 1421 and a plurality of supporting structures 1423. Specifically, the frame structure 1421 is disposed between the two transmission assemblies 141, and the frame structure 1421 has a hollow groove 1422 with a square cross section. It should be noted that the number of the hollow grooves 1422 may be one, two, or more, and the hollow grooves 1422 are flexibly configured according to actual requirements. Further, a plurality of support structures 1423 are connected to the frame structure 1421, each support structure 1423 being located in the frame structure 1421 near a corner of the hollow 1422. Through setting up bearing structure 1423, can support material 200, make material 200 just can be to frame construction 1421's fretwork groove 1422. When the material 200 passes through the illumination radiation area along with the carrier 142, the illumination radiation device can irradiate on the material 200 through the hollow groove 1422, so that the front and back sides of the material 200 can be free from shielding, the possibility that the frame structure 1421 shields light is greatly reduced, and the possibility that shadow appears after illumination radiation is further reduced.

Further, the frame structure 1421 includes a plurality of support beams and a plurality of partition beams connected to each other. Specifically, the plurality of support beams includes a first support beam, a second support beam, and a third support beam. The quantity of first supporting beam is two, and two first supporting beams set up relatively. The number of the second supporting beams is also two, and the two second supporting beams are oppositely arranged. The first supporting beam and the second supporting beam are connected end to end at intervals to form a rectangular frame. The quantity of separating the roof beam is a plurality of, and a plurality of separating roof beams parallel arrangement. Two ends of each separating beam are respectively connected with two first supporting beams which are oppositely arranged. Furthermore, the number of the third supporting beams is one, the third supporting beams are connected with the plurality of partition beams, and two ends of each third supporting beam are respectively connected with the two second supporting beams which are arranged oppositely. Through setting up the third supporting beam, can support a plurality of partition roof beams, can also play firm rectangular frame's effect. The supporting beam and the separating beam are surrounded by a hollow groove 1422, and the supporting structure 1423 is disposed on the separating beam around the hollow groove 1422.

In another embodiment, as shown in fig. 13, the carrier 142 is a basket, and the basket includes at least two spaced apart end plates 1424 and a connecting rod 1425 for connecting the end plates 1424, and the material is stacked between the two spaced apart end plates 1424, for example, the end plates 1424 may be the end plates 1424 and the connecting rod 1425 may be the connecting rod 1425, and more specifically, the basket includes two spaced apart end plates 1424 and at least four connecting rods 1425. Specifically, a certain distance exists between the two end plates 1424, one end of the connecting rod 1425 is connected to one of the end plates 1424, and the other end of the connecting rod 1425 is connected to the other end plate 1424, that is, the two ends of the connecting rod 1425 are respectively connected to the two end plates 1424, and the connecting rods 1425 are arranged in parallel. The materials 200 are stacked between the two end plates 1424 of the basket, and a plurality of materials 200 can be stored in the same basket at the same time, so that the working efficiency is improved. It is worth to say that, the quantity of connecting rod 1425 is at least four, and connecting rod 1425 can play spacing effect to a certain extent, avoids material 200 to fall out the basket of flowers. The connecting rod 1425 is provided with a partition portion at an equal interval, or is provided with other limiting members, and the material is placed on the partition portion or the limiting members.

The length direction of the flower basket coincides with the length direction of the connecting bar 1425. The length direction of the flower basket is the same as the length direction of the frame body 110, or the length direction of the flower basket is perpendicular to the length direction of the frame body 110. In other words, the flower basket can be transversely arranged or longitudinally arranged.

By adopting the structure of the flower basket, when the flower basket is transversely arranged or placed, namely the end plate 1424 of the flower basket is in contact with the transmission assembly 141, the transmission assembly 141 transmits the flower basket, and further the transmission of the material 200 is realized. When the basket is vertically disposed or placed, two sides of one of the end plates 1424 of the basket contact with the transmission assembly 141, and in addition, in order to reduce the weight of the basket, the materials 200 in the basket are fully heated or irradiated by light during the transmission process, the limiting members or the end plates 1424 in the basket may be disposed in a hollow structure or partially include parts in a hollow structure.

EXAMPLE five

As shown in fig. 8, transfer assembly 141 includes a first transfer segment 143 and a second transfer segment 144. Specifically, the first conveying section 143 is located within the first light radiating mechanism 120, and the material 200 passes through the first light radiating mechanism 120 through the first conveying section 143. The second conveying section 144 is located within the second light radiating means 130 and the material 200 passes the second light radiating means 130 through the second conveying section 144. By dividing the transmission assembly 141 into two sections, when the material 200 passes through the first optical radiation mechanism 120 and the second optical radiation mechanism 130, the two sections can be independently controlled, which is beneficial to improving the transmission efficiency and enhancing the illumination radiation effect.

Further, the transfer mechanism 140 further includes a first drive assembly 145 and a second drive assembly 146. Specifically, a first drive assembly 145 is drivingly connected to the first transmission section 143, and a second drive assembly 146 is drivingly connected to the second transmission section 144. The first drive assembly 145 includes a first motor and the second drive assembly 146 includes a second motor, the first motor having a different speed than the second motor to enable staged speed adjustment of the transmission mechanism 140.

The section penetrating the first light radiation mechanism 120 and the section penetrating the second light radiation mechanism 130 are separately arranged, so that the time of the material 200 staying in the first light radiation mechanism 120 and the second light radiation mechanism 130 can be controlled, and the process control of infrared IR light radiation and LED light radiation on the material 200 is facilitated. Different sections of the conveying mechanism 140 are driven by different motors to adjust and control the conveying speed of the hollow-out carrier plate or the basket in sections.

In another embodiment, transport mechanism 140 includes two transport assemblies 141. Specifically, two transmission assemblies 141 are disposed on the frame body 110, a space exists between the two transmission assemblies 141, and each carrier 142 is disposed between the two transmission assemblies 141. The length direction of the two transfer units 141 is identical to the length direction of the rack 110, and the plurality of carriers 142 are arranged along the length direction of the transfer units 141. It will be appreciated that the material 200 moves directly along the length of the frame 110 via the two transfer assemblies 141. In the movement process of the material 200, the illumination radiation device in the heat treatment equipment can perform illumination radiation on the front side and the back side of the material 200, so that the possibility that the material 200 generates shadows after the illumination radiation is greatly reduced.

EXAMPLE six

As shown in fig. 1, 10, 11, and 12, the furnace apparatus 100 further includes a feeding mechanism 150 and a discharging mechanism. Specifically, the feeding mechanism 150 is disposed at the first end 111 of the frame 110, and the discharging mechanism is disposed at the second end 112 of the frame 110. In other words, the feeding mechanism 150 and the discharging mechanism are respectively disposed at both ends of the frame body 110 in the longitudinal direction. As shown in fig. 12, after the material 200 enters the feeding mechanism 150, the feeding lifting assembly 151 of the feeding mechanism 150 lifts the position to a certain height, and then the material 200 enters the corresponding carrier 142, so that the worker can adjust the position of the supporting structure 1423 in the carrier 142 in advance according to the size of the material 200 to adapt to the size of the material 200. The material 200 passes through the first optical radiation mechanism 120 and the second optical radiation mechanism 130 in sequence through the transmission mechanism 140, the first optical radiation mechanism 120 is used for performing double-sided irradiation on the material 200, and the second optical radiation mechanism 130 is used for performing single-sided irradiation on the material 200. The first light radiation mechanism 120 can uniformly heat the material 200, the material 200 has a high temperature of 200 ℃ when entering the second light radiation mechanism 130 after being heated, the second light radiation mechanism 130 is an open furnace body structure, and the temperature of the material 200 is reduced when passing through the second light radiation mechanism 130. The material 200 is transported in the open furnace structure, and is continuously cooled and cooled in the process of receiving light attenuation, and is already cooled to the temperature capable of abutting and blanking when being transported out of the second light radiation mechanism 130, so that the process time required by cooling of the conventional equipment is saved in the whole system.

Further, as shown in fig. 1, the furnace apparatus 100 further includes a cooling mechanism 170, the cooling mechanism 170 is disposed on the frame body 110, and the cooling mechanism 170 is located between the blanking mechanism 160 and the second light radiation mechanism 130. The material 200 conveyed out of the second optical radiation mechanism 130 passes through the cooling mechanism 170 and then enters the blanking mechanism 160. The cooling mechanism 170 cools and cools the material 200, and then the material 200 is lowered to a certain height through the blanking lifting assembly 161 in the blanking mechanism 160, the material 200 is continuously conveyed to the next station through the conveying guide rail, the empty carrier 142 returns to the feeding mechanism 150 through the lower part of the equipment, and the next batch of material 200 is continuously conveyed.

Further, the transmission mechanism 140 is provided with a plurality of driving structures, and the transmission speed of the transmission mechanism 140 in each section is independently adjustable and does not affect each other. In the conveying mechanism 140, the section penetrating the first light radiation mechanism 120 and the section penetrating the second light radiation mechanism 130 are separately arranged, so that the residence time of the materials 200 in the first light radiation mechanism 120 and the second light radiation mechanism 130 can be controlled, and the process control of infrared IR light radiation and LED light radiation on the materials 200 is facilitated. Different sections of the transport mechanism 140 are driven by different motors to adjust the transport speed of the carrier 142 in stages.

Specifically, the carrier 142 enters the first optical radiation mechanism 120 from the feeding mechanism 150, and the speed is changed from fast to slow; the speed of the carrier 142 entering the second optical radiation mechanism 130 is kept constant or is changed from slow to fast; after the carrier 142 enters the cooling mechanism 170, the speed is changed from slow to fast. Finally, the carrier 142 lowers the processed material 200 in the lower mechanism 160 and returns to the upper mechanism 150 from the bottom of the apparatus for transporting the next batch of material 200.

In another embodiment, where the material 200 is a silicon wafer, the silicon wafer is a whole or half wafer. The ratio of the length to the width of the silicon wafer is 1, and the silicon wafer is half and square; or, the ratio of the length to the width of the silicon wafer is 2, and the silicon wafer is a whole wafer, namely two and a half wafers, and is rectangular. According to different sizes of the silicon wafers, the corners of some silicon wafers are chamfered.

In addition, the size of the silicon wafer can be adjusted, and the specific structure of the carrier is correspondingly adjusted.

In an infrared IR light radiation area (namely a first light radiation mechanism), the front and back light radiation injection of a solar cell is adopted, the upper and lower temperature areas in a furnace cavity are in a structure of hot air, a wind-equalizing plate and an infrared lamp tube, and the temperature and the light radiation intensity of each temperature area are independently adjustable and controllable.

In LED light radiation district (being the second light radiation mechanism), adopt solar wafer front side light radiation to inject into, radiation district upper portion adopts "LED lamp plate + cooling aluminum water tank" structure, and the lower part adopts "bright air conditioning + air-equalizing plate" structure, and temperature and light radiation intensity are adjustable, controllable in the radiation district.

The infrared IR light radiation area and the LED light radiation area are horizontally arranged separately to form different furnace chambers, so that the temperature of each furnace chamber can be controlled independently, and especially the influence of the heat of the infrared IR light radiation area on the LED light radiation area can be avoided.

The solar cell enters the hearth through the carrier tray, a plurality of power controls are arranged in the feeding area, the infrared IR light radiation area, the LED light radiation area, the discharging area and the carrier tray returning area, the transmission speed of each area is independently adjustable and does not influence each other, and the debugging of the solar cell in a wider process window is met. The infrared IR light radiation area and the LED light radiation area are arranged separately, the carriers sequentially pass through the infrared IR light radiation area and the LED light radiation area, and the retention time of the battery piece in different processing areas can be controlled by combining the function of segmented speed regulation, so that the process control of the infrared IR light radiation and the LED light radiation is facilitated. The conveying shafts are in segmental and interval cooperation and are respectively driven by different motors so as to adjust and control the conveying speed of the carrier tray in a segmental manner. For example, infrared IR light radiation region: the carrier enters the infrared furnace body (namely a first light radiation mechanism) from the feeding area (the feeding mechanism) at a high speed and a low speed; into the LED light radiation zone (i.e. the second light radiation means): the carrier keeps constant speed or rotates slowly and quickly; after entering the air cooling area, the carrier rotates slowly and quickly, finally leaves the furnace body equipment from the blanking area, and simultaneously the carrier is transmitted back to the feeding area (feeding mechanism) from the bottom of the furnace body.

The furnace body equipment disclosed by the invention is reasonable in design and stable in operation, so that the back surface of the solar cell is completely free from shielding during irradiation annealing treatment, and the front surface and the back surface of the solar cell receive light radiation injection in all directions.

According to the embodiment of the furnace body equipment, materials pass through the first light radiation mechanism before passing through the second light radiation mechanism, the first light radiation mechanism can perform omnibearing infrared ray radiation injection on the front side and the back side of the materials, and the efficiency of the materials after radiation annealing treatment can be improved by 0.3%.

In the present invention, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless expressly limited otherwise. The terms "mounted," "connected," "fixed," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; "coupled" may be direct or indirect through an intermediary. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "front", "rear", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or unit must have a specific direction, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.