阅读说明：本技术 一种带分流板的四级分馏式油扩散泵 (Four-stage fractionating type oil diffusion pump with flow distribution plate ) 是由 潘燕萍 井苅晴美 于 2019-08-23 设计创作，主要内容包括：本发明公开了一种带分流板的四级分馏式油扩散泵,包括内置泵芯的泵体,泵体的底部设有油室,泵体的上端设有进气口,泵体的侧端底部设有喷射嘴,且喷射嘴外接有排气管,泵体的外周固定有冷却水管,油室中固定有支撑罩,支撑罩由支撑板和柱形管构成,支撑罩的内部设有加热管道以及位于其上方的分流板,分流板包括中心盲板、第一环形端板和第二环形端板,支撑罩的上侧固定有泵芯。本发明结构设计科学合理,在油室中增设有分流板,能够对馏分进行预导向,增大通过蒸馏能够提高的极限真空度；同时由于分流板的存在,能够将未达到沸点前挥发的馏分进行有效拦截阻挡,进而大幅降低返油现象,提高泵体的使用效果。(The invention discloses a four-stage fractional distillation type oil diffusion pump with a flow distribution plate, which comprises a pump body internally provided with a pump core, wherein an oil chamber is arranged at the bottom of the pump body, an air inlet is arranged at the upper end of the pump body, an injection nozzle is arranged at the bottom of the side end of the pump body, an exhaust pipe is externally connected with the injection nozzle, a cooling water pipe is fixed at the periphery of the pump body, a support cover is fixed in the oil chamber, the support cover consists of a support plate and a cylindrical pipe, a heating pipeline and the flow distribution plate positioned above the heating pipeline are arranged in the support cover, the flow distribution plate comprises a central blind plate, a first annular end plate and a second annular end plate, and. The invention has scientific and reasonable structural design, and the splitter plate is additionally arranged in the oil chamber, so that the distillate can be pre-guided, and the ultimate vacuum degree which can be improved by distillation is increased; meanwhile, due to the existence of the flow distribution plate, the volatile fractions before reaching the boiling point can be effectively intercepted and blocked, so that the oil return phenomenon is greatly reduced, and the using effect of the pump body is improved.)

1. The utility model provides a take level four fractional distillation formula oil diffusion pump of flow distribution plate, includes the pump body of built-in pump core, the bottom of the pump body is equipped with grease chamber, the upper end of the pump body is equipped with the air inlet, the side bottom of the pump body is equipped with the jet nozzle, and the jet nozzle is external to have the blast pipe, the periphery of the pump body is fixed with condenser tube, its characterized in that: a supporting cover is fixed in the oil chamber, the supporting cover is a cylindrical pipe cover of which the upper end is provided with an end plate, a heating pipeline and a flow distribution plate positioned above the heating pipeline are arranged in the supporting cover, and a pump core is fixed on the upper side of the supporting cover;

the supporting cover is composed of a supporting plate and a cylindrical pipe, a first air hole is formed in the center of the supporting plate, a second air hole, a third air hole and a fourth air hole are sequentially formed in the outer side of the first air hole, the first air hole is a round hole, the second air hole, the third air hole and the fourth air hole are respectively arc-shaped holes distributed in an annular array mode, the upper end of the cylindrical pipe is fixed with the edge of the supporting plate in a sealing mode, and oil return holes are uniformly formed in the lower end of the cylindrical pipe along the circumferential direction;

the pump core comprises a first-level flow guide pipe, a first-level spray head, a second-level flow guide pipe, a second-level spray head, a third-level flow guide pipe, a fourth-level spray head and a heat insulation protection plate, wherein the first-level flow guide pipe, the second-level flow guide pipe and the fourth-level flow guide pipe are sequentially arranged inside the first-level flow guide pipe from outside to inside, the axis of the first-level flow guide pipe coincides with that of the second-level flow guide pipe, the fourth-level flow guide pipe is arranged between the first air hole and the second air hole, the second-level flow guide pipe is arranged between the third air hole and the fourth air hole, the first-level flow guide pipe is arranged outside the fourth air hole, the heights of the first-level flow guide pipe, the second-level, The outer sides of the first-stage spray nozzle and the second-stage spray nozzle are also fixedly provided with heat insulation protection plates at the upper end of the four-stage flow guide pipe;

the flow distribution plate comprises a central blind plate, a first annular end plate and a second annular end plate, the outer end of the central blind plate is fixed with the inner end of the first annular end plate through a plurality of first connecting pieces, and the outer end of the first annular end plate is fixed with the inner end of the second annular end plate through a plurality of second connecting pieces.

2. The four-stage fractionation oil diffusion pump with a flow distribution plate according to claim 1, wherein: the pump body is a straight cavity type pump body, a flange plate is arranged at the upper end of the pump body, and support legs are arranged at the lower end of the pump body.

3. The four-stage fractionation oil diffusion pump with a flow distribution plate according to claim 1, wherein: the heating pipeline is of a disc-shaped structure capable of being uniformly heated.

4. The four-stage fractionation oil diffusion pump with a flow distribution plate according to claim 3, wherein: and a heating wire is arranged in the heating pipeline and is filled with magnesium oxide powder.

5. The four-stage fractionation oil diffusion pump with a flow distribution plate according to claim 1, wherein: and an oil blocking cap for blocking evaporation of oil vapor is arranged outside the primary spray head.

6. The four-stage fractionation oil diffusion pump with a flow distribution plate according to claim 1, wherein: the outer diameter of the support cover is smaller than the inner diameter of the oil chamber, and the outer diameter of the primary flow guide pipe is smaller than the outer diameter of the support cover.

7. The four-stage fractionation oil diffusion pump with a flow distribution plate according to claim 1, wherein: the outer edge of the second annular end plate is bent inwards to form a taper pipe.

8. The four-stage fractionation oil diffusion pump with a flow distribution plate according to claim 1, wherein: the first connecting piece is a Z-shaped plate, and the second connecting piece is a C-shaped plate.

9. The four-stage fractionation oil diffusion pump with a flow distribution plate according to claim 1, wherein: the central blind plate, the first annular end plate, the second annular end plate, the first connecting piece and the second connecting piece are all made of stainless steel materials.

10. The four-stage fractionation oil diffusion pump with a flow distribution plate according to claim 1, wherein: the supporting cover and the pump core are connected into a whole through welding.

Technical Field

The invention relates to the technical field of oil diffusion pumps, in particular to a four-stage fractionation type oil diffusion pump with a flow distribution plate.

Background

Below 10^-2The Torr pressure region is very important for modern industrial and scientific research, and high vacuum is widely applied to melting and refining of active metals and refractory metals, decorative coating of plastics and the like. The most widely used suction device to achieve the required high vacuum is the diffusion pump. The diffusion pump can extract 10 by directional high-speed steam flow^-2-10^-7Pressure of Torr or less at 10^-7Below Torr, a shadow mask and a cold trap are generally used. Diffusion pumpIs high vacuum and ultrahigh vacuum obtaining equipment, a diffusion pump and a low temperature pump work together, and 10 can be obtained^-14Degree of vacuum of Torr.

In the traditional high vacuum oil diffusion pump, an air inlet is arranged above a pump body, the bottom of the pump body is used as an oil chamber, pump oil is filled in the oil chamber, an open heater is arranged outside and at the bottom of the pump body, and a pump core comprises a first-stage flow guide pipe and a first-stage nozzle, a second-stage flow guide pipe and a second-stage nozzle, and a third-stage flow guide pipe and a third-stage nozzle which are communicated; the three-stage diffusion and one-stage injection device comprises a first-stage nozzle, a second-stage nozzle, a third-stage nozzle and an injection nozzle, wherein the first-stage nozzle, the second-stage nozzle and the third-stage nozzle are used for completing the three-stage diffusion, the injection nozzle is used for completing the one-stage injection, the outlet of the injection nozzle is connected with an exhaust pipe, and a cooling pipe is arranged on the outer. Firstly, in order to make up for the deficiency of the pumping speed, the middle end of the pump body enlarges the annular area of the pump body, so that the annular areas of the positions of the primary nozzle, the secondary nozzle and the tertiary nozzle in the pump body are increased, namely the pumping area is increased, the processing process of the pump body is more complicated, for example, the welding procedure of the pump body is increased, the air tightness of the diffusion pump is reduced by frequent welding, the welding deformation of materials is increased, and the processing precision of the pump body is higher; the oil chamber is not provided with a splitter plate, so that the distillate cannot be pre-guided, and the ultimate vacuum degree which can be improved by distillation is reduced; and thirdly, although the vacuum oil diffusion pump is a pump body with less oil return amount in the vacuum pump type, a certain oil return amount still exists, and if the oil return amount can be further reduced, the using effect of the vacuum oil diffusion pump is greatly improved.

Disclosure of Invention

The invention aims to overcome the problems in the prior art and provide a four-stage fractionation type oil diffusion pump with a flow dividing plate.

In order to achieve the technical purpose and achieve the technical effect, the invention is realized by the following technical scheme:

the utility model provides a take level four fractional distillation formula oil diffusion pump of flow distribution plate, includes the pump body of built-in pump core, the bottom of the pump body is equipped with grease chamber, the upper end of the pump body is equipped with the air inlet, the side bottom of the pump body is equipped with the jet nozzle, and the jet nozzle is external to have the blast pipe, the periphery of the pump body is fixed with condenser tube, its characterized in that: a supporting cover is fixed in the oil chamber, the supporting cover is a cylindrical pipe cover of which the upper end is provided with an end plate, a heating pipeline and a flow distribution plate positioned above the heating pipeline are arranged in the supporting cover, and a pump core is fixed on the upper side of the supporting cover;

the supporting cover is composed of a supporting plate and a cylindrical pipe, a first air hole is formed in the center of the supporting plate, a second air hole, a third air hole and a fourth air hole are sequentially formed in the outer side of the first air hole, the first air hole is a round hole, the second air hole, the third air hole and the fourth air hole are respectively arc-shaped holes distributed in an annular array mode, the upper end of the cylindrical pipe is fixed with the edge of the supporting plate in a sealing mode, and oil return holes are uniformly formed in the lower end of the cylindrical pipe along the circumferential direction;

the pump core comprises a first-level flow guide pipe, a first-level spray head, a second-level flow guide pipe, a second-level spray head, a third-level flow guide pipe, a fourth-level spray head and a heat insulation protection plate, wherein the first-level flow guide pipe, the second-level flow guide pipe and the fourth-level flow guide pipe are sequentially arranged inside the first-level flow guide pipe from outside to inside, the axis of the first-level flow guide pipe coincides with that of the second-level flow guide pipe, the fourth-level flow guide pipe is arranged between the first air hole and the second air hole, the second-level flow guide pipe is arranged between the third air hole and the fourth air hole, the first-level flow guide pipe is arranged outside the fourth air hole, the heights of the first-level flow guide pipe, the second-level, The outer sides of the first-stage spray nozzle and the second-stage spray nozzle are also fixedly provided with heat insulation protection plates at the upper end of the four-stage flow guide pipe;

the flow distribution plate comprises a central blind plate, a first annular end plate and a second annular end plate, the outer end of the central blind plate is fixed with the inner end of the first annular end plate through a plurality of first connecting pieces, and the outer end of the first annular end plate is fixed with the inner end of the second annular end plate through a plurality of second connecting pieces.

Further, in the four-stage fractionation type oil diffusion pump with the splitter plate, the pump body is a straight cavity type pump body, a flange plate is arranged at the upper end of the pump body, and support legs are arranged at the lower end of the pump body.

Further, in the four-stage fractionation type oil diffusion pump with the flow distribution plate, the heating pipeline is of a disc-shaped structure capable of being uniformly heated.

Furthermore, in the four-stage fractionation type oil diffusion pump with the flow distribution plate, a heating wire is arranged in the heating pipeline and is filled with magnesium oxide powder.

Furthermore, in the four-stage fractionation type oil diffusion pump with the flow distribution plate, an oil blocking cap for blocking evaporation of oil vapor is arranged outside the first-stage spray head.

Further, in the four-stage fractionation type oil diffusion pump with the flow distribution plate, the outer diameter of the support cover is smaller than the inner diameter of the oil chamber, and the outer diameter of the first-stage flow guide pipe is smaller than the outer diameter of the support cover.

Further, in the four-stage fractionation type oil diffusion pump with the splitter plate, the outer edge of the second annular end plate is bent inwards to form a taper pipe.

Further, in the four-stage fractionation type oil diffusion pump with the splitter plate, the first connecting piece is a Z-shaped plate, and the second connecting piece is a C-shaped plate.

Furthermore, in the four-stage fractionation type oil diffusion pump with the splitter plate, the central blind plate, the first annular end plate, the second annular end plate, the first connecting piece and the second connecting piece are all made of stainless steel materials.

Furthermore, in the four-stage fractionation type oil diffusion pump with the flow distribution plate, the support cover and the pump core are connected into a whole through welding.

The invention has the beneficial effects that:

1. the pump body adopts the straight chamber formula structure, and the course of working is fairly simple, effectively reduces welding operation, ensures the gas tightness of diffusion pump, just the lower requirement on the machining precision of pump body.

2. A splitter plate is additionally arranged in the oil chamber, so that the distillate can be pre-guided, and the ultimate vacuum degree which can be improved by distillation is increased; meanwhile, due to the existence of the flow distribution plate, the volatile fractions before reaching the boiling point can be effectively intercepted and blocked, so that the oil return phenomenon is greatly reduced, and the using effect of the pump body is improved.

3. The outer sides of the first-stage spray head and the second-stage spray head are provided with heat insulation protection plates, so that oil mist condensed by the first-stage spray head and the second-stage spray head is effectively prevented from evaporating again, and the oil vapor is kept at a certain temperature by ensuring the temperature of the spray nozzles, so that normal jet flow is ensured.

Of course, it is not necessary for any one product that embodies the invention to achieve all of the above advantages simultaneously.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic front view of the present invention;

FIG. 2 is a schematic perspective view of a diverter plate according to the present invention;

FIG. 3 is a schematic view of a half-section of a diverter plate according to the present invention;

FIG. 4 is a schematic bottom view of the support housing of the present invention;

FIG. 5 is a schematic view of a half-section of a support housing and a portion of a pump core according to the present invention;

in the drawings, the components represented by the respective reference numerals are listed below:

1-a pump body, 2-an oil chamber, 3-an air inlet, 4-an injection nozzle, 5-an exhaust pipe, 6-a cooling water pipe, 7-a support cover, 701-a support plate, 702-a cylindrical pipe, 703-a first air vent, 704-a second air vent, 705-a third air vent, 706-a fourth air vent, 707-an oil return hole, 8-a heating pipeline, 9-a splitter plate, 901-a central blind plate, 902-a first annular end plate, 903-a second annular end plate, 904-a first connecting piece, 905-a second connecting piece, 10-a first-stage flow guide pipe, 11-a first-stage spray head, 12-a second-stage flow guide pipe, 13-a second-stage spray head, 14-a third-stage flow guide pipe, 15-a third-stage spray head, 16-a fourth-, 18-heat insulation protection plate, 19-support leg.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to the attached drawings 1-5, the present embodiment is a four-stage fractionation type oil diffusion pump with a splitter plate, which includes a pump body 1 with a built-in pump core, an oil chamber 2 is disposed at the bottom of the pump body 1, an air inlet 3 is disposed at the upper end of the pump body 1, an injection nozzle 4 is disposed at the bottom of the side end of the pump body 1, the injection nozzle 4 is externally connected with an exhaust pipe 5, and a cooling water pipe 6 is fixed at the periphery of the pump body 1. A supporting cover 7 is fixed in the oil chamber 2, the supporting cover 7 is a cylindrical pipe cover with an end plate at the upper end, a heating pipeline 8 and a flow distribution plate 9 positioned above the heating pipeline are arranged in the supporting cover 7, and a pump core is fixed on the upper side of the end plate of the supporting cover 7.

In this embodiment, the support cover 7 is composed of a support plate 701 and a cylindrical pipe 702, a first air hole 703 is formed in the center of the support plate 701, a second air hole 704, a third air hole 705 and a fourth air hole 706 are sequentially formed outside the first air hole 703, the first air hole 703 is a circular hole, and the second air hole 704, the third air hole 705 and the fourth air hole 706 are arc-shaped holes distributed in an annular array; the upper end of the cylindrical pipe 702 is fixed with the edge of the support plate 701 in a sealing way, and the lower end is uniformly provided with oil return holes 707 along the circumferential direction.

In this embodiment, the pump core includes one-level honeycomb duct 10, one-level shower nozzle 11, second grade honeycomb duct 12, second grade shower nozzle 13, tertiary honeycomb duct 14, tertiary shower nozzle 15, level four honeycomb duct 16, level four shower nozzle 17 and thermal-insulated guard plate 18. The first-stage draft tube 10 is internally provided with a second-stage draft tube 12, a third-stage draft tube 14 and a fourth-stage draft tube 16 which are overlapped in an axial line from outside to inside in sequence. The four-level draft tube 16 is positioned between the first air hole 703 and the second air hole 704, the three-level draft tube 14 is positioned between the second air hole 704 and the third air hole 705, the two-level draft tube 12 is positioned between the third air hole 705 and the fourth air hole 706, and the one-level draft tube 10 is positioned outside the fourth air hole 706. The first-stage spray nozzle 11, the second-stage spray nozzle 13, the third-stage spray nozzle 15 and the fourth-stage spray nozzle 17 are respectively fixed at the upper ends of the first-stage guide pipe 10, the second-stage guide pipe 12, the third-stage guide pipe 14 and the fourth-stage guide pipe 16, and heat insulation protection plates 17 are further fixed on the outer sides of the first-stage spray nozzle 11 and the second-stage spray nozzle 13. The supporting cover 7 and the pump core are connected into a whole by welding.

In this embodiment, the flow distribution plate 9 includes a central blind plate 901, a first annular end plate 902, and a second annular end plate 903, where an outer end of the central blind plate 901 is fixed to an inner end of the first annular end plate 902 through a plurality of first connecting members 904, and an outer end of the first annular end plate 902 is fixed to an inner end of the second annular end plate 903 through a plurality of second connecting members 905. The first connector 904 is a Z-shaped plate and the second connector 905 is a C-shaped plate. The central blind plate 901, the first annular end plate 902, the second annular end plate 903, the first connecting piece 904 and the second connecting piece 905 are all made of stainless steel materials.

In this embodiment, the pump body 1 is a straight cavity type pump body, and the upper end thereof is provided with a flange plate and the lower end thereof is provided with a support leg 19. The heating duct 8 has a disk-like structure capable of uniform heating. The heating pipeline 8 is internally provided with a heating wire and is filled with magnesia powder. An oil blocking cap for blocking the evaporation of the oil vapor is arranged outside the first-stage spray nozzle 11.

In this embodiment, the outer diameter of the support cover 7 is smaller than the inner diameter of the oil chamber 2, and the outer diameter of the primary flow guide tube 10 is smaller than the outer diameter of the support cover 7. The outer edge of the second annular end plate 902 is bent inward to form a cone.

One specific application of this embodiment is: the pump body 1 of the embodiment adopts a straight cavity type structure, the machining process is simpler, the welding operation is effectively reduced, the air tightness of the diffusion pump is guaranteed, and the requirement on the machining precision of the pump body 1 is lower. A splitter plate 9 is additionally provided in the oil chamber 2, so that the distillate can be pre-guided and the ultimate vacuum degree that can be improved by distillation can be increased. Meanwhile, due to the existence of the flow distribution plate, the volatile fractions before reaching the boiling point can be effectively intercepted and blocked, so that the oil return phenomenon is greatly reduced, and the using effect of the pump body is improved. The heat insulation protection plate 17 is arranged on the outer sides of the first-stage spray head 11 and the second-stage spray head 13, so that oil mist condensed by the first-stage spray head 11 and the second-stage spray head 13 is effectively prevented from being evaporated again, and the oil vapor is kept at a certain temperature by ensuring the temperature of the spray nozzle, and the normal operation of the jet flow is ensured.

The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.