阅读说明：本技术 冷阱装置以及扩散炉设备 (Cold trap device and diffusion furnace equipment ) 是由 不公告发明人 于 2019-09-03 设计创作，主要内容包括：本发明实施例涉及一种冷阱装置及扩散炉设备,包括：外壳体,所述外壳体包括第一进气口和第一出气口；内壳体,所述内壳体位于所述外壳体内,且所述内壳体相对于所述外壳体可拆卸,所述内壳体包括第二进气口和第二出气口,所述第二进气口与所述第一进气口相贯通,所述第二出气口与所述第一出气口相贯通；冷却管路,所述冷却管路位于所述内壳体内。本发明能够缩短冷阱装置保养耗时,提高机台产能。(The embodiment of the invention relates to a cold trap device and diffusion furnace equipment, which comprises: an outer housing comprising a first air inlet and a first air outlet; the inner shell is positioned in the outer shell and can be detached relative to the outer shell, the inner shell comprises a second air inlet and a second air outlet, the second air inlet is communicated with the first air inlet, and the second air outlet is communicated with the first air outlet; a cooling line located within the inner shell. The invention can shorten the time consumption of cold trap device maintenance and improve the machine productivity.)

1. A cold trap device, comprising:

an outer housing comprising a first air inlet and a first air outlet;

the inner shell is positioned in the outer shell and can be detached relative to the outer shell, the inner shell comprises a second air inlet and a second air outlet, the second air inlet is communicated with the first air inlet, and the second air outlet is communicated with the first air outlet;

a cooling line located within the inner shell.

2. A cold trap device according to claim 1, wherein the inner housing outer wall is conformed to the outer housing inner wall.

3. A cold trap device according to claim 1, wherein there is a gap between the inner housing outer wall and the outer housing inner wall.

4. A cold trap device according to claim 3, further comprising: the first connecting channel is arranged between the outer wall of the inner shell and the inner wall of the outer shell and surrounds the first air inlet, and the first air inlet and the second air inlet are communicated through the first connecting channel; the second connecting channel is arranged between the outer wall of the inner shell and the inner wall of the outer shell, the second connecting channel is wrapped around the second air outlet, and the first air outlet is communicated with the second air outlet through the second connecting channel.

5. A cold trap device according to claim 4, wherein a first end of the first connecting passage is fixedly arranged on the outer wall of the inner shell, and a second end opposite to the first end is in contact with the inner wall of the outer shell; or the first end of the first connecting channel is fixedly arranged on the inner wall of the outer shell, and the second end opposite to the first end is in contact with the outer wall of the inner shell.

6. A cold trap device according to claim 4, wherein a first end of the second connecting channel is fixedly arranged on the outer wall of the inner shell, and a second end opposite to the first end is in contact with the inner wall of the outer shell; or the first end of the second connecting channel is fixedly arranged on the inner wall of the outer shell, and the second end opposite to the first end is in contact with the outer wall of the inner shell.

7. A cold trap device according to any of claims 1 to 6, wherein the second inlet port is offset from the second outlet port in a projected area in a direction perpendicular to the second inlet port.

8. A cold trap device according to any one of claims 1 to 6, wherein the second gas inlet partially or completely coincides with the projected area of the second gas outlet in a direction perpendicular to the second gas inlet.

9. A cold trap device according to claim 8, further comprising: and the flow deflector is positioned in the inner shell and is arranged between the second air inlet and the second outlet.

10. A cold trap device according to claim 1, wherein the inner housing is fixedly connected to the outer housing, the fixed connection comprising a snap-fit connection, a magnetic-type connection or a threaded connection.

11. A cold trap device according to claim 10, wherein one of the outer housing and the inner housing further has a recess and the other has a projection adapted to align with the recess.

12. A cold trap device according to any of claims 1 to 11, wherein the shape of the inner housing comprises a cuboid.

13. A diffusion furnace apparatus, characterized in that it comprises a cold trap device according to any one of claims 1 to 11.

Technical Field

The invention relates to the technical field of semiconductors, in particular to a cold trap device and diffusion furnace equipment.

Background

With the progress of semiconductor manufacturing technology and the increasing demand of electronic devices, the productivity of semiconductor devices is a major concern of all manufacturers, and the productivity of semiconductor devices is related to the operation efficiency of process equipment on the machine of a production line, including diffusion furnace equipment. The cold trap device is an important component of diffusion furnace equipment, and the operation time of the cold trap device determines the capacity of a semiconductor device to a certain extent.

At present, the cold trap device captures reaction byproducts by using the low-temperature characteristic of a metal shell of the device, and the reaction byproduct steam is deposited on the inner wall of the metal shell after being cooled. With the increase of the working time of the cold trap device, the number of byproducts deposited on the inner wall of the metal shell is increased, the low-temperature characteristic of the metal shell is difficult to exert, and the capability of capturing reaction byproducts is reduced. The byproduct which is not captured enters the next device, namely the vacuum pump, and the service life of the vacuum pump is shortened. Therefore, the worker needs to perform maintenance operations such as cleaning the cold trap device with dust-free cloth and other objects, by periodically maintaining the cold trap device.

However, the time-consuming maintenance process of the cold trap device in the prior art may affect the productivity of the semiconductor device. Therefore, how to shorten the time consumption of the cold trap device has become a key issue in the semiconductor manufacturing process.

Disclosure of Invention

The embodiment of the invention provides a cold trap device and diffusion furnace equipment, which can shorten the time consumed by the maintenance of the cold trap device and improve the productivity of a machine.

To solve the above technical problem, an embodiment of the present invention provides a cold trap device, including: an outer housing comprising a first air inlet and a first air outlet; the inner shell is positioned in the outer shell and can be detached relative to the outer shell, the inner shell comprises a second air inlet and a second air outlet, the second air inlet is communicated with the first air inlet, and the second air outlet is communicated with the first air outlet; a cooling line located within the inner shell.

In addition, the outer wall of the inner shell is attached to the inner wall of the outer shell.

In addition, a gap is formed between the outer wall of the inner shell and the inner wall of the outer shell.

In addition, the cold trap apparatus further includes: the first connecting channel is arranged between the outer wall of the inner shell and the inner wall of the outer shell and surrounds the first air inlet, and the first air inlet and the second air inlet are communicated through the first connecting channel; the second connecting channel is arranged between the outer wall of the inner shell and the inner wall of the outer shell, the second connecting channel is wrapped around the second gas outlet, and the first gas outlet is communicated with the second gas outlet through the second connecting channel.

In addition, a first end of the first connecting channel is fixedly arranged on the outer wall of the inner shell, and a second end opposite to the first end is in contact with the inner wall of the outer shell; or the first end of the first connecting channel is fixedly arranged on the inner wall of the outer shell, and the second end opposite to the first end is in contact with the outer wall of the inner shell.

In addition, a first end of the second connecting channel is fixedly arranged on the outer wall of the inner shell, and a second end opposite to the first end is in contact with the inner wall of the outer shell; or the first end of the second connecting channel is fixedly arranged on the inner wall of the outer shell, and the second end opposite to the first end is in contact with the outer wall of the inner shell.

In addition, the projection area of the second air inlet and the projection area of the second air outlet in the direction perpendicular to the air inlet are staggered.

In addition, the projection area of the second air inlet and the second air outlet in the direction perpendicular to the second air inlet is partially or completely overlapped.

In addition, the cold trap apparatus further includes: and the flow deflector is positioned in the inner shell and is arranged between the second air inlet and the second outlet.

In addition, the inner shell body is fixedly connected with the outer shell body, and the fixed connection mode comprises buckle type connection, magnetic type connection and threaded connection.

In addition, one of the outer housing and the inner housing also has a recess and the other has a projection adapted to align with the recess.

In addition, the shape of the inner case includes a rectangular parallelepiped.

The embodiment of the invention also provides diffusion furnace equipment which comprises any one cold trap device.

Compared with the prior art, the technical scheme provided by the embodiment of the invention has the following advantages:

the embodiment of the invention provides a cold trap device, wherein an inner shell is arranged in an outer shell, the inner shell and the outer shell are respectively provided with an air inlet and an air outlet, and a cooling pipeline for providing a low-temperature environment is positioned in the inner shell, so that reaction byproducts are condensed on the inner wall of the inner shell. When the speed of the reaction byproducts captured by the inner shell is lower than the preset level, the whole inner shell and the cooling pipeline positioned in the inner shell can be directly taken out to replace the new inner shell and the new cooling pipeline, so that the time consumed by the maintenance of the cold trap device is shortened, and the productivity of a machine table is improved.

In addition, when having the space between interior casing outer wall and the shell body inner wall, the first connecting channel who sets up between interior casing outer wall and the shell body inner wall wraps first air inlet, second connecting channel wraps the second gas outlet to avoid reaction accessory substance steam to get into the space between interior casing outer wall and the shell body inner wall.

In addition, the first connecting channel is fixed on the inner wall of the outer shell or the outer wall of the inner shell, so that the normal disassembly of the inner shell can be ensured.

In addition, the second connecting channel is fixed on the inner wall of the outer shell or the outer wall of the inner shell, so that the normal disassembly of the inner shell can be ensured.

In addition, when the projection areas of the second air inlet and the second air outlet on at least one surface of the inner shell are partially or completely overlapped, a flow deflector is arranged between the second air inlet and the second air outlet, the flow path of the byproduct steam is adjusted, and the byproduct steam is prevented from directly flowing to the second air outlet from the second air inlet.

In addition, one of the outer shell and the inner shell is provided with a concave part, and the other is provided with a convex part aligned with the concave part, so that the direction accuracy of the inner shell during installation is ensured.

In addition, the shape of interior casing includes the cuboid, and under the same and the same condition of wall thickness of volume, the internal surface area of cuboid is greater than the cylinder to improve the maintenance cycle of interior casing, improve the board productivity.

Drawings

One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.

Fig. 1 is a schematic structural diagram of a cold trap device according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of the internal structure of the cold trap device shown in FIG. 1;

fig. 3 is a schematic structural diagram of a cold trap device according to another embodiment of the present invention;

fig. 4 is a left side sectional view of a partial structure of a cold trap device according to yet another embodiment of the present invention;

FIG. 5 is a bottom cross-sectional view of a portion of the cold trap device of FIG. 4;

fig. 6 is a schematic partial structure diagram of a cold trap device according to yet another embodiment of the present invention.

Detailed Description

As can be seen from the background art, the conventional cold trap device has the problem that the maintenance process is time-consuming.

In order to solve the above problems, an embodiment of the present invention provides a cold trap device, in which an inner housing is further disposed in an outer housing, the inner housing and the outer housing respectively have an air inlet and an air outlet, and a cooling pipeline for providing a low temperature environment is located in the inner housing, so that a byproduct is condensed on an inner wall of the inner housing. When the speed of the reaction byproducts captured by the inner shell is lower than the preset level, the whole inner shell and the cooling pipeline positioned in the inner shell can be directly taken out to replace the new inner shell and the new cooling pipeline, so that the time consumed by the maintenance of the cold trap device is shortened, and the productivity of a machine table is improved.

In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that in various embodiments of the invention, numerous technical details are set forth in order to provide a better understanding of the present application. However, the technical solution claimed in the present application can be implemented without these technical details and various changes and modifications based on the following embodiments. Fig. 1 is a schematic structural diagram of a cold trap device according to an embodiment of the present invention. For convenience of explanation, the cold trap device shown in fig. 1 is in a state when the inner case is disassembled.

Referring to fig. 1, the cold trap apparatus includes: an outer casing 110, the outer casing 110 including a first air inlet 111 and a first air outlet (not shown); the inner housing 120, the inner housing 120 is located in the outer housing 110, and the inner housing 120 is detachable with respect to the outer housing 110, and the inner housing 120 includes a second air inlet 121 and a second air outlet (not shown). When the cold trap device is in a working state, the second air inlet 121 is communicated with the first air inlet 111, and the second air outlet is communicated with the first air outlet; a cooling line (not shown) is located within the inner casing 120.

The wafer carrying device according to the present embodiment will be described in detail below with reference to the accompanying drawings.

In the present embodiment, the outer housing 110 and the inner housing 120 are rectangular parallelepiped, and one side of the outer housing 110 is open for mounting and dismounting the inner housing 120. The inner housing 120 has a cooling duct inlet/outlet 126 on a side surface in the detaching direction, and the inner housing 120 is a closed rectangular parallelepiped except for the cooling duct inlet/outlet 126, the second air inlet 121, and the second air outlet. In the present embodiment, the cooling pipeline is cooled by circulating cooling water, and a gap is formed between the cooling pipeline and the inner wall of the inner housing 120.

It should be noted that, in other embodiments, the inner housing and the outer housing may also be a cube, a cylinder, or any other shape, and only the condition that the inner housing is detachable is required to be satisfied. In other embodiments, the cooling pipeline inlet and outlet may also be located on other side surfaces of the inner shell, and penetrate through the inner shell and the outer shell. In addition, the inner shell is detachable so as to be convenient for maintenance.

Under the condition that the cuboids and the cylinders have the same internal volume, the surface area of the inner wall of the cuboid is larger, and more reaction by-product condensate can be deposited, so that the maintenance times in unit time are reduced, and the machine capacity is improved. In this embodiment, the inner housing 110 and the outer housing 120 are connected by a magnetic attraction type connection. Specifically, the outer housing 110 has magnetic members 113 on opposite sides of an open surface thereof, and the inner housing 120 has another magnetic member 122 opposite in magnetism to the magnetic member 113 at a corresponding position.

It should be noted that, in other embodiments, the inner casing and the outer casing may further be fixedly connected by means of a snap-fit connection, a threaded connection, or the like, and the components for the fixed connection are located outside the inner casing and the outer casing, so as to avoid damage to the cold trap device and the lower device of the cold trap device when the components fall into the outer casing during the process of detaching the inner casing.

In this embodiment, the outer housing 110 further has a protrusion 114 thereon, the inner housing 120 has a recess 123 aligned with the protrusion 114, and the recess 123 is located in the middle of the magnetic member 122. When the cold trap device is in an operating state, the convex portion 114 is fitted with the concave portion 123. The alignment fit of the protrusion 114 and the recess 123 is advantageous to avoid the wrong installation direction of the inner housing 110.

It should be noted that in other embodiments, the protrusion is located on the inner housing and the recess is located on the outer housing. The positions of the convex part and the concave part aligned with the convex part are determined according to actual conditions. In addition, the present invention may also use any other alignment member as long as the alignment member can satisfy the condition for determining the installation direction of the inner case.

Fig. 2 is a schematic diagram of the internal structure of the cold trap device shown in fig. 1. For convenience of illustration, the blocked second air outlet is indicated by a dotted line.

Referring to fig. 2, in the present embodiment, the second air inlet 221 is opposite to the second air outlet 227, and the projection areas of the second air inlet 221 and the second air outlet 227 in the direction perpendicular to the second air inlet 221 are completely overlapped.

It should be noted that when the projection areas of the second air inlet 221 and the second air outlet 227 in the direction perpendicular to the second air inlet 221, i.e., the air inlet direction, are partially or completely overlapped.

When there is no barrier between the second gas inlet 221 and the second gas outlet 227, part of the reaction byproduct steam will flow directly from the second gas inlet 221 to the second gas outlet 227, so that the cooling effect of the cooling pipeline 224 is insufficient. In order to prevent the reaction byproduct steam from flowing directly from the second gas inlet 221 to the second gas outlet 227, the cold trap device is further provided with a baffle 225, and the baffle 225 is disposed between the second gas inlet 221 and the second gas outlet 227. In this embodiment, the baffle 225 is a flat plate with a bent middle portion, the baffle 225 and the inner shell 220 form a space with a single side opening in a surrounding manner, and the flow path of the reaction byproduct steam is changed by changing the position of the opening, so that the reaction byproduct steam can be sufficiently contacted with the cooling pipeline and cooled.

It should be noted that, in other embodiments, the shape and the structure of the guide vane may be adjusted according to actual needs.

It should also be noted that, in other embodiments, the projection area of the second air inlet and the projection area of the second air outlet in the direction perpendicular to the second air inlet are offset. Specifically, referring to fig. 3, fig. 3 is a schematic structural diagram of a cold trap device according to another embodiment of the present invention, wherein a projection area of the second air inlet 321 and the second air outlet 327 in a direction perpendicular to the second air inlet 321 are offset.

In this embodiment, no guide vane is provided. It should be noted that in other embodiments, the guide vanes may be arranged according to actual situations.

In the present embodiment, the cooling pipe 324 is wound around the inner case 320. It should be noted that, in other embodiments, the cooling pipeline may be distributed on the inner wall of the inner casing or the surface of the baffle in an S shape, or may be wound around the side wall of the inner casing for multiple turns. Specifically, referring to fig. 4 and 5, fig. 4 is a left side view of a partial structure of a cold trap device according to another embodiment of the present invention, and fig. 5 is a bottom cross-sectional view of the partial structure of the cold trap device shown in fig. 4, wherein the inner housing 420 contains a baffle 425, the baffle is V-shaped, and the condenser tubes 424 are distributed on the surface of the baffle 425 in an S-shape.

In this embodiment, the inner wall of the outer casing 310 is attached to the outer wall of the inner casing 320, and in the working state, the first air inlet 311 and the second air inlet 321 completely overlap, and the first air outlet 311 and the second air outlet 327 completely overlap.

It should be noted that, in other embodiments, the first air inlet and the second air inlet partially coincide, and the second air outlet and the first air outlet partially coincide.

It should also be noted that in other embodiments, there is a gap between the inner wall of the outer shell and the outer wall of the inner shell. Specifically, referring to fig. 6, fig. 6 is a partial structural schematic view of a cold trap device according to still another embodiment of the present invention, a first connecting channel 513 and a second connecting channel 523 are provided between an outer casing 510 and an inner casing 520, the first connecting channel 513 connects a first air inlet 511 and a second air inlet 521, and the second connecting channel 523 connects a second air outlet 522 and a first air outlet 512.

In the present embodiment, the first connection passage 513 surrounds the first gas inlet 511, and the second connection passage 523 surrounds the second gas outlet 522, so that the reaction byproduct vapor flowing from the first gas inlet 511 can flow into the lower stage of the cold trap apparatus without flowing into the gap between the outer wall of the inner case 520 and the inner wall of the outer case 510.

In this embodiment, a first end of the first connection passage 513 is fixedly disposed on an inner wall of the outer housing 510, and a second end opposite to the first end is in contact with an outer wall of the inner housing 520; a first end of the second connecting passage 523 is fixedly disposed on the outer wall of the inner housing 520, and a second end opposite to the first end contacts the inner wall of the outer housing 510. Fixing the first connecting passage 513 on the outer case 510 and the second connecting passage 523 on the inner case 520 can ensure that the first connecting passage 513 surrounds the first air inlet 511 and the second connecting passage 523 surrounds the second air outlet 522, ensuring that the reaction byproduct steam does not flow into the gap between the outer wall of the inner case 520 and the inner wall of the outer case 510.

It should be noted that, in other embodiments, the first end of the first connecting channel 513 is fixedly disposed on the outer wall of the inner casing 520 or the inner wall of the outer casing 510, and the first end of the second connecting channel 523 is fixedly disposed on the outer wall of the inner casing 520 or the inner wall of the outer casing 510. The first connecting channel and the second connecting channel are only fixedly connected with the inner shell or the outer shell, so that the normal disassembly of the inner shell is ensured.

This cold trap device can directly take out interior casing and the cooling pipeline that is arranged in interior casing when needs maintain, replaces new interior casing and new cooling pipeline to can save the time of wasing shells inner wall and other maintenance operations, shorten the maintenance of cold trap device consuming time, improve the board productivity.

Correspondingly, the embodiment of the invention also provides diffusion furnace equipment, and the diffusion furnace equipment comprises the cold trap device provided by any embodiment of the invention.

This diffusion furnace equipment is when needs maintain, can directly take out the cooling pipeline of interior casing in the cold trap device and being arranged in interior casing, replaces new interior casing and new cooling pipeline to can save the time of wasing shells inner wall and other maintenance operations, shorten the maintenance of diffusion furnace equipment consuming time, improve the board productivity.

It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.