阅读说明：本技术 层叠薄膜的制造方法、太阳能电池的制造方法及太阳能电池模块的制造方法 (Method for manufacturing laminated thin film, method for manufacturing solar cell, and method for manufacturing solar cell module ) 是由 芝崎聪一郎 保西祐弥 山崎六月 中川直之 吉尾纱良 平冈佳子 山本和重 于 2020-02-28 设计创作，主要内容包括：实施方式提供透光性优异的层叠薄膜的制造方法、太阳能电池的制造方法、多结型太阳能电池的制造方法及太阳能电池模块的制造方法。实施方式的层叠薄膜的制造方法包含通过采用以铜为主成分的靶在氧分压为0.01[Pa]以上且4.8[Pa]以下的气氛中在第1透明电极上进行溅射来成膜光电转换层的工序；在所述光电转换层的成膜中,满足所述氧分压为上述范围内,且在将沉积速度设定为d[μm/min]时,所述氧分压为0.5×d[Pa]以上且1.5×d[Pa]以下；在所述光电转换层的成膜中,为300℃以上且600℃以下。(Embodiments provide a method for manufacturing a laminated thin film having excellent light transmittance, a method for manufacturing a solar cell, a method for manufacturing a multijunction solar cell, and a method for manufacturing a solar cell module. The method for manufacturing a laminated thin film of an embodiment includes a step of forming a photoelectric conversion layer by sputtering a target containing copper as a main component on a 1 st transparent electrode in an atmosphere having an oxygen partial pressure of 0.01[ Pa ] or more and 4.8[ Pa ] or less; in the formation of the photoelectric conversion layer, the oxygen partial pressure is in the above range, and when the deposition rate is set to d [ mu ] m/min ], the oxygen partial pressure is 0.5 xd [ Pa ] or more and 1.5 xd [ Pa ] or less; the film formation temperature of the photoelectric conversion layer is 300 ℃ to 600 ℃.)

1. A method for producing a laminated film, wherein,

comprises a step of forming a photoelectric conversion layer by sputtering a target mainly composed of copper on a 1 st transparent electrode in an atmosphere having an oxygen partial pressure of 0.01[ Pa ] or more and 4.8[ Pa ] or less;

in the formation of the photoelectric conversion layer, the oxygen partial pressure is in the above range, and when the deposition rate is set to d [ mu ] m/min ], the oxygen partial pressure is 0.5 xd [ Pa ] or more and 1.5 xd [ Pa ] or less;

the film formation temperature of the photoelectric conversion layer is 300 ℃ to 600 ℃.

2. The method of manufacturing a laminated thin film according to claim 1, wherein the temperature is 350 ℃ or higher and 550 ℃ or lower in the formation of the photoelectric conversion layer.

3. The method for producing a laminated thin film according to claim 1 or 2, wherein the oxygen partial pressure is 1.5 x 10 in the formation of the photoelectric conversion layer⁺⁹×e^{(-30000/sputtering temperature [ K ]])}The above.

4. The method of manufacturing a laminated thin film according to any one of claims 1 to 3, wherein the deposition rate is 0.02[ μm/min ] or more and 4[ μm/min ] or less in the formation of the photoelectric conversion layer.

5. The method for producing a laminated thin film according to any one of claims 1 to 4, wherein the oxygen partial pressure is 0.55 xd [ Pa ] or more and 1.4 xd [ Pa ] or less when a deposition rate is set to d [ μm/min ] in the formation of the photoelectric conversion layer.

6. The method for producing a laminated film according to any one of claims 1 to 5, wherein the photoelectric conversion layer is a p-type compound semiconductor layer mainly containing cuprous oxide.

7. A method for manufacturing a solar cell, wherein the method for manufacturing a laminated film according to any one of claims 1 to 6 is used to manufacture a laminated film.

8. A method for manufacturing a solar cell module, wherein the method for manufacturing a laminated film according to any one of claims 1 to 6 is used to manufacture a laminated film.

Technical Field

Background

As a high-efficiency solar cell, there is a multi-junction (series) solar cell. The tandem solar cell can use a single cell having high spectral sensitivity for each wavelength band, and therefore can be more efficient than a single junction. In addition, as a top cell of a tandem solar cell, a cuprous oxide compound which is an inexpensive material and has a wide band gap is expected to be used. However, although an efficiency of about 8% has been reported in a cuprous oxide solar cell manufactured by oxidizing a copper foil, the efficiency is still lower than the theoretical limit efficiency. This is considered to be because the heterogeneous phase such as copper oxide on the outermost surface of the copper foil after oxidation is removed by etching, but it is not completely removed, and a good pn junction cannot be formed because constituent elements of the etching solution remain. In addition, this method requires that a foil having a thickness of about 0.1mm be oxidized and then polished to about 20 μm, which makes it difficult to increase the area.

On the other hand, the film is produced by a method such as a reaction in a liquid phase, but the efficiency is at most about 4%. The main reason for this is considered to be that not only heterogeneous phase enters the film, but also impurities contained in the solution enter the film, and they become recombination centers of photoexcited carriers. Such a thin film is not used in a top cell of a tandem solar cell because light having a wavelength of 600nm or more, which is not absorbed by the thin film, is also absorbed. In general, sputtering is known as a method for producing a thin film with less impurity contamination, but the conversion efficiency is 1% or less, although a report example produced by this method is available. This is considered to be because heterogeneous phases of copper or copper oxide are easily generated even if no impurities are mixed, and a high-quality cuprous oxide layer is not easily obtained.

Disclosure of Invention

Problems to be solved by the invention

Drawings

Fig. 1 is a conceptual sectional view of a laminated film according to an embodiment.

Fig. 2 is a flowchart of a method for manufacturing a laminated film according to an embodiment.

FIG. 3 is a graph showing the relationship between the oxygen partial pressure and the deposition rate in the embodiment.

Fig. 4 is a conceptual sectional view of a laminated film according to the embodiment.

Fig. 5 is a conceptual sectional view of the solar cell of the embodiment.

Fig. 6 is a flowchart of a method for manufacturing a solar cell according to the embodiment.

Fig. 7 is a conceptual sectional view of the solar cell module according to the embodiment.

Fig. 8 is a conceptual sectional view of the solar cell module according to the embodiment.

Fig. 9 is a flowchart of the solar cell module of the embodiment.

Fig. 10 is a conceptual diagram of a solar photovoltaic power generation system of the embodiment.

Fig. 11 is a conceptual diagram of a vehicle of the embodiment.

FIG. 12 shows the XRD measurement results of example 5.

Embodiments relate to a method for manufacturing a laminated thin film, a method for manufacturing a solar cell, and a method for manufacturing a solar cell module.