阅读说明：本技术 柔性板结构移相器 (Flexible plate structure phase shifter ) 是由 汤明智 于 2020-08-10 设计创作，主要内容包括：本发明公开了一种柔性板结构移相器,包括基座和主体；所述基座的内部为工作腔；主体设置在基座的上方；所述基座内安装有竖向的促动器组件；促动器组件电连接有线束组件,线束组件连接线束接头,线束接头上套接有线扣；所述基座的侧面设置有通孔,线扣安装在通孔上；所述促动器组件的顶部安装有柔性板组件,主体固定在柔性板组件上。本发明不会产生位置的偏差,大大提升了使用寿命,间接帮助企业减少损失,提高了卧式干涉仪的工作效率。(The invention discloses a flexible plate structure phase shifter, which comprises a base and a main body, wherein the base is provided with a plurality of grooves; a working cavity is arranged inside the base; the main body is arranged above the base; a vertical actuator assembly is mounted in the base; the actuator assembly is electrically connected with the wire harness assembly, the wire harness assembly is connected with the wire harness connector, and the wire harness connector is sleeved with the wire buckle; a through hole is formed in the side face of the base, and the wire buckle is installed on the through hole; the top of the actuator assembly is provided with a flexible plate assembly, and the main body is fixed on the flexible plate assembly. The invention can not generate position deviation, greatly prolongs the service life, indirectly helps enterprises to reduce loss and improves the working efficiency of the horizontal interferometer.)

1. The flexible plate structure moves looks ware, its characterized in that: comprises a base and a main body;

a working cavity is arranged inside the base; the main body is arranged above the base;

a vertical actuator assembly is mounted in the base; the actuator assembly is electrically connected with the wire harness assembly, the wire harness assembly is connected with the wire harness connector, and the wire harness connector is sleeved with the wire buckle; a through hole is formed in the side face of the base, and the wire buckle is installed on the through hole;

the top of the actuator assembly is provided with a flexible plate assembly, and the main body is fixed on the flexible plate assembly.

2. A flexible plate structure phase shifter according to claim 1, wherein: the actuator assembly comprises a plurality of actuators fixedly mounted in the working chamber by first fasteners; all actuators are arranged circumferentially.

3. A flexible plate structure phase shifter according to claim 2, wherein: the wire harness assembly comprises wire harnesses made of wires corresponding to the actuators one by one; one end of each wire harness is electrically connected with the actuator, and the other ends of all the wire harnesses are connected with the wire harness joint together.

4. A flexible plate structure phase shifter according to claim 3, wherein: the flexible plate assembly comprises flexible plates which correspond to the actuators one to one, and the flexible plates are fixedly connected with the actuators through cylindrical pins and jackscrews.

5. A flexible plate structure phase shifter according to claim 4, wherein: the number of the actuators is 3-6, and the actuators are uniformly distributed in the working cavity.

Technical Field

The invention relates to the field of interferometer parts, in particular to a phase shifter with a flexible plate structure.

Background

At present, in the field of interferometer detection, the quality of a detected sample reflected by interferometer fringes is calculated by a computer algorithm and is more and more widely used. In the interference phase shift algorithm, a section of submicron displacement with consistent, stable and recoverable displacement curve of each point on the end face of a moved object is required to be arranged between a tested sample and a standard lens, and the phase shifter has the same function.

When the interferometer is calculated through software, a section of stable, precise and recoverable displacement cannot be obtained, a large displacement error is often caused, the difference between the final calculation result and the actual numerical value is large, and the judgment of the quality of the measured sample by an enterprise is influenced finally.

A similar solution is available in the market, in which a phase shifter supported at a single point is provided on an interferometer. The phase shifter is supported by a single point, so that the defects of position deviation of phase shifting, reduction of recovery performance along with time lapse, short service life and the like exist, and meanwhile, the application load of the flexible hinge phase shifter on horizontal equipment is limited.

Disclosure of Invention

The invention provides a phase shifter with a flexible plate structure aiming at the defects of the prior art, and the defects of the technology are overcome.

In order to achieve the purpose, the invention adopts the following technical scheme:

the flexible plate structure moves looks ware, its characterized in that: comprises a base and a main body; a working cavity is arranged inside the base; the main body is arranged above the base; a vertical actuator assembly is mounted in the base; the actuator assembly is electrically connected with the wire harness assembly, the wire harness assembly is connected with the wire harness connector, and the wire harness connector is sleeved with the wire buckle; a through hole is formed in the side face of the base, and the wire buckle is installed on the through hole; the top of the actuator assembly is provided with a flexible plate assembly, and the main body is fixed on the flexible plate assembly.

In an optimized scheme, the actuator assembly comprises a plurality of actuators fixedly installed in the working cavity through first fasteners; all actuators are arranged circumferentially.

According to the optimized scheme, the wire harness assembly comprises wire harnesses made of wires corresponding to the actuators one by one; one end of each wire harness is electrically connected with the actuator, and the other ends of all the wire harnesses are connected with the wire harness joint together.

According to the optimized scheme, the flexible plate assembly comprises flexible plates which correspond to the actuators one to one, and the flexible plates are fixedly connected with the actuators through cylindrical pins and jackscrews.

In an optimized scheme, the number of the actuators is 3-6, and the actuators are uniformly distributed in the working cavity.

Due to the adoption of the technology, compared with the prior art, the invention has the beneficial effects that:

according to the phase shifter, the flexible plate is additionally arranged between the main body and the base, the flexible plate is approximately in rigid connection with the base, and the elastic restoring force of the structure is utilized to restore the phase shifter to the original state after the phase shifting is finished.

The invention can not generate position deviation, greatly prolongs the service life, indirectly helps enterprises to reduce loss and improves the working efficiency of the horizontal interferometer.

Drawings

Fig. 1 is an exploded view of an embodiment of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

As shown in fig. 1, the phase shifter of a flexible plate structure includes a base 8 and a body 1.

The inside of the base is a working cavity. The main body 1 is disposed above the base 8. A vertical actuator assembly is mounted within the base 8. The actuator assembly is electrically connected with the wire harness assembly, the wire harness assembly is connected with the wire harness connector, and the wire harness connector is sleeved with the wire buckle 6. The side of base is provided with through-hole 7, and line is buckled 6 and is installed on through-hole 7. The actuator assembly is provided with a flexible plate assembly at the top, and the main body 1 is fixed on the flexible plate assembly.

The specific design is as follows:

the actuator assembly comprises a number of actuators 5 fixedly mounted in the working chamber by means of first fasteners. All the actuators 5 are arranged circumferentially. The number of the actuators is 3-6, and the actuators are uniformly distributed in the working cavity.

The wire harness assembly includes wire harnesses made of wires corresponding one-to-one to the actuators. One end of each wire harness is electrically connected with the actuator, and the other ends of all the wire harnesses are connected with the wire harness joint together.

The flexible plate component comprises flexible plates 4 which correspond to the actuators one by one, and the flexible plates 4 are fixedly connected with the actuators through cylindrical pins 2 and jackscrews 3.

In the present embodiment, the actuator is a part with good piezoelectric effect, which is packaged by a package structure. A base for connecting the stationary actuator to the device. And a body converting the displacement of the actuator into a displacement of an end face of the body. The flexible plate is installed on the base, the main body is connected with the flexible plate, and the actuator enables the flexible plate to be slightly deformed and transmits the deformation to the main body. And the wire buckle is a part for fixing and leading out the wire harness joint. The cylindrical pin is a part for smoothly transferring the displacement of the actuator. And the jackscrew is used for adjusting the pre-tightening force of the contact of the cylindrical pin and the actuator.

According to the phase shifter, the flexible plate is additionally arranged between the main body and the base, the flexible plate is approximately in rigid connection with the base, and the elastic restoring force of the structure is utilized to restore the phase shifter to the original state after the phase shifting is finished.

The invention can not generate position deviation, greatly prolongs the service life, indirectly helps enterprises to reduce loss and improves the working efficiency of the horizontal interferometer.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the equipment or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.