阅读说明：本技术 用于制造超导lc型谐振器的方法和由此获得的超导谐振器 (Method for manufacturing a superconducting LC-type resonator and superconducting resonator obtained thereby ) 是由 法齐·布萨哈 萨米尔·贝尔迪 克莉丝汀·肖蒙 蒂博·瓦斯莱 于 2019-12-04 设计创作，主要内容包括：本发明涉及一种用于制造包括至少一个高电阻率衬底(1)类型的超导LC型谐振器的方法,所述至少一个高电阻率上印刷有电感线圈(3)、称为下部的第一电极(41)和称为上部的第二电极(40),该第二电极与第一电极相对布置以形成与电感线圈(3)并联连接的电容器(4),以及专用于所述谐振器的电感耦合装置(2),其中牺牲铝层沉积在所述第一和第二电极之间。本发明还涉及由此获得的超导LC型谐振器以及涉及这种谐振器用于检测毫米光子噪声的用途。(The invention relates to a method for manufacturing a superconducting LC-type resonator of the type comprising at least one high-resistivity substrate (1) on which an inductor coil (3), a first electrode (41), referred to as lower, and a second electrode (40), referred to as upper, arranged opposite the first electrode to form a capacitor (4) connected in parallel with the inductor coil (3), and an inductive coupling device (2) dedicated to said resonator, wherein a sacrificial aluminium layer is deposited between said first and second electrodes. The invention also relates to the superconducting LC-type resonator thus obtained and to the use of such a resonator for detecting millimeter-photon noise.)

1. A method for manufacturing a superconducting LC-type resonator comprising at least one high-resistivity substrate (1) on which the following elements are printed: -an inductor (3), -a first electrode (41), called lower part, and-a second electrode (40), called upper part, arranged opposite the first electrode to form together a capacitor (4) connected in parallel with the inductor (3), and-an inductive coupling device (2) dedicated to the resonator, characterized in that at least the following steps are carried out in sequence:

a step E0 of providing the high resistivity substrate (1),

-a step E1 of simultaneously printing the inductor coil (3) and the lower electrode (41),

-a step E2 of printing the coupling means (2),

a step E3 of printing an aluminum layer completely covering the lower electrode (41),

a step E4 of printing an upper electrode (40) on the aluminium layer,

-a step E5 of dissolving the aluminium layer.

2. Method for manufacturing a superconducting LC-type resonator according to claim 1, characterized in that said printing step E3 produces an aluminum layer with a thickness varying from a few tens of nanometers to a few hundreds of nanometers.

3. Method for manufacturing a superconducting LC-type resonator according to claim 1 or 2, characterized in that said printing step E3 produces a layer of aluminum with a thickness of less than 400nm, preferably less than 150nm, still more preferably between 40 and 70 nm.

4. Method for manufacturing a superconducting LC-type resonator according to one of claims 1 to 3, characterized in that said step E1 of simultaneously printing said inductor coil (3) and lower electrode (41) is carried out: starting from a titanium nitride (TiN) layer having a thickness of about 60nm, previously deposited using PVD techniques, preferably cathodic sputtering techniques, a lithographic technique, preferably a photolithographic technique, is used, followed by reactive ion etching.

5. Method for manufacturing a superconducting LC-type resonator according to any of the preceding claims, characterized in that said printing step E2 comprises using a lithographic technique, preferably a photolithographic technique, followed by a PVD deposition, preferably a cathodic sputtering deposition, then defined using a lift-off technique, resulting in a coplanar reading line made of niobium of about 50 ohms and with a thickness of about 100 nm.

6. Method for manufacturing a superconducting LC-type resonator according to any of the preceding claims, characterized in that said step E3 of printing an aluminum layer is performed using a lithographic technique, preferably a photolithographic technique, followed by a PVD deposition, preferably a cathodic sputtering deposition, followed by a definition using a lift-off technique.

7. Method for manufacturing a superconducting LC-type resonator according to any of the preceding claims, characterized in that said printing step E4, defined using a lithographic technique, preferably a photolithographic technique, followed by a PVD deposition, preferably a cathodic sputtering deposition, followed by a lift-off technique, is able to cause the production of said upper electrode mainly consisting of a material chosen from the list defined by (TiN, TaN, NbN).

8. Method for manufacturing a superconducting LC-type resonator according to any of the preceding claims, characterized in that said printing step E4 uses a lithographic technique, preferably a photolithographic technique, followed by a PVD deposition, preferably a cathodic sputter deposition, followed by a lift-off technique definition, causing the creation of said upper electrode (40) from TiN.

9. Process for the manufacture of a superconducting LC-type resonator according to any of the preceding claims, characterized in that said dissolving step E5 is carried out by immersing the resonator in a developer consisting of an alkaline solution having a PH greater than 10.5, preferably containing ammonia or tetramethylammonium hydroxide, for 20 to 60 minutes.

10. Method for manufacturing a superconducting LC-type resonator according to any of the preceding claims, wherein said step E4 of printing the upper electrode (40) results in the formation of an upper electrode consisting of N micro-bridges (4010) connected in parallel at their respective ends by two strips (4011).

11. Method for manufacturing a superconducting LC-type resonator according to any of the preceding claims, characterized in that during said steps E1, E3, E4, a plurality of lower and upper electrodes arranged to form a plurality of capacitors in parallel are printed.

12. A superconducting LC-type resonator comprising at least one high-resistivity substrate (1) on which the following elements are printed: -an inductive coil (3), -a first electrode (41), called lower part, and-a second electrode (40), called upper part, arranged opposite the first electrode to form together a capacitor (4) connected in parallel with said inductive coil (3), and-RF coupling means (2) dedicated to said resonator, characterized in that said first electrode (41), called lower part, and said second electrode (40), called upper part, are substantially parallel and are separated by a free space by a distance varying from some tens of nanometers to some hundreds of nanometers.

13. Superconducting LC-type resonator according to claim 12, characterized in that said first electrode (41), referred to as lower, and said second electrode (40), referred to as upper, are substantially parallel and separated by a free space by a distance of less than 400nm, preferably less than 150nm, more preferably 40 to 70 nm.

14. The superconducting LC-type resonator according to claim 12 or 13, characterized in that said substrate is selected from the list defined by high resistivity silicon substrate, sapphire, quartz, silica, silicon carbide with a diameter of 2 inches and a thickness of 330 μ ι η.

15. Superconducting LC-type resonator according to any of claims 12 to 14, characterized in that: the inductor coil (3) and lower electrode (41) are an etch of titanium nitride (TiN) with a thickness of 40 to 80nm, preferably about 60 nm.

16. Superconducting LC-type resonator according to any of claims 12 to 15, characterized in that said coupling means (2) constitute a coplanar readout line etched on the substrate, which is 50 ohms and made of niobium (Nb), with a thickness of 80 to 150nm, preferably about 100 nm.

17. Superconducting LC-type resonator according to any of claims 12 to 16, characterized in that said upper electrode (40) is an electrode with a thickness of 350 to 550nm, mainly composed of a material selected from the list defined by (TiN, TaN, NbN) by using lithographic techniques, preferably photolithographic techniques, followed by PVD deposition, preferably cathodic sputter deposition, followed by definition using lift-off techniques.

18. Superconducting LC-type resonator according to any of claims 12 to 17, characterized in that the upper electrode (40) is constituted by N micro-bridges (4010) connected in parallel and at their respective ends by two strips (4011).

19. The superconducting LC-type resonator according to any of claims 12 to 18, characterized in that it comprises a plurality of lower and upper electrodes arranged to form a plurality of capacitors in parallel, such that the resonator exhibits a resonance of 0.1 to 8GHz and an intrinsic quality factor Qi greater than 700000.

20. Use of the superconducting LC-type resonator according to any one of claims 12 to 19 for the detection of electromagnetic radiation in the millimeter/sub-millimeter to X-ray range.