用于制造超导lc型谐振器的方法和由此获得的超导谐振器
阅读说明:本技术 用于制造超导lc型谐振器的方法和由此获得的超导谐振器 (Method for manufacturing a superconducting LC-type resonator and superconducting resonator obtained thereby ) 是由 法齐·布萨哈 萨米尔·贝尔迪 克莉丝汀·肖蒙 蒂博·瓦斯莱 于 2019-12-04 设计创作,主要内容包括:本发明涉及一种用于制造包括至少一个高电阻率衬底(1)类型的超导LC型谐振器的方法,所述至少一个高电阻率上印刷有电感线圈(3)、称为下部的第一电极(41)和称为上部的第二电极(40),该第二电极与第一电极相对布置以形成与电感线圈(3)并联连接的电容器(4),以及专用于所述谐振器的电感耦合装置(2),其中牺牲铝层沉积在所述第一和第二电极之间。本发明还涉及由此获得的超导LC型谐振器以及涉及这种谐振器用于检测毫米光子噪声的用途。(The invention relates to a method for manufacturing a superconducting LC-type resonator of the type comprising at least one high-resistivity substrate (1) on which an inductor coil (3), a first electrode (41), referred to as lower, and a second electrode (40), referred to as upper, arranged opposite the first electrode to form a capacitor (4) connected in parallel with the inductor coil (3), and an inductive coupling device (2) dedicated to said resonator, wherein a sacrificial aluminium layer is deposited between said first and second electrodes. The invention also relates to the superconducting LC-type resonator thus obtained and to the use of such a resonator for detecting millimeter-photon noise.)
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