阅读说明：本技术 单片传感器装置、制造方法和测量方法 (Monolithic sensor device, method for producing and method for measuring ) 是由 弗雷德里克·威廉姆·毛里茨·万海尔蒙特 内博伊沙·内纳多维茨 希尔科·瑟伊 霍曼·哈比比 于 2019-02-28 设计创作，主要内容包括：一种单片气体传感器装置具有包括第一敏感层(17)的第一电容式换能器(11)和包括第二敏感层(18)的第二电容式换能器(12),其中,第一敏感层和第二敏感层(17、18)在至少一种特性上彼此不同。该装置还包括读出电路(30),该读出电路包括电容-数字转换器(31),该电容-数字转换器电耦合到第一换能器和第二换能器(11、12),并且配置为基于第一换能器(11)生成第一测量信号和基于第二换能器(12)生成第二测量信号。(A monolithic gas sensor device has a first capacitive transducer (11) comprising a first sensitive layer (17) and a second capacitive transducer (12) comprising a second sensitive layer (18), wherein the first and second sensitive layers (17, 18) differ from each other in at least one property. The apparatus further comprises a readout circuit (30) comprising a capacitance-to-digital converter (31) electrically coupled to the first and second transducers (11, 12) and configured to generate a first measurement signal based on the first transducer (11) and a second measurement signal based on the second transducer (12).)

1. A monolithic gas sensor device (1) comprising

-a sensor having a first transducer (11) and a second transducer (12), the first transducer

The transducer comprises a first sensitive layer (17), the second transducer comprises a second sensitive layer (18);

-wherein the first and second sensitive layers (17, 18) are each other in at least one characteristic

This is different; and

-a readout circuit (30) which generates from the first and second transducers (11, 12)

A first measurement signal and a second measurement signal.

2. The sensor device (1) according to claim 1, wherein the sensor device (1) is configured as a humidity sensor device and the first and second sensitive layers (17, 18) are configured to absorb water molecules.

3. The sensor device (1) according to claim 1 or 2, wherein the first and second sensitive layers (17, 18) are composed of different materials.

4. The sensor device (1) according to one of claims 1 to 3, wherein the first and second sensitive layers (17, 18) have different thicknesses.

5. Sensor device (1) according to one of claims 1 to 4, wherein the first and second transducers (11, 12) differ from each other by accuracy and/or sensitivity.

6. The sensor device (1) according to one of claims 1 to 5, wherein the first and second transducers (11, 12) are configured such that their pass response rates differ from each other.

7. The sensor device (1) according to one of claims 1 to 6, wherein the readout circuit (30) is configured to provide a result signal as a predetermined function of the first and second measurement signals.

8. The sensor device (1) according to one of claims 1 to 7, wherein the readout circuit (30) comprises a memory (33) and is configured to provide a result signal as a predetermined function of the first and second measurement signals and data stored in the memory (33).

9. The sensor device (1) according to claim 8, wherein the data stored in the memory (33) comprises a weighting factor which is a function of the first and/or second measurement signal and which is used to generate the resulting signal as a weighted average of the first and second measurement signal.

10. The sensor device (1) according to claim 8, wherein the data stored in the memory (33) comprises a first and a second filter function, which are applied to the first and the second measurement signal to generate a result signal.

11. The sensor device (1) according to claim 10, wherein the first and second filter functions depend on noise characteristics and/or drift characteristics of the first and second transducers (11, 12).

12. The sensor device (1) according to one of claims 1 to 11, wherein the first and second transducers (11, 12) are arranged on a substrate (10).

13. The sensor device (1) according to one of claims 1 to 12, wherein the first and second transducers (11, 12) are capacitors, in particular interdigital capacitors or parallel plate capacitors.

14. A method for manufacturing a monolithic gas sensor device (1), the method comprising

-manufacturing a first transducer (11) on a substrate (10), the first transducer (11) comprising a first sensitive layer (17); and

-manufacturing a second transducer (12) on a substrate (10), the second transducer (12) comprising a second sensitive layer (18);

-wherein the first and second sensitive layers (17, 18) differ from each other in at least one property.

15. The method according to claim 14, wherein the gas sensor device (1) is manufactured as a humidity sensor device and the first and second sensitive layers (17, 18) are manufactured to absorb water molecules.

16. A method for generating a resulting signal from a capacitive gas sensor device having a first transducer (11) with a first sensitive layer (17) and a second transducer (12) with a second sensitive layer (18), wherein the first and second sensitive layers (17, 18) differ from each other in at least one property, the method comprising

-generating a first measurement signal using the first transducer (11);

-generating a second measurement signal using the second transducer (12);

-generating a resulting signal as a predetermined function of the first and second measurement signals and the data stored in the memory (33).

17. The method according to claim 16, wherein the gas sensor device (1) is configured as a humidity sensor device and the first and second sensitive layers (17, 18) are configured to absorb water molecules.

18. A method according to claim 16 or 17, wherein the data comprises a weighting factor, the result signal being generated by weighting the first and second measurement signals using the weighting factor to obtain a weighted average.

19. A method according to claim 16 or 17, wherein the data comprises a first filter function and a second filter function, the result signal being generated by applying the first filter function to the first measurement signal and the second filter function to the second measurement signal.