阅读说明：本技术 单片传感器装置、制造方法和测量方法 (Monolithic sensor device, method for producing and method for measuring ) 是由 弗雷德里克·威廉姆·毛里茨·万海尔蒙特 内博伊沙·内纳多维茨 希尔科·瑟伊 霍曼·哈比比 于 2019-02-28 设计创作，主要内容包括：一种单片气体传感器装置具有包括第一敏感层(17)的第一电容式换能器(11)和包括第二敏感层(18)的第二电容式换能器(12),其中,第一敏感层和第二敏感层(17、18)在至少一种特性上彼此不同。该装置还包括读出电路(30),该读出电路包括电容-数字转换器(31),该电容-数字转换器电耦合到第一换能器和第二换能器(11、12),并且配置为基于第一换能器(11)生成第一测量信号和基于第二换能器(12)生成第二测量信号。(A monolithic gas sensor device has a first capacitive transducer (11) comprising a first sensitive layer (17) and a second capacitive transducer (12) comprising a second sensitive layer (18), wherein the first and second sensitive layers (17, 18) differ from each other in at least one property. The apparatus further comprises a readout circuit (30) comprising a capacitance-to-digital converter (31) electrically coupled to the first and second transducers (11, 12) and configured to generate a first measurement signal based on the first transducer (11) and a second measurement signal based on the second transducer (12).)