阅读说明：本技术 一种超景深显微快速测量装置及测量方法 (Ultra-depth-of-field microscopic rapid measurement device and measurement method ) 是由 李世昌 胡春桃 帅成忠 章则华 赵辰 胡士海 于 2020-08-12 设计创作，主要内容包括：本发明公开了一种超景深显微快速测量装置及测量方法,包括测量架,测量架上连接有光学组件,光学组件的下方设有移动测量平台；所述光学组件中设有变焦镜头。本发明利用电动变焦镜头或液体镜头在不同焦距下对工件在检测范围内进行图像获取,并对获取图像中的清晰部分进行合成得到样品的完整图像；使其可以无需调整镜头高度或对焦位置便能实现对样品的高度检测和图像采集；同时,通过以灰度图的方式对图片进行显示,还可以提高软件对工件的高度值提取及后续三维建模效率,具有测量效率高和成像效果好的特点。(The invention discloses a microscopic rapid measuring device with ultra field depth and a measuring method, comprising a measuring frame, wherein the measuring frame is connected with an optical assembly, and a movable measuring platform is arranged below the optical assembly; the optical assembly is provided with a zoom lens. The invention utilizes the motorized zoom lens or the liquid lens to acquire images of a workpiece in a detection range under different focal lengths, and synthesizes clear parts in the acquired images to obtain a complete image of a sample; the height detection and image acquisition of the sample can be realized without adjusting the height of a lens or the focusing position; meanwhile, the images are displayed in a gray-scale image mode, the efficiency of extracting the height value of the workpiece and performing subsequent three-dimensional modeling by software can be improved, and the method has the characteristics of high measurement efficiency and good imaging effect.)

1. A microscopic rapid measuring device with super depth of field is characterized in that: the device comprises a measuring frame (1), wherein an optical assembly is connected to the measuring frame (1), and a movable measuring platform (2) is arranged below the optical assembly; the optical assembly is provided with a zoom lens (3).

2. The ultra-depth of field microscopic rapid measuring device according to claim 1, characterized in that: the optical assembly comprises a camera (4), a zoom lens (3), a main body lens (5) and an objective lens (6) which are sequentially connected, wherein the zoom lens (3) is a liquid lens or an electric zoom lens.

3. The ultra-depth of field microscopic rapid measuring device according to claim 1, characterized in that: the lower end of the movable measuring platform (2) is connected with the measuring frame (1) through the damping workbench (7), and the bottom of the measuring frame (1) is provided with a cushion layer.

4. The apparatus according to claim 3, wherein: the measuring rack (1) is connected with a damping workbench (7) through a marble bottom plate, and the cushion layer is arranged at the bottom of the marble bottom plate.

5. The ultra-depth of field microscopic rapid measuring device according to claim 1, characterized in that: and one side of the optical component is provided with an illumination light source (8), the illumination light source (8) is a halogen lamp with the power of more than 100W, and the irradiation light of the halogen lamp is annular light or point light source coaxial light.

6. The measuring method of the ultra-depth-of-field microscopic rapid measuring device based on the claims 1, 2, 3, 4 or 5 is characterized by comprising the following steps:

A. placing a sample on a mobile measuring platform below the optical assembly, and enabling the range to be measured of the sample to be located in the display center of the optical assembly;

B. sequentially changing the focusing focal length of the zoom lens according to a plurality of preset parameter values, and enabling the optical assembly to obtain a picture of a range to be measured after zooming each time, so as to obtain a plurality of pictures of the range to be measured under different focal lengths, thereby obtaining a picture A;

C. selecting a clear part in each picture A, and then synthesizing the clear parts in all the pictures A to obtain a complete clear picture in a range to be detected, so as to obtain a picture B;

D. sequentially changing the range to be measured of the sample by moving the measuring platform, and re-obtaining a complete clear picture of the range to be measured according to the step B and the step C after the range to be measured is changed every time, so as to obtain a plurality of complete clear pictures of different ranges to be measured, and obtain a picture C;

E. synthesizing the picture B and the picture C to obtain a two-dimensional picture of the sample;

F. and E, obtaining a three-dimensional model of the sample according to the two-dimensional picture of the sample in the step E.

7. The measurement method according to claim 6, characterized in that: b, recording the height value of each picture A according to the parameter value of the current zoom lens when each picture A is obtained; when the clear parts in the step C are synthesized, displaying the clear parts by corresponding gray value pairs according to the height values of the pictures corresponding to the clear parts to obtain a D gray image; e, synthesizing the D gray level images in different ranges to be detected to obtain an E gray level image; and F, obtaining the height information of the sample at different positions according to the gray value of the E gray image, and stretching the E gray image on the basis of the height information to obtain a three-dimensional model of the sample.

8. The measurement method according to claim 7, characterized in that: and B, calculating the height value of the picture in the step B according to the parameter value of the zoom lens and the conversion function, wherein the obtaining mode of the conversion function comprises the following steps:

B1. taking the surfaces to be tested of the test samples at different heights as standard planes, and enabling the zoom lens to move the optical assembly in the vertical direction to focus the test samples on different standard planes in a reference state; simultaneously, recording height information of the optical assembly at different focusing positions by using a grating ruler to obtain height information H;

B2. returning the optical assembly to an initial position, and then sequentially adjusting the parameter values of the zoom lens to enable the optical assembly to focus on standard planes with different heights, and simultaneously recording the parameter values V of the zoom lens in different focusing states;

B3. and fitting the recorded height information H and the parameter value V to obtain a conversion function of H ═ f (V).

9. The measurement method according to claim 8, characterized in that: the zoom lens is a liquid lens, the parameter value of the liquid lens is an input voltage value, and when the input voltage value in step B1 is 0, the zoom lens is in a reference state.

10. The measurement method according to claim 8, characterized in that: and the zoom lens is a motorized zoom lens, the parameter value of the motorized zoom lens is a rotation angle value, and when the rotation angle value in the step B1 is 0 degree, the zoom lens is in a reference state.

Technical Field

The invention relates to a size measuring device and a measuring method, in particular to a super-field depth microscopic rapid measuring device and a measuring method.

Background

The measuring microscope is a microscope device which images an image seen by the microscope on a screen of the microscope or on a computer through digital-to-analog conversion; and simultaneously, the surface of the measuring point is subjected to height measurement in a high-precision optical focusing point detection mode. The existing measuring microscope generally adopts a main body lens with a zooming function or a plurality of groups of objective lenses with different magnifications to realize stable measurement of a measuring point, and when the size of a detected workpiece is larger, the main body lens or the objective lens can make the measuring point be positioned in the depth of field of the lens by reducing the magnification; accordingly, when the imaging sharpness and the imaging size at the measuring point are required to be improved, the main lens or the objective lens improves the imaging effect of the measuring point by increasing the magnification. However, the field depth range of the lens is correspondingly reduced after the magnification of the lens is increased; therefore, once the height difference of the workpiece is detected, all areas in the image cannot be simultaneously and clearly displayed. Meanwhile, the increase of the magnification of the lens can reduce the measurement range of the workpiece to be detected, so that when the size of the workpiece to be detected is larger, the measurement microscope cannot completely display the complete image of the workpiece at one time; the workpiece is moved transversely, so that the problem of image blurring is caused by the height deviation of different measuring points, and the image needs to be focused again after the measuring points are changed.

For the workpieces with height difference on the surface, the current measuring method is to measure the local positions of the workpiece at different heights by using a measuring microscope for many times, realize focusing by manually or electrically adjusting the height of a lens during each measurement, and finally synthesize the images of the local positions to obtain a complete measuring image; and during each focusing, measuring the Z-axis position of the lens through the grating ruler, and calculating by matching with the focal length of the lens, thereby obtaining the height information of the measuring point. However, in this method, focusing is performed by adjusting the height of the lens, and the lens needs about 3-5 s of lifting time each time the lens is raised, so that the measurement time of the method for a single measurement point needs about 10 seconds. When the workpieces in the measuring range are at different height positions, the measuring microscope also needs to adjust the height of the lens for multiple times in the same measuring range, so that the different height positions are respectively focused, and the overall measuring efficiency of the detected workpieces is further reduced; when the heights of the workpieces in the measuring ranges are different, corresponding focusing points need to be manually selected, so that the measuring efficiency is further reduced; the obtained picture also has a fuzzy position with part not selected, and the imaging effect of the measuring microscope is reduced.

In addition, in order to ensure the efficiency of measuring the sample, the current measuring microscope can enlarge the clear part obtaining range of the image by reducing the definition standard of the image when acquiring the image, so that the measuring microscope can obtain a complete two-dimensional picture of the sample by only a few pictures. This results in a serious decrease in the sharpness of the composite picture and a poor imaging effect. Meanwhile, the reduction of the image definition can cause that part of the workpiece surface with a small height difference can be recorded as the same height when the measuring microscope acquires the height information, so that the detection precision of the workpiece is reduced, and the model accuracy in the subsequent three-dimensional modeling is reduced.

Therefore, the existing measuring microscope has the problems of low measuring efficiency and poor imaging effect.

Disclosure of Invention

The invention aims to provide a super-depth-of-field microscopic rapid measuring device and a measuring method. The method has the characteristics of high measurement efficiency and good imaging effect.

The technical scheme of the invention is as follows: a microscopic rapid measuring device with ultra field depth comprises a measuring frame, wherein an optical assembly is connected to the measuring frame, and a movable measuring platform is arranged below the optical assembly; the optical assembly is provided with a zoom lens.

In the ultra-depth-of-field microscopic rapid measuring device, the optical assembly comprises a camera, a zoom lens, a main lens and an objective lens which are sequentially connected, and the zoom lens is a liquid lens or a motorized zoom lens.

In the rapid measuring device for the ultra-field-depth microscope, the lower end of the movable measuring platform is connected with the measuring frame through the damping workbench, and the bottom of the measuring frame is provided with the cushion layer.

In the ultra-depth-of-field microscopic rapid measuring device, the measuring frame is connected with the damping workbench through the marble bottom plate, and the cushion layer is arranged at the bottom of the marble bottom plate.

In the above ultra-depth-of-field microscopic rapid measuring apparatus, an illumination light source is disposed at one side of the optical component, the illumination light source is a halogen lamp with a power of 100W or more, and illumination light of the halogen lamp is annular light or point light source coaxial light.

The measuring method based on the ultra-depth-of-field microscopic rapid measuring device comprises the following steps of:

A. placing a sample on a mobile measuring platform below the optical assembly, and enabling the range to be measured of the sample to be located in the display center of the optical assembly;

B. sequentially changing the focusing focal length of the zoom lens according to a plurality of preset parameter values, and enabling the optical assembly to obtain a picture of a range to be measured after zooming each time, so as to obtain a plurality of pictures of the range to be measured under different focal lengths, thereby obtaining a picture A;

C. selecting a clear part in each picture A, and then synthesizing the clear parts in all the pictures A to obtain a complete clear picture in a range to be detected, so as to obtain a picture B;

D. sequentially changing the range to be measured of the sample by moving the measuring platform, and re-obtaining a complete clear picture of the range to be measured according to the step B and the step C after the range to be measured is changed every time, so as to obtain a plurality of complete clear pictures of different ranges to be measured, and obtain a picture C;

E. synthesizing the picture B and the picture C to obtain a two-dimensional picture of the sample;

F. and E, obtaining a three-dimensional model of the sample according to the two-dimensional picture of the sample in the step E.

In the foregoing measurement method, in the step B, when each picture a is obtained, the height value of the picture is recorded according to the parameter value of the current zoom lens; when the clear parts in the step C are synthesized, displaying the clear parts by corresponding gray value pairs according to the height values of the pictures corresponding to the clear parts to obtain a D gray image; e, synthesizing the D gray level images in different ranges to be detected to obtain an E gray level image; and F, obtaining the height information of the sample at different positions according to the gray value of the E gray image, and stretching the E gray image on the basis of the height information to obtain a three-dimensional model of the sample.

In the foregoing measurement method, the height value of the picture in step B is calculated according to the parameter value of the zoom lens and the conversion function, and the obtaining manner of the conversion function includes the following steps:

B1. taking the surfaces to be tested of the test samples at different heights as standard planes, and enabling the zoom lens to move the optical assembly in the vertical direction to focus the test samples on different standard planes in a reference state; simultaneously, recording height information of the optical assembly at different focusing positions by using a grating ruler to obtain height information H;

B2. returning the optical assembly to an initial position, and then sequentially adjusting the parameter values of the zoom lens to enable the optical assembly to focus on standard planes with different heights, and simultaneously recording the parameter values V of the zoom lens in different focusing states;

B3. and fitting the recorded height information H and the parameter value V to obtain a conversion function of H ═ f (V).

In the foregoing measurement method, the zoom lens is a motorized zoom lens, the parameter value of the motorized zoom lens is a rotation angle value, and when the rotation angle value in step B1 is 0 °, the zoom lens is in a reference state.

Compared with the prior art, the invention has the following characteristics:

(1) the invention selects the power-driven zoom lens or the liquid lens as the zoom lens in the optical component, and on the basis, the zoom lens directly obtains the workpiece images in the range to be measured under different focal lengths through the preset parameter values, so that the invention does not need to focus the appointed position in the range to be measured by lifting the lens, but respectively obtains the clear images with different heights in the range to be measured by depending on the images obtained under different focal lengths, thereby greatly improving the definition range and the imaging effect of the images compared with the prior method; the zooming speed of the liquid lens can reach microsecond level, and the zooming speed of the motorized zoom lens can reach millisecond level, so that more than 100 measurement pictures in the same range to be measured can be obtained within 0.5 second, and the measurement efficiency of the workpiece can be greatly improved compared with the conventional mode;

(2) on the basis, the method for acquiring the height value of the clear part in the picture is further optimized, so that the height information of different positions in the picture can be directly converted through the parameter value of the zoom lens, and further the height measurement of the workpiece and the subsequent three-dimensional modeling are realized; meanwhile, the height information of the workpiece is recorded through the gray value, the processing efficiency of the software on subsequent pictures and the speed of the software during three-mode modeling can be effectively improved, so that the method can be completed within 1 second when the two-dimensional picture of the sample is synthesized, and the three-mode modeling is completed within 2 seconds; the invention can obtain more images in one detection process, thereby improving the final imaging effect;

(3) the mounting structure of the mobile measuring platform is optimized, the damping effect on the workpiece can be effectively improved, the problem of blurring of the acquired image due to vibration can be avoided when the image is acquired by the optical assembly, the problem that the image cannot be normally screened due to the definition problem when the image is synthesized by software is further avoided, the stability is good, and the acquisition and height detection of the workpiece image can be realized under the condition of 15-800 times of amplification;

therefore, the invention has the characteristics of high measurement efficiency and good imaging effect.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a picture of the range to be measured at any focal length in step B;

FIG. 3 is a clear picture of the sample in step C within a range to be measured;

FIG. 4 is a gray scale of the sample in step C within a range to be measured;

FIG. 5 is a three-dimensional model of a sample extracted according to the present invention.

The labels in the figures are: the method comprises the following steps of 1-a measuring frame, 2-a movable measuring platform, 3-a zoom lens, 4-a camera, 5-a main lens, 6-an objective lens, 7-a damping workbench and 8-an illumination light source.

Detailed Description

The invention is further illustrated by the following figures and examples, which are not to be construed as limiting the invention.