阅读说明：本技术 划线装置以及控制方法 (Scribing device and control method ) 是由 井村淳史 于 2020-03-10 设计创作，主要内容包括：技术问题：使划线装置的控制高速化。解决方案：划线装置(100)具备：切割部件(37)、第一移动机构(11)、第二移动机构(5)、第三移动机构(33)、转动机构(35)、第一控制装置(6)以及第二控制装置(7)。切割部件(37)在基板上形成划分线。第一移动机构(11)使基板沿Y方向移动。第二移动机构(5)使切割部件(37)沿X方向移动。第三移动机构(33)使切割部件(37)沿Z方向移动。转动机构(35)使切割部件(37)绕Z轴转动。第一控制装置(6)计算切割部件(37)的预定加工轨迹,并基于预定加工轨迹控制第一移动机构(11)。第二控制装置(7)基于预定加工轨迹控制第二移动机构(5)、第三移动机构(33)、以及转动机构(35)。(The technical problem is as follows: the control of the scribing device is speeded up. The solution is as follows: a scribing device (100) is provided with: a cutting component (37), a first moving mechanism (11), a second moving mechanism (5), a third moving mechanism (33), a rotating mechanism (35), a first control device (6) and a second control device (7). The cutting member (37) forms dividing lines on the substrate. The first moving mechanism (11) moves the substrate in the Y direction. The second moving mechanism (5) moves the cutting member (37) in the X direction. The third moving mechanism (33) moves the cutting member (37) in the Z direction. The rotating mechanism (35) rotates the cutting member (37) about the Z axis. The first control device (6) calculates a predetermined processing trajectory of the cutting member (37), and controls the first moving mechanism (11) based on the predetermined processing trajectory. The second control device (7) controls the second movement mechanism (5), the third movement mechanism (33), and the rotation mechanism (35) based on a predetermined processing trajectory.)

1. A scribing device is provided with:

a cutting member that forms dividing lines on a substrate to be processed;

a first moving mechanism that moves the substrate in a first direction;

a second moving mechanism that moves the cutting member in a second direction perpendicular to the first direction;

a third moving mechanism that moves the cutting member in a third direction perpendicular to the first direction and the second direction;

a rotating mechanism that rotates the cutting member about an axis extending in the third direction;

a first control device that calculates a predetermined processing trajectory of the cutting member and controls the first moving mechanism based on the predetermined processing trajectory; and

And a second control device that controls the second moving mechanism, the third moving mechanism, and the rotating mechanism based on the predetermined processing trajectory.

2. The scribing arrangement according to claim 1,

the first control device calculates the predetermined processing trajectory as a position and a rotation angle of the cutting member on a virtual coordinate having at least a first virtual axis corresponding to the first direction and a second virtual axis corresponding to the second direction.

3. The scribing arrangement according to claim 2,

the first control device calculates an actual position of the cutting member in the first direction by adding an offset amount in the first direction between an origin of the virtual coordinate and an origin of the base plate to a coordinate value of the first virtual axis,

the second control device calculates an actual position of the cutting member in the second direction by adding a shift amount in the second direction between an origin of the virtual coordinate and an origin of the substrate to a coordinate value of the second virtual axis, and sets a rotation angle of the cutting member in the virtual coordinate as an actual rotation angle.

4. A control method for a scribing apparatus, the scribing apparatus comprising:

a cutting member that forms dividing lines on a substrate to be processed; a first moving mechanism that moves the substrate in a first direction; a second moving mechanism that moves the cutting member in a second direction perpendicular to the first direction; a third moving mechanism that moves the cutting member in a third direction perpendicular to the first direction and the second direction; a rotating mechanism that rotates the cutting member about an axis extending in the third direction; a first control device; and a second control device for controlling the operation of the motor,

wherein the control method comprises the following steps:

the first control device calculates a preset processing track of the cutting component;

the first control device controls the first moving mechanism based on the predetermined processing track;

the second control device controls the second moving mechanism, the third moving mechanism, and the rotating mechanism based on the predetermined processing trajectory.

Technical Field

The present invention relates to a scribing apparatus for processing a substrate such as a glass substrate and a method of controlling the scribing apparatus.

Background

Scribing apparatuses for cutting out glass substrates are currently known. For example, a device is known in which a fixed blade such as a diamond pen is moved relative to a substrate to form dividing lines on the substrate (for example, patent document 1).

Disclosure of Invention

Technical problem to be solved

In the conventional apparatus for moving the fixed blade relative to the substrate, no control is made as to the orientation of the fixed blade when the dividing line is formed. However, in recent years, in order to perform more advanced machining, a study has been made on controlling not only the movement of the fixed blade but also the orientation.

When controlling both the movement and the orientation of the fixed blade, the amount of calculation required for controlling the scribing device (particularly, the fixed blade) increases, and there is a possibility that the control of the high-speed scribing device cannot be performed. As a result, the dividing line may not be formed appropriately on the substrate.

The invention aims to provide a scribing device for controlling the movement and the direction of a fixed blade, which can speed up the control of the scribing device.

(II) technical scheme

A plurality of ways are described below as means for solving the problem. These modes can be arbitrarily combined as required.

A scribing device according to one aspect of the present invention includes: the cutting device comprises a cutting component, a first moving mechanism, a second moving mechanism, a third moving mechanism, a rotating mechanism, a first control device and a second control device. The cutting member forms a dividing line on a substrate to be processed. The first moving mechanism moves the substrate in a first direction. The second moving mechanism moves the cutting member in a second direction. The second direction is a direction perpendicular to the first direction. The third moving mechanism moves the cutting member in a third direction. The third direction is a direction perpendicular to the first direction and the second direction. The rotation mechanism rotates the cutting member about an axis extending in the third direction.

The first control device calculates a predetermined processing trajectory of the cutting member and controls the first moving mechanism based on the processing trajectory. The second control device controls the second moving mechanism, the third moving mechanism, and the rotating mechanism based on a predetermined processing trajectory.

In the above scribing device, the first control device performs calculation of the predetermined processing trajectory and control of the first moving mechanism, and the second control device performs control of the second moving mechanism, the third moving mechanism, and the rotating mechanism based on the predetermined processing trajectory. In this way, by distributing the control of the scribing device to a plurality of control devices, the calculation load of each control device can be reduced, and therefore the scribing device can be controlled at high speed.

The first control means may calculate the predetermined processing trajectory as the position and the rotation angle of the cutting member in the imaginary coordinates. The virtual coordinate is a coordinate system having at least a first virtual axis corresponding to the first direction and a second virtual axis corresponding to the second direction.

This enables the actual position and the rotation angle of the cutting member to be calculated at a higher speed.

The first control device adds a deviation amount in the first direction between an origin of the virtual coordinate and an origin of the base plate to the coordinate value of the first virtual axis, and calculates an actual position of the cutting member in the first direction. The second control device calculates an actual position of the cutting member in the second direction by adding a shift amount in the second direction between the origin of the virtual coordinate and the origin of the base plate to the coordinate value of the second virtual axis. Further, the second control means may take the rotation angle of the cutting member in the imaginary coordinate as the actual rotation angle.

Thus, the first control device and the second control device can calculate the control amount of the mechanism controlled by the first control device and the second control device at a higher speed.

A control method of another aspect of the present invention is a control method of a scribing apparatus. The scribing device is provided with: the cutting device comprises a cutting component, a first moving mechanism, a second moving mechanism, a third moving mechanism, a rotating mechanism, a first control device and a second control device. The cutting member forms a dividing line on a substrate to be processed. The first moving mechanism moves the substrate in a first direction. The second moving mechanism moves the cutting member in a second direction. The third moving mechanism moves the cutting member in a third direction. The rotation mechanism rotates the cutting member about an axis extending in the third direction. The control method of the control device comprises the following steps:

the first control device calculates a predetermined processing locus of the cutting member.

The first control device controls the first moving mechanism based on a predetermined processing locus.

The second control device controls the second moving mechanism, the third moving mechanism, and the rotating mechanism based on a predetermined processing trajectory.

In the above-described method for controlling a scribing apparatus, the first control device calculates a predetermined processing trajectory and controls the first moving mechanism, and the second control device controls the second moving mechanism, the third moving mechanism, and the rotating mechanism based on the predetermined processing trajectory. In this way, by distributing the control of the scribing device to a plurality of control devices, the calculation load of each control device can be reduced, and therefore the scribing device can be controlled at high speed.

(III) advantageous effects

The control of the scribing device is distributed to a plurality of control devices, so that the calculation load of each control device is reduced, and the scribing device can be controlled at high speed.

Drawings

Fig. 1 is a perspective view showing a scribing apparatus according to a first embodiment.

Fig. 2 is a diagram showing a detailed configuration of the head.

Fig. 3 is a diagram showing a control structure of the scribing apparatus.

Fig. 4 is a flowchart showing the overall operation of the scribing apparatus.

Fig. 5 is a flowchart showing a scribing line forming operation of the scribing apparatus.

Fig. 6 is a diagram showing another embodiment of the scribing device.

Description of the reference numerals

100. 100' -a scoring device; 1-a workbench; 11-a first movement mechanism; 2-a base; 3-a head; 31-a body; 33-a third movement mechanism; 34-a stationary part; 35-a rotating mechanism; 36-a coupler portion; 37-a cutting member; 37 a-a holding member; 37 b-stationary blade; 4-a bridging member; 5-a second moving mechanism; 6-a first control device; 7-a second control device; 8-a switching hub; 9-upper computer; o, O' -origin; theta, theta' -rotation angle; 21-fourth movement mechanism.

Detailed Description

1. First embodiment

(1) Marking device

The scribing device 100 according to the first embodiment will be described below with reference to fig. 1. Fig. 1 is a perspective view showing a scribing apparatus according to a first embodiment. The scribing apparatus 100 is an apparatus for forming a dividing line on a substrate such as a glass substrate by using a fixed blade such as a diamond pen. The scribing device 100 mainly includes a table 1 and a head 3.

The table 1 is a member on which a substrate to be processed forming a dividing line is placed. The table 1 is movable in the Y direction (fig. 1) (an example of the first direction) by a first moving mechanism 11. The first moving mechanism 11 is, for example, a linear motor extending in the Y direction. Further, the first moving mechanism 11 is provided on the base 2.

The head 3 is provided on the bridging member 4 (fig. 1) so as to be slidable in the X direction (fig. 1) (an example of the second direction). The head 3 can be moved in the X direction by a second moving mechanism 5 provided in the bridge member 4. The second moving mechanism 5 is, for example, a linear motor extending in the X direction.

(2) Head part

The head 3 described above will be described more specifically below with reference to fig. 2. Fig. 2 is a diagram showing a detailed configuration of the head. The head 3 includes a main body 31, a third moving mechanism 33, a rotating mechanism 35, and a cutting member 37.

The main body 31 is a frame forming the main body of the head 3. The third moving mechanism 33 is a linear motor arranged in parallel along the width direction (X direction) of the main body 31 and extending in the Z direction. A fixing member 34 is fixed to the third moving mechanism 33. That is, the fixing member 34 can be moved in the Z direction (an example of the third direction) by the third moving mechanism 33.

The rotation mechanism 35 is a motor fixed to the upper portion of the coupling portion 36, and the drive shaft thereof is inserted into an angular bearing (fixed to the upper portion of the coupling portion 36). The coupling portion 36 couples a drive shaft of the turning mechanism 35 and a driven shaft of a holding member 37a (described later) via a coupling, and the holding member 37a is inserted into and fixed to a corner bearing at a lower portion of the coupling portion 36.

With the above configuration, the coupling portion 36 can firmly couple the rotating mechanism 35 and the driven shaft of the holding member 37 a. That is, the coupling portion 36 of the present embodiment can couple the drive shaft and the driven shaft without "play". This allows the rotation of the drive shaft of the turning mechanism 35 to be transmitted to the holding member 37a without loss or delay.

The cutter member 37 includes a holding member 37a and a fixed blade 37 b. The holding member 37a holds the fixed blade 37 b. As described above, the holding member 37a is coupled to the drive shaft of the turning mechanism 35 via the coupling portion 36. The holding member 37a is rotated in accordance with the rotation of the drive shaft of the rotating mechanism 35, so that the fixed blade 37b can be rotated about the Z axis.

The fixed blade 37b is a blade for forming a dividing line on a substrate to be processed (a substrate on the table 1). The fixed blade 37b is a member having a diamond pen at the tip, for example.

In the head 3 having the above-described configuration, the third moving mechanism 33 can move the cutting member 37 (fixed blade 37b) in the Z direction (height direction) by moving the fixing member 34 in the Z direction. Further, the holding member 37a is coupled to the drive shaft of the rotating mechanism 35 via the coupling portion 36, so that the rotating mechanism 35 can rotate the fixed blade 37b held by the holding member 37a about the Z axis.

(3) Control structure

Next, a control structure of the scribing device 100 according to the first embodiment will be described with reference to fig. 3. Fig. 3 is a diagram showing a control structure of the scribing apparatus. The control structure of the scribing apparatus 100 includes a first control device 6, a second control device 7, and a switching hub 8.

The first control device 6 is a computer system having a CPU, a storage device (RAM, ROM, etc.), various input/output interfaces, and the like. The first control device 6 is a system including, for example, a PLC and a motor controller. The first control device 6 is connected to the first moving mechanism 11. That is, the first controller 6 can control the Y-direction movement of the table 1 (substrate) by controlling the first movement mechanism 11.

The second control device 7 is a computer system having a CPU, a storage device (RAM, ROM, etc.), various input/output interfaces, and the like. The second control device 7 is a system including, for example, a PLC and a motor controller. The second control device 7 is connected to the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35. That is, the second controller 7 can control the X-direction and Z-direction movements of the cutter 37 (fixed blade 37b) and the rotation of the cutter 37 (rotation angle of the fixed blade 37b) by controlling the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35.

The switching hub 8 connects the first control device 6 and the second control device 7, and relays (mediates) communication (transmission/reception data) between the first control device 6 and the second control device 7.

As shown in fig. 3, the switching hub 8 is connected to an upper computer 9. The upper computer 9 is a computer system having a CPU, a storage device (RAM, ROM, SSD, hard disk, etc.), various interfaces, and the like, and executes various settings of the scribing device 100, settings of a shape of a dividing line to be formed on a substrate as a processing object, and the like. The upper computer 9 is, for example, a personal computer operated by a user.

In the above-described control configuration, the first control device 6 executes not only the control of the first moving mechanism 11 but also various controls in the scribing device 100. Specifically, the first control device 6 calculates the position and rotation angle of the cutting member 37 on which the dividing line is being formed for each control cycle of the substrate, based on data (e.g., CAD data) indicating the shape of the dividing line to be formed. Hereinafter, the position and the rotation angle of the cutting member 37 per control cycle will be referred to as a "predetermined processing path". In addition, the first control device 6 is responsible for input and output of data from sensors and the like.

On the other hand, the second control device 7 performs only simple calculations related to the control of the second moving mechanism 5, the third moving mechanism 33, and the turning mechanism 35. This is because the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35 need to be controlled at high speed, and the second control device 7 needs to use a calculation load to perform these controls.

In this way, by distributing the control of the scribing apparatus 100 to the plurality of control apparatuses (the first control apparatus 6 and the second control apparatus 7), the calculation load of each control apparatus can be reduced, and thus the scribing apparatus 100 can be controlled at high speed.

(4) Operation of the scribing device

(4-1) Overall action

The operation of the scribing apparatus 100 according to the present embodiment will be described below with reference to fig. 4. Fig. 4 is a flowchart showing the overall operation of the scribing apparatus. The operation of the scribing apparatus 100 described below is realized by a program stored in a storage device of the first control device 6 and the second control device 7.

In order to form dividing lines on the substrate, first, in step S1, the substrate to be processed is fixed on the table 1. The fixing of the substrate on the table 1 can be achieved by, for example, suction fixing.

After the substrate is fixed to the table 1, in step S2, the first controller 6 and the second controller 7 control the first moving mechanism 11, the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35 to move the cutting member 37 to the original position of the cutting member 37.

Then, in step S3, the first controller 6 and the second controller 7 move the cutting member 37 to the origin position of the substrate. The fixed position of the substrate on the table 1 (that is, the origin position of the substrate on the table 1) is not fixed for the reason that the sizes of the substrates to be processed are different from each other. Therefore, in the present embodiment, the first controller 6 and the second controller 7 specify the origin position of the substrate based on whether or not the substrate is detected by a sensor (not shown). The first controller 6 and the second controller 7 preliminarily store the offset between the origin position of the cutting member 37 in step S2 and the origin position of the substrate determined in step S3.

Next, in step S4, forming dividing lines to the substrate is performed. In step S4, the first control device 6 controls the calculation of the movement amount and rotation angle (i.e., a predetermined processing trajectory) of the cutting member 37 when forming the dividing line to the substrate, and the movement of the table 1 in the Y direction by the first movement mechanism 11.

On the other hand, the second control device 7 controls the movement of the head 3 in the X direction by the second moving mechanism 5, the movement of the cutting member 37 in the Z direction (height direction) by the third moving mechanism 33, and the rotation of the cutting member 37 by the rotating mechanism 35. The operation of the first control device 6 and the second control device 7 in step S4 will be described in detail later.

After forming the dividing lines to the substrate, in step S5, the scribing apparatus 100 performs the end processing after forming the dividing lines. Specifically, as the end processing, the operation of returning the cutting member 37 to the original position thereof and the operation of releasing the fixation of the substrate to the table 1 are executed.

(4-2) operation of the control device in forming the dividing line

The control of the first control device 6 and the second control device 7 when forming the dividing lines performed in step S4 described above will be described below with reference to fig. 5. Fig. 5 is a flowchart showing a scribing line forming operation of the scribing apparatus.

For example, when receiving data indicating dividing lines to be formed to the substrate from the upper computer 9 or the like, the first control device 6 calculates a predetermined processing trajectory from the received data in step S11. Specifically, the first control device 6 calculates the position (X ', Y ') and the rotation angle θ ' of the cutting member 37 (fixed blade 37b) on the virtual coordinates based on the received data. The virtual coordinates are plane coordinates defined by a first virtual axis (referred to as Y 'axis) corresponding to the Y direction of the real space and a second virtual axis (referred to as X' axis) corresponding to the X direction of the real space. Further, in the virtual coordinates, a third virtual axis (Z' axis) corresponding to the Z direction (height direction) of the real space may be defined.

In the present embodiment, the first control device 6 outputs the position (X ', Y ') and the rotation angle θ ' for each control cycle when forming the dividing line as the predetermined processing trajectory. That is, the first control device 6 calculates a predetermined processing trajectory for linearly moving the cutting member 37 every control period (for example, 1 ms). As a result, the first control device 6 calculates a predetermined processing trajectory of the dividing line in the polygonal representation curve.

Therefore, the first control device 6 calculates the position (X ', Y ') and the rotation angle θ ' of the virtual coordinate of the cutting member 37 so that the movement amount and the rotation amount of the cutting member 37 per control cycle (per cycle performed by the control command) are as small as possible. For example, the positions (X ', Y ') and the rotation angle θ ' are calculated so that the movement amount per control cycle of the cutting member 37 is in the order of μm.

Thus, the first control device 6 can calculate the predetermined machining locus that can more faithfully reproduce the dividing line of an arbitrary shape. In particular, by reducing the amount of movement per control cycle and expressing the curve with polygons having more vertices, the dividing line of the curve shape can be reproduced more faithfully.

Further, by reducing the amount of movement and the amount of rotation per control cycle, the first controller 6 and the second controller 7 can easily perform feedback control of the first movement mechanism 11, the second movement mechanism 5, the third movement mechanism 33, and the rotation mechanism 35. In particular, if the first moving mechanism 11 excessively moves the table 1 having a weight during one control cycle, the position of the table 1 cannot be controlled with high accuracy even if the feedback control is performed. Therefore, by reducing the amount of movement of the table 1 or the like per control cycle, the effect of the feedback control can be increased, and the position of the table 1 or the like can be controlled with high accuracy.

The first control device 6 continues to calculate the predetermined machining trajectory in step S11 while executing the following operation to be described below with respect to the first movement mechanism 11, and outputs the predetermined machining trajectory (the X 'coordinate value and the rotation angle θ' of the predetermined machining trajectory) calculated at a predetermined timing to the second control device 7.

When the first control device 6 starts to calculate the predetermined machining locus and at least a part of the predetermined machining locus is calculated, the first control device 6 commands the second control device 7 to control the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35 to follow the position and the rotation angle of the cutting member 37 on the virtual coordinates in step S12. The operation in which the first movement mechanism 11, the second movement mechanism 5, the third movement mechanism 33, and the rotation mechanism 35 follow the position and the rotation angle of the cutting member 37 on the virtual coordinates is hereinafter referred to as "follow-up operation".

When the follow-up operation start instruction in step S12 is output, the first control device 6 transmits other setting conditions and the like to the second control device 7.

When the first control device 6 outputs the follow-up operation start instruction to the second control device 7 in step S12, the control of the position and the rotation angle of the cutting member 37 is started in step S13. Specifically, the first control device 6 and the second control device 7 execute the following control.

First, the position (X ', Y ') and the rotation angle θ ' of the cutting member 37 on the virtual coordinates are converted into the position (X, Y) and the rotation angle θ of the cutting member 37 in the real space.

In step S131, the first control device 6 can calculate the position of the cutting member 37 in the Y direction in the real space as Y ' + Δ Y by adding the offset (set to Δ Y) between the origin O ' of the virtual coordinate in the Y direction and the origin O of the substrate to the Y ' coordinate value of the predetermined processing trajectory in the current control cycle.

In step S132, the first control device 6 outputs a control amount to the first movement mechanism 11 so that the position of the cutting member 37 in the Y direction with respect to the substrate placed on the stage 1 becomes Y' + Δ Y.

On the other hand, in step S133, the second control device 7 can calculate the position of the cutting member 37 in the X direction in the real space as X ' + Δ X by adding the offset (set to Δ X) between the origin O ' of the virtual coordinate in the X direction and the origin O of the substrate to the X ' coordinate value of the predetermined processing trajectory in the current control cycle. The second control device 7 directly sets the rotation angle θ 'of the predetermined machining trajectory in the current control cycle as the rotation angle θ in the real space (that is, θ ═ θ'). The position of the cutting member 37 in the Z direction in the real space is set to a position slightly advanced downward from the origin in the Z direction determined in the above steps S2 and S3. This position can be determined more appropriately, for example, according to how much force the fixed blade 37b is brought into contact with the substrate surface.

In step S134, the second control device 7 outputs a control amount to the second movement mechanism 5, the control amount being such that the position of the cutting member 37 in the X direction with respect to the substrate placed on the stage 1 becomes X' + Δ X. Further, a control amount is output to the turning mechanism 35, and the control amount is such that the rotation angle θ of the cutting member 37 becomes the rotation angle θ'. When the cutting member 37 moves in the Z direction, a corresponding control amount is output to the third movement mechanism 33.

After the control of the second movement mechanism 5, the third movement mechanism 33, and the rotation mechanism 35 in the current control cycle is completed, in step S135, the second control device 7 notifies the first control device 6 that the control of the mechanisms is completed.

The above-described step S13 is repeatedly executed for all the positions (X ', Y ') and the rotation angle θ ' calculated as the predetermined machining trajectory (steps S131 to S135).

As described above, in the scribing apparatus 100 according to the present embodiment, the first control device 6 calculates the predetermined processing trajectory and controls the first moving mechanism 11, and the second control device controls the second moving mechanism 5, the third moving mechanism 33, and the turning mechanism 35 based on the predetermined processing trajectory. In this way, by distributing the control of the scribing apparatus 100 to a plurality of control apparatuses, the calculation load of each control apparatus can be reduced, and therefore the scribing apparatus 100 can be controlled at high speed.

By controlling the turning mechanism 35, the second moving mechanism 5, and the third moving mechanism 33, which require particularly high-speed and high-precision control, by the second control device 7, the position (X, Y) and the rotation angle θ of the cutting member 37 can be controlled without causing inappropriate control such as control delay. As a result, the dividing line having an arbitrary shape can be appropriately formed on the substrate.

In the present embodiment, the first control device 6 calculates the actual position of the cutting member in the Y direction by adding the offset in the Y direction between the origin O 'of the virtual coordinates and the origin O of the substrate to the coordinate values of the first virtual axis (Y' axis). The second controller 7 calculates the actual position of the cutting member 37 in the X direction by adding the offset in the X direction between the origin O 'of the virtual coordinates and the origin O of the substrate to the coordinate values of the second virtual axis (X' axis).

By calculating the position and the rotation angle of the cutting member 37 as the position and the rotation angle on the virtual coordinates in this way, the first control device 6 and the second control device 7 can calculate the control amount of the mechanism for self-control by simple calculation such as addition. As a result, the first controller 6 and the second controller 7 can control the position and the rotation angle of the cutter 37 at a higher speed.

(5) Common matters of the embodiments

The first embodiment described above has the following configuration and functions in common.

The scribing apparatus (for example, the scribing apparatus 100) includes: a cutting member (e.g., the cutting member 37), a first moving mechanism (e.g., the first moving mechanism 11), a second moving mechanism (e.g., the second moving mechanism 5), a third moving mechanism (e.g., the third moving mechanism 33), a rotating mechanism (e.g., the rotating mechanism 35), a first control device (e.g., the first control device 6), a second control device (e.g., the second control device 7).

The cutting member forms a dividing line on a substrate to be processed. The first moving mechanism moves the substrate in a first direction (e.g., Y direction). The second moving mechanism moves the cutting member in a second direction (e.g., X direction). The third moving mechanism moves the cutting member in a third direction (e.g., Z direction). The rotation mechanism rotates the cutting member about an axis (e.g., Z-axis) extending in the third direction.

The first control device calculates a predetermined processing trajectory of the cutting member and controls the first moving mechanism based on the predetermined processing trajectory. The second control device controls the second moving mechanism, the third moving mechanism, and the rotating mechanism based on a predetermined processing trajectory.

In the scribing apparatus, a first control device calculates a predetermined processing trajectory and controls a first moving mechanism, and a second control device controls a second moving mechanism, a third moving mechanism, and a rotating mechanism based on the predetermined processing trajectory. In this way, by distributing the control of the scribing device to a plurality of control devices, the calculation load of each control device can be reduced, and therefore the scribing device can be controlled at high speed.

2. Other embodiments

While one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention. In particular, the plurality of embodiments and modifications described in the present specification can be combined as desired.

The control operations shown in the flowcharts of fig. 4 and 5 may be performed in any manner as long as the contents of the processes in the steps and the order of execution of the steps are not deviated from the gist of the present invention.

(A) The scribing device 100 may include a plurality of heads 3 (cutting members 37). In this case, a second control device 7 is provided on each head 3. The predetermined processing trajectories calculated by the first control device 6 are output to all the second control devices 7, and each of the second control devices 7 calculates the position and the rotation angle of the self-controlled cutting member 37 in the real space by adding the offset between the origin of the self-controlled cutting member 37 and the origin O of the substrate to the predetermined processing trajectories. This enables a plurality of small pieces having the same shape to be cut out from one substrate.

(B) As shown in fig. 6, the bridge member 4 that can slide the head 3 in the X direction can be moved in the Y direction by a fourth moving mechanism 21 provided on the table 1 (a scribing apparatus 100' of a gantry drive system). The fourth moving mechanism 21 is, for example, a linear motor extending in the Y direction. Fig. 6 is a diagram showing another embodiment of the scribing device.

Industrial applicability

The present invention can be widely applied to a scribing apparatus for forming dividing lines on a substrate.