阅读说明：本技术 加液装置及研磨设备 (Liquid feeding device and grinding equipment ) 是由 陈家宝 于 2021-07-26 设计创作，主要内容包括：本申请实施例提供一种加液装置及研磨设备,涉及半导体技术领域,该加液装置包括用于盛放研磨液的筒体、出液管以及控制器；所述筒体上设置有出液口,所述出液管可拆卸连接在出液口上,且所述出液管上设置有电磁阀；所述控制器与所述电磁阀信号连接,用于控制所述电磁阀工作。本申请实施例通过在研磨设备上设置加液装置,利用电磁阀和控制器的设置,可以使得该加液装置自动向研磨设备的研磨盘提供研磨液,与相关技术中手动向研磨设备的研磨盘提供研磨液的技术方案相比,一方面可以提高研磨效率,另一方面可以节约研磨液的用量,降低生产成本。(The embodiment of the application provides a liquid adding device and grinding equipment, and relates to the technical field of semiconductors, wherein the liquid adding device comprises a cylinder body for containing grinding liquid, a liquid outlet pipe and a controller; the barrel is provided with a liquid outlet, the liquid outlet pipe is detachably connected to the liquid outlet, and the liquid outlet pipe is provided with an electromagnetic valve; the controller is in signal connection with the electromagnetic valve and is used for controlling the electromagnetic valve to work. This application embodiment utilizes the setting of solenoid valve and controller through setting up the liquid feeding device on the grinding apparatus, can make this liquid feeding device provide the lapping liquid to the lapping disc of grinding apparatus automatically, compares with the technical scheme that the manual lapping liquid that provides to the lapping disc of grinding apparatus among the correlation technique, can improve grinding efficiency on the one hand, and on the other hand can practice thrift the quantity of lapping liquid, reduction in production cost.)

1. The liquid adding device is characterized by being used for providing grinding fluid for a grinding disc of grinding equipment and comprising a cylinder body for containing the grinding fluid, a liquid outlet pipe and a controller;

the barrel is provided with a liquid outlet, the liquid outlet pipe is detachably connected to the liquid outlet, and the liquid outlet pipe is provided with an electromagnetic valve;

the controller is in signal connection with the electromagnetic valve and is used for controlling the electromagnetic valve to work.

2. The liquid adding device according to claim 1, wherein a first internal thread is provided on the inner wall of said liquid outlet, a first external thread is provided on the outer wall of said liquid outlet pipe, and said liquid outlet pipe is screwed to said liquid outlet.

3. The filling apparatus according to claim 2, further comprising a shield member, said shield member being drawably mounted in said barrel, said shield member being adapted to open or shield said liquid outlet.

4. The liquid adding device according to claim 3, characterized in that a drawing opening is arranged on the side wall of the cylinder;

the shielding piece comprises a shielding plate and a drawing rod connected with the shielding plate, one end of the drawing rod, which deviates from the shielding plate, penetrates through the drawing opening and extends into the barrel, and the drawing rod is connected with the drawing opening in a sealing mode.

5. The filling device according to any one of claims 1 to 4, wherein a filling opening is provided on the barrel, and a cover body is detachably connected to the filling opening.

6. The filling apparatus according to claim 5, wherein a handle is provided on said cover.

7. The filling adding device according to any one of claims 1 to 4, wherein a detachably connected filter screen is provided in the cylinder.

8. The liquid adding device according to any one of claims 1 to 4, further comprising an agitation assembly, said agitation assembly comprising a rotating shaft, a driver, and an agitation member;

the driver is arranged on the cylinder body, and the output end of the driver is connected with the rotating shaft;

the stirring piece is arranged on the rotating shaft and rotates along with the rotating shaft.

9. The liquid adding device according to claim 8, wherein said stirring member comprises a transmission mechanism, a stirring shaft and a stirring blade;

the transmission mechanism comprises a gear ring fixedly connected to the side wall of the barrel and a gear in meshing transmission with the gear ring;

one end of the stirring shaft is fixedly connected with a gear in the transmission mechanism, and the other end of the stirring shaft is rotatably connected with the rotating shaft;

the stirring blades are arranged on the stirring shaft.

10. The filling apparatus according to claim 9, further comprising a carrier ring fixedly attached to the sidewall of the barrel, wherein the toothed ring is fixedly attached to an upper surface of the carrier ring.

11. The charging device according to any one of claims 1 to 4, characterized in that it further comprises a mounting bracket, one end of said mounting bracket being connected to said barrel, the other end of said mounting bracket being adapted to be connected to a grinding apparatus.

12. The charging device according to claim 11, characterized in that said mounting bracket comprises a first telescopic mounting rod and a second mounting rod connected to said first mounting rod, said cylinder being fixedly connected to said second mounting rod;

the axis of the first mounting rod is perpendicular to the axis of the second mounting rod.

13. The device according to claim 12, wherein said first mounting rod comprises a first rod and a second rod sleeved on said first rod, said second rod being capable of moving up and down with respect to the axis of said first rod.

14. A grinding plant comprising a grinding mill and a charging device according to any one of claims 1 to 13, the mounting bracket of the charging device being fixedly attached to the grinding mill.

15. The grinding apparatus of claim 14, wherein a water outlet is provided on the grinder for providing washing water to a grinding pan of the grinder;

a first adjusting button is arranged on the grinder and used for adjusting the flow rate of the washing water;

and a second adjusting button is arranged on the grinding machine and used for adjusting the flow rate of the grinding liquid in the barrel.

Technical Field

The embodiment of the application relates to the technical field of grinding machines, in particular to a liquid adding device and grinding equipment.

Background

The semiconductor failure analysis is to confirm the failure phenomenon in the chip, analyze the failure mode and failure mechanism and determine the final failure reason by using various test analysis tools and analysis methods.

In order to perform failure analysis on a semiconductor structure, a failure analysis sample needs to be prepared, and in the related art, a surface to be ground of a wafer is usually placed on a grinding table of a grinding machine, then the wafer is pressed by hands, grinding fluid is added onto the grinding table, and the surface to be ground of the wafer is ground by utilizing mutual friction between the grinding fluid and the surface to be ground of the wafer until a required target layer appears, so as to obtain the failure analysis sample.

However, the above-mentioned grinding machine has a technical problem of low grinding efficiency.

Disclosure of Invention

The embodiment of the application provides a liquid feeding device and grinding equipment for conveniently add the lapping liquid, improve grinding equipment's efficiency.

A first aspect of embodiments of the present application provides a liquid adding device, which includes: the liquid adding device comprises a cylinder body for containing the grinding liquid, a liquid outlet pipe and a controller;

the barrel is provided with a liquid outlet, the liquid outlet pipe is detachably connected to the liquid outlet, and the liquid outlet pipe is provided with an electromagnetic valve;

the controller is in signal connection with the electromagnetic valve and is used for controlling the electromagnetic valve to work.

In some embodiments, a first internal thread is arranged on the inner wall of the liquid outlet, a first external thread is arranged on the outer wall of the liquid outlet pipe, and the liquid outlet pipe is connected to the liquid outlet in a threaded manner.

In some embodiments, the liquid outlet device further comprises a shield member which is installed in the barrel in a drawing mode and used for opening or shielding the liquid outlet.

In some embodiments, a drawing opening is arranged on the side wall of the barrel body;

the shielding piece comprises a shielding plate and a drawing rod connected with the shielding plate, one end of the drawing rod, which deviates from the shielding plate, penetrates through the drawing opening and extends into the barrel, and the drawing rod is connected with the drawing opening in a sealing mode.

In some embodiments, the barrel is provided with a filling opening, and the cover body is detachably connected to the filling opening.

In some embodiments, a handle is provided on the cover.

In some embodiments, a detachably connected filter screen is disposed within the barrel.

In some embodiments, further comprising a stirring assembly comprising a rotating shaft, a driver, and a stirring member;

the driver is arranged on the cylinder body, and the output end of the driver is connected with the rotating shaft;

the stirring piece is arranged on the rotating shaft and rotates along with the rotating shaft.

In some embodiments, the stirring member comprises a transmission mechanism, a stirring shaft and a stirring blade;

the transmission mechanism comprises a toothed ring fixedly connected to the side wall of the barrel and a gear in meshing transmission with the toothed ring, and teeth of the toothed ring are arranged on the upper surface of the toothed ring;

one end of the stirring shaft is fixedly connected with a gear in the transmission mechanism, and the other end of the stirring shaft is rotatably connected with the rotating shaft;

the stirring blades are arranged on the stirring shaft.

In some embodiments, the device further comprises a bearing ring fixedly connected to the side wall of the barrel, and the gear ring is fixedly connected to the upper surface of the bearing ring.

In some embodiments, the grinding device further comprises a mounting bracket, one end of the mounting bracket is connected with the cylinder, and the other end of the mounting bracket is used for being connected with the grinding device.

In some embodiments, the mounting bracket comprises a first mounting rod that is telescopic and a second mounting rod connected with the first mounting rod, and the cylinder body is fixedly connected with the second mounting rod;

the axis of the first mounting rod is perpendicular to the axis of the second mounting rod.

In some embodiments, the first mounting rod includes a first rod body and a second rod body sleeved on the first rod body, and the second rod body can move up and down relative to the axis direction of the first rod body

A second aspect of the embodiments of the present application provides a grinding apparatus comprising a grinding mill and the liquid adding device of the first aspect, wherein a mounting bracket of the liquid adding device is fixedly connected to the grinding mill.

In some embodiments, a water outlet is provided on the grinder for providing washing water to a grinding pan of the grinder;

a first adjusting button is arranged on the grinder and used for adjusting the flow rate of the washing water;

and a second adjusting button is arranged on the grinding machine and used for adjusting the flow rate of the grinding liquid in the barrel.

In the liquid adding device and the grinding equipment that this application embodiment provided, through set up the liquid adding device on the grinding equipment, utilize the setting of solenoid valve and controller, can make this liquid adding device provide the lapping liquid to the lapping disc of grinding equipment automatically, compare with the technical scheme that manual lapping liquid is provided to the lapping disc of grinding equipment among the correlation technique, can improve grinding efficiency on the one hand, on the other hand can practice thrift the quantity of lapping liquid, reduction in production cost.

In addition to the technical problems, technical features constituting technical solutions and advantages brought by the technical features of the technical solutions described above, other technical problems, technical features included in technical solutions and advantages brought by the technical features solved by the liquid adding device and the grinding equipment provided by the embodiments of the present application will be further described in detail in the detailed description.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a first schematic structural diagram of a liquid adding device provided in an embodiment of the present application;

FIG. 2 is a schematic structural diagram of a cartridge provided in an embodiment of the present application;

FIG. 3 is a schematic structural view of a blanking member according to an embodiment of the present disclosure;

fig. 4 is a schematic structural diagram of a filter screen provided in an embodiment of the present application;

FIG. 5 is a schematic structural diagram of a stirring assembly provided in an embodiment of the present application;

FIG. 6 is a schematic structural diagram of a second liquid adding device according to an embodiment of the present application;

fig. 7 is a schematic structural diagram of a polishing apparatus according to an embodiment of the present disclosure.

Reference numerals:

100: a liquid adding device; 110: a barrel;

111: a bottom wall; 112: a side wall;

113: an accommodating space; 114: a liquid outlet;

115: a liquid outlet pipe; 116: an electromagnetic valve;

117: drawing the opening; 118: a cover body;

1181: a top cover; 1182: an annular side plate;

119: a handle; 120: a controller;

130: a shield; 131: a shielding plate;

132: a pull rod; 140: a filter screen;

150: a stirring assembly; 151: a rotating shaft;

152: a driver; 153: a stirring member;

154: a transmission mechanism; 1541: a toothed ring;

1542: a gear; 1543: a load ring;

155: a stirring shaft; 156: a stirring blade;

160: mounting a bracket; 161: a first mounting bar;

162: a second mounting bar; 200: a grinder;

210: a machine platform; 220: a grinding groove;

230: a water outlet; 240: a first adjustment button;

250: a second adjustment button.

Detailed Description

In the related art, an operator usually holds a bottle containing polishing solution with one hand and presses a wafer with the other hand, so that a surface to be polished of the wafer is in contact with a polishing disk of a polishing device, which causes a problem that the attention of the operator is not focused.

To above-mentioned technical problem, in this application embodiment, through set up the liquid feeding device on the grinding equipment, utilize the setting of solenoid valve and controller, can make this liquid feeding device provide the lapping liquid to the lapping disc of grinding equipment automatically, compare with the technical scheme that the manual lapping liquid that provides to the lapping disc of grinding equipment among the correlation technique, can practice thrift the quantity of lapping liquid on the one hand, reduction in production cost, on the other hand can improve grinding efficiency.

In order to make the aforementioned objects, features and advantages of the embodiments of the present application more comprehensible, embodiments of the present application are described in detail below with reference to the accompanying drawings. It is to be understood that the described embodiments are merely a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

As shown in fig. 1, the present application provides a liquid adding device for supplying a grinding liquid to a grinding disc of a grinding apparatus, wherein the liquid adding device 100 may include a cylinder 110, a liquid outlet pipe 115, and a controller 120.

The cylinder 110 has a receiving space therein for receiving the slurry, wherein the cylinder 110 may have a regular shape or an irregular shape, for example, the cross-sectional shape of the cylinder 110 may be circular.

Illustratively, as shown in fig. 2, the cylinder 110 may include a bottom wall 111 and a side wall 112 disposed on the bottom wall 111, and an accommodating space 113 is defined between the bottom wall 111 and the side wall 112, wherein the accommodating space 113 may have a regular shape or an irregular shape.

The barrel 110 may be provided with a liquid outlet 114, the liquid outlet 114 provides a circulating channel for the grinding fluid, wherein the liquid outlet 114 may be disposed on the bottom wall 111 or on the side wall 112, and when the liquid outlet 114 is disposed on the bottom wall 111, the grinding fluid may be conveniently added to the grinding disc of the grinding apparatus, so that a circulating path of the grinding fluid is reduced, and the working efficiency is improved.

Can dismantle on the liquid outlet 114 and be connected with drain pipe 115, wherein, can pass through threaded connection between drain pipe 115 and the liquid outlet 114, also can connect through the mode of joint, for example, can form first internal thread on the inner wall of liquid outlet 114, can form first external screw thread on the outer wall of drain pipe 115, drain pipe 115 threaded connection is on liquid outlet 114.

In the use, the crystallization can take place for the grinding fluid and block up drain pipe and liquid outlet, consequently, this embodiment can conveniently dismantle the drain pipe and get off and wash drain pipe and liquid outlet through setting the drain pipe to detachable mode with the liquid outlet to improve grinding efficiency and prepare the quality of treating the inefficacy sample.

The liquid outlet pipe 115 is provided with an electromagnetic valve 116, the electromagnetic valve 116 is in signal connection with a controller 120, and the controller 120 is configured to control the operation of the electromagnetic valve 116, in this embodiment, the controller 120 may be disposed on the barrel 110, or may be disposed on other components, for example, the controller 120 may also be disposed on the grinding apparatus.

In this embodiment, through set up solenoid valve and controller on the barrel, through opening or closing of controller control solenoid valve, realize that automatic lapping disc to grinding equipment provides the lapping liquid, has improved work efficiency.

In some embodiments, as shown in fig. 3, the filling device 100 further comprises a shutter 130, and the shutter 130 is drawably installed in the cylinder 110 for opening or blocking the liquid outlet 114.

Among them, the shutter 130 may include a shutter 131 and a drawing rod 132 connected to the shutter 131.

In order to facilitate the shielding plate 131 to extend into the cylinder 110, a drawing opening 117 (shown in fig. 2) may be provided on the cylinder 110, for example, the drawing opening 117 may be provided on the side wall 112, one end of the drawing rod 132, which is away from the shielding plate 131, is inserted into the drawing opening 117 and then extends into the cylinder 110, and the drawing rod 132 and the drawing opening 117 may be hermetically connected by a sealing ring.

When the liquid outlet pipe or the battery valve needs to be replaced or maintained, the liquid outlet 114 can be shielded by the shielding piece 130, so that the grinding liquid in the cylinder is prevented from leaking out, and the waste of the grinding liquid is avoided.

After the liquid outlet pipe or the electromagnetic valve is replaced, the shielding piece can move along the direction deviating from the cylinder body to open the liquid outlet and realize the normal work of the liquid adding device.

It should be noted that, the implementation manner of the blocking piece is not limited to the above manner, for example, the blocking piece may further include a plug installed in the liquid outlet, and the plug and the liquid outlet may be connected through a thread.

In some embodiments, a fill port is provided on the barrel 110, and a cap 118 is removably attached to the fill port.

The barrel 110 may be provided with a cap 118. illustratively, the cap 118 may be detachably connected to the filling opening, for example, the top end of the sidewall 112 of the barrel 110 may enclose the filling opening, and the cap 118 may be screwed into the filling opening.

As a possible embodiment of the cover 118, the cover 118 may include a circular plate, and the plate and the sidewall may be connected by bonding or clipping.

As another possible embodiment of the cover 118, with continued reference to fig. 1, the cover 118 may include a top cover 1181 and an annular side plate 1182 disposed on an edge of the top cover 1181, wherein an inner diameter of the annular side plate 1182 is larger than an outer diameter of the barrel 110, so that an inner thread may be formed on an inner surface of the annular side plate 1182, and an outer thread may be formed on an outer circumferential surface of the barrel 110, and the barrel 110 and the cover 118 may be detachably connected by a threaded connection.

This embodiment can protect the lapping liquid in the barrel through setting up the lid on the barrel, prevents that external impurity from getting into the barrel, has guaranteed the purity degree of lapping liquid, in addition, for dismantling being connected between lid and the barrel, can make things convenient for the installation between barrel and the lid.

In some embodiments, a handle 119 is disposed on the cover 118, and the handle 119 can provide installation efficiency between the barrel and the cover.

In some embodiments, as shown in fig. 4, a filter screen 140 is disposed in the cylinder 110, the filter screen 140 may be detachably connected to the cylinder 110, for example, the filter screen 140 may include a mounting ring and a filter membrane disposed in the mounting ring, an outer thread is disposed on an outer circumferential surface of the mounting ring, an inner thread is disposed on an inner wall of the cylinder, and the filter screen 140 is connected to the cylinder 110 by a thread.

The filter screen 140 may be used to filter relatively large particles of the slurry or particles that are crystallized and removed from the inner wall of the barrel, so as to increase the cleanliness of the slurry.

After the liquid feeding device used a period, the granule that the crystallization dropped off on the inner wall of the grinding fluid granule or the barrel that can leave over bigger granule on the filter screen 140, through dismantling filter screen 140, can wash the filter screen, realize the used repeatedly of filter screen.

In some embodiments, the liquid adding device 100 may further include a stirring assembly 150, a portion of the stirring assembly 150 is disposed in the cylinder 110, and the stirring assembly 150 stirs the slurry in the cylinder 110 to ensure uniform mixing of the slurry, thereby ensuring the polishing effect.

Illustratively, as shown in fig. 2, the stirring assembly 150 may include a rotating shaft 151, a driver 152, and a stirring member 153, the driver 152 is disposed on the barrel 110, for example, the driver 152 may be disposed on the cover 118, an output end of the driver 152 is connected to the rotating shaft 151 for driving the rotating shaft 151 to rotate in a counterclockwise direction or a clockwise direction, and a bearing (not shown) may be disposed between the barrel and the rotating shaft in order to prevent the barrel from rotating.

In this embodiment, the driver 152 may include a stepping motor, the rotation speed of the rotating shaft may be adjusted by the stepping motor, and a motor reducer may be disposed between the output shaft of the driver 152 and the rotating shaft 151, so that the driver 152 drives the rotating shaft 151 to rotate clockwise or counterclockwise.

Stirring member 153 sets up on axis of rotation 151 to rotate along with axis of rotation 151, drive axis of rotation 151 through driver 152 and rotate, and then drive stirring member 153 and rotate, stir to the lapping liquid that is located the barrel in order to accomplish, and then improve the homogeneity of lapping liquid.

As one possible embodiment of the stirring member, as shown in fig. 2, the stirring member 153 may include a plurality of stirring blades, and the plurality of stirring blades are spaced apart from each other on the rotating shaft 151.

The stirring blade can be made of stainless steel or teflon to improve the corrosion resistance of the stirring blade.

As another possible embodiment of the stirring member, as shown in fig. 5, the stirring member 153 includes a transmission mechanism 154, a stirring shaft 155, and a stirring blade 156.

The transmission mechanism 154 includes a toothed ring 1541 fixedly connected to the sidewall 112 of the cylinder 110 and a gear 1542 in meshing transmission with the toothed ring 1541, teeth of the toothed ring 1541 are disposed on an upper surface of the toothed ring 1541, wherein the toothed ring 1541 may be directly fixed to the sidewall 112 of the cylinder 110 or may be fixedly connected to the sidewall 112 of the cylinder 110 through a bearing member, for example, a bearing ring 1543 is fixedly connected to the sidewall 112 of the cylinder 110, and the toothed ring 1541 is fixedly connected to an upper surface of the bearing ring 1543.

It should be noted that the fixed connection in this embodiment may refer to a connection manner such as welding or clamping, and the gear 1542 is a spur gear.

One end of the stirring shaft 155 is fixedly connected to the gear 1542 of the transmission mechanism 154, the other end of the stirring shaft 155 is rotatably connected to the rotating shaft 151, and illustratively, the other end of the stirring shaft 155 is rotatably connected to the rotating shaft 151 through a bearing (not shown).

The stirring blades 156 are uniformly distributed on the stirring shaft 155, wherein the extending direction of the stirring blades 156 may be perpendicular to the axis of the stirring shaft 155, or may have a predetermined included angle with the axis of the stirring shaft 155.

When the driver rotates, the driver drives the axis of rotation and rotates along anticlockwise or clockwise, the (mixing) shaft also revolutes the axis of rotation and realizes anticlockwise or clockwise rotation under the drive of axis of rotation, at this moment, the gear with the agitator shaft is connected can rotate along the circumferencial direction of ring gear, and then drive stirring vane and rotate around the axis of (mixing) shaft, realize stirring vane's rotation, this embodiment can enough revolve the axis of rotation through stirring vane and rotate, also can rotate around the (mixing) shaft, stirring vane's stirring effect has been improved, and then guarantee that the lapping liquid can the misce bene, prevent that the lapping liquid from deposiing.

In some embodiments, as shown in fig. 2 and 6, the filling device 100 further comprises a mounting bracket 160, one end of the mounting bracket 160 is connected with the cylinder 110, and the other end is used for connecting with a grinding device.

The present embodiment can increase the stability of the connection between the liquid adding device 100 and the grinding equipment on the one hand and the stability of the liquid adding device 100 on the other hand by the arrangement of the mounting bracket.

As one possible embodiment of the mounting bracket 160, as shown in fig. 6, the mounting bracket 160 may include a mounting plate (not shown), one end of which is attached to the side wall or the bottom wall of the drum 110, and the other end of which may be used to connect with the grinding apparatus.

As a possible embodiment of the mounting bracket 160, with reference to fig. 1, the mounting bracket 160 includes a first mounting rod 161 that is retractable and a second mounting rod 162 connected to the first mounting rod 161, the cylinder 110 is fixedly connected to the second mounting rod 162, and an axis of the first mounting rod 161 is perpendicular to an axis of the second mounting rod 162, that is, the mounting bracket 160 is L-shaped.

But this embodiment is through setting up first installation pole into extending structure, and like this, first installation pole can reciprocate along the axial of first installation pole to adjust the vertical distance between barrel and the grinding device, outside preventing that the lapping liquid from spattering to the abrasive disc of grinding device, and then practiced thrift the lapping liquid, reduced manufacturing cost.

For example, the first mounting rod 161 may include a first rod and a second rod sleeved on the first rod, and the second rod can move up and down relative to the axis direction of the first rod.

The embodiment of the present application also provides a grinding apparatus, as shown in fig. 7, which includes a grinding machine 200 and the liquid adding device 100 in the above embodiment, wherein the mounting bracket 160 of the liquid adding device 100 is fixedly connected to the grinding machine 200.

The grinding machine 200 may include a machine table 210 and a grinding groove 220 disposed in the machine table 210, a grinding disc (not shown) is disposed in the grinding groove 220, and the liquid adding device 100 is disposed on the machine table 210, and supplies grinding liquid to the grinding disc through the liquid adding device 100, so as to polish a wafer on the grinding disc.

This embodiment utilizes opening or closing of controller control solenoid valve through set up the liquid feeding device on the board, realizes that automatic lapping disc to grinding equipment provides the lapping liquid, has improved work efficiency.

In some embodiments, the grinder 200 is provided with a water outlet 230, and the water outlet 230 is connected to a water supply device for supplying cleaning water to the grinding plate of the grinder 200, and the impurities or debris in the grinding groove 220 are washed by the cleaning water to ensure the cleanliness of the grinding plate and prevent the impurities or debris from scratching the wafer.

The machine table 210 is further provided with a drain outlet (not shown in the figure) communicated with the grinding groove 220, and the cleaning water with impurities or debris can be discharged out of the grinding groove 220 through the drain outlet.

In some embodiments, the grinder 200 is provided with a first adjustment button 240, and the first adjustment button 240 is used to adjust the flow rate of the washing water; the grinder 200 is provided with a second adjustment button 250, and the second adjustment button 250 is used to adjust the flow rate of the grinding fluid in the barrel 110.

This embodiment can adjust the velocity of flow of wash water and lapping liquid according to actual conditions through the setting of first adjustment button and second adjustment button, prevents to cause the waste of wash water and lapping liquid, has reduced manufacturing cost.

The embodiments or implementation modes in the present specification are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other.

In the description herein, references to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application.

In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present application.