阅读说明：本技术 流体处理装置 (Fluid treatment device ) 是由 砂永伸也 山内拓史 于 2019-02-18 设计创作，主要内容包括：本发明的第一流体处理装置具有：第一液体导入部；第一清洗液导入部；第一流路,用于使导入至所述第一液体导入部及所述第一清洗液导入部的液体流动；第二液体导入部；第二清洗液导入部；第二流路,用于使导入至所述第二液体导入部及所述第二清洗液导入部的液体流动；第三流路,用于使在所述第一流路中流过来的液体及在所述第二流路中流过来的液体流动；第一隔膜阀,配置于所述第一流路与所述第三流路之间；第二隔膜阀,配置于所述第二流路与所述第三流路之间；以及腔室,与所述第三流路连接。(The first fluid treatment apparatus of the present invention includes: a first liquid introduction part; a first cleaning liquid introduction part; a first flow path through which the liquid introduced into the first liquid introduction portion and the first cleaning liquid introduction portion flows; a second liquid introduction part; a second cleaning liquid introduction part; a second flow path through which the liquid introduced into the second liquid introduction portion and the second cleaning liquid introduction portion flows; a third channel for allowing the liquid flowing through the first channel and the liquid flowing through the second channel to flow; a first diaphragm valve disposed between the first channel and the third channel; a second diaphragm valve disposed between the second channel and the third channel; and a chamber connected to the third flow path.)

1. A fluid treatment device, comprising:

a first liquid introduction portion for introducing a first liquid;

a first cleaning liquid introduction portion for introducing a cleaning liquid;

a first flow path through which the liquid introduced into the first liquid introduction portion and the liquid introduced into the first cleaning liquid introduction portion flow;

a second liquid introduction portion for introducing a second liquid;

a second cleaning liquid introduction portion for introducing a cleaning liquid;

a second flow path through which the liquid introduced into the second liquid introduction portion and the liquid introduced into the second cleaning liquid introduction portion flow;

a third channel for allowing the liquid flowing through the first channel and the liquid flowing through the second channel to flow;

a first diaphragm valve disposed between the first channel and the third channel;

a second diaphragm valve disposed between the second channel and the third channel; and

a chamber connected to the third flow path.

2. The fluid treatment device of claim 1,

the first diaphragm valve and the second diaphragm valve are disposed at different positions from each other in a flow direction of the third flow path.

3. The fluid treatment apparatus according to claim 1, further comprising:

a third diaphragm valve disposed between the first liquid introduction portion and the first channel;

a fourth diaphragm valve disposed between the first cleaning liquid introduction portion and the first flow path;

a fifth diaphragm valve disposed between the second liquid introduction portion and the second channel; and

and a sixth diaphragm valve disposed between the second cleaning liquid introduction portion and the second flow path.

4. A fluid treatment device, comprising:

a first liquid introduction portion for introducing a first liquid;

a second liquid introduction portion for introducing a second liquid;

a cleaning liquid introduction portion for introducing a cleaning liquid;

a first flow path through which the liquid introduced into the first liquid introduction portion and the liquid introduced into the cleaning liquid introduction portion flow;

a second flow path through which the liquid introduced into the second liquid introduction portion and the liquid introduced into the cleaning liquid introduction portion flow;

a first diaphragm valve disposed between the cleaning liquid introduction portion and the first and second flow paths;

a third channel connected to the first channel and the second channel, for allowing the liquid flowing through the first channel and the liquid flowing through the second channel to flow; and

a chamber connected to the third flow path.

5. The fluid treatment device according to claim 4, further comprising:

a second diaphragm valve disposed between the first liquid introduction portion and the first channel; and

and a third diaphragm valve disposed between the second liquid introduction portion and the second channel.

6. A fluid treatment device, comprising:

a first liquid introduction portion for introducing a first liquid;

a first cleaning liquid introduction portion for introducing a cleaning liquid;

a first flow path through which the liquid introduced into the first liquid introduction portion and the liquid introduced into the first cleaning liquid introduction portion flow;

a second liquid introduction portion for introducing a second liquid;

a second cleaning liquid introduction portion for introducing a cleaning liquid;

a second flow path through which the liquid introduced into the second liquid introduction portion and the liquid introduced into the second cleaning liquid introduction portion flow; and

and a chamber which is connected to the first channel and the second channel independently of each other.

7. The fluid treatment device defined in claim 6, further comprising:

a first diaphragm valve disposed between the first liquid introduction portion and the first channel;

a second diaphragm valve disposed between the first cleaning liquid introduction portion and the first flow path;

a third diaphragm valve disposed between the second liquid introduction portion and the second channel; and

and a fourth diaphragm valve disposed between the second cleaning liquid introduction portion and the second flow path.

Technical Field

The present invention relates to a fluid processing apparatus for mixing two or more liquids in a chamber.

Background

In recent years, fluid processing apparatuses have been used to analyze a trace amount of a substance such as a protein or a nucleic acid with high accuracy and high speed. The fluid processing apparatus has an advantage that the amount of a reagent and a sample required for analysis is small, and is expected to be used in various applications such as clinical examination, food examination, and environmental examination. As a fluid processing apparatus, a fluid processing apparatus is known which has a plurality of flow paths and a plurality of micro valves and can sequentially supply different types of liquids by sequentially driving the micro valves (for example, see patent document 1).

Fig. 1 is a schematic diagram showing a configuration of a fluid processing apparatus (flow path substrate) described in patent document 1. As shown in fig. 1, the fluid processing apparatus (flow path substrate) described in patent document 1 includes: a first liquid introduction part 10, a first channel 12, a second liquid introduction part 20, a second channel 22, a third channel 32, and a liquid extraction part 30. The upstream end of the first channel 12 is connected to the first liquid introduction portion 10, and the downstream end of the first channel 12 is connected to the upstream end of the third channel 32. The upstream end of the second channel 22 is connected to the second liquid introduction portion 20, and the downstream end of the second channel 22 is connected to the upstream end of the third channel 32. The upstream end of the third channel 32 is connected to the downstream end of the first channel 12 and the downstream end of the second channel 22, and the downstream end of the third channel 32 is connected to the liquid extraction unit 30. The first flow path 12, the second flow path 22, and the third flow path 32 are provided with microvalves (shown by broken lines in the figure), respectively. For example, when the microvalves of the first channel 12 and the third channel 32 are opened in a state where the first liquid is introduced into the first liquid introduction unit 10, the first liquid passes through the first channel 12 and the third channel 32 and reaches the liquid extraction unit 30 as shown in fig. 1B. Next, when the microvalves of the second flow path 22 and the third flow path 32 are opened in a state where the second liquid is introduced into the second liquid introduction portion 20, the second liquid passes through the second flow path 22 and the third flow path 32 and reaches the liquid extraction portion 30 as shown in fig. 1C. In this way, the first liquid and the second liquid can be sequentially supplied to the liquid extraction unit 30 by controlling the opening and closing of the plurality of micro valves.

Disclosure of Invention

Problems to be solved by the invention

However, in the fluid processing apparatus described in patent document 1, when the first liquid and the second liquid are sequentially supplied as described above, the first liquid and the second liquid may come into contact with each other in the fluid processing apparatus. That is, when the first liquid is moved from the first liquid introduction portion 10 to the liquid extraction portion 30, the first liquid flows through the first channel 12 and the third channel 32, but a small portion of the first liquid enters the second channel 22 as indicated by arrows in fig. 1B. After that, when the second liquid is moved from the second liquid introduction portion 20 to the liquid extraction portion 30, the second liquid comes into contact with the first liquid remaining in the second channel 22. In some applications of the fluid handling device, such contact of the first liquid with the second liquid at an unintended location is undesirable.

An object of the present invention is to provide a fluid processing apparatus for mixing a first liquid and a second liquid in a chamber, which can prevent the first liquid and the second liquid from coming into contact with each other before reaching the chamber.

Means for solving the problems

The first fluid treatment apparatus of the present invention includes: a first liquid introduction portion for introducing a first liquid; a first cleaning liquid introduction portion for introducing a cleaning liquid; a first flow path through which the liquid introduced into the first liquid introduction portion and the liquid introduced into the first cleaning liquid introduction portion flow; a second liquid introduction portion for introducing a second liquid; a second cleaning liquid introduction portion for introducing a cleaning liquid; a second flow path through which the liquid introduced into the second liquid introduction portion and the liquid introduced into the second cleaning liquid introduction portion flow; a third channel for allowing the liquid flowing through the first channel and the liquid flowing through the second channel to flow; a first diaphragm valve disposed between the first channel and the third channel; a second diaphragm valve disposed between the second channel and the third channel; and a chamber connected to the third flow path.

The second fluid treatment apparatus of the present invention includes: a first liquid introduction portion for introducing a first liquid; a second liquid introduction portion for introducing a second liquid; a cleaning liquid introduction portion for introducing a cleaning liquid; a first flow path through which the liquid introduced into the first liquid introduction portion and the liquid introduced into the cleaning liquid introduction portion flow; a second flow path through which the liquid introduced into the second liquid introduction portion and the liquid introduced into the cleaning liquid introduction portion flow; a first diaphragm valve disposed between the cleaning liquid introduction portion and the first and second flow paths; a third channel connected to the first channel and the second channel, for allowing the liquid flowing through the first channel and the liquid flowing through the second channel to flow; and a chamber connected to the third flow path.

The third fluid treatment apparatus of the present invention includes: a first liquid introduction portion for introducing a first liquid; a first cleaning liquid introduction portion for introducing a cleaning liquid; a first flow path through which the liquid introduced into the first liquid introduction portion and the liquid introduced into the first cleaning liquid introduction portion flow; a second liquid introduction portion for introducing a second liquid; a second cleaning liquid introduction portion for introducing a cleaning liquid; a second flow path through which the liquid introduced into the second liquid introduction portion and the liquid introduced into the second cleaning liquid introduction portion flow; and a chamber which is connected to the first channel and the second channel individually.

Effects of the invention

According to the present invention, the first liquid and the second liquid can be prevented from contacting each other before reaching the chamber, and the first liquid and the second liquid can be brought into contact with each other at an appropriate timing.

Drawings

Fig. 1A to 1C are schematic views of the fluid treatment apparatus described in patent document 1.

Fig. 2 is a plan view of the fluid treatment apparatus according to embodiment 1.

Fig. 3 is a cross-sectional view taken along line a-a of fig. 2.

Fig. 4 is a plan view of the rotating member according to embodiment 1.

Fig. 5A to 5D are schematic diagrams for explaining the operation of the fluid treatment apparatus according to embodiment 1.

Fig. 6 is a plan view of the integrated rotary member.

Fig. 7 is a plan view of the fluid treatment apparatus according to embodiment 2.

Fig. 8 is a plan view of a rotating member according to embodiment 2.

Fig. 9A to 9D are schematic diagrams for explaining the operation of the fluid treatment apparatus according to embodiment 2.

Fig. 10 is a plan view of a fluid treatment apparatus according to embodiment 3.

Fig. 11 is a plan view of a rotating member according to embodiment 3.

Fig. 12A to 12D are schematic diagrams for explaining the operation of the fluid treatment apparatus according to embodiment 3.

Detailed Description

Embodiments of the present invention will be described in detail below with reference to the drawings.

[ embodiment 1]

(construction of fluid treatment apparatus)

Fig. 2 is a plan view of the fluid treatment apparatus 100 according to embodiment 1. Fig. 3 is a cross-sectional view taken along line a-a of fig. 2. Also shown in fig. 3 is a cross-section of rotating component 200 (described below) against fluid treatment device 100. Fig. 2 shows a groove (channel, chamber) formed on the surface of the substrate 110 on the thin film 120 side and a diaphragm formed on the thin film 120 by a dotted line.

The fluid processing apparatus 100 includes a substrate 110 and a thin film 120. The substrate 110 has a recess (groove) serving as a flow path or a chamber, and a through hole serving as an inlet or an outlet. The thin film 120 is bonded to one surface of the substrate 110 so as to close the openings of the through holes and the recesses formed in the substrate 110. A part of the region of the film 120 functions as a separator. The concave portion of the substrate 110 sealed by the thin film 120 serves as a flow path for flowing a fluid such as a reagent, a liquid sample, a gas, or a powder, or a chamber for mixing them.

The thickness of the substrate 110 is not particularly limited. For example, the thickness of the substrate 110 is 1mm or more and 10mm or less. In addition, the material of the substrate 110 is not particularly limited. For example, the material of the substrate 110 may be appropriately selected from known resins and glass. Examples of the material of the substrate 110 include: polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene, silicone resin, and elastomer.

The thickness of the thin film 120 is not particularly limited as long as it can function as a separator. For example, the thickness of the thin film 120 is 30 μm or more and 300 μm or less. The material of the thin film 120 is not particularly limited as long as it can function as a separator. For example, the material of the film 120 can be appropriately selected from known resins. Examples of materials for the film 120 include: polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene, silicone resin, and elastomer. The film 120 is bonded to the substrate 110 by, for example, thermal welding, laser welding, an adhesive, or the like.

The fluid treatment apparatus 100 of the present embodiment includes: the cleaning liquid supply apparatus includes a first liquid introduction portion 130, a first liquid introduction flow path 131, a third diaphragm valve 132, a first cleaning liquid introduction portion 140, a first cleaning liquid introduction flow path 141, a fourth diaphragm valve 142, a first flow path 150, a first diaphragm valve 151, a second liquid introduction portion 160, a second liquid introduction flow path 161, a fifth diaphragm valve 162, a second cleaning liquid introduction portion 170, a second cleaning liquid introduction flow path 171, a sixth diaphragm valve 172, a second flow path 180, a second diaphragm valve 181, a third flow path 190, a chamber 191, a discharge flow path 192, and a discharge portion 193.

The first liquid introduction portion 130 is a recessed portion having a bottom for introducing the first liquid. In the present embodiment, the first liquid introduction portion 130 is composed of a through hole formed in the substrate 110 and a thin film 120 that closes one opening of the through hole. The shape and size of the first liquid introduction portion 130 are not particularly limited, and may be appropriately set as needed. The first liquid introduction portion 130 has, for example, a substantially cylindrical shape. The width of the first liquid introduction portion 130 is, for example, about 2 mm. The fluid that can be contained in the first liquid introduction portion 130 can be appropriately selected according to the use of the fluid treatment apparatus 100. The fluid is a reagent, a liquid sample, a powder, or other fluid.

The first liquid introduction flow path 131 is a flow path in which a fluid can move. The upstream end of the first liquid introduction channel 131 is connected to the first liquid introduction portion 130. The downstream end of the first liquid introduction channel 131 is connected to the third diaphragm valve 132. In the present embodiment, the first liquid introduction channel 131 is composed of a groove formed in the substrate 110 and the thin film 120 that closes the opening of the groove. The cross-sectional area and cross-sectional shape of the first liquid introduction channel 131 are not particularly limited. In the present specification, the "cross section of the flow channel" refers to a cross section of the flow channel perpendicular to the direction in which the fluid flows. The cross-sectional shape of the first liquid introduction channel 131 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the first liquid introduction channel 131 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the first liquid introduction channel 131 is constant.

The third diaphragm valve 132 is disposed between the first liquid introduction flow path 131 and the first flow path 150, and includes a partition wall and a diaphragm.

The partition wall of the third diaphragm valve 132 is a wall disposed between the first liquid introduction channel 131 and the first channel 150. The partition wall functions as a valve seat of a diaphragm valve for opening and closing a gap between the first liquid introduction flow path 131 and the first flow path 150. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition is, for example, the same as the depth of the first liquid introduction channel 131 and the first channel 150.

The diaphragm of the third diaphragm valve 132 is a part of the flexible film 120, and has a substantially spherical crown shape. The thin film 120 is disposed on the substrate 110 so that the diaphragm and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a first convex portion 211 of a first rotating member 210 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the first convex portion 211 does not press the diaphragm, the first liquid introduction flow path 131 and the first flow path 150 are in a state of communicating with each other via the gap between the diaphragm and the partition wall. On the other hand, when the first convex portion 211 presses the diaphragm to contact the partition wall, the first liquid introduction flow path 131 and the first flow path 150 are not communicated with each other.

The first cleaning liquid introduction portion 140 is a recessed portion having a bottom for introducing a cleaning liquid for cleaning the first flow path 150. In the present embodiment, the first cleaning liquid introduction portion 140 is composed of a through hole formed in the substrate 110 and the thin film 120 that closes one opening of the through hole. The shape and size of the first cleaning liquid introduction part 140 are not particularly limited, and may be appropriately set as needed. The first cleaning liquid introduction part 140 has, for example, a substantially cylindrical shape. The width of the first cleaning liquid introduction part 140 is, for example, about 2 mm. The type of cleaning liquid that can be stored in the first cleaning liquid introduction portion 140 can be appropriately selected according to the application of the fluid treatment apparatus 100. The cleaning liquid is, for example, water.

The first cleaning liquid introduction flow path 141 is a flow path through which a fluid can move. The upstream end of the first cleaning liquid introduction flow path 141 is connected to the first cleaning liquid introduction portion 140. The downstream end of the first cleaning liquid introduction flow path 141 is connected to the fourth diaphragm valve 142. In the present embodiment, the first cleaning liquid introduction flow path 141 is composed of a groove formed in the substrate 110 and the thin film 120 for closing an opening of the groove. The cross-sectional area and the cross-sectional shape of the first cleaning liquid introduction flow path 141 are not particularly limited. The cross-sectional shape of the first cleaning liquid introduction passage 141 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the first cleaning liquid introduction flow path 141 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the first cleaning liquid introduction flow path 141 is constant.

The fourth diaphragm valve 142 is disposed between the first cleaning liquid introduction flow path 141 and the first flow path 150, and includes a partition wall and a diaphragm.

The partition wall of the fourth diaphragm valve 142 is a wall disposed between the first cleaning liquid introduction flow path 141 and the first flow path 150. The partition wall functions as a valve seat of a diaphragm valve for opening and closing a gap between the first cleaning liquid introduction flow path 141 and the first flow path 150. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition wall is, for example, the same as the depth of the first cleaning liquid introduction flow path 141 and the first flow path 150.

The diaphragm of the fourth diaphragm valve 142 is a part of the flexible film 120, and has a substantially spherical crown shape. The thin film 120 is disposed on the substrate 110 so that the diaphragm and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a first convex portion 211 of a first rotating member 210 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the first convex portion 211 does not press the diaphragm, the first cleaning liquid introduction flow path 141 and the first flow path 150 are in a state of communicating with each other via the gap between the diaphragm and the partition wall. On the other hand, when the first convex portion 211 presses the diaphragm to contact the partition wall, the first cleaning liquid introduction flow path 141 and the first flow path 150 are not communicated with each other.

The first flow path 150 is a flow path in which fluid can move. The first channel 150 is connected to the first liquid introduction portion 130 (first liquid introduction channel 131) via the third diaphragm valve 132, and is connected to the first cleaning liquid introduction portion 140 (first cleaning liquid introduction channel 141) via the fourth diaphragm valve 142. Therefore, the liquid (first liquid) introduced into the first liquid introduction portion 130 and the liquid (cleaning liquid) introduced into the first cleaning liquid introduction portion 140 flow through the first flow path 150. The fourth diaphragm valve 142 is disposed upstream of the third diaphragm valve 132 in the first flow path 150. The downstream end of the first flow path 150 is connected to a first diaphragm valve 151. In the present embodiment, the first channel 150 is composed of a groove formed in the substrate 110 and the thin film 120 that closes the opening of the groove. The cross-sectional area and cross-sectional shape of the first flow path 150 are not particularly limited. The cross-sectional shape of the first flow path 150 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the first flow path 150 may or may not be constant in the direction of fluid flow. In the present embodiment, the cross-sectional area of the first flow path 150 is constant.

The first diaphragm valve 151 is disposed between the first channel 150 and the third channel 190, and has a partition wall and a diaphragm.

The partition wall of the first diaphragm valve 151 is a wall disposed between the first channel 150 and the third channel 190. The partition wall functions as a valve seat of a diaphragm valve for opening and closing the gap between the first channel 150 and the third channel 190. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition wall is, for example, the same as the depth of the first channel 150 and the third channel 190.

The diaphragm of the first diaphragm valve 151 is a part of the flexible film 120, and has a substantially spherical crown shape. The thin film 120 is disposed on the substrate 110 so that the diaphragm and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a second convex portion 221 of a second rotating member 220 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the second protrusion 221 does not press the diaphragm, the first flow channel 150 and the third flow channel 190 are in a state of communicating with each other via the gap between the diaphragm and the partition wall. On the other hand, when the second convex portion 221 presses the diaphragm and the diaphragm is brought into contact with the partition wall, the first flow channel 150 and the third flow channel 190 are not in communication with each other.

The second liquid introduction portion 160 is a recessed portion having a bottom for introducing the second liquid. In the present embodiment, the second liquid introduction portion 160 is composed of a through hole formed in the substrate 110 and the thin film 120 that closes one opening of the through hole. The shape and size of the second liquid introduction portion 160 are not particularly limited, and may be appropriately set as necessary. The second liquid introduction portion 160 has a substantially cylindrical shape, for example. The width of the second liquid introduction part 160 is, for example, about 2 mm. The fluid that can be contained in the second liquid introduction portion 160 can be appropriately selected according to the use of the fluid treatment apparatus 100. The fluid is a reagent, a liquid sample, a powder, or the like. Generally, the first liquid introduced into the first liquid introduction part 130 and the second liquid introduced into the second liquid introduction part 160 are different kinds of liquids.

The second liquid introduction flow path 161 is a flow path in which a fluid can move. The upstream end of the second liquid introduction passage 161 is connected to the second liquid introduction portion 160. The downstream end of the second liquid introduction passage 161 is connected to the fifth diaphragm valve 162. In the present embodiment, the second liquid introduction path 161 is composed of a groove formed in the substrate 110 and a thin film 120 that closes an opening of the groove. The cross-sectional area and cross-sectional shape of the second liquid introduction passage 161 are not particularly limited. The cross-sectional shape of the second liquid introduction passage 161 is, for example, a substantially rectangular shape having a side length (width and depth) of about several tens μm. The cross-sectional area of the second liquid introduction passage 161 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the second liquid introduction passage 161 is fixed.

The fifth diaphragm valve 162 is disposed between the second liquid introduction channel 161 and the second channel 180, and has a partition wall and a diaphragm.

The partition wall of the fifth diaphragm valve 162 is a wall disposed between the second liquid introduction channel 161 and the second channel 180. The partition wall functions as a valve seat of a diaphragm valve for opening and closing a space between the second liquid introduction flow path 161 and the second flow path 180. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition is, for example, the same as the depth of the second liquid introduction channel 161 and the second channel 180.

The diaphragm of the fifth diaphragm valve 162 is a part of the flexible film 120, and has a substantially spherical crown shape. The thin film 120 is disposed on the substrate 110 so that the diaphragm and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a first convex portion 211 of a first rotating member 210 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the first convex portion 211 does not press the diaphragm, the second liquid introduction flow path 161 and the second flow path 180 are in a state of communicating with each other via the gap between the diaphragm and the partition wall. On the other hand, when the first convex portion 211 presses the diaphragm to bring the diaphragm into contact with the partition wall, the second liquid introduction flow path 161 and the second flow path 180 are not in communication with each other.

The second cleaning liquid introduction portion 170 is a recessed portion having a bottom for introducing a cleaning liquid for cleaning the second flow path 180. In the present embodiment, the second cleaning liquid introduction portion 170 is composed of a through hole formed in the substrate 110 and the thin film 120 that closes one opening of the through hole. The shape and size of the second cleaning liquid introduction portion 170 are not particularly limited, and may be appropriately set as needed. The second cleaning liquid introduction portion 170 has, for example, a substantially cylindrical shape. The width of the second cleaning liquid introduction portion 170 is, for example, about 2 mm. The type of cleaning liquid that can be stored in the second cleaning liquid introduction portion 170 can be appropriately selected according to the application of the fluid treatment apparatus 100. The cleaning liquid is, for example, water. The cleaning liquid introduced into the first cleaning liquid introduction portion 140 and the cleaning liquid introduced into the second cleaning liquid introduction portion 170 may be the same type of liquid or different types of liquids.

The second cleaning liquid introduction flow path 171 is a flow path through which a fluid can move. The upstream end of the second cleaning liquid introduction passage 171 is connected to the second cleaning liquid introduction portion 170. The downstream end of the second cleaning liquid introduction flow path 171 is connected to the sixth diaphragm valve 172. In the present embodiment, the second cleaning liquid introduction flow path 171 is composed of a groove formed in the substrate 110 and the thin film 120 that closes the opening of the groove. The cross-sectional area and the cross-sectional shape of the second cleaning liquid introduction flow path 171 are not particularly limited. The cross-sectional shape of the second cleaning liquid introduction passage 171 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the second cleaning liquid introduction flow path 171 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the second cleaning liquid introduction flow path 171 is constant.

The sixth diaphragm valve 172 is disposed between the second cleaning liquid introduction flow path 171 and the second flow path 180, and has a partition wall and a diaphragm.

The partition wall of the sixth diaphragm valve 172 is a wall disposed between the second cleaning liquid introduction flow path 171 and the second flow path 180. The partition wall functions as a valve seat of a diaphragm valve for opening and closing the space between the second cleaning liquid introduction flow path 171 and the second flow path 180. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition wall is, for example, the same as the depth of the second cleaning liquid introduction flow path 171 and the second flow path 180.

The diaphragm of the sixth diaphragm valve 172 is a part of the flexible film 120, and has a substantially spherical crown shape. The thin film 120 is disposed on the substrate 110 so that the diaphragm and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a first convex portion 211 of a first rotating member 210 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the first convex portion 211 does not press the diaphragm, the second cleaning liquid introduction flow path 171 and the second flow path 180 are in a state of communicating with each other via a gap between the diaphragm and the partition wall. On the other hand, when the first convex portion 211 presses the diaphragm to contact the partition wall, the second cleaning liquid introduction flow path 171 and the second flow path 180 are not in communication with each other.

The second flow path 180 is a flow path in which fluid can move. The second channel 180 is connected to the second liquid introduction portion 160 (second liquid introduction channel 161) via the fifth diaphragm valve 162, and is connected to the second cleaning liquid introduction portion 170 (second cleaning liquid introduction channel 171) via the sixth diaphragm valve 172. Therefore, the liquid (second liquid) introduced into the second liquid introduction portion 160 and the liquid (cleaning liquid) introduced into the second cleaning liquid introduction portion 170 flow through the second flow path 180. The sixth diaphragm valve 172 is disposed upstream of the fifth diaphragm valve 162 in the second flow path 180. The downstream end of the second channel 180 is connected to a second diaphragm valve 181. In the present embodiment, the second channel 180 is composed of a groove formed in the substrate 110 and the thin film 120 that closes the opening of the groove. The cross-sectional area and the cross-sectional shape of the second flow path 180 are not particularly limited. The cross-sectional shape of the second channel 180 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the second flow path 180 may or may not be constant in the flow direction of the fluid. In the present embodiment, the cross-sectional area of the second flow path 180 is fixed.

The second diaphragm valve 181 is disposed between the second channel 180 and the third channel 190, and has a partition wall and a diaphragm.

The partition wall of the second diaphragm valve 181 is a wall disposed between the second channel 180 and the third channel 190. The partition wall functions as a valve seat of a diaphragm valve for opening and closing the space between the second channel 180 and the third channel 190. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition wall is, for example, the same as the depth of the second flow channel 180 and the third flow channel 190.

The diaphragm of the second diaphragm valve 181 is a part of the flexible film 120, and has a substantially spherical crown shape. The thin film 120 is disposed on the substrate 110 so that the diaphragm and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a third convex portion 231 of a third rotating member 230 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the third convex portion 231 does not press the diaphragm, the second flow path 180 and the third flow path 190 are in a state of communicating with each other via the gap between the diaphragm and the partition wall. On the other hand, when the third convex portion 231 presses the diaphragm and the diaphragm is brought into contact with the partition wall, the second flow path 180 and the third flow path 190 are not in communication with each other.

The third flow path 190 is a flow path in which a fluid can move. The third flow path 190 is connected to the first flow path 150 via a first diaphragm valve 151, and is connected to the second flow path 180 via a second diaphragm valve 181. Therefore, the liquid (for example, the first liquid) flowing through the first channel 150 and the liquid (for example, the second liquid) flowing through the second channel 180 flow through the third channel 190. In the present embodiment, the first diaphragm valve 151 and the second diaphragm valve 181 are disposed at different positions from each other in the flow direction of the third flow path 190 (for example, in the extending direction of the third flow path 190), but they may be disposed at the same position as each other in the flow direction of the third flow path 190. In the present embodiment, the second diaphragm valve 181 is disposed upstream of the third channel 190 with respect to the first diaphragm valve 151. The downstream end of the third flow path 190 is connected to the chamber 191. In the present embodiment, the third flow channel 190 is composed of a groove formed in the substrate 110 and the thin film 120 that closes the opening of the groove. The cross-sectional area and the cross-sectional shape of the third flow channel 190 are not particularly limited. The cross-sectional shape of the third channel 190 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the third flow path 190 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the third flow channel 190 is constant.

The chamber 191 is a space for accommodating a fluid therein. In the present embodiment, the cavity 191 is formed by a recess formed in the substrate 110 and the thin film 120 that closes the opening of the recess. The shape and size of the cavity 191 are not particularly limited and may be appropriately adjusted according to the purpose. The shape of the chamber 191 is, for example, a substantially rectangular parallelepiped shape. The chamber 191 is connected to the downstream end of the third flow path 190. Further, the chamber 191 is connected to the upstream end of the discharge flow path 192.

The discharge flow path 192 is a flow path in which fluid can move. The upstream end of the discharge passage 192 is connected to the chamber 191, and the downstream end of the discharge passage 192 is connected to the discharge portion 193. Therefore, the fluid (for example, air, or a mixed liquid of the first liquid and the second liquid) in the chamber 191 flows into the discharge flow path 192. In the present embodiment, the discharge flow path 192 is composed of a groove formed in the substrate 110 and the thin film 120 that closes the opening of the groove. The cross-sectional area and cross-sectional shape of the discharge flow path 192 are not particularly limited. The cross-sectional shape of the discharge flow path 192 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the discharge flow path 192 may be fixed or may not be fixed in the fluid flow direction. In the present embodiment, the cross-sectional area of the discharge flow path 192 is constant.

The discharge portion 193 is a bottomed recess connected to the chamber 191 via the discharge flow path 192. The discharge portion 193 functions as an air hole or as an outlet for taking out the liquid in the chamber 191. In the present embodiment, the discharge portion 193 is formed of a through hole formed in the substrate 110 and the thin film 120 that closes one opening of the through hole. The shape and size of the discharge portion 193 are not particularly limited, and may be appropriately set as necessary. The shape of the discharge portion 193 is, for example, a substantially cylindrical shape. The width of the discharge portion 193 is, for example, about 2 mm.

(Structure of rotating Member)

Fig. 4 is a plan view of the rotary member 200 according to embodiment 1. In fig. 4, for the sake of easy observation, the top surfaces of the first convex portion 211, the second convex portion 221, and the third convex portion 231 are blackened. As described above, fig. 3 shows a cross-sectional view of the rotating member 200.

Rotating member 200 includes a cylindrical first rotating member 210, a cylindrical second rotating member 220, and a cylindrical third rotating member 230. The second rotating member 220 is disposed inside the first rotating member 210. The third rotating member 230 is disposed inside the second rotating member 220. The first, second, and third rotating members 210, 220, and 230 can rotate around the same rotation axis. They are individually rotated by an external drive mechanism not shown.

A first protrusion 211 for pressing the diaphragms of the third diaphragm valve 132, the fourth diaphragm valve 142, the fifth diaphragm valve 162, and the sixth diaphragm valve 172 is provided on the first rotating member 210. A second protrusion 221 for pressing the diaphragm of the first diaphragm valve 151 is provided on the second rotating member 220. A third protrusion 231 for pressing the diaphragm of the second diaphragm valve 181 is provided on the upper portion of the third rotating member 230. The first convex portion 211, the second convex portion 221, and the third convex portion 231 are all arc-shaped in a plan view, and the first convex portion 211, the second convex portion 221, and the third convex portion 231 are arranged in concentric circles.

(operation of fluid treatment apparatus)

Next, the operation of the fluid treatment apparatus 100 will be described with reference to fig. 5A to 5D. In fig. 5A to 5D, some components such as the separator are omitted for the convenience of viewing. Further, a portion where the first liquid or the second liquid is present is blackened. Further, the first liquid introduction portion 130 contains a first liquid, the second liquid introduction portion 160 contains a second liquid, the first cleaning liquid introduction portion 140 and the second cleaning liquid introduction portion 170 contain cleaning liquids, and the first liquid introduction portion 130, the second liquid introduction portion 160, the first cleaning liquid introduction portion 140, and the second cleaning liquid introduction portion 170 are pressurized.

First, the first, second, and third rotating members 210, 220, and 230 are rotated to open the third diaphragm valves 132 and the first diaphragm valves 151, and close the other diaphragm valves. Thus, as shown in fig. 5A, the first liquid in the first liquid introduction portion 130 passes through the first liquid introduction channel 131, the third diaphragm valve 132, the first channel 150, the first diaphragm valve 151, and the third channel 190, and moves to the chamber 191. At this time, since the second diaphragm valve 181 is closed, the first liquid does not flow into the second channel 180.

Next, the first, second, and third rotating members 210, 220, and 230 are rotated, respectively, to open the fourth diaphragm valves 142 and the first diaphragm valves 151, and close the other diaphragm valves. Thereby, as shown in fig. 5B, the cleaning liquid in the first cleaning liquid introduction portion 140 cleans the inside of the first cleaning liquid introduction flow path 141, the fourth diaphragm valve 142, the first flow path 150, the first diaphragm valve 151, and the third flow path 190.

Next, the first rotating member 210, the second rotating member 220, and the third rotating member 230 are rotated, respectively, to open the fifth diaphragm valve 162 and the second diaphragm valve 181, and close the other diaphragm valves. As a result, as shown in fig. 5C, the second liquid in the second liquid introduction portion 160 passes through the second liquid introduction channel 161, the fifth diaphragm valve 162, the second channel 180, the second diaphragm valve 181, and the third channel 190, and moves to the chamber 191. At this time, since the first diaphragm valve 151 is closed, the second liquid does not flow into the first flow path 150.

Finally, the first, second, and third rotating members 210, 220, and 230 are rotated, respectively, to open the sixth diaphragm valves 172 and the second diaphragm valves 181, and close the other diaphragm valves. As a result, as shown in fig. 5D, the cleaning liquid in the second cleaning liquid introduction portion 170 cleans the inside of the second cleaning liquid introduction flow path 171, the sixth diaphragm valve 172, the second flow path 180, the second diaphragm valve 181, and the third flow path 190.

By the above procedure, the first liquid and the second liquid can be brought into contact with each other for the first time in the chamber 191 without being brought into contact with each other in the first flow path 150, the second flow path 180, and the third flow path 190.

(Effect)

As described above, the fluid processing apparatus 100 according to embodiment 1 can bring the first liquid and the second liquid into contact with each other for the first time in the chamber 191 without bringing the first liquid and the second liquid into contact with each other in the first flow path 150, the second flow path 180, and the third flow path 190.

In the present embodiment, the fluid processing device 100 including the third diaphragm valve 132, the fourth diaphragm valve 142, the fifth diaphragm valve 162, and the sixth diaphragm valve 172 has been described, but the fluid processing device 100 may not include the third diaphragm valve 132, the fourth diaphragm valve 142, the fifth diaphragm valve 162, and the sixth diaphragm valve 172.

In the present embodiment, although rotating member 200 in which first rotating member 210, second rotating member 220, and third rotating member 230 are rotatable independently has been described, rotating member 200 may be integrated. For example, the fluid treatment apparatus 100 can be operated as shown in fig. 5A to 5D using the integrated rotating member 200 shown in fig. 6. In the integrated rotary member 200, the first convex portion 211, the second convex portion 221, and the third convex portion 231 are arranged as follows: when the first protrusion 211 does not press the diaphragm of the third diaphragm valve 132 or the fourth diaphragm valve 142, the second protrusion 221 does not press the diaphragm of the first diaphragm valve 151, and the third protrusion 231 presses the diaphragm of the second diaphragm valve 181. In addition, the first convex portion 211, the second convex portion 221, and the third convex portion 231 are arranged as follows: when the first protrusion 211 does not press the diaphragm of the fifth diaphragm valve 162 or the sixth diaphragm valve 172, the second protrusion 221 presses the diaphragm of the first diaphragm valve 151, and the third protrusion 231 does not press the diaphragm of the second diaphragm valve 181. In addition, the shape and the number of the convex portions provided to the rotating member can be arbitrarily changed.

In the present embodiment, the fluid treatment apparatus 100 having four liquid introduction portions is described, but the fluid treatment apparatus 100 may have another liquid introduction portion.

[ embodiment 2]

(construction of fluid treatment apparatus)

Fig. 7 is a plan view of a fluid treatment apparatus 300 according to embodiment 2. In fig. 7, a groove (channel, chamber) formed on the surface of the substrate 310 on the thin film side and a diaphragm formed on the thin film are shown by broken lines.

The fluid processing apparatus 300 includes a substrate 310 and a thin film (see fig. 3). The substrate 310 has a recess (groove) serving as a flow path or a chamber, and a through hole serving as an inlet or an outlet. The thin film is bonded to one surface of the substrate 310 so as to close the openings of the through holes and the recesses formed in the substrate 310. A partial region of the thin film functions as a separator. The concave portion of the substrate 310 sealed by the thin film serves as a flow path for flowing a fluid such as a reagent, a liquid sample, a gas, or a powder, or a chamber for mixing them.

The thickness of the substrate 310 is not particularly limited. For example, the thickness of the substrate 310 is 1mm or more and 10mm or less. In addition, the material of the substrate 310 is not particularly limited. For example, the material of the substrate 310 may be appropriately selected from known resins and glass. Examples of the material of the substrate 310 include: polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene, silicone resin, and elastomer.

The thickness of the thin film is not particularly limited as long as the thin film can function as a separator. For example, the thickness of the film is 30 μm or more and 300 μm or less. The material of the thin film is not particularly limited, and may function as a separator. For example, the material of the film can be appropriately selected from known resins. Examples of the material of the film include: polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene, silicone resin, and elastomer. The film is bonded to the substrate 310 by, for example, thermal welding, laser welding, an adhesive, or the like.

The fluid treatment apparatus 300 of the present embodiment includes: a first liquid introduction portion 320, a first liquid introduction flow path 321, a second diaphragm valve 322, a first flow path 330, a second liquid introduction portion 340, a second liquid introduction flow path 341, a third diaphragm valve 342, a second flow path 350, a cleaning liquid introduction portion 360, a cleaning liquid introduction flow path 361, a first diaphragm valve 362, a third flow path 370, and a chamber 371.

The first liquid introduction portion 320 is a recessed portion having a bottom for introducing the first liquid. In the present embodiment, the first liquid introduction part 320 is composed of a through hole formed in the substrate 310 and a thin film that closes one opening of the through hole. The shape and size of the first liquid introduction part 320 are not particularly limited, and may be appropriately set as needed. The shape of the first liquid introduction portion 320 is, for example, a substantially cylindrical shape. The width of the first liquid introduction portion 320 is, for example, about 2 mm. The fluid that can be stored in the first liquid introduction portion 320 can be appropriately selected according to the use of the fluid treatment apparatus 300. The fluid is a reagent, a liquid sample, a powder, or the like.

The first liquid introduction flow path 321 is a flow path in which a fluid can move. The upstream end of the first liquid introduction flow path 321 is connected to the first liquid introduction portion 320. The downstream end of the first liquid introduction channel 321 is connected to the second diaphragm valve 322. In the present embodiment, the first liquid introduction flow path 321 is composed of a groove formed in the substrate 310 and a thin film that closes an opening of the groove. The cross-sectional area and cross-sectional shape of the first liquid introduction flow path 321 are not particularly limited. As described above, in the present specification, the "cross section of the flow channel" refers to a cross section of the flow channel perpendicular to the direction in which the fluid flows. The cross-sectional shape of the first liquid introduction channel 321 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the first liquid introduction flow path 321 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the first liquid introduction flow path 321 is constant.

The second diaphragm valve 322 is disposed between the first liquid introduction flow path 321 and the first flow path 330, and has a partition wall and a diaphragm.

The partition wall of the second diaphragm valve 322 is a wall disposed between the first liquid introduction flow path 321 and the first flow path 330. The partition wall functions as a valve seat of a diaphragm valve for opening and closing a gap between the first liquid introduction flow path 321 and the first flow path 330. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition is, for example, the same as the depth of the first liquid introduction flow path 321 and the first flow path 330.

The diaphragm of the second diaphragm valve 322 is a part of a flexible thin film and has a substantially spherical crown shape. The thin film is disposed on the substrate 310 so that the separator and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a convex portion 401 of a rotating member 400 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the convex portion 401 does not press the diaphragm, the first liquid introduction flow path 321 and the first flow path 330 are in a state of communicating with each other via a gap between the diaphragm and the partition wall. On the other hand, when the convex portion 401 presses the diaphragm to contact the partition wall, the first liquid introduction flow path 321 and the first flow path 330 are not in communication with each other.

The first flow path 330 is a flow path in which fluid can move. The first channel 330 is connected to the first liquid introduction unit 320 (first liquid introduction channel 321) via the second diaphragm valve 322. Therefore, the liquid (first liquid) introduced into the first liquid introduction portion 320 flows in the first flow path 330. As described later, the upstream end of the first flow path 330 is connected to the cleaning liquid introduction unit 360 (cleaning liquid introduction flow path 361) via a first diaphragm valve 362. Therefore, the liquid (cleaning liquid) introduced into the cleaning liquid introduction portion 360 also flows through the first flow path 330. The first diaphragm valve 362 is disposed upstream of the first channel 330 with respect to the second diaphragm valve 322. The downstream end of the first flow path 330 is connected to the third flow path 370. In the present embodiment, the first flow path 330 is composed of a groove formed in the substrate 310 and a thin film that closes an opening of the groove. The cross-sectional area and the cross-sectional shape of the first flow path 330 are not particularly limited. The cross-sectional shape of the first channel 330 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the first flow path 330 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the first flow path 330 is constant.

The second liquid introduction portion 340 is a recessed portion having a bottom for introducing the second liquid. In the present embodiment, the second liquid introduction portion 340 is composed of a through hole formed in the substrate 310 and a thin film that closes one opening of the through hole. The shape and size of the second liquid introduction part 340 are not particularly limited, and may be appropriately set as necessary. The second liquid introduction portion 340 has a substantially cylindrical shape, for example. The width of the second liquid introduction part 340 is, for example, about 2 mm. The fluid that can be contained in the second liquid introduction portion 340 can be appropriately selected according to the use of the fluid treatment apparatus 300. The fluid is a reagent, a liquid sample, a powder, or the like. Generally, the first liquid introduced into the first liquid introduction part 320 and the second liquid introduced into the second liquid introduction part 340 are different kinds of liquids.

The second liquid introduction flow path 341 is a flow path in which a fluid can move. The upstream end of the second liquid introduction flow path 341 is connected to the second liquid introduction portion 340. The downstream end of the second liquid introduction flow path 341 is connected to a third diaphragm valve 342. In this embodiment, the second liquid introduction flow path 341 is composed of a groove formed in the substrate 310 and a thin film for closing an opening of the groove. The cross-sectional area and the cross-sectional shape of the second liquid introduction flow path 341 are not particularly limited. The cross-sectional shape of the second liquid introduction flow path 341 is, for example, a substantially rectangular shape having a side length (width and depth) of about several tens μm. The cross-sectional area of the second liquid introduction flow path 341 may be fixed or may not be fixed in the flow direction of the fluid. In the present embodiment, the cross-sectional area of the second liquid introduction flow path 341 is fixed.

The third diaphragm valve 342 is disposed between the second liquid introduction flow path 341 and the second flow path 350, and has a partition wall and a diaphragm.

The partition wall of the third diaphragm valve 342 is a wall disposed between the second liquid introduction flow path 341 and the second flow path 350. The partition wall functions as a valve seat of a diaphragm valve for opening and closing a gap between the second liquid introduction flow path 341 and the second flow path 350. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition is, for example, the same as the depth of the second liquid introduction flow path 341 and the second flow path 350.

The diaphragm of the third diaphragm valve 342 is a part of a flexible thin film and has a substantially spherical crown shape. The thin film is disposed on the substrate 310 so that the separator and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a convex portion 401 of a rotating member 400 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the convex portion 401 does not press the diaphragm, the second liquid introduction flow path 341 and the second flow path 350 are in a state of communicating with each other via the gap between the diaphragm and the partition wall. On the other hand, when the convex portion 401 presses the diaphragm and the diaphragm is brought into contact with the partition wall, the second liquid introduction flow path 341 and the second flow path 350 are not in communication with each other.

The second flow path 350 is a flow path in which fluid can move. The second channel 350 is connected to the second liquid introduction portion 340 (second liquid introduction channel 341) via a third diaphragm valve 342. Therefore, the liquid (second liquid) introduced into the second liquid introduction portion 340 flows in the second flow path 350. As described later, the upstream end of the second channel 350 is connected to the cleaning liquid introduction unit 360 (cleaning liquid introduction channel 361) via the first diaphragm valve 362. Therefore, the liquid (cleaning liquid) introduced into the cleaning liquid introduction portion 360 also flows through the second flow path 350. The first diaphragm valve 362 is disposed upstream of the second channel 350 relative to the third diaphragm valve 342. Further, a partition wall is disposed between the upstream end of the first flow path 330 and the second flow path 350. Therefore, when the diaphragm of the first diaphragm valve 362 contacts the partition wall, the first flow path 330 and the second flow path 350 are not communicated with each other. The downstream end of the second flow path 350 is connected to the third flow path 370. In the present embodiment, the second channel 350 is composed of a groove formed in the substrate 310 and a thin film that closes an opening of the groove. The cross-sectional area and the cross-sectional shape of the second flow path 350 are not particularly limited. The cross-sectional shape of the second channel 350 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the second flow path 350 may be fixed or may not be fixed in the fluid flow direction. In the present embodiment, the cross-sectional area of the second flow path 350 is constant.

The cleaning liquid introduction portion 360 is a recessed portion having a bottom for introducing a cleaning liquid for cleaning the first flow path 330 and the second flow path 350. In the present embodiment, the cleaning liquid introduction portion 360 is composed of a through hole formed in the substrate 310 and a thin film that closes one opening of the through hole. The shape and size of the cleaning liquid introduction portion 360 are not particularly limited, and may be appropriately set as needed. The cleaning liquid introduction portion 360 has a substantially cylindrical shape, for example. The width of the cleaning liquid introduction portion 360 is, for example, about 2 mm. The type of cleaning liquid that can be stored in the cleaning liquid introduction portion 360 can be appropriately selected according to the application of the fluid treatment apparatus 300. The cleaning liquid is, for example, water.

The cleaning liquid introduction passage 361 is a passage through which a fluid can move. The cleaning liquid introduction passage 361 has an upstream end connected to the cleaning liquid introduction portion 360. The downstream end of the cleaning liquid introduction passage 361 is connected to the first diaphragm valve 362. In the present embodiment, the cleaning liquid introduction passage 361 is composed of a groove formed in the substrate 310 and a thin film for closing an opening of the groove. The sectional area and the sectional shape of the cleaning liquid introduction passage 361 are not particularly limited. The sectional shape of the cleaning liquid introduction passage 361 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the cleaning liquid introduction passage 361 may be constant or may not be constant in the fluid flow direction. In the present embodiment, the sectional area of the cleaning liquid introduction passage 361 is fixed.

The first diaphragm valve 362 is disposed between the cleaning liquid introduction passage 361 and the first and second passages 330 and 350, and includes a partition wall and a diaphragm.

The partition wall of the first diaphragm valve 362 is a wall disposed between the cleaning liquid introduction passage 361 and the first and second passages 330 and 350. The partition wall functions as a valve seat of a diaphragm valve for opening and closing between the cleaning liquid introduction flow path 361 and the first and second flow paths 330 and 350. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition wall is, for example, the same as the depth of the cleaning liquid introduction passage 361, the first passage 330, and the second passage 350.

The diaphragm of the first diaphragm valve 362 is a part of a flexible thin film, and has a substantially spherical crown shape. The thin film is disposed on the substrate 310 so that the separator and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a convex portion 401 of a rotating member 400 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the convex portion 401 does not press the diaphragm, the cleaning liquid introduction passage 361 and the first and second passages 330, 350 are in a state of communicating with each other via the gap between the diaphragm and the partition wall. On the other hand, when the convex portion 401 presses the diaphragm to bring the diaphragm into contact with the partition wall, the cleaning liquid introduction passage 361 and the first and second passages 330, 350 are not in communication with each other.

The third flow path 370 is a flow path in which a fluid can move. The upstream end of the third flow channel 370 is connected to the downstream end of the first flow channel 330 and the downstream end of the second flow channel 350. Therefore, the liquid (e.g., the first liquid) flowing through the first flow path 330 and the liquid (e.g., the second liquid) flowing through the second flow path 350 flow through the third flow path 370. The downstream end of the third flow path 370 is connected to the chamber 371. In the present embodiment, the third flow path 370 is composed of a groove formed in the substrate 310 and a thin film for closing an opening of the groove. The cross-sectional area and the cross-sectional shape of the third flow channel 370 are not particularly limited. The cross-sectional shape of the third flow channel 370 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the third flow path 370 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the third flow channel 370 is constant.

The chamber 371 is a space for receiving a fluid therein. In this embodiment, the chamber 371 is constituted by a concave portion formed in the substrate 310 and a thin film for closing an opening of the concave portion. The shape and size of the chamber 371 are not particularly limited, and may be appropriately adjusted according to the purpose. The shape of the chamber 371 is, for example, a substantially rectangular parallelepiped shape. The chamber 371 is connected to the downstream end of the third flow path 370. Further, the chamber 371 is connected to the upstream end of the discharge flow path 372.

The discharge flow path 372 is a flow path in which fluid can move. The upstream end of the discharge channel 372 is connected to the chamber 371, and the downstream end of the discharge channel 372 is connected to the discharge portion 373. Therefore, the fluid (for example, air, or a mixed liquid of the first liquid and the second liquid) in the chamber 371 flows into the discharge flow path 372. In the present embodiment, the discharge flow path 372 is composed of a groove formed in the substrate 310 and a thin film that closes an opening of the groove. The cross-sectional area and cross-sectional shape of the discharge flow path 372 are not particularly limited. The cross-sectional shape of the discharge flow path 372 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the discharge flow path 372 may be fixed or may not be fixed in the fluid flow direction. In the present embodiment, the cross-sectional area of the discharge flow path 372 is constant.

The discharge portion 373 is a recessed portion having a bottom connected to the chamber 371 via the discharge flow path 372. The discharge portion 373 functions as an air hole or a discharge port for discharging the liquid in the chamber 371. In the present embodiment, the discharging portion 373 is composed of a through hole formed in the substrate 310 and a thin film that closes one opening of the through hole. The shape and size of the discharge portion 373 are not particularly limited, and may be appropriately set as needed. The shape of the discharge portion 373 is, for example, a substantially cylindrical shape. The width of the discharge portion 373 is, for example, about 2 mm.

(Structure of rotating Member)

Fig. 8 is a plan view of the rotating member 400 according to embodiment 2. In fig. 8, the top surface of the projection 401 is blackened for easy observation.

The rotating member 400 is a cylindrical member and can rotate around a rotation axis. The rotating member 400 is rotated by an external driving mechanism not shown.

A projection 401 for pressing the diaphragms of the first diaphragm valve 362, the second diaphragm valve 322, and the third diaphragm valve 342 is provided on the upper portion of the rotary member 400. The projection 401 has an arc shape in plan view.

(operation of fluid treatment apparatus)

Next, the operation of the fluid treatment apparatus 300 will be described with reference to fig. 9A to 9D. In fig. 9A to 9D, some components such as the separator are omitted for the convenience of viewing. Further, a portion where the first liquid or the second liquid is present is blackened. Further, the first liquid introduction portion 320 contains a first liquid, the second liquid introduction portion 340 contains a second liquid, the cleaning liquid introduction portion 360 contains a cleaning liquid, and the first liquid introduction portion 320, the second liquid introduction portion 340, and the cleaning liquid introduction portion 360 are pressurized.

First, the rotating member 400 is rotated to open the second diaphragm valve 322 and close the other diaphragm valves. Thus, as shown in fig. 9A, the first liquid in the first liquid introduction portion 320 passes through the first liquid introduction channel 321, the second diaphragm valve 322, the first channel 330, and the third channel 370, and moves to the chamber 371. In this case, a part of the first liquid may flow into the downstream portion of the second channel 350.

Next, the rotating member 400 is rotated, so that the first diaphragm valve 362 is opened and the other diaphragm valves are closed. Thus, as shown in fig. 9B, the cleaning liquid in the cleaning liquid introduction portion 360 cleans the inside of the cleaning liquid introduction flow path 361, the first diaphragm valve 362, the first flow path 330, the second flow path 350, and the third flow path 370. Thereby, the first liquid flowing into the second flow path 350 is removed.

Next, the rotating member 400 is rotated, so that the third diaphragm valve 342 is opened and the other diaphragm valves are closed. Thus, as shown in fig. 9C, the second liquid in the second liquid introduction portion 340 passes through the second liquid introduction path 341, the third diaphragm valve 342, the second flow path 350, and the third flow path 370, and moves to the chamber 371. In this case, a part of the second liquid may flow into the downstream portion of the first channel 330.

Finally, the rotating member 400 is rotated, thereby opening the first diaphragm valve 362 and closing the other diaphragm valves. Thus, as shown in fig. 9D, the cleaning liquid in the cleaning liquid introduction portion 362 cleans the inside of the cleaning liquid introduction flow path 361, the first diaphragm valve 362, the first flow path 330, the second flow path 350, and the third flow path 370. Thereby, the second liquid flowing into the first flow path 330 is removed.

By the above procedure, the first liquid and the second liquid can be brought into contact with each other for the first time in the chamber 371 without being brought into contact with each other in the first flow path 330, the second flow path 350, and the third flow path 370.

(Effect)

As described above, the fluid processing apparatus 300 according to embodiment 2 can bring the first liquid and the second liquid into contact with each other for the first time in the chamber 371 without bringing the first liquid and the second liquid into contact with each other in the first flow path 330, the second flow path 350, and the third flow path 370.

In the present embodiment, the fluid processing device 300 including the second diaphragm valve 322 and the third diaphragm valve 342 is described, but the fluid processing device 300 may not include the second diaphragm valve 322 and the third diaphragm valve 342.

In the present embodiment, the fluid treatment apparatus 300 having three liquid introduction portions has been described, but the fluid treatment apparatus 300 may have another liquid introduction portion.

[ embodiment 3]

(construction of fluid treatment apparatus)

Fig. 10 is a plan view of a fluid treatment apparatus 500 according to embodiment 3. In fig. 10, a groove (channel, chamber) formed on the surface of the substrate 510 on the thin film side and a diaphragm formed on the thin film are shown by dotted lines.

The fluid processing apparatus 500 includes a substrate 510 and a thin film (see fig. 10). The substrate 510 has a recess (groove) serving as a flow path or a chamber, and a through hole serving as an inlet or an outlet. The thin film is bonded to one surface of the substrate 510 so as to close the openings of the through holes and the recesses formed in the substrate 510. A partial region of the thin film functions as a separator. The concave portion of the substrate 510 sealed by the thin film serves as a flow path for flowing a fluid such as a reagent, a liquid sample, a gas, or a powder, or a chamber for mixing them.

The thickness of the substrate 510 is not particularly limited. For example, the thickness of the substrate 510 is 1mm or more and 10mm or less. In addition, the material of the substrate 510 is also not particularly limited. For example, the material of the substrate 510 may be appropriately selected from known resins and glass. Examples of the material of the substrate 510 include: polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene, silicone resin, and elastomer.

The thickness of the thin film is not particularly limited as long as the thin film can function as a separator. For example, the thickness of the film is 30 μm or more and 300 μm or less. The material of the thin film is not particularly limited, and may function as a separator. For example, the material of the film can be appropriately selected from known resins. Examples of the material of the film include: polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene, silicone resin, and elastomer. The film is bonded to the substrate 510 by, for example, thermal welding, laser welding, an adhesive, or the like.

The fluid treatment apparatus 500 of the present embodiment includes: a first liquid introduction portion 520, a first liquid introduction flow path 521, a first diaphragm valve 522, a first cleaning liquid introduction portion 530, a first cleaning liquid introduction flow path 531, a second diaphragm valve 532, a first flow path 540, a second liquid introduction portion 550, a second liquid introduction flow path 551, a third diaphragm valve 552, a second cleaning liquid introduction portion 560, a second cleaning liquid introduction flow path 561, a fourth diaphragm valve 562, a second flow path 570, a chamber 580, and a discharge flow path 581.

The first liquid introduction portion 520 is a recessed portion having a bottom for introducing the first liquid. In the present embodiment, the first liquid introduction part 520 is composed of a through hole formed in the substrate 510 and a thin film that closes one opening of the through hole. The shape and size of the first liquid introduction part 520 are not particularly limited, and may be appropriately set as needed. The shape of the first liquid introduction portion 520 is, for example, a substantially cylindrical shape. The width of the first liquid introduction part 520 is, for example, about 2 mm. The fluid that can be stored in the first liquid inlet 520 can be appropriately selected according to the use of the fluid treatment apparatus 500. The fluid is a reagent, a liquid sample, a powder, or the like.

The first liquid introduction flow path 521 is a flow path in which a fluid can move. The upstream end of the first liquid introduction path 521 is connected to the first liquid introduction portion 520. The downstream end of the first liquid introduction flow path 521 is connected to the first diaphragm valve 522. In the present embodiment, the first liquid introduction channel 521 is composed of a groove formed in the substrate 510 and a thin film that closes an opening of the groove. The cross-sectional area and cross-sectional shape of the first liquid introduction passage 521 are not particularly limited. As described above, in the present specification, the "cross section of the flow channel" refers to a cross section of the flow channel perpendicular to the direction in which the fluid flows. The cross-sectional shape of the first liquid introduction channel 521 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the first liquid introduction path 521 may be constant or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the first liquid introduction channel 521 is constant.

The first diaphragm valve 522 is disposed between the first liquid introduction channel 521 and the first channel 540, and includes a partition wall and a diaphragm.

The partition wall of the first diaphragm valve 522 is a wall disposed between the first liquid introduction channel 521 and the first channel 540. The partition wall functions as a valve seat of a diaphragm valve for opening and closing a gap between the first liquid introduction flow path 521 and the first flow path 540. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition is, for example, the same as the depth of the first liquid introduction channel 521 and the first channel 540.

The diaphragm of the first diaphragm valve 522 is a part of a flexible thin film and has a substantially spherical crown shape. The thin film is disposed on the substrate 510 such that the separator and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a convex portion 601 of a rotary member 600 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the convex portion 601 does not press the diaphragm, the first liquid introduction flow path 521 and the first flow path 540 are in a state of communicating with each other via a gap between the diaphragm and the partition wall. On the other hand, when the convex portion 601 presses the diaphragm to contact the partition wall, the first liquid introduction flow path 521 and the first flow path 540 are not in communication with each other.

The first cleaning liquid introduction part 530 is a recessed part having a bottom for introducing a cleaning liquid for cleaning the first flow path 540. In the present embodiment, the first cleaning liquid introduction part 530 is composed of a through hole formed in the substrate 510 and a thin film that closes one opening of the through hole. The shape and size of the first cleaning liquid introduction part 530 are not particularly limited, and may be appropriately set as necessary. The first cleaning liquid introduction part 530 has a substantially cylindrical shape, for example. The width of the first cleaning liquid introduction part 530 is, for example, about 2 mm. The type of cleaning liquid that can be stored in the first cleaning liquid introduction portion 530 can be appropriately selected according to the use of the fluid treatment apparatus 500. The cleaning liquid is, for example, water.

The first cleaning liquid introduction flow path 531 is a flow path through which a fluid can move. The upstream end of the first cleaning liquid introduction flow path 531 is connected to the first cleaning liquid introduction part 530. The downstream end of the first cleaning liquid introduction flow path 531 is connected to the second diaphragm valve 532. In the present embodiment, the first cleaning liquid introduction flow path 531 is constituted by a groove formed in the substrate 510 and a thin film that closes an opening of the groove. The cross-sectional area and the cross-sectional shape of the first cleaning liquid introduction flow path 531 are not particularly limited. The cross-sectional shape of the first cleaning liquid introduction flow path 531 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the first cleaning liquid introduction flow path 531 may be constant or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the first cleaning liquid introduction flow path 531 is constant.

The second diaphragm valve 532 is disposed between the first cleaning liquid introduction flow path 531 and the first flow path 540, and has a partition wall and a diaphragm.

The partition wall of the second diaphragm valve 532 is a wall disposed between the first cleaning liquid introduction flow path 531 and the first flow path 540. The partition wall functions as a valve seat of a diaphragm valve for opening and closing the first cleaning liquid introduction flow path 531 and the first flow path 540. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition wall is, for example, the same as the depth of the first cleaning liquid introduction flow path 531 and the first flow path 540.

The diaphragm of the second diaphragm valve 532 is a part of a flexible thin film and has a substantially spherical crown shape. The thin film is disposed on the substrate 510 such that the separator and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a convex portion 601 of a rotary member 600 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the convex portion 601 does not press the diaphragm, the first cleaning liquid introduction flow path 531 and the first flow path 540 are in a state of communicating with each other via the gap between the diaphragm and the partition wall. On the other hand, when the convex portion 601 presses the diaphragm to bring the diaphragm into contact with the partition wall, the first cleaning liquid introduction flow path 531 and the first flow path 540 are not in communication with each other.

The first flow path 540 is a flow path in which fluid can move. The first channel 540 is connected to the first liquid introduction portion 520 (first liquid introduction channel 521) via the first diaphragm valve 522, and is connected to the first cleaning liquid introduction portion 530 (first cleaning liquid introduction channel 531) via the second diaphragm valve 532. Therefore, the liquid (first liquid) introduced into the first liquid introduction portion 520 and the liquid (cleaning liquid) introduced into the first cleaning liquid introduction portion 530 flow in the first flow path 540. The second diaphragm valve 532 is disposed upstream of the first diaphragm valve 522 in the first flow path 540. The downstream end of the first flow path 540 is connected to the chamber 580. In the present embodiment, the first channel 540 is composed of a groove formed in the substrate 510 and a thin film that closes an opening of the groove. The cross-sectional area and the cross-sectional shape of the first flow channel 540 are not particularly limited. The cross-sectional shape of the first flow channel 540 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the first flow channel 540 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the first flow channel 540 is constant.

The second liquid introduction portion 550 is a recessed portion having a bottom for introducing the second liquid. In the present embodiment, the second liquid introduction portion 550 is composed of a through hole formed in the substrate 510 and a thin film that closes one opening of the through hole. The shape and size of the second liquid introduction portion 550 are not particularly limited, and may be appropriately set as necessary. The second liquid introduction portion 550 has, for example, a substantially cylindrical shape. The width of the second liquid introduction portion 550 is, for example, about 2 mm. The fluid that can be contained in the second liquid introduction portion 550 can be appropriately selected according to the use of the fluid treatment apparatus 500. The fluid is a reagent, a liquid sample, a powder, or the like. Generally, the first liquid introduced into the first liquid introduction part 520 and the second liquid introduced into the second liquid introduction part 550 are different kinds of liquids.

The second liquid introduction flow path 551 is a flow path through which a fluid can move. The upstream end of the second liquid introduction flow path 551 is connected to the second liquid introduction portion 550. The downstream end of the second liquid introduction channel 551 is connected to the third diaphragm valve 552. In this embodiment, the second liquid introduction flow path 551 is composed of a groove formed in the substrate 510 and a thin film that closes an opening of the groove. The cross-sectional area and cross-sectional shape of the second liquid introduction passage 551 are not particularly limited. The cross-sectional shape of the second liquid introduction channel 551 is, for example, a substantially rectangular shape having a side length (width and depth) of about several tens μm. The cross-sectional area of the second liquid introduction flow path 551 may or may not be constant in the flow direction of the fluid. In the present embodiment, the cross-sectional area of the second liquid introduction flow path 551 is constant.

The third diaphragm valve 552 is disposed between the second liquid introduction flow path 551 and the second flow path 570, and has a partition wall and a diaphragm.

The partition wall of the third diaphragm valve 552 is a wall disposed between the second liquid introduction channel 551 and the second channel 570. The partition wall functions as a valve seat of a diaphragm valve for opening and closing a space between the second liquid introduction flow path 551 and the second flow path 570. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition is, for example, the same as the depth of the second liquid introduction channel 551 and the second channel 570.

The diaphragm of the third diaphragm valve 552 is a part of a flexible thin film, and has a substantially spherical crown shape. The thin film is disposed on the substrate 510 such that the separator and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a convex portion 601 of a rotary member 600 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the convex portion 601 does not press the diaphragm, the second liquid introduction flow path 551 and the second flow path 570 communicate with each other through the gap between the diaphragm and the partition wall. On the other hand, when the convex portion 601 presses the diaphragm to bring the diaphragm into contact with the partition wall, the second liquid introduction flow path 551 and the second flow path 570 are not in communication with each other.

The second cleaning liquid introduction portion 560 is a recessed portion having a bottom for introducing a cleaning liquid for cleaning the second flow path 570. In the present embodiment, the second cleaning liquid introduction portion 560 is composed of a through hole formed in the substrate 510 and a thin film that closes one opening of the through hole. The shape and size of the second cleaning liquid introduction part 560 are not particularly limited, and may be appropriately set as necessary. The second cleaning liquid introduction portion 560 has a substantially cylindrical shape, for example. The width of the second cleaning liquid introduction portion 560 is, for example, about 2 mm. The type of cleaning liquid that can be stored in the second cleaning liquid introduction portion 560 can be appropriately selected according to the use of the fluid treatment apparatus 500. The cleaning liquid is, for example, water. The cleaning liquid introduced into the first cleaning liquid introduction part 530 and the cleaning liquid introduced into the second cleaning liquid introduction part 560 may be the same type of liquid or different types of liquids.

The second cleaning liquid introduction flow path 561 is a flow path through which a fluid can move. An upstream end of the second cleaning liquid introduction flow path 561 is connected to the second cleaning liquid introduction portion 560. The downstream end of the second cleaning liquid introduction flow path 561 is connected to the fourth diaphragm valve 562. In the present embodiment, the second cleaning liquid introduction flow path 561 is composed of a groove formed in the substrate 510 and a thin film for closing an opening of the groove. The cross-sectional area and the cross-sectional shape of the second cleaning liquid introduction flow path 561 are not particularly limited. The cross-sectional shape of the second cleaning liquid introduction passage 561 is, for example, a substantially rectangular shape having a side length (width and depth) of about several tens μm. The cross-sectional area of the second cleaning liquid introduction flow path 561 may or may not be constant in the fluid flow direction. In the present embodiment, the cross-sectional area of the second cleaning liquid introduction flow path 561 is fixed.

The fourth diaphragm valve 562 is disposed between the second cleaning liquid introduction flow path 561 and the second flow path 570, and has a partition wall and a diaphragm.

The partition wall of the fourth diaphragm valve 562 is a wall disposed between the second cleaning liquid introduction flow path 561 and the second flow path 570. The partition wall functions as a valve seat of a diaphragm valve for opening and closing between the second cleaning liquid introduction flow path 561 and the second flow path 570. The shape and height of the partition wall are not particularly limited as long as the above-described function can be exhibited. The partition wall has a quadrangular prism shape, for example. The height of the partition wall is, for example, the same as the depth of the second cleaning liquid introduction flow path 561 and the second flow path 570.

The diaphragm of the fourth diaphragm valve 562 is a part of a flexible thin film, and has a substantially spherical crown shape. The thin film is disposed on the substrate 510 such that the separator and the partition wall face each other without contact. The diaphragm is bent toward the partition wall when pressed by a convex portion 601 of a rotary member 600 (described later). That is, the diaphragm functions as a valve body of the diaphragm valve. When the convex portion 601 does not press the diaphragm, the second cleaning liquid introduction flow path 561 and the second flow path 570 are in a state of communicating with each other via a gap between the diaphragm and the partition wall. On the other hand, when the convex portion 601 is pressed against the diaphragm and the diaphragm is brought into contact with the partition wall, the second cleaning liquid introduction flow path 561 and the second flow path 570 are not in communication with each other.

The second flow path 570 is a flow path in which fluid can move. The second channel 570 is connected to the second liquid introduction portion 550 (second liquid introduction channel 551) via the third diaphragm valve 552, and is connected to the second cleaning liquid introduction portion 560 (second cleaning liquid introduction channel 561) via the fourth diaphragm valve 562. Therefore, the liquid (second liquid) introduced into the second liquid introduction portion 550 and the liquid (cleaning liquid) introduced into the second cleaning liquid introduction portion 560 flow through the second flow path 570. The fourth diaphragm valve 562 is disposed upstream of the third diaphragm valve 552 in the second flow path 570. The downstream end of the second flow path 570 is connected to the chamber 580. In the present embodiment, the second channel 570 is composed of a groove formed in the substrate 510 and a thin film that closes an opening of the groove. The cross-sectional area and cross-sectional shape of the second flow channel 570 are not particularly limited. The cross-sectional shape of the second flow channel 570 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the second flow channel 570 may or may not be constant in the direction of fluid flow. In the present embodiment, the cross-sectional area of the second flow channel 570 is fixed.

The chamber 580 is a space for receiving a fluid therein. In this embodiment, the chamber 580 is formed of a recess formed in the substrate 510 and a thin film that closes an opening of the recess. The shape and size of the chamber 580 are not particularly limited and may be appropriately adjusted according to the purpose. The shape of the chamber 580 is, for example, a substantially rectangular parallelepiped shape. The chamber 580 is connected to the downstream end of the first flow path 540 and the downstream end of the second flow path 570, respectively. The chamber 580 is connected to an upstream end of the discharge flow path 581.

The discharge flow path 581 is a flow path in which a fluid can move. An upstream end of the discharge flow path 581 is connected to the chamber 580, and a downstream end of the discharge flow path 581 is connected to the discharge portion 582. Therefore, the fluid (for example, air, or a mixed liquid of the first liquid and the second liquid, or the like) in the chamber 580 flows into the discharge flow path 581. In the present embodiment, the discharge flow path 581 is composed of a groove formed in the substrate 510 and a thin film for closing an opening of the groove. The cross-sectional area and the cross-sectional shape of the discharge flow path 581 are not particularly limited. The cross-sectional shape of the discharge flow path 581 is, for example, a substantially rectangular shape having a length (width and depth) of one side of several tens μm or so. The cross-sectional area of the discharge passage 581 may be fixed or may not be fixed in the fluid flow direction. In the present embodiment, the cross-sectional area of the discharge flow path 581 is constant.

The discharge portion 582 is a bottomed recess connected to the chamber 580 via the discharge flow path 581. The discharge portion 582 functions as an air hole or as an outlet for taking out the liquid in the chamber 580. In the present embodiment, the discharge portion 582 is composed of a through hole formed in the substrate 510 and a thin film that closes one opening of the through hole. The shape and size of the discharge portion 582 are not particularly limited, and may be appropriately set as necessary. The shape of the discharge portion 582 is, for example, a substantially cylindrical shape. The width of the discharge portion 582 is, for example, about 2 mm.

(Structure of rotating Member)

Fig. 11 is a plan view of rotary member 600 according to embodiment 3. In fig. 11, the top surface of the projection 601 is blackened for easy observation.

Rotary member 600 is a cylindrical member and can rotate about a rotation axis. The rotary member 600 is rotated by an external drive mechanism not shown.

A convex portion 601 for pressing the diaphragms of the first diaphragm valve 522, the second diaphragm valve 532, the third diaphragm valve 552, and the fourth diaphragm valve 562 is provided on the upper portion of the rotating member 600. The projection 601 has an arc shape in plan view.

(operation of fluid treatment apparatus)

Next, the operation of the fluid processing apparatus 500 will be described with reference to fig. 12A to 12D. In fig. 12A to 12D, some components such as the separator are omitted for convenience of observation. Further, a portion where the first liquid or the second liquid is present is blackened. Further, the first liquid introduction portion 520 contains a first liquid, the second liquid introduction portion 550 contains a second liquid, the first cleaning liquid introduction portion 530 and the second cleaning liquid introduction portion 560 contain cleaning liquids, and the first liquid introduction portion 520, the second liquid introduction portion 550, the first cleaning liquid introduction portion 530, and the second cleaning liquid introduction portion 560 are pressurized.

First, the rotary member 600 is rotated, so that the first diaphragm valve 522 is opened and the other diaphragm valves are closed. Thus, as shown in fig. 12A, the first liquid in the first liquid introduction unit 520 passes through the first liquid introduction channel 521, the first diaphragm valve 522, and the first channel 540, and moves to the chamber 580. At this time, since the first flow path 540 and the second flow path 570 are individually connected to the chamber 580, the first liquid does not flow into the second flow path 570.

Next, the rotating member 600 is rotated, thereby opening the second diaphragm valve 532 and closing the other diaphragm valves. As a result, as shown in fig. 12B, the cleaning liquid in the first cleaning liquid introduction portion 530 cleans the inside of the first cleaning liquid introduction flow path 531, the second diaphragm valve 532, and the first flow path 540.

Next, the rotating member 600 is rotated, so that the third diaphragm valve 552 is opened and the other diaphragm valves are closed. Thus, as shown in fig. 12C, the second liquid in the second liquid introduction portion 550 passes through the second liquid introduction channel 551, the third diaphragm valve 552, and the second channel 570, and moves to the chamber 580. At this time, since the first flow path 540 and the second flow path 570 are individually connected to the chamber 580, the second liquid does not flow into the first flow path 540.

Finally, the rotating component 600 is rotated, thereby opening the fourth diaphragm valve 562 and closing the other diaphragm valves. As a result, as shown in fig. 12D, the cleaning liquid in the second cleaning liquid introduction portion 560 cleans the inside of the second cleaning liquid introduction flow path 561, the fourth diaphragm valve 562, and the second flow path 570.

By the above-described procedure, the first liquid and the second liquid can be brought into contact with each other for the first time in the chamber 581 without being brought into contact with each other in the first flow path 540 and the second flow path 570.

(Effect)

As described above, the fluid processing apparatus 500 according to embodiment 3 can bring the first liquid and the second liquid into contact with each other for the first time in the chamber 581 without bringing the first liquid and the second liquid into contact with each other in the first flow path 540 and the second flow path 570.

In the present embodiment, the fluid processing device 500 including the first diaphragm valve 522, the second diaphragm valve 532, the third diaphragm valve 552, and the fourth diaphragm valve 562 has been described, but the fluid processing device 500 may not include the first diaphragm valve 522, the second diaphragm valve 532, the third diaphragm valve 552, and the fourth diaphragm valve 562.

In the present embodiment, the fluid processing apparatus 500 having four liquid introduction portions has been described, but the fluid processing apparatus 500 may have another liquid introduction portion.

The application claims priority based on japanese patent application laid-open at 22.2.2018 for 2018 and 029833. The entire contents described in the specification and drawings of this application are incorporated in the specification of this application.

Industrial applicability

The fluid processing apparatus of the present invention is useful for various applications such as clinical examination, food examination, and environmental examination.

Description of the reference numerals

10 a first liquid introduction part for introducing a liquid,

12a first flow path of a first fluid,

20 a second liquid introduction part for introducing a second liquid,

22 a second flow path of the liquid,

30 a liquid take-out part for taking out the liquid,

32 a third flow path of the second fluid,

100 a fluid treatment device for the treatment of a fluid,

110 of a substrate, and a plurality of substrates,

120 of a thin film of a film of,

130 a first liquid introduction part for introducing a first liquid,

131 a first liquid introduction flow path,

132 a third diaphragm valve of the type described,

140 a first cleaning liquid introduction part for introducing cleaning liquid,

141 a first cleaning liquid introduction flow path,

142 of the fourth diaphragm valve is provided,

150 of the first flow path is provided,

151 a first diaphragm valve, a diaphragm valve,

160 a second liquid introduction portion for introducing a second liquid,

161 a second liquid introduction flow path,

162 a fifth diaphragm valve having a diaphragm valve,

170 a second cleaning liquid introduction part at a position,

171 a second cleaning liquid introduction flow path,

172 a sixth diaphragm valve which is,

180 of the second flow path is provided in the second flow path,

181 a second diaphragm valve, which is,

190 a third flow path of the liquid,

191 the chambers of the chamber are provided with a plurality of cavities,

192 of the discharge flow path of the gas,

193 a discharge part for discharging the molten metal from the molten metal reservoir,

200 the rotation element of the rotary part of the device,

210 a first rotating member of the first rotating part,

211 a first convex portion of the first group,

220 of the second rotating part,

221 a second convex portion of the first convex portion,

230 a third rotating member of the second rotating member,

231 of the third convex portion of the first plate,

300 a fluid-handling device for use in a fluid-handling device,

310 of the substrate, and a plurality of the first and second substrates,

320 a first liquid introduction part for introducing a first liquid,

321 a first liquid introduction flow path,

322 of the second diaphragm valve, and,

330 a first flow path of the first fluid,

340 a second liquid introduction part for introducing a second liquid,

341 a second liquid introduction flow path,

342 of a third diaphragm valve, and a third diaphragm valve,

350 of the second flow path of the second fluid,

360 a cleaning liquid introduction part, and a cleaning liquid introduction part,

361 a cleaning liquid introduction flow path,

362 a first diaphragm valve having a first diaphragm valve,

370 the third flow path is a flow path,

371 the chamber, the first chamber,

372 is discharged from the flow path of the liquid,

a discharge part 373 at which the liquid is discharged,

the rotating member 400 is rotated by a rotating unit,

the convex part 401 is provided with a convex part,

500 a fluid-handling device for use in a fluid-handling device,

510 a substrate, and a plurality of conductive lines,

520 a first liquid introduction part for introducing a first liquid,

521 a first liquid introduction flow path,

522 a first diaphragm valve is provided and,

530 a first cleaning liquid introduction part for introducing cleaning liquid,

531 the first cleaning liquid introduction flow path,

532 a second diaphragm valve, the diaphragm valve,

540 a first flow path of a first fluid,

550 a second liquid introduction part for introducing a second liquid,

551 a second liquid introduction flow path,

552 of a third diaphragm valve,

560 a second cleaning liquid introduction part,

561 a second cleaning liquid introduction flow path,

562 a fourth diaphragm valve is provided,

570 of the second flow path of the first flow path,

580 are provided in the chamber, and the chamber,

581 the discharge flow path is provided,

582 a discharge section for discharging the molten metal from the molten metal reservoir,

600 the rotation of the component(s) is performed,

601 a convex part.