阅读说明：本技术 高压气体采样试验装置及采样试验方法 (High-pressure gas sampling test device and sampling test method ) 是由 罗艳 吴晓斌 王魁波 谢婉露 李慧 于 2020-05-13 设计创作，主要内容包括：本申请实施例中提供了一种高压气体采样试验装置及采样试验方法,高压气体采样试验装置包括真空过渡组件、真空测量组件以及采样通道组件；真空过渡组件用于减压获取一定气压的待测高压气体；真空测量组件用于测量所述待测高压气体的气体组成；采样通道组件用于连接所述真空过渡组件和/或真空测量组件；其中,所述采样通道组件包括并联的以下采样通道支路中的至少两种：小孔采样通道支路、毛细管采样通道支路以及采样阀通道支路。通过本申请的高压气体采样试验装置及采样试验方法可以系统地研究分析某种或者某几种气体采样方式对气体成分分析的影响。(The embodiment of the application provides a high-pressure gas sampling test device and a sampling test method, wherein the high-pressure gas sampling test device comprises a vacuum transition assembly, a vacuum measurement assembly and a sampling channel assembly; the vacuum transition component is used for decompressing to obtain high-pressure gas to be measured with certain air pressure; the vacuum measurement assembly is used for measuring the gas composition of the high-pressure gas to be measured; the sampling channel assembly is used for connecting the vacuum transition assembly and/or the vacuum measurement assembly; wherein the sampling channel assembly comprises at least two of the following sampling channel branches in parallel: the sampling device comprises a small hole sampling channel branch, a capillary tube sampling channel branch and a sampling valve channel branch. The high-pressure gas sampling test device and the sampling test method can systematically research and analyze the influence of certain or a plurality of gas sampling modes on gas component analysis.)

1. A high-pressure gas sampling test device, characterized by comprising:

the vacuum transition component is used for decompressing to obtain high-pressure gas to be detected with certain air pressure;

the vacuum measurement assembly is used for measuring the gas composition of the high-pressure gas to be measured;

the sampling channel assembly is used for connecting the vacuum transition assembly and/or the vacuum measurement assembly; wherein the sampling channel assembly comprises at least two of the following sampling channel branches in parallel: the sampling device comprises a small hole sampling channel branch, a capillary tube sampling channel branch and a sampling valve channel branch.

2. The high pressure gas sampling test device of claim 1, wherein the vacuum transition assembly comprises a transition chamber, a vacuum gauge, and a vacuum transition pump package; the front end of the transition chamber is directly decompressed to obtain or is connected with the sampling channel assembly and then decompressed to obtain high-pressure gas to be measured, and the rear end of the transition chamber is connected with the sampling channel assembly or the vacuum measurement assembly; the transition chamber is connected with a vacuum gauge and a vacuum transition pump set.

3. The high pressure gas sampling test device of claim 1, wherein the vacuum measurement assembly comprises a mass spectrometer chamber, a vacuum gauge, a mass spectrometer and a vacuum measurement pump set; the front end of the mass spectrum cavity directly obtains or is connected with the sampling channel assembly to obtain the vacuum to be measured with certain air pressure, and the mass spectrum cavity is connected with a vacuum gauge, a mass spectrometer and a vacuum measurement pump set.

4. The high pressure gas sampling test device of claim 1, wherein the vacuum transition pump set and the vacuum measurement pump set each comprise a molecular pump and a mechanical pump.

5. The high pressure gas sampling test device of claim 1, wherein the sampling channel branch comprises a sampling channel and a shut-off valve.

6. The high pressure gas sampling test device of claim 5, wherein the shut-off valve of the sampling channel branch is disposed at one or both ends of the sampling channel.

7. The high pressure gas sampling test device of claim 5, wherein the sampling channel is removably mounted to the sampling channel leg.

8. The high-pressure gas sampling test device according to claim 1, further comprising a fine adjustment valve, wherein the fine adjustment valve is disposed on a channel between the vacuum measurement component and the vacuum transition component, or on a path through which the vacuum transition component decompresses to obtain the high-pressure gas to be measured.

9. A high-pressure gas sampling test method is characterized by comprising the following specific steps:

decompressing to obtain high-pressure gas to be measured with a certain pressure;

measuring the gas composition of the high-pressure gas to be measured;

acquiring high-pressure gas to be detected through a sampling channel assembly, and/or acquiring high-pressure gas to be detected with certain air pressure through the sampling channel assembly; wherein the sampling channel assembly comprises at least two of the following sampling channel branches in parallel: the sampling device comprises a small hole sampling channel branch, a capillary tube sampling channel branch and a sampling valve channel branch.

10. The high pressure gas sampling test method of claim 9, wherein the sampling channel branch comprises a sampling channel and a shut-off valve.

Technical Field

The application belongs to the technical field of measurement and analysis, and particularly relates to a high-pressure gas sampling test device and a sampling test method.

Background

The extreme ultraviolet lithography (EUVL) is used for obtaining the lithography node technology of 7nm and below, the extreme ultraviolet lithography machine adopts extreme ultraviolet light (EUV) with the wavelength of 13.5nm, and since air and almost all refractive optical materials have strong absorption effect on EUV13.5nm, an optical system, a silicon wafer stage and a mask stage of the extreme ultraviolet lithography machine must be in a Vacuum Environment, any solid material can be deflated when being placed in the Vacuum Environment, and simultaneously a great amount of polluted gas can be generated by the action of air and resist in the EUV exposure process, a reflecting mirror in the EUVL optical system is very sensitive to the pollutants, and the reflectivity of the reflecting mirror is reduced when the reflecting mirror is slightly polluted, so that the EUVL system has strict requirements on the total pressure, the gas component and the partial pressure of each Vacuum microenvironment^-7Pa, water partial pressure less than or equal to 1 × 10^-5Pa to ensure that the reflectivity loss of the optical system is less than 1% over 7-10 years.

Mass spectrometers are often used in industry to achieve accurate measurements of gas composition and partial pressure in a vacuum. Mass spectrometers typically require a certain vacuum (e.g., 10 f)^-2Pa) that otherwise could cause damage to the mass spectrometer components. The total pressure of the EUVL vacuum microenvironment is low vacuum with the magnitude of Pa and higher than the working pressure of a general mass spectrometer, and the gas to be detected in the vacuum needs to be subjected to pressure reduction sampling for detection; meanwhile, the partial pressure measurement of the EUVL vacuum microenvironment needs to be fast enough, and has certain requirements on sampling time.

The gas is sampled in a plurality of ways under vacuum, such as capillary sampling, small hole sampling, sampling valves and the like, while the gas component analysis result is closely related to the sampling process, such as the pressure reduction measurement on the gas component proportion change condition, the sampling time and the like, and the influence research on the gas component analysis is carried out through the sampling way, so that the more accurate vacuum gas analysis result is obtained. Therefore, a sampling test apparatus and a sampling test method for high-pressure gas are needed, and the influence of a gas sampling method on gas component analysis can be systematically studied.

Disclosure of Invention

The invention provides a sampling test device and a sampling test method for high-pressure gas, and aims to solve the problem that the influence of a gas sampling mode on gas component analysis needs to be systematically researched and analyzed in the conventional high-pressure gas sampling analysis technology.

According to a first aspect of the embodiments of the present application, there is provided a high-pressure gas sampling test apparatus, including a vacuum transition component, a vacuum measurement component and a sampling channel component, specifically:

the vacuum transition component is used for decompressing to obtain high-pressure gas to be detected with certain air pressure;

the vacuum measurement assembly is used for measuring the gas composition of the high-pressure gas to be measured;

the sampling channel assembly is used for connecting the vacuum transition assembly and/or the vacuum measurement assembly; wherein, the sampling channel subassembly includes the following at least two kinds of sampling channel branch road of parallelly connected: the sampling device comprises a small hole sampling channel branch, a capillary tube sampling channel branch and a sampling valve channel branch.

Optionally, the vacuum transition assembly comprises a transition chamber, a vacuum gauge and a vacuum transition pump set; the front end of the transition chamber is directly decompressed to obtain or is connected with a sampling channel assembly and then decompressed to obtain high-pressure gas to be measured, and the rear end of the transition chamber is connected with the sampling channel assembly or a vacuum measurement assembly; the transition chamber is connected with a vacuum gauge and a vacuum transition pump set.

Optionally, the vacuum measurement assembly comprises a mass spectrum chamber, a vacuum gauge, a mass spectrometer and a vacuum measurement pump set; the front end of the mass spectrum cavity directly obtains or obtains the vacuum to be measured with a certain air pressure after being connected with the sampling channel assembly, and the mass spectrum cavity is connected with a vacuum gauge, a mass spectrometer and a vacuum measurement pump set.

Optionally, the vacuum transition pump set and the vacuum measurement pump set each include a molecular pump and a mechanical pump.

Optionally, the sampling channel branch comprises a sampling channel and a shut-off valve.

Optionally, a shut-off valve of the sampling channel branch is provided at one or both ends of the sampling channel.

Optionally, the sampling channel is detachably mounted on the sampling channel branch.

Optionally, the device further comprises a fine adjustment valve, wherein the fine adjustment valve is arranged on a channel between the vacuum measurement assembly and the vacuum transition assembly, or is arranged on a passage for obtaining the high-pressure gas to be measured through decompression of the vacuum transition assembly.

According to a second aspect of the embodiments of the present application, there is provided a high pressure gas sampling test method, specifically including the following steps:

decompressing to obtain high-pressure gas to be measured with a certain pressure;

measuring the gas composition of the high-pressure gas to be measured;

obtaining high-pressure gas to be detected through pressure reduction of the sampling channel assembly, and/or obtaining high-pressure gas to be detected with certain air pressure through the sampling channel assembly; wherein, the sampling channel subassembly includes the following at least two kinds of sampling channel branch road of parallelly connected: the sampling device comprises a small hole sampling channel branch, a capillary tube sampling channel branch and a sampling valve channel branch.

Optionally, the sampling channel branch comprises a sampling channel and a shut-off valve.

By adopting the high-pressure gas sampling test device and the sampling test method in the embodiment of the application, the high-pressure gas sampling test device comprises a vacuum transition component, a vacuum measurement component and a sampling channel component; the vacuum transition component is used for decompressing to obtain high-pressure gas to be measured with certain air pressure; the vacuum measurement assembly is used for measuring the gas composition of the high-pressure gas to be measured; the sampling channel assembly is used for connecting the vacuum transition assembly and/or the vacuum measurement assembly; wherein the sampling channel assembly comprises at least two of the following sampling channel branches in parallel: the sampling device comprises a small hole sampling channel branch, a capillary tube sampling channel branch and a sampling valve channel branch. The high-pressure gas sampling test device and the sampling test method can systematically research and analyze the influence of certain or a plurality of gas sampling modes on gas component analysis.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

FIG. 1 is a schematic diagram of a high pressure gas sampling test apparatus according to an embodiment of the present application;

FIG. 2 is a schematic diagram of a high pressure gas sampling test apparatus according to another embodiment of the present application;

a schematic structural diagram of a high-pressure gas sampling test device according to another embodiment of the present application is shown in fig. 3;

FIG. 4 shows a schematic structural diagram of a high pressure gas sampling test apparatus according to another embodiment of the present application;

FIG. 5 shows a comparison graph of an atmospheric mass spectrum obtained by sampling a needle valve and a capillary according to an embodiment of the present application;

FIG. 6 shows a comparison graph of the needle valve and capillary tube sampling to obtain the isotope spectrogram of trace Xe gas in the atmosphere according to the embodiment of the present application;

FIG. 7 shows a schematic step diagram of a high pressure gas sampling test method according to an embodiment of the present application;

the device comprises a sampling valve 01, a sampling capillary tube 02, a sampling small hole 03, a mass spectrum chamber 11, a transition chamber 12, a mechanical pump 21-22, a molecular pump 23-24, a vacuum gauge 31-32, a mass spectrometer 33, a stop valve 41-46,410, a three-way valve 47, an angle valve 48, a trim valve 49, a stop valve 411-416, a sampling valve 51, a sampling capillary tube 52 and a sampling small hole 53.

Detailed Description

In the process of implementing the application, the inventor finds that when high-pressure gas is measured, a plurality of gas sampling modes are available, such as capillary sampling, small-hole sampling, sampling valves and the like, and the gas component analysis result is closely related to the sampling process.

By adopting the high-pressure gas sampling test device and the sampling test method in the embodiment of the application, the sampling channel can be selected by adopting the sampling channel assembly. The sampling channel assembly is used for connecting the vacuum transition assembly and/or the vacuum measurement assembly; the vacuum transition component is used for decompressing to obtain high-pressure gas to be measured with certain air pressure; the vacuum measurement component is used for indirectly measuring the gas composition of the high-pressure gas to be measured; wherein the sampling channel assembly comprises at least two of the following sampling channel branches in parallel: the sampling device comprises a small hole sampling channel branch, a capillary tube sampling channel branch and a sampling valve channel branch. The high-pressure gas sampling test device and the sampling test method can systematically research and analyze the influence of certain or a plurality of gas sampling modes on gas component analysis.

In order to make the technical solutions and advantages of the embodiments of the present application more apparent, the following further detailed description of the exemplary embodiments of the present application with reference to the accompanying drawings makes it clear that the described embodiments are only a part of the embodiments of the present application, and are not exhaustive of all embodiments. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.