阅读说明：本技术 用于真空反应炉的减震装置及晶体生长炉 (Damping device for vacuum reaction furnace and crystal growth furnace ) 是由 李帅 李乃庆 李宏刚 赵建国 李函朔 于 2020-04-23 设计创作，主要内容包括：本发明提供了一种用于真空反应炉的减震装置,所述减震装置包括：连接管路、第一空气垫、第二空气垫和压力控制装置,所述连接管路包括真空管路,所述真空管路外侧依次设置有阻尼减震层和空气减震层；所述连接管路用于连接真空反应炉的抽真空装置和炉体；所述第一空气垫用于容纳恒定气压的气体,所述第一空气垫连接真空反应炉抽真空装置的底部；所述第二空气垫用于容纳恒定气压的气体,所述第二空气垫连接真空反应炉炉体的底部。本发明通过在真空管路外设置阻尼减震层和空气管路层,通过真空管路的双重减震,显著降低了真空管路的震动,且将空气减震应用到晶体生长炉、真空泵和管路,使炉体内基本上处于一个静止的状态,减震效果得到大幅度地提高。(The present invention provides a damping device for a vacuum reaction furnace, the damping device comprising: the device comprises a connecting pipeline, a first air cushion, a second air cushion and a pressure control device, wherein the connecting pipeline comprises a vacuum pipeline, and a damping shock-absorbing layer and an air shock-absorbing layer are sequentially arranged on the outer side of the vacuum pipeline; the connecting pipeline is used for connecting a vacuumizing device of the vacuum reaction furnace and the furnace body; the first air cushion is used for containing gas with constant air pressure and is connected with the bottom of a vacuum pumping device of the vacuum reaction furnace; the second air cushion is used for containing gas with constant air pressure and is connected with the bottom of the vacuum reaction furnace body. According to the invention, the damping shock absorption layer and the air pipeline layer are arranged outside the vacuum pipeline, the shock of the vacuum pipeline is obviously reduced through double shock absorption of the vacuum pipeline, and the air shock absorption is applied to the crystal growth furnace, the vacuum pump and the pipeline, so that the inside of the furnace body is basically in a static state, and the shock absorption effect is greatly improved.)

1. A shock-absorbing device for a vacuum reaction furnace, comprising:

the connecting pipeline comprises a vacuum pipeline, and a damping shock absorption layer and an air shock absorption layer are sequentially arranged on the outer side of the vacuum pipeline; the connecting pipeline is used for connecting a vacuumizing device of the vacuum reaction furnace and the furnace body;

the first air cushion is used for containing gas with constant air pressure and is connected with the bottom of the vacuum pumping device of the vacuum reaction furnace;

and the second air cushion is used for containing gas with constant air pressure and is connected with the bottom of the vacuum reaction furnace body.

2. The shock absorbing device of claim 1, wherein the material of the damping shock absorbing layer is selected from viscoelastic materials;

preferably, the material of the damping shock absorption layer is selected from at least one of polyurethane elastomer and polyvinyl butyral;

preferably, the density of the damping shock-absorbing layer material is 0.9-0.95 g/cm³。

3. The shock absorbing device as claimed in claim 1, wherein the outer layer material of the air duct layer is the same as the material of a radial tire;

and/or the material of the first and second air cushions is the same as the material of the radial tire.

4. The damping device according to claim 1, wherein the thickness ratio of the damping shock-absorbing layer to the air shock-absorbing layer is 1-3: 1-5;

preferably, the thickness ratio of the damping shock absorption layer to the air shock absorption layer is 1-2: 1-2.

5. The shock absorbing device of claim 1, further comprising a pressure control device connected to the air cushion, the first air cushion and the second air cushion, respectively;

the pressure control device comprises an inflating device and a pressure control valve, the inflating device is connected with the air damping layer, the first air cushion and the second air cushion through pipelines respectively, and the pressure control valve is arranged on the pipelines connected with the air damping layer, the first air cushion and the second air cushion.

6. The shock absorbing device as claimed in claim 1, wherein a connection port is provided on an outer side of the air pipe layer, and the connection port is connected to the pressure control device through a pipe.

7. The shock-absorbing device according to claim 1, wherein both ends of the damping shock-absorbing layer and the air shock-absorbing layer are closed by hard materials;

preferably, the hard material is selected from at least one of a copper alloy and stainless steel.

8. A crystal growth furnace, characterized in that the damping device according to any one of claims 1 to 6 is mounted on the crystal growth furnace.

9. The crystal growth furnace of claim 8, wherein the crystal growth furnace comprises a furnace body, a column and a vacuum extractor; the upright column is arranged at the bottom of the furnace body and used for supporting the furnace body; the vacuumizing device is used for vacuumizing the furnace body;

two ends of the connecting pipeline are respectively communicated with the furnace body and the vacuumizing device;

the first air cushion is arranged at the bottom of the vacuumizing device;

the second air cushion is mounted at the bottom of the upright post.

10. The crystal growth furnace of claim 9, wherein the furnace body and the vacuum extractor are provided with connecting ports communicated with the connecting pipeline, the connecting ports are provided with inward concave grooves, the grooves are internally provided with O-shaped sealing rings, the outer edges of the connecting pipeline are in sealing contact with the O-shaped sealing rings, and the connecting pipeline is fixed at the connecting ports through buckles;

preferably, the cross section of the first air cushion is square, and the cross section of the second air cushion is round;

preferably, the number of the second air cushions is four.

Technical Field

The invention relates to a damping device for a vacuum reaction furnace and a crystal growth furnace, belonging to the technical field of mechanical damping.

Background

The existing crystal growth furnace is connected with a vacuum pump, and the vacuum pump is used for vacuumizing the interior of the furnace body of the crystal growth furnace. The vacuum pump can generate great vibration in the working and running process, even can cause vibration on the ground, meanwhile, the connecting pipeline can also generate great vibration, the touch feeling is very strong, the crystal growth furnace is not in a stable state in the normal running process, the fluctuation of the temperature gradient in the furnace body and the instability of a gas phase are caused, the most serious crystal stagnation generated in the furnace body continuously falls off, the temperature is reduced instantly, and the stability of the furnace body is seriously influenced.

At present to the vibrator design of vacuum pump adopt air damper to and machine vibrations still adopt the rubber cushion layer shock attenuation, compare still that air damper effect is comparatively obvious under the shock attenuation of large-scale machine, but existing design does not use it to whole set of machine but only to the vacuum pump alone, and the range of application is narrow and small. Still adopt bellows shock attenuation and rubber shock attenuation, the bellows is for connecting the vacuum pump pipeline, just uses the bellows at present to see, though played the shock attenuation effect to a certain extent, but the sense of touch is still strong, and the design is comparatively simple under the comparison, and the effect is better to be used by a large tracts of land and is implemented, but to precision equipment's shock attenuation, only with the bellows be far away not enough. Meanwhile, the prior art still adopts a rubber shock absorption mode to reduce ground shock, and although the prior art improves the ground shock, the effect is not particularly good.

Disclosure of Invention

In order to solve the problems, the invention provides a damping device for a vacuum reaction furnace and a crystal growth furnace, wherein the damping device comprehensively utilizes air damping and damping modes to ensure that a vacuumizing device, a furnace body and a pipeline achieve good damping effect; the crystal growth furnace is provided with the damping device, so that the stability in the furnace body can be kept, and the crystal in the furnace body is in a relatively stable growth state.

The technical scheme adopted by the invention is as follows:

according to an aspect of the present application, there is provided a shock-absorbing device for a vacuum reaction furnace, the shock-absorbing device including:

the connecting pipeline comprises a vacuum pipeline, and a damping shock absorption layer and an air shock absorption layer are sequentially arranged on the outer side of the vacuum pipeline; the connecting pipeline is used for connecting a vacuumizing device of the vacuum reaction furnace and the furnace body;

the first air cushion is used for containing gas with constant air pressure and is connected with the bottom of the vacuum pumping device of the vacuum reaction furnace;

and the second air cushion is used for containing gas with constant air pressure and is connected with the bottom of the vacuum reaction furnace body.

Further, the material of the damping shock absorption layer is selected from viscoelastic materials; preferably, the material of the damping shock absorption layer is selected from at least one of polyurethane elastomer and polyvinyl butyral; preferably, the density of the damping shock-absorbing layer material is 0.9-0.95 g/cm³。

Further, the material of the outer layer of the air pipeline layer is the same as that of the radial tire; and/or the material of the first and second air cushions is the same as the material of the radial tire.

Further, the thickness ratio of the damping shock absorption layer to the air shock absorption layer is 1-3: 1-5; preferably, the thickness ratio of the damping shock absorption layer to the air shock absorption layer is 1-2: 1-2. Preferably, the thickness of the damping shock absorption layer is 0.5-3 cm, and the thickness of the air shock absorption layer is 0.5-3 cm; preferably, the thickness of the damping shock absorption layer is 1-1.5 cm, and the thickness of the air shock absorption layer is 1-1.5 cm.

Furthermore, the damping device also comprises a pressure control device, and the pressure control device is respectively connected with the air damping layer, the first air cushion and the second air cushion. Preferably, the pressure control device comprises an inflation device and a pressure control valve, the inflation device is respectively connected with the air damping layer, the first air cushion and the second air cushion through pipelines, and the pipelines of the inflation device connected with the air damping layer, the first air cushion and the second air cushion are respectively provided with the pressure control valve.

Furthermore, a connecting port is arranged on the outer side of the air pipeline layer and is connected with a pressure control device through a pipeline.

Furthermore, two ends of the damping shock absorption layer and the air shock absorption layer are sealed by hard materials; preferably, the hard material is selected from at least one of a copper alloy and stainless steel.

According to another aspect of the application, a crystal growth furnace is provided, and the damping device is installed on the crystal growth furnace.

Further, the crystal growth furnace comprises a furnace body, a stand column and a vacuum pumping device; the upright column is arranged at the bottom of the furnace body and used for supporting the furnace body; the vacuumizing device is used for vacuumizing the furnace body; two ends of the connecting pipeline are respectively communicated with the furnace body and the vacuumizing device; the first air cushion is arranged at the bottom of the vacuumizing device; the second air cushion is mounted at the bottom of the upright post.

Furthermore, the furnace body and the vacuumizing device are provided with connectors communicated with the connecting pipeline, the connectors are provided with inwards concave grooves, O-shaped sealing rings are arranged in the grooves, the outer side edges of the connecting pipeline are in sealing contact with the O-shaped sealing rings, and the connecting pipeline is fixed at the connectors through buckles.

Furthermore, the cross section of the first air cushion is square, and the cross section of the second air cushion is round; preferably, the number of the second air cushions is four.

The invention has the beneficial effects that:

(1) according to the damping device, the damping layer and the air pipeline layer are arranged on the outer layer of the vacuum pipeline, and the vibration of the vacuum pipeline is remarkably reduced through double damping of the vacuum pipeline, so that the damping effect is remarkably improved.

(2) The damping device of the invention connects the pressure control device with the first air cushion, the second air cushion and the air pipeline layer, so that the first air cushion, the second air cushion and the air pipeline layer are in a constant pressure state, and the damping effect is greatly improved.

(3) The crystal growth furnace is provided with the damping device, the damping vibration layer and the air vibration layer are arranged on the double damping pipelines, the air vibration is applied to the furnace body, the vacuumizing pipeline and the pipelines, the damping vibration and the air vibration are comprehensively utilized, so that the furnace body is basically in a static state, and the crystal growth in the furnace body is in a relatively stable growth state.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.

In the drawings:

FIG. 1 is a schematic view of the shock absorbing device of the present invention;

FIG. 2 is a schematic sectional view of a connecting pipe in the shock absorbing device according to the present invention;

wherein, 1, a vacuum pipeline; 2. a damping layer; 3. an air pipeline layer; 4. a first air cushion; 5. a second air cushion; 6. an inflator.

Detailed Description

The present invention will be described in detail with reference to examples, but the present invention is not limited to these examples.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.

In addition, in the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integral; the connection can be mechanical connection, connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.