阅读说明：本技术 一种视觉成像反馈的压电驱动自调整并行测试装置和方法 (Piezoelectric driving self-adjusting parallel testing device and method for visual imaging feedback ) 是由 曹宁 沈斐玲 何文斌 费致根 都金光 段留洋 于 2020-06-05 设计创作，主要内容包括：本发明属于微纳技术领域,公开了一种视觉成像反馈的压电驱动自调整并行测试装置和方法。该装置包括装夹装置、第一图像检测装置和第二图像检测装置；装夹装置底面上设有两个对称设置的第一垂直压电伸缩杆和两个对称设置的第二垂直压电伸缩杆；第一垂直压电伸缩杆底部转动连接有水平旋转装置,水平旋转装置上均匀布设有多个水平压电伸缩杆,水平压电伸缩杆伸缩端设有用于放置测试器件的器件夹持装置；第一图像检测装置通过支撑杆固定在显微镜载物台上方,第二图像检测装置固定在显微镜载物台上,第二图像检测装置的视野中心水平线与载物台上表面平齐。本发明测试装置能实现多个器件并行测试,省时省力,效率高,而且压电驱动自动调整,调整精度高。(The invention belongs to the technical field of micro-nano technology, and discloses a piezoelectric driving self-adjusting parallel test device and method for visual imaging feedback. The device comprises a clamping device, a first image detection device and a second image detection device; the bottom surface of the clamping device is provided with two first vertical piezoelectric telescopic rods which are symmetrically arranged and two second vertical piezoelectric telescopic rods which are symmetrically arranged; the bottom of the first vertical piezoelectric telescopic rod is rotatably connected with a horizontal rotating device, a plurality of horizontal piezoelectric telescopic rods are uniformly distributed on the horizontal rotating device, and the telescopic ends of the horizontal piezoelectric telescopic rods are provided with device clamping devices for placing test devices; the first image detection device is fixed above the microscope objective table through the supporting rod, the second image detection device is fixed on the microscope objective table, and the horizontal line of the center of the visual field of the second image detection device is flush with the upper surface of the objective table. The testing device can realize the parallel testing of a plurality of devices, saves time and labor, has high efficiency, and has automatic adjustment of piezoelectric drive and high adjustment precision.)

1. A piezoelectric driving self-adjusting parallel testing device for visual imaging feedback is characterized by comprising a clamping device, a first image detection device and a second image detection device; the bottom surface of the clamping device is provided with two first vertical piezoelectric telescopic rods which are symmetrically arranged and two second vertical piezoelectric telescopic rods which are symmetrically arranged; the bottom of the first vertical piezoelectric telescopic rod is rotatably connected with a horizontal rotating device, a plurality of horizontal piezoelectric telescopic rods are uniformly distributed on the horizontal rotating device, and the telescopic ends of the horizontal piezoelectric telescopic rods are provided with device clamping devices for placing test devices; the bottom of the second vertical piezoelectric telescopic rod is provided with a base; the first image detection device is fixed above a microscope objective table through a support rod, the top end of the support rod is connected with the first image detection device, the bottom end of the support rod is fixedly connected with the objective table, and the support rod is a piezoelectric telescopic rod; the second image detection device is fixed on the microscope objective table, and the horizontal line of the center of the visual field of the second image detection device is flush with the upper surface of the objective table.

2. The piezoelectric self-adjusting parallel testing device for visual imaging feedback according to claim 1, wherein the device holding device is disposed on the same horizontal plane as the horizontal piezoelectric telescopic rod, and a bottom surface of the device holding device is flush with a bottom surface of the horizontal piezoelectric telescopic rod.

3. The piezoelectric self-adjusting parallel test device for visual imaging feedback according to claim 2, wherein the second image detection device is fixed on the stage of the microscope via a fixing base, the fixing base comprises a supporting plate and a connecting rod, one end of the supporting plate is fixed on the side surface of the stage, the upper end of the connecting rod is connected with the second image detection device, the lower end of the connecting rod is fixedly connected with the supporting plate, and the second image detection device is arranged at the upper end of the piezoelectric telescopic rod.

4. The piezoelectric self-adjusting parallel testing device for visual imaging feedback according to claim 3, wherein 4 horizontal piezoelectric telescopic rods are uniformly distributed on the horizontal rotating device.

5. The piezoelectric-driven self-adjusting parallel testing device for visual imaging feedback according to claim 4, wherein the connecting rod is a piezoelectric telescopic rod.

6. A method for testing by using the piezoelectric driving self-adjusting parallel testing device for visual imaging feedback of any one of claims 1 to 5, which is characterized by comprising the following steps:

(1) placing a device to be tested on a device clamping device, shortening the first vertical piezoelectric telescopic rod and the second vertical piezoelectric telescopic rod to the minimum height, and then installing the clamping device on a target objective of a microscope;

(2) adjusting the extension of a second vertical piezoelectric telescopic rod, when a second image detection device detects that the lower surface of the base is in contact with the objective table, stopping the extension of the second vertical piezoelectric telescopic rod, controlling the clamping device to be separated from the objective lens, and placing a piezoelectric driving self-adjusting parallel test device fed back by visual imaging on the objective table of the microscope under the supporting action of the second vertical piezoelectric telescopic rod and the base;

(3) adjusting the supporting rod to enable the supporting rod to be shortened to the minimum height, wherein the horizontal line of the center of the visual field of the first image detection device is positioned above the objective table, then adjusting the first vertical piezoelectric telescopic rod to extend, and when the first image detection device detects that the bottom surface of the device clamping device is level with the central line of the visual field of the device clamping device, the first vertical piezoelectric telescopic rod stops extending;

(4) adjusting the horizontal rotating device to rotate, and rotating a target device to be tested on the device clamping device into a visible field of the microscope; adjusting a horizontal piezoelectric telescopic rod connected with a device clamping device of a target device to be tested to move the target device to be tested to the center of the visual field of a microscope, and then testing the target device to be tested in the center of the visual field by adopting the microscope; in the testing process, the horizontal piezoelectric telescopic rod is adjusted according to the requirement, the position of the target device under the objective lens is changed, and the part of the target device to be tested is positioned in the visual field range;

(5) and (5) after the target device is tested, repeating the operation in the step (4), and rotating the next target device to be tested to the center of the visual field of the microscope for testing until all the devices placed on the device clamping device are tested.

7. The method according to claim 6, wherein in the step (3), before the support bar is shortened to the minimum height, the support bar is adjusted to make the horizontal line of the center of the field of view of the first image detection device level with the bottom surface of the target objective lens, and then the support bar is shortened to the minimum height, so as to obtain the vertical working space height below the bottom surface of the target objective lens according to the shortened distance of the support bar, thereby achieving the purpose of accurately positioning the vertical working space height below the bottom surface of the microscope target objective lens by using the piezoelectric drive support bar.

8. The method of claim 7, wherein in step (5), after testing of all devices placed on the device holding device, the clamping device is re-clamped to the objective lens of the microscope.

Technical Field

The invention belongs to the fields of micro-nano technology and micro-nano testing, and particularly discloses a piezoelectric driving self-adjusting parallel testing device and method for visual imaging feedback.

Background

With the increasing demand of people for micro-world exploration, optical microscopes are widely used as the main instrument carrier for the research and exploration of micron and submicron-scale objects. Generally, a single device is placed on an objective table of an optical microscope, a tested object on the device is observed by utilizing a microscope image so as to achieve the purposes of real-time imaging and performance testing, and the device testing of the micro-nano object by means of the optical microscope has great advantages in the aspects of horizontal space, degree of freedom and the like. However, when the device needs to be replaced, manual methods are generally adopted, which easily causes artificial damage to the device, wastes time and labor and increases the cost. After the test environment and the object to be studied of the device are changed, the objective lens of the optical microscope is generally switched according to the requirement of the test magnification, at the moment, the vertical space from the lowest end surface of the objective lens to the objective table is changed, and the height of the vertical space is generally judged by adopting a visual method, so that the height data of the vertical space cannot be accurately acquired, and the device cannot be quickly placed at a proper position on the objective table. Moreover, because the imaging range of the optical microscope is limited, when the device placed on the stage is manually moved, the object to be studied is easily out of the visual field range of the optical microscope, and the requirements of special research occasions for accurately positioning and shifting the horizontal position of the device cannot be met.

Disclosure of Invention

In view of the problems and deficiencies of the prior art, it is an object of the present invention to provide a piezoelectric driven self-adjusting parallel test apparatus and method for visual imaging feedback.

The invention provides a piezoelectric driving self-adjusting parallel testing device for visual imaging feedback, which comprises a clamping device, a first image detection device and a second image detection device, wherein the clamping device comprises a clamping head and a clamping head; the clamping device is used for being installed on an objective lens of a microscope, and two first vertical piezoelectric telescopic rods which are symmetrically arranged and two second vertical piezoelectric telescopic rods which are symmetrically arranged are arranged on the bottom surface of the clamping device; the bottom of the first vertical piezoelectric telescopic rod is rotatably connected with a horizontal rotating device, a plurality of horizontal piezoelectric telescopic rods are uniformly distributed on the horizontal rotating device, and the telescopic ends of the horizontal piezoelectric telescopic rods are provided with device clamping devices for placing test devices; the bottom of the second vertical piezoelectric telescopic rod is provided with a base; the first image detection device is fixed above a microscope objective table through a support rod, the top end of the support rod is connected with the first image detection device, the bottom end of the support rod is fixedly connected with the objective table, and the support rod is a piezoelectric telescopic rod; the second image detection device is fixed on the microscope objective table, and the horizontal line of the center of the visual field of the second image detection device is flush with the upper surface of the objective table.

According to the piezoelectric driving self-adjusting parallel testing device for visual imaging feedback, preferably, the device clamping device and the horizontal piezoelectric telescopic rod are arranged on the same horizontal plane, and the bottom surface of the device clamping device is flush with the bottom surface of the horizontal piezoelectric telescopic rod.

According to the piezoelectric driving self-adjusting parallel testing device with the visual imaging feedback, preferably, the second image detection device is fixed on an objective table of the microscope through a fixing seat, the fixing seat is composed of a supporting plate and a connecting rod, one end of the supporting plate is fixed on the side face of the objective table, the upper end of the connecting rod is connected with the second image detection device, the lower end of the connecting rod is fixedly connected with the supporting plate, and the second image detection device is arranged at the upper end of the piezoelectric telescopic rod.

According to the piezoelectric driving self-adjusting parallel testing device for visual imaging feedback, preferably, 4 horizontal piezoelectric telescopic rods are uniformly distributed on the horizontal rotating device.

According to the piezoelectric driving self-adjusting parallel testing device for visual imaging feedback, preferably, the connecting rod is a piezoelectric telescopic rod.

According to the piezoelectric driving self-adjusting parallel testing device for visual imaging feedback, the image detection device is preferably a visual sensor.

The piezoelectric telescopic rod is prepared from piezoelectric materials (such as piezoelectric ceramics), voltage is applied to the piezoelectric telescopic rod, and the piezoelectric telescopic rod can stretch along the length direction of the rod.

According to the piezoelectric driving self-adjusting parallel test device for visual imaging feedback, preferably, the piezoelectric driving self-adjusting parallel test device for visual imaging feedback further comprises a controller, and the controller is electrically connected with the clamping device, the first vertical piezoelectric telescopic rod, the second vertical piezoelectric telescopic rod, the horizontal rotating device, the horizontal piezoelectric telescopic rod, the first image detection device, the second image detection device, the supporting rod and the connecting rod.

The invention also provides a method for testing by using the piezoelectric driving self-adjusting parallel testing device for visual imaging feedback, which comprises the following steps:

(1) placing a device to be tested on a device clamping device, shortening the first vertical piezoelectric telescopic rod and the second vertical piezoelectric telescopic rod to the minimum height, and then installing the clamping device on a target objective of a microscope;

(2) adjusting the extension of a second vertical piezoelectric telescopic rod, when a second image detection device detects that the lower surface of the base is in contact with the objective table, stopping the extension of the second vertical piezoelectric telescopic rod, controlling the clamping device to be separated from the objective lens, and placing a piezoelectric driving self-adjusting parallel test device fed back by visual imaging on the objective table of the microscope under the supporting action of the second vertical piezoelectric telescopic rod and the base;

(3) adjusting the supporting rod to enable the supporting rod to be shortened to the minimum height, wherein the horizontal line of the center of the visual field of the first image detection device is positioned above the objective table, then adjusting the first vertical piezoelectric telescopic rod to extend, and when the first image detection device detects that the bottom surface of the device clamping device is level with the central line of the visual field of the device clamping device, the first vertical piezoelectric telescopic rod stops extending;

(4) adjusting the horizontal rotating device to rotate, and rotating a target device to be tested on the device clamping device into a visible field of the microscope; adjusting a horizontal piezoelectric telescopic rod connected with a device clamping device of a target device to be tested to move the target device to be tested to the center of the visual field of a microscope, and then testing the target device to be tested in the center of the visual field by adopting the microscope; in the testing process, the horizontal piezoelectric telescopic rod is adjusted according to the requirement, the position of the target device under the objective lens is changed, and the part of the target device to be tested is positioned in the visual field range;

(5) and (5) after the target device is tested, repeating the operation in the step (4), and rotating the next target device to be tested to the center of the visual field of the microscope for testing until all the devices placed on the device clamping device are tested.

According to the method, preferably, in the step (3), before the support rod is shortened to the minimum height, the support rod is adjusted to make the horizontal line of the center of the field of view of the first image detection device be flush with the bottom surface of the target objective lens, and then the support rod is shortened to the minimum height, so that the height of the vertical working space below the bottom surface of the target objective lens is obtained according to the shortened distance of the support rod, and the purpose of accurately positioning the height of the vertical working space below the bottom surface of the microscope target objective lens by using the piezoelectric drive support rod is achieved. The moving distance of the lens barrel in the vertical direction during focusing can be controlled according to the height of the vertical working space below the bottom surface of the target objective lens.

According to the method, preferably, in the step (5), after the devices placed on all the device holding devices are tested, the clamping device is clamped on the target objective lens of the microscope again.

Compared with the prior art, the invention has the following technical effects:

(1) the piezoelectric driving self-adjusting parallel testing device for visual imaging feedback can rapidly switch among different testing devices by adjusting the horizontal rotating device, realizes the parallel testing of a plurality of devices, reduces unnecessary repeated device replacement and focusing operation, saves time and labor, improves the working efficiency, and solves the problems of easy damage of devices, time and labor waste, high cost, low efficiency and the like when the conventional microscope testing device is manually replaced.

(2) The testing device can realize the accurate adjustment of the horizontal position of the testing device under the objective lens through the telescopic adjustment of the horizontal piezoelectric telescopic rod, enables the part of the target device to be tested to be positioned in the visual field range according to the testing requirement, does not need to manually move the testing device, and has more accurate observation and more convenient use.

(3) The testing device can accurately position the telescopic length of the first vertical piezoelectric telescopic rod through the first image detection device through visual imaging feedback, and avoids the damage of devices caused by collision between the first piezoelectric telescopic rod and an objective table in the extension process; the second image detection device can accurately position the base through visual imaging feedback, so that the extension of the second vertical piezoelectric telescopic rod is convenient to control, and the piezoelectric driving self-adjusting parallel testing device for the visual imaging feedback is placed on a microscope objective table.

(4) Before the testing device is used for testing, the supporting rod can be adjusted firstly, so that the horizontal line of the center of the visual field of the first image detection device is flush with the bottom surface of the target objective lens, then the supporting rod is shortened to the minimum height, the height of a vertical working space below the bottom surface of the target objective lens is obtained according to the shortened distance of the supporting rod, and the purpose of accurately positioning the height of the vertical working space below the bottom surface of the microscope target objective lens by utilizing the piezoelectric driving supporting rod is achieved; the moving distance of the lens barrel in the vertical direction during focusing can be controlled according to the height of the vertical working space below the bottom surface of the target objective lens.

(5) The clamping device of the testing device can be arranged on the circular outer surface of the microscope objective lens, and the aim of synchronously switching along with the objective lens can be fulfilled; in addition, in the actual use process, the testing device can be respectively arranged on the circular outer side surface of each objective lens of the microscope according to the testing requirements, and when the testing of the testing device above and below one objective lens is finished, the next objective lens of the optical microscope can be rotated to the working position, so that the purpose of parallel testing of the devices on different objective lenses of the optical microscope can be achieved.

(6) In the testing device, the first vertical piezoelectric telescopic rod, the second vertical piezoelectric telescopic rod, the supporting rod and the connecting rod are automatically adjusted by piezoelectric drive, and the adjusting precision is high.

Drawings

Fig. 1 is a schematic structural diagram of a piezoelectric-driven self-adjusting parallel testing device for visual imaging feedback according to the present invention.

FIG. 2 is a flow chart of a method for testing by using the piezoelectric driving self-adjusting parallel testing device for visual imaging feedback of the present invention.

In the figure: the device comprises a clamping device 1, a first vertical piezoelectric telescopic rod 2, a horizontal rotating device 3, a horizontal piezoelectric telescopic rod 4, a device clamping device 5, a supporting rod 6, a first image detection device 7, a second piezoelectric telescopic rod 8, a base 9, a second image detection device 10, a connecting rod 11, a supporting plate 12, an objective lens 13 and an objective table 14.

Detailed Description

The present invention will be described in further detail with reference to specific examples, but the scope of the present invention is not limited thereto.