阅读说明：本技术 一种同时测量带电粒子的能量和角度的方法及磁谱仪 (Method for simultaneously measuring energy and angle of charged particles and magnetic spectrometer ) 是由 王昆仑 邹杰 张思群 于 2020-05-29 设计创作，主要内容包括：本发明公开了一种同时测量带电粒子的能量和角度的方法及磁谱仪,包括在磁谱仪上设置多个圆弧形沟槽,圆弧形沟槽的中轴线相互平行且设置在同一平面内,或者设置在一个曲率大于相邻中轴线间距的光滑曲面内,辐射通道内设置的次生带电粒子产生装置设置在大于多个圆弧形沟槽的入口的预设距离的位置,以避免次生带电粒子之外的其他带电粒子进入对应的圆弧形沟槽中,次生带电粒子基于自身的粒子角度和粒子速度选择对应目标圆弧形沟槽通过,并运动至带电粒子成像介质,以获取通过目标圆弧形沟槽的目标带电粒子的强度分布信息,计算机设备根据该强度分布信息计算目标带电粒子的角度和能量,完成对次生带电粒子能量和角度分布进行同时测量。(The invention discloses a method for simultaneously measuring the energy and the angle of charged particles and a magnetic spectrometer, which comprises the steps of arranging a plurality of arc-shaped grooves on the magnetic spectrometer, wherein the central axes of the arc-shaped grooves are mutually parallel and are arranged in the same plane, or are arranged in a smooth curved surface with the curvature larger than the distance between adjacent central axes, arranging a secondary charged particle generating device in a radiation channel at a position larger than the preset distance of the inlets of the arc-shaped grooves so as to prevent other charged particles except the secondary charged particles from entering the corresponding arc-shaped grooves, selecting the corresponding target arc-shaped grooves to pass through by the secondary charged particles based on the particle angle and the particle speed of the secondary charged particles, moving the secondary charged particles to a charged particle imaging medium so as to obtain the intensity distribution information of the target charged particles passing through the target arc-shaped grooves, and calculating the angle and the energy of the target charged particles by computer equipment according to, and simultaneously measuring the energy and the angle distribution of the secondary charged particles.)

1. A method of simultaneously measuring charged particle energy and angle, comprising:

the method comprises the following steps that a plurality of arc-shaped grooves are arranged on a magnetic spectrometer, the central axes of the arc-shaped grooves are parallel to each other and are arranged in the same plane, or the central axes of the arc-shaped grooves are parallel to each other and are arranged in a smooth curved surface with the curvature larger than the distance between the adjacent central axes;

the magnetic spectrometer is also provided with a radiation channel, a secondary charged particle generating device is arranged in the radiation channel, and the distance between the secondary charged particle generating device and the inlets of the plurality of arc-shaped grooves is greater than a preset distance;

the secondary charged particle generating device generates secondary charged particles under the ionizing radiation of the radiation source through the radiation channel;

the secondary charged particles have corresponding particle angles and particle speeds, enter the arc-shaped grooves through the inlets of the arc-shaped grooves under the action of the permanent magnets, select corresponding target arc-shaped grooves to pass through the arc-shaped grooves based on the particle angles and the particle speeds, move to a charged particle imaging medium arranged at the outlets of the arc-shaped grooves, and take the secondary charged particles passing through the target arc-shaped grooves as target charged particles;

the charged particle imaging medium records the intensity distribution information of the target charged particles and sends the intensity distribution information to corresponding computer equipment;

and the computer equipment calculates the intensity distribution information based on an intensity distribution information calculation formula to obtain the angle and the energy of the target charged particles.

2. The method of claim 1, wherein a plurality of the circular arc-shaped grooves are further provided with slits;

under the action of a permanent magnet, the secondary charged particles select a corresponding target arc-shaped groove to pass through based on the particle angle and the particle speed and move to the charged particle imaging medium, and the method comprises the following steps:

and under the action of a permanent magnet, selecting a slit in a corresponding target circular arc groove to pass through based on the particle angle and the particle speed, and moving the secondary charged particles to the charged particle imaging medium.

3. The method of claim 2, wherein the slits comprise a plurality of horizontal slits and a vertical slit perpendicular to a horizontal plane; the horizontal slit is provided on a horizontal slit member and the vertical slit is provided on a vertical slit member.

4. The method of claim 1, wherein the radiation source is disposed on a central axis of the radiation channel, and the permanent magnet is disposed in a permanent magnet channel.

5. The method of claim 1, wherein the intensity distribution information is calculated by a formula comprisingWhere ρ (h, i) is intensity distribution information, h is the depth of the circular arc groove, i is the number of the circular arc groove, a is the size of the vertical slit, b is the size of the parallel slit, r is the number of the circular arc groove, and_iis the radius of the circular arc-shaped groove, theta is the particle angle of the secondary charged particle, I (v)_⊥θ) energy and angular distribution of secondary charged particlesFunction, v_⊥The component of the particle velocity of the secondary charged particles perpendicular to the plane of the groove outlet is shown, m is the mass of the secondary charged particles, q is the charge quantity of the secondary charged particles, and B is the size of the magnetic field generated by the permanent magnet.

6. A magnetic spectrometer for simultaneously measuring the energy and the angle of charged particles is characterized by comprising a supporting and connecting assembly (8), a magnetic conduction plate (9) and a metal block (17);

the front surface and the rear surface of the supporting and connecting assembly (8) are provided with magnetic conductive plates (9);

a permanent magnet channel (10) is arranged in the supporting and connecting assembly (8); one end of the permanent magnet channel (10) is arranged on the front surface of the supporting and connecting assembly (8), and the other end of the permanent magnet channel is arranged on the rear surface of the supporting and connecting assembly (8); permanent magnets are arranged in the permanent magnet channels (10);

a small accommodating cavity (16) is arranged inside the supporting and connecting assembly (8), a radiation channel (15) is further arranged inside the supporting and connecting assembly (8), and a secondary charged particle generating device is arranged inside the radiation channel (15); the radiation channel (15) passing through the housing small cavity (16); a metal block (17) is arranged in the small accommodating cavity (16);

an arc-shaped groove component (11) is arranged in the metal block (17), the arc-shaped groove component (11) comprises a plurality of arc-shaped grooves (18), the central axes of the arc-shaped grooves (18) are parallel to each other and are arranged in the same plane, or the central axes of the arc-shaped grooves (18) are parallel to each other and are arranged in a smooth curved surface with the curvature larger than the distance between the adjacent central axes, a horizontal straight groove (20) and a vertical straight groove (19) perpendicular to the horizontal straight groove (20) are arranged on each arc-shaped groove (18), a horizontal slit component (23) is inserted into each horizontal straight groove (20), and a vertical slit component (21) is inserted into each vertical straight groove (19); the horizontal slit (24) of the horizontal slit member (23) and the vertical slit (22) of the vertical slit member (21) limit the electron movement trajectory;

the arc-shaped groove assembly (11) is provided with an inlet (13) of the arc-shaped groove assembly (11) and an outlet (12) of the arc-shaped groove assembly (11), and the distance between the inlet (13) of the arc-shaped groove assembly (11) and the secondary charged particle generating device is larger than a preset distance; the outlet (12) of the arc-shaped groove component (11) is provided with charged particle imaging media;

and the radiation source is positioned on the central axis of the radiation channel, ionizing radiation is carried out on a secondary charged particle generating device (14) arranged in the radiation channel (15) through the radiation channel (15) to generate secondary charged particles, and the secondary charged particles enter the arc-shaped groove component (11) through an inlet (13) of the arc-shaped groove component (11).

7. A spectrometer for simultaneous measurement of charged particle energy and angle according to claim 6, characterised in that the housing cell (16) is cubic and the permanent magnet channel (10) and the radiation channel (15) are cylindrical.

8. The spectrometer according to claim 6, characterized in that the material of the magnetic conducting plate (9) component is low carbon steel.

9. The spectrometer according to claim 6, characterized in that the horizontal slit means (23) and the vertical slit means (21) are metal sheets.

Technical Field

The invention relates to the field of secondary charged particle measurement, in particular to a magnetic spectrometer for measuring charged particle energy and angle distribution.

Background

The traditional method for measuring the energy distribution of secondary charged particles generated in a material by ionizing radiation such as X-rays firstly uses a straight-hole beam limiting device (or a beam limiting structure) to collimate charged particle beams and then uses a magnetic spectrometer to measure the energy of the charged particles. The intensity and energy distribution of charged particles in one direction can be measured by using the traditional method at one time, and the energy and angle distribution of secondary charged particles cannot be measured simultaneously, so that the working efficiency is influenced.

Disclosure of Invention

The invention aims to solve the technical problem that the prior art cannot realize the simultaneous measurement of the energy and the angle distribution of secondary charged particles. Therefore, the magnetic spectrometer for measuring the energy and the angular distribution of the charged particles is provided, and the working efficiency of the magnetic spectrometer is improved.

The invention is realized by the following technical scheme:

a method of simultaneously measuring charged particle energy and angle, comprising:

the method comprises the following steps that a plurality of arc-shaped grooves are arranged on a magnetic spectrometer, the central axes of the arc-shaped grooves are parallel to each other and are arranged in the same plane, or the central axes of the arc-shaped grooves are parallel to each other and are arranged in a smooth curved surface with the curvature larger than the distance between the adjacent central axes;

the magnetic spectrometer is also provided with a radiation channel, a secondary charged particle generating device is arranged in the radiation channel, and the distance between the secondary charged particle generating device and the inlets of the plurality of arc-shaped grooves is greater than a preset distance;

the secondary charged particle generating device generates secondary charged particles under the ionizing radiation of the radiation source through the radiation channel;

the secondary charged particles have corresponding particle angles and particle speeds, enter the arc-shaped grooves through the inlets of the arc-shaped grooves under the action of the permanent magnets, select corresponding target arc-shaped grooves to pass through the arc-shaped grooves based on the particle angles and the particle speeds, move to a charged particle imaging medium arranged at the outlets of the arc-shaped grooves, and take the secondary charged particles passing through the target arc-shaped grooves as target charged particles;

the charged particle imaging medium records the intensity distribution information of the target charged particles and sends the intensity distribution information to corresponding computer equipment;

and the computer equipment calculates the intensity distribution information based on an intensity distribution information calculation formula to obtain the angle and the energy of the target charged particles.

Furthermore, slits are also arranged in the arc-shaped grooves;

under the action of a permanent magnet, the secondary charged particles select a corresponding target arc-shaped groove to pass through based on the particle angle and the particle speed and move to the charged particle imaging medium, and the method comprises the following steps:

and under the action of a permanent magnet, selecting a slit in a corresponding target circular arc groove to pass through based on the particle angle and the particle speed, and moving the secondary charged particles to the charged particle imaging medium.

Further, the slits include a plurality of horizontal slits and a vertical slit perpendicular to a horizontal plane; the horizontal slit is provided on a horizontal slit member and the vertical slit is provided on a vertical slit member.

Further, the radiation source is arranged on a central axis where the radiation channel is located, and the permanent magnet is arranged in the permanent magnet channel.

Further, the intensity distribution information calculation formula is specificallyWhere ρ (h, i) is intensity distribution information, h is the depth of the circular arc groove, i is the number of the circular arc groove, a is the size of the vertical slit, b is the size of the parallel slit, r is the number of the circular arc groove, and_iis the radius of the circular arc-shaped groove, theta is the particle angle of the secondary charged particle, I (v)_⊥θ) is the energy and angular distribution function of the secondary charged particles, v_⊥The component of the particle velocity of the secondary charged particles perpendicular to the plane of the groove outlet is shown, m is the mass of the secondary charged particles, q is the charge quantity of the secondary charged particles, and B is the size of the magnetic field generated by the permanent magnet.

A magnetic spectrometer for simultaneously measuring the energy and the angle of charged particles comprises a supporting and connecting assembly, a magnetic conduction plate and a metal block;

the front surface and the rear surface of the supporting and connecting assembly (8) are provided with magnetic conductive plates (9);

a permanent magnet channel (10) is arranged in the supporting and connecting assembly (8); one end of the permanent magnet channel (10) is arranged on the front surface of the supporting and connecting assembly (8), and the other end of the permanent magnet channel is arranged on the rear surface of the supporting and connecting assembly (8); permanent magnets are arranged in the permanent magnet channels (10);

a small accommodating cavity (16) is arranged inside the supporting and connecting assembly (8), a radiation channel (15) is further arranged inside the supporting and connecting assembly (8), and a secondary charged particle generating device (14) is arranged inside the radiation channel (15); the radiation channel (15) passing through the housing small cavity (16); a metal block (17) is arranged in the small accommodating cavity (16);

an arc-shaped groove component (11) is arranged in the metal block (17), the arc-shaped groove component (11) comprises a plurality of arc-shaped grooves (18), the central axes of the arc-shaped grooves (18) are parallel to each other and are arranged in the same plane, or the central axes of the arc-shaped grooves (18) are parallel to each other and are arranged in a smooth curved surface with the curvature larger than the distance between the adjacent central axes, a horizontal straight groove (20) and a vertical straight groove (19) perpendicular to the horizontal straight groove (20) are arranged on each arc-shaped groove (18), a horizontal slit component (23) is inserted into each horizontal straight groove (20), and a vertical slit component (21) is inserted into each vertical straight groove (19); the horizontal slit (24) of the horizontal slit member (23) and the vertical slit (22) of the vertical slit member (21) limit the electron movement trajectory;

the arc-shaped groove assembly (11) is provided with an inlet (13) of the arc-shaped groove assembly (11) and an outlet (12) of the arc-shaped groove assembly (11), and the distance between the inlet (13) of the arc-shaped groove assembly (11) and the secondary charged particle generating device (14) is larger than a preset distance; the outlet (12) of the arc-shaped groove component (11) is provided with charged particle imaging media;

and the radiation source is positioned on the central axis of the radiation channel, ionizing radiation is carried out on a secondary charged particle generating device (14) arranged in the radiation channel (15) through the radiation channel (15) to generate secondary charged particles, and the secondary charged particles enter the arc-shaped groove component (11) through an inlet (13) of the arc-shaped groove component (11).

Further, the small accommodating cavity is a cube, and the permanent magnet channel and the radiation channel are cylindrical.

Further, the material of the magnetic conduction plate component is low-carbon steel.

Further, the horizontal slit member and the vertical slit member are metal sheets.

The invention provides a method for simultaneously measuring the energy and the angle of charged particles and a magnetic spectrometer, wherein a plurality of circular arc grooves are arranged on the magnetic spectrometer, the central axes of the circular arc grooves are parallel to each other and are arranged in the same plane, or the central axes of the circular arc grooves are parallel to each other and are arranged in a smooth curved surface with the curvature larger than the distance between adjacent central axes, a secondary charged particle generating device is arranged in a radiation channel arranged on the magnetic spectrometer, and the inlets of the circular arc grooves are arranged at the positions larger than the preset distance of the secondary charged particle generating device, so that other charged particles except the secondary charged particles generated by the secondary charged particle generating device under ionizing radiation are prevented from entering the corresponding circular arc grooves. The secondary charged particles select corresponding target arc-shaped grooves to pass through based on the particle angles and the particle speeds of the secondary charged particles and move to the charged particle imaging medium, the charged particle imaging medium records intensity distribution information of the target charged particles passing through the target arc-shaped grooves and sends the intensity distribution information to corresponding computer equipment, so that the computer equipment can calculate the angles and the energies of the target charged particles based on the intensity distribution information, the energy and the angle distribution of the secondary charged particles can be measured simultaneously, and the measurement efficiency of a magnetic spectrometer is improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:

FIG. 1 is a flow chart of a method for simultaneously measuring charged particle energy and angle according to the present invention.

FIG. 2 is a schematic structural diagram of a magnetic spectrometer for simultaneously measuring the energy and angle of charged particles according to the present invention.

Fig. 3 is a detailed view of the metal block.

Fig. 4 is a schematic view of a horizontal slit component and a vertical slit component.

Reference numbers and corresponding part names in the drawings:

8-support connection assembly, 9-magnetic conduction plate, 10-permanent magnet channel, 11-circular arc groove assembly, 12-outlet of circular arc groove assembly, 13-inlet of circular arc groove assembly, 14-secondary charged particle generation device, 15-radiation channel, 16-accommodation small cavity, 17-metal block, 18-circular arc groove, 19-vertical groove, 20-horizontal groove, 21-vertical slit component, 22-vertical slit, 23-horizontal slit component and 24-horizontal slit.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.