阅读说明：本技术 一种非金属膜片式真空获得设备 (Non-metal diaphragm type vacuum obtaining equipment ) 是由 王浩为 邓高飞 刘淑婷 马现刚 齐英 陈林 于 2020-06-01 设计创作，主要内容包括：本发明提供一种非金属膜片式真空获得设备,属于真空设备技术领域,包括：电机,具有朝向两端伸出的传动轴；第一泵体,设置在所述电机的一端,具有与所述传动轴连接的第一非金属膜片,所述第一非金属膜片通过第一偏心结构与所述传动轴连接；第二泵体,设置在所述电机的另一端,具有与所述传动轴连接的第二非金属膜片,所述第二非金属膜片通过第二偏心结构与所述传动轴连接；所述第一偏心结构与所述第二偏心结构的偏心方向相反；本发明的非金属膜片式真空获得设备,设计为采用一台电机驱动两个泵体的结构,并且两个泵体采用交替出力的优化设计,通过合理设计泵的尺寸、转速、冷却条件,能够使得泵的结构紧凑、安全可靠、寿命长、耗能低。(The invention provides a non-metal diaphragm type vacuum obtaining device, which belongs to the technical field of vacuum equipment and comprises: a motor having a transmission shaft extending toward both ends; the first pump body is arranged at one end of the motor and is provided with a first non-metal diaphragm connected with the transmission shaft, and the first non-metal diaphragm is connected with the transmission shaft through a first eccentric structure; the second pump body is arranged at the other end of the motor and is provided with a second non-metal diaphragm connected with the transmission shaft, and the second non-metal diaphragm is connected with the transmission shaft through a second eccentric structure; the eccentric directions of the first eccentric structure and the second eccentric structure are opposite; the nonmetal diaphragm type vacuum obtaining equipment is designed to adopt a structure that one motor drives two pump bodies, the two pump bodies adopt an optimized design of alternative output, and the pump has the advantages of compact structure, safety, reliability, long service life and low energy consumption by reasonably designing the size, the rotating speed and the cooling condition of the pump.)

1. A non-metallic diaphragm vacuum pickup apparatus, comprising:

a motor (1) having a drive shaft (16) extending toward both ends;

the first pump body (2) is arranged at one end of the motor (1) and is provided with a first non-metal diaphragm (21) connected with the transmission shaft (16), and the first non-metal diaphragm (21) is connected with the transmission shaft (16) through a first eccentric structure (17);

the second pump body (3) is arranged at the other end of the motor (1) and is provided with a second non-metal diaphragm connected with the transmission shaft (16), and the second non-metal diaphragm is connected with the transmission shaft (16) through a second eccentric structure (18);

the first eccentric structure (17) and the second eccentric structure (18) are opposite in eccentric direction.

2. The non-metallic membrane vacuum pickup device according to claim 1, characterized by having an inlet manifold and an outlet manifold, said inlet manifolds communicating with a first inlet port (8) of said first pump body (2) and a second inlet port (10) of said second pump body (3), respectively;

the air outlet main port is respectively communicated with a first air outlet (9) of the first pump body (2) and a second air outlet (11) of the second pump body (3).

3. The non-metal membrane vacuum obtaining device according to claim 2, wherein the inlet manifold and the outlet manifold are arranged on the first pump body (2), the first pump body (2) is further provided with an inlet connecting port (14) and an outlet connecting port (15), the inlet connecting port (14) and the second inlet (10) are communicated through an inlet connecting pipe (12), and the outlet connecting port (15) and the second outlet (11) are communicated through an outlet connecting pipe (13).

4. A non-metallic membrane vacuum pickup apparatus as defined in any one of claims 1 to 3 wherein the first eccentric configuration (17) comprises:

a first eccentric block having an eccentric block body (23) and a first mounting hole (25), the eccentric block body (23) being eccentrically disposed with respect to the first mounting hole (25), the first mounting hole (25) being adapted for connection therein to a drive shaft (16) of a motor (1);

the bearing (26) is sleeved with the inner ring of the eccentric block body (23);

and the connecting rod support (20) is provided with a second mounting hole (27) for accommodating the outer ring of the bearing (26), and a non-metal diaphragm is connected to the top end of the connecting rod support (20).

5. The non-metal membrane type vacuum obtaining apparatus according to claim 4, wherein an eccentric mass body (23) side of the first eccentric mass is provided with an eccentric compensation structure (24), and the eccentric compensation structure (24) is a circular mass eccentrically disposed toward an eccentric direction away from the eccentric mass body (23).

6. The non-metallic membrane vacuum pickup apparatus as recited in claim 5, wherein an eccentric distance of the circular mass is greater than an eccentric distance of the eccentric mass body (23).

7. The non-metallic membrane vacuum pickup apparatus as defined in claim 6, wherein the second eccentric structure (18) is identical in structure to the first eccentric structure (17), and a second eccentric mass of the second eccentric structure (18) is opposite in eccentric direction to a first eccentric mass of the first eccentric structure (17).

8. A non-metal diaphragm type vacuum obtaining device according to any one of claims 5-7, wherein a flat surface (28) is arranged on the part of the transmission shaft (16) penetrating through the eccentric compensation structure (24), a threaded hole (29) communicated with the flat surface (28) is arranged on the eccentric compensation structure (24), and a screw (30) can abut on the flat surface (28) after penetrating through the threaded hole (29).

9. The non-metallic membrane vacuum pickup apparatus as recited in claim 4, further comprising: and the cavity support (4) is supported at the bottom of the compression cavity of the pump body, and one side of the cavity support is connected with the motor (1).

10. The non-metallic membrane vacuum pickup apparatus as recited in claim 9, further comprising: the fan structure sets up the both ends of transmission shaft (16), have with end connection's of transmission shaft (16) flabellum (7), still have the cover and establish flabellum (7) outside fan housing (6), the inside of fan housing (6) has wind channel (31), the one end orientation in wind channel (31) flabellum (7) intercommunication, the other end orientation in wind channel (31) cavity support (4) intercommunication.

Technical Field

The invention relates to the technical field of vacuum equipment, in particular to non-metal diaphragm type vacuum obtaining equipment.

Background

As the development of semiconductor manufacturing lines, in which dry vacuum pumps are widely used, and the integrated control of the semiconductor manufacturing lines is a great trend, the industry is eagerly looking to reduce the physical size of the dry vacuum pumps.

However, this is in turn contradictory to the pumping rate of a dry vacuum pump, since the pumping rate of a dry vacuum pump is proportional to the volume, and a small physical size means a small volume.

Therefore, reducing the physical size requires increasing the rotational speed of the dry vacuum pump rotor, which requires better dynamic balance, better thermodynamic performance and smaller leakage.

Disclosure of Invention

Therefore, the technical problem to be solved by the invention is to design a vacuum obtaining device with the characteristics of small volume, high rotating speed, high pumping speed, self cooling, low energy consumption and the like.

In order to solve the above technical problems, the present invention provides a non-metal diaphragm type vacuum obtaining apparatus, comprising:

a motor having a transmission shaft extending toward both ends;

the first pump body is arranged at one end of the motor and is provided with a first non-metal diaphragm connected with the transmission shaft, and the first non-metal diaphragm is connected with the transmission shaft through a first eccentric structure;

the second pump body is arranged at the other end of the motor and is provided with a second non-metal diaphragm connected with the transmission shaft, and the second non-metal diaphragm is connected with the transmission shaft through a second eccentric structure;

the first eccentric structure and the second eccentric structure are opposite in eccentric direction.

As a preferable scheme, the pump is provided with an air inlet main port and an air outlet main port, and the air inlet main port is respectively communicated with a first air inlet of the first pump body and a second air inlet of the second pump body;

the air outlet main port is communicated with a first air outlet of the first pump body and a second air outlet of the second pump body respectively.

Preferably, the inlet main port and the outlet main port are arranged on the first pump body, the first pump body is further provided with an inlet connecting port and an outlet connecting port, the inlet connecting port is communicated with the second inlet through an inlet connecting pipe, and the outlet connecting port is communicated with the second outlet through an outlet connecting pipe.

Preferably, the first eccentric structure includes:

the first eccentric block is provided with an eccentric block body and a first mounting hole, the eccentric block body is eccentrically arranged relative to the first mounting hole, and a transmission shaft of a motor is suitable to be connected in the first mounting hole;

the inner ring of the bearing is sleeved on the outer ring of the eccentric block body;

and the connecting rod support is provided with a second mounting hole for accommodating the outer ring of the bearing, and the top end of the connecting rod support is connected with a non-metal diaphragm.

Preferably, an eccentric compensation structure is arranged on one side of the eccentric block body of the first eccentric block, and the eccentric compensation structure is a circular block eccentrically arranged towards the eccentric direction far away from the eccentric block body.

Preferably, the eccentric distance of the circular block is greater than the eccentric distance of the eccentric block body.

Preferably, the second eccentric structure has the same structure as the first eccentric structure, and the second eccentric mass of the second eccentric structure is opposite to the eccentric direction of the first eccentric mass of the first eccentric structure.

Preferably, a plane is arranged on a part of the transmission shaft, which penetrates through the eccentric compensation structure, a threaded hole communicated with the plane is arranged on the eccentric compensation structure, and the transmission shaft can abut against the plane after penetrating through the threaded hole through a screw.

Preferably, the method further comprises the following steps: and the cavity chamber bracket is supported at the bottom of the compression cavity chamber of the pump body, and one side of the cavity chamber bracket is connected with the motor.

Preferably, the method further comprises the following steps: the fan structure sets up the both ends of transmission shaft, have with the end connection's of transmission shaft flabellum still has the cover and establishes the outside fan housing of flabellum, the inside of fan housing has the wind channel, the one end orientation in wind channel the flabellum intercommunication, the other end orientation in wind channel the cavity support intercommunication.

The technical scheme of the invention has the following advantages:

1. the nonmetal diaphragm type vacuum obtaining equipment provided by the invention is designed to adopt a structure that one motor drives two pump bodies, the two pump bodies adopt an optimized design of alternative output, and the size, the rotating speed and the cooling condition of the pump are reasonably designed, so that the pump has the advantages of compact structure, safety, reliability, long service life and low energy consumption.

2. According to the nonmetal diaphragm type vacuum obtaining equipment provided by the invention, the two pump bodies adopt the same air inlet main port and the same air outlet main port, and the two pump bodies are matched with each other to apply force in a crossed manner, so that the overall pumping speed of the equipment can be improved.

3. According to the nonmetal diaphragm type vacuum obtaining equipment provided by the invention, the air inlet main port and the air outlet main port are arranged on the first pump body, the side, facing the second pump body, of the first pump body is also provided with the air inlet connecting port and the air outlet connecting port, the air inlet connecting port of the first pump body is communicated with the second air inlet of the second pump body through the air inlet connecting pipe, and the air outlet connecting port of the first pump body is communicated with the air outlet of the second pump body through the air outlet connecting pipe, so that the equipment can be conveniently connected with a container through the hose.

4. According to the nonmetal diaphragm type vacuum obtaining equipment provided by the invention, the eccentric compensation structure is arranged on one side of the eccentric block, and is a circular block eccentrically arranged towards the eccentric direction far away from the eccentric block body, so that when the eccentric block drives the connecting rod bracket to eccentrically rotate, part of eccentric force caused by the connecting rod bracket can be offset through the eccentric compensation structure, and the system can more stably run.

5. According to the nonmetal diaphragm type vacuum obtaining equipment provided by the invention, the eccentric distance of the circular block of the eccentric compensation structure is larger than that of the eccentric block body, so that the size of the circular block is not required to be too large when the eccentric force between the connecting rods is balanced.

6. According to the nonmetal diaphragm type vacuum obtaining equipment provided by the invention, the two ends of the transmission shaft of the motor are respectively provided with the fan structures, and in work, the transmission shaft drives the fan blades to rotate, so that air flow passes through the air channel of the fan outer cover and passes between the chambers, and the temperature of the compression chamber can be reduced through the chamber support.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic perspective view of an embodiment of a non-metal diaphragm type vacuum obtaining apparatus according to the present invention.

Fig. 2 is an exploded view of fig. 1.

Fig. 3 is an exploded view of the first eccentric configuration of fig. 2.

Fig. 4 is a bottom perspective view of fig. 3.

Fig. 5 is a schematic view of the assembly of the fan structure and the chamber bracket of fig. 1.

Fig. 6 is a bottom perspective view of fig. 5.

Description of reference numerals:

1. a motor; 2. a first pump body; 3. a second pump body; 4. a chamber support; 5. a rubber leg; 6. a fan housing; 7. a fan blade; 8. a first air inlet; 9. a first air outlet; 10. a second air inlet; 11. a second air outlet; 12. an air inlet connecting pipe; 13. an air outlet connecting pipe; 14. an air inlet connection port; 15. an air outlet connection port; 16. a drive shaft; 17. a first eccentric structure; 18. a second eccentric structure; 19. sealing the cover; 20. a connecting rod bracket; 21. a first non-metallic diaphragm; 22. a kidney gasket; 23. an eccentric block body; 24. an eccentricity compensation structure; 25. a first mounting hole; 26. a bearing; 27. a second mounting hole; 28. a plane; 29. a threaded hole; 30. a screw; 31. an air duct; 32. a slot; 33. fitting ribs; 34. an elastic clamping strip; 35. a clamping groove.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

The embodiment provides a specific implementation mode of a non-metal diaphragm type vacuum obtaining device, and as shown in fig. 1, the device comprises a motor 1, and a first pump body 2 and a second pump body 3 which are installed at two ends of the motor 1. The first pump body 2 and the second pump body 3 are provided with chamber supports 4 connected to two ends of the motor 1, the chamber supports 4 are supported at the bottoms of compression chambers of the pump bodies, and rubber support legs 5 used for supporting equipment are arranged at the bottom ends of the chamber supports 4. Fan structures are respectively connected to the chamber brackets 4 of the first pump body 2 and the second pump body 3.

As shown in fig. 2, the first pump body 2 has a first air inlet 8, a first air outlet 9, an air inlet connection port 14 and an air outlet connection port 15, wherein the first air inlet 8 serves as an air inlet main port of the equipment, and the second air outlet 11 serves as an air outlet main port of the equipment; the second pump body 3 is provided with a second air inlet 10 and a second air outlet 11, the air inlet connecting port 14 is communicated with the second air inlet 10 through an air inlet connecting pipe 12, and the air outlet connecting port 15 is communicated with the second air outlet 11 through an air outlet connecting pipe 13.

As shown in fig. 2, the motor 1 has a transmission shaft 16 extending towards both ends, and both ends of the transmission shaft 16 are respectively connected with the non-metallic diaphragms of the first pump body 2 and the second pump body 3 through two eccentric structures. The first pump body 2 and the second pump body 3 have the same structure, except that, in operation, the first non-metal diaphragm 21 of the first pump body 2 and the second non-metal diaphragm of the second pump body 3 work alternately, and the means for producing the effect is to make the eccentric directions of the first eccentric structure 17 and the second eccentric structure 18 opposite.

As shown in fig. 3, the first pump body 2 comprises: a chamber holder 4 and a cover 19, a compression chamber being formed between said cover 19 and the chamber holder 4. The first nonmetal diaphragm 21 connected with the connecting rod support 20 is arranged in the compression chamber, the two waist-shaped sealing gaskets 22 are arranged on the sealing cover 19, when the compression chamber works, the first nonmetal diaphragm 21 does work in the compression chamber, and then vacuum is formed in the compression chamber through one-way conduction of the two waist-shaped sealing gaskets 22, so that vacuumizing is performed.

As shown in fig. 3 and 4, the first eccentric structure 17 includes: a first eccentric mass having an eccentric mass body 23, an eccentric compensation structure 24 and a first mounting hole 25, a bearing 26 and a connecting rod holder 20, through which first mounting hole 25 the transmission shaft 16 of the motor 1 is connected. The connecting rod support 20 has a second mounting hole 27 for receiving the outer ring of the bearing 26, and the top end of the connecting rod support 20 is connected with the first non-metallic diaphragm 21. The outer ring of the bearing 26 is sleeved in the second mounting hole 27 of the connecting rod bracket 20, and the inner ring of the bearing 26 is sleeved on the outer ring of the eccentric block body 23.

As shown in fig. 4, the eccentric mass body 23 is eccentrically disposed with respect to the first mounting hole 25. The eccentricity compensation structure 24 is disposed at one side of the eccentric mass body 23, the eccentricity compensation structure 24 is a circular mass eccentrically disposed toward an eccentricity direction away from the eccentric mass body 23, and an eccentricity distance of the circular mass is greater than that of the eccentric mass body 23.

As shown in fig. 3, the transmission shaft 16 of the motor 1 is provided with a flat surface 28 at the position of the eccentric compensation structure 24, the eccentric compensation structure 24 is provided with a threaded hole 29 communicated with the flat surface 28, and a screw 30 can be abutted on the flat surface 28 after passing through the threaded hole 29. In addition, the second eccentric structure 18 of the second pump body 3 is structurally identical to the first eccentric structure 17 of the first pump body 2, except that the second eccentric mass of the second eccentric structure 18 is opposite to the first eccentric mass of the first eccentric structure 17 in eccentric direction, i.e. the two eccentric masses are installed in opposite directions, and the positions of the flat surfaces 28 on the transmission shaft 16 of the motor 1 corresponding to the two eccentric masses are also opposite.

As shown in fig. 5, the fan structure is disposed at two ends of a transmission shaft 16 of the motor 1, the fan blades 7 of the fan structure are connected with the end of the transmission shaft 16, and the fan housing 6 of the fan structure is disposed outside the fan blades 7. An air duct 31 is provided inside the fan housing 6, one end of the air duct 31 communicates with the fan blades 7, and the other end of the air duct 31 communicates with the chamber bracket 4.

As shown in fig. 5 and 6, the fan housing 6 and the chamber bracket 4 are assembled together by means of insertion and clamping, specifically, a slot 32 is formed at the top end of the fan housing 6, a corresponding rib 33 is formed on the chamber bracket 4, and the slot 32 of the fan housing 6 is horizontally inserted into the rib 33 of the chamber bracket 4 during installation. There are also elastic strips 34 on the top and bottom of the fan housing 6, and correspondingly there are slots 35 on the chamber frame 4, and during the process of inserting the fan housing 6 horizontally towards the chamber frame 4, the elastic strips 34 are clipped into the slots 35, thereby completing the assembly.

Principle of operation

When the non-metal diaphragm type vacuum obtaining apparatus provided in this embodiment is operated, as shown in fig. 2, the driving shaft 16 is driven by the motor 1 to rotate. In the rotating process of the transmission shaft 16, two ends of the transmission shaft 16 respectively drive the first eccentric structure 17 and the second eccentric structure 18 to eccentrically rotate, so that the first pump body 2 and the second pump body 3 are crossed to apply force to do work, and continuous vacuum pumping operation is performed.

Meanwhile, in the rotating process of the transmission shaft 16, the two ends of the transmission shaft 16 also drive the two fan blades 7 to rotate respectively, so as to cool the compression chambers of the first pump body 2 and the second pump body 3.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are intended to be within the scope of the invention.