阅读说明：本技术 一种基于碳纳米管的波导耦合器 (Waveguide coupler based on carbon nano tube ) 是由 不公告发明人 于 2020-06-19 设计创作，主要内容包括：本发明提供了一种基于碳纳米管的波导耦合器,在第一波导层、隔离层、第二波导层之间设置贯穿的孔洞；碳纳米管设置在悬臂梁的头部上,在振源的作用下,碳纳米管振动,碳纳米管能够深入到孔洞内,改变第一波导层和第二波导层的耦合特性。在本发明中,碳纳米管的直径小,能够更多地深入到孔洞中；第一波导层与第二波导层中的光通过碳纳米管连通,碳纳米管形成了光通路。本发明可以通过改变碳纳米管深入孔洞的深度,改变第一波导层与第二波导层之间的耦合,具有耦合特性方便可调的优点,在波导耦合和传感器领域具有良好的应用前景。(The invention provides a waveguide coupler based on a carbon nano tube, wherein through holes are formed among a first waveguide layer, an isolation layer and a second waveguide layer; the carbon nano tube is arranged on the head of the cantilever beam, and under the action of the vibration source, the carbon nano tube vibrates, and can penetrate into the hole to change the coupling characteristic of the first waveguide layer and the second waveguide layer. In the invention, the diameter of the carbon nano tube is small, and the carbon nano tube can be more deeply inserted into the hole; the light in the first waveguide layer and the second waveguide layer is communicated through the carbon nano tubes, and the carbon nano tubes form an optical path. The invention can change the coupling between the first waveguide layer and the second waveguide layer by changing the depth of the carbon nano tube penetrating into the hole, has the advantage of convenient and adjustable coupling characteristic, and has good application prospect in the field of waveguide coupling and sensors.)

1. A carbon nanotube-based waveguide coupler, comprising: the waveguide structure comprises a substrate, a first waveguide layer, an isolation layer, a second waveguide layer, a hole, a vibration source, a base, a cantilever beam, a head and a carbon nano tube; the first waveguide layer is arranged on the substrate, the isolation layer is arranged on the first waveguide layer, the second waveguide layer is arranged on the isolation layer, the first waveguide layer, the isolation layer and the second waveguide layer are internally provided with the through holes, the base is fixed on the vibration source, one end of the cantilever beam is fixed on the base, the head is arranged at the other end of the cantilever beam, the carbon nano tube is fixed on the head and arranged above the holes, and when the cantilever beam vibrates, the carbon nano tube goes deep into the holes to change the coupling characteristic between the first waveguide layer and the second waveguide layer.

2. The carbon nanotube-based waveguide coupler of claim 1, wherein: the first waveguide layer and the second waveguide layer are made of silicon dioxide.

3. The carbon nanotube-based waveguide coupler of claim 2, wherein: the substrate and the isolation layer are made of silicon.

4. The carbon nanotube-based waveguide coupler of claim 3, wherein: the hole is conical, and the axis of the conical shape is along the vertical direction.

5. The carbon nanotube-based waveguide coupler of claim 4, wherein: the carbon nanotubes are in a vertical direction.

6. The carbon nanotube-based waveguide coupler of claim 5, wherein: the diameter of the holes is larger than 10 nanometers and smaller than 20 nanometers.

7. The carbon nanotube-based waveguide coupler of claim 6, wherein: the length of the carbon nano tube extending out of the head part is larger than the sum of the thicknesses of the first waveguide layer, the isolation layer and the second waveguide layer.

8. The carbon nanotube-based waveguide coupler of any one of claims 1-7, wherein: the thickness of the isolation layer is more than 100 nanometers and less than 200 nanometers.

9. The carbon nanotube-based waveguide coupler of claim 8, wherein: the first waveguide layer and the second waveguide layer are both less than 60 nanometers thick.

10. The carbon nanotube-based waveguide coupler of claim 9, wherein: the hole extends to the interior of the substrate.

Technical Field

The invention relates to the field of waveguide couplers, in particular to a waveguide coupler based on a carbon nano tube.

Background

The coupling of light among different waveguides relates to the conversion of different energy forms or energy distribution, and is an important device in the field of micro-nano optics. The waveguide coupler can be applied to micro-nano optical integrated devices and sensors for different physical quantities. Therefore, the waveguide coupler is very widely used. The method for exploring the coupling mode of light in different waveguides based on a new principle has an important promotion effect on the application of the two aspects.

Disclosure of Invention

In order to solve the above problems, the present invention provides a waveguide coupler based on carbon nanotubes, the coupler comprising a substrate, a first waveguide layer, an isolation layer, a second waveguide layer, a hole, a vibration source, a base, a cantilever beam, a head, and carbon nanotubes; the first waveguide layer is arranged on the substrate, the isolation layer is arranged on the first waveguide layer, the second waveguide layer is arranged on the isolation layer, through holes are formed in the first waveguide layer, the isolation layer and the second waveguide layer, the base is fixed on the vibration source, one end of the cantilever beam is fixed on the base, the head is arranged at the other end of the cantilever beam, the carbon nano tube is fixed on the head, the carbon nano tube is arranged above the through holes, when the cantilever beam vibrates, the carbon nano tube goes deep into the through holes, and the coupling characteristic between the first waveguide layer and the second waveguide layer is changed.

Furthermore, the material of the first waveguide layer and the second waveguide layer is silicon dioxide.

Further, the material of the substrate and the isolation layer is silicon.

Further, the holes are tapered with the axis of the taper in the vertical direction.

Further, the carbon nanotubes are in a vertical direction.

Further, the diameter of the holes is larger than 10 nanometers and smaller than 20 nanometers.

Furthermore, the length of the carbon nano tube extending out of the head part is larger than the sum of the thicknesses of the first waveguide layer, the isolating layer and the second waveguide layer.

Further, the thickness of the isolation layer is greater than 100 nanometers and less than 200 nanometers.

Further, the first waveguide layer and the second waveguide layer each have a thickness of less than 60 nanometers.

Further, the hole extends to the inside of the substrate.

The invention has the beneficial effects that: the invention provides a waveguide coupler based on a carbon nano tube, wherein through holes are formed among a first waveguide layer, an isolation layer and a second waveguide layer; the carbon nano tube is arranged on the head of the cantilever beam, and under the action of the vibration source, the carbon nano tube vibrates, and can penetrate into the hole to change the coupling characteristic of the first waveguide layer and the second waveguide layer. In the invention, the diameter of the carbon nano tube is small, and the carbon nano tube can be more deeply inserted into the hole; the light in the first waveguide layer and the second waveguide layer is communicated through the carbon nano tubes, and the carbon nano tubes form an optical path. The invention can change the coupling between the first waveguide layer and the second waveguide layer by changing the depth of the carbon nano tube penetrating into the hole, has the advantage of convenient and adjustable coupling characteristic, and has good application prospect in the field of waveguide coupling and sensors.

The present invention will be described in further detail below with reference to the accompanying drawings.

Drawings

FIG. 1 is a schematic diagram of a carbon nanotube-based waveguide coupler.

Fig. 2 is a schematic diagram of yet another carbon nanotube-based waveguide coupler.

In the figure: 1. a substrate; 2. a first waveguide layer; 3. an isolation layer; 4. a second waveguide layer; 5. a hole; 6. a base; 7. a cantilever beam; 8. a head portion; 9. carbon nanotubes.

Detailed Description

To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.