阅读说明：本技术 一种全通式真空界面隔膜阀疲劳测试系统 (All-through vacuum interface diaphragm valve fatigue test system ) 是由 孙富强 连加俤 于 2020-03-25 设计创作，主要内容包括：本发明公开了一种全通式真空界面隔膜阀疲劳测试系统,包括压缩机、脉冲阀、调压阀、导压阀和隔膜阀,所述压缩机通过管道连接有脉冲阀,脉冲阀通过管道连接有调压阀,调压阀右端与导压阀连接成整体；所述导压阀下端从左至右设有大气孔和真空孔,大气孔外接大气,真空孔外接真空源,导压阀右端开口接入大气；所述导压阀上端设有导压孔,导压孔通过管道连接隔膜阀的内空腔,隔膜阀出口外接真空源。本发明能够通过脉冲阀间隔释放低压空气,控制调压阀、导压阀使得隔膜阀间隔地导入真空和大气,从而完成疲劳测试。(The invention discloses a full-through type vacuum interface diaphragm valve fatigue test system which comprises a compressor, a pulse valve, a pressure regulating valve, a pressure guide valve and a diaphragm valve, wherein the compressor is connected with the pulse valve through a pipeline; the lower end of the pressure guide valve is provided with an atmospheric hole and a vacuum hole from left to right, the atmospheric hole is externally connected with atmosphere, the vacuum hole is externally connected with a vacuum source, and an opening at the right end of the pressure guide valve is connected with atmosphere; the upper end of the pressure guide valve is provided with a pressure guide hole, the pressure guide hole is connected with an inner cavity of the diaphragm valve through a pipeline, and the outlet of the diaphragm valve is externally connected with a vacuum source. The invention can release low-pressure air at intervals through the pulse valve, and control the pressure regulating valve and the pressure guide valve to lead the diaphragm valve to lead vacuum and atmosphere at intervals, thereby completing the fatigue test.)

1. The utility model provides a full formula vacuum interface diaphragm valve fatigue test system which characterized in that: the air compressor comprises a compressor (1), a pulse valve (3), a pressure regulating valve (4), a pressure guide valve (5) and a diaphragm valve (6), wherein the compressor (1) is connected with the pulse valve (3) through a pipeline (2), the pulse valve (3) is connected with the pressure regulating valve (4) through the pipeline (2), and the right end of the pressure regulating valve (4) is connected with the pressure guide valve (5) into a whole; the lower end of the pressure guide valve (5) is provided with an atmospheric hole (21) and a vacuum hole (22) from left to right, the atmospheric hole (21) is externally connected with atmosphere, the vacuum hole (22) is externally connected with a vacuum source, and an opening at the right end of the pressure guide valve (5) is connected with atmosphere; the upper end of the pressure guide valve (5) is provided with a pressure guide hole (19), the pressure guide hole (19) is connected with an inner cavity of the diaphragm valve (6) through a pipeline (2), and the outlet of the diaphragm valve (6) is externally connected with a vacuum source.

2. The full-through vacuum interface diaphragm valve fatigue testing system of claim 1, wherein: the pressure regulating valve (4) comprises a pressure regulating left valve body (7), a pressure regulating diaphragm (9), a pressure regulating right valve body (10), a pressure regulating nut (11), a pressure regulating valve rod (12), a pressure regulating spring (13) and a magnet (14), the pressure regulating diaphragm (9) is clamped between the pressure regulating left valve body (7) and the pressure regulating right valve body (10), the pressure regulating diaphragm (9) is connected with the pressure regulating valve rod (12) in the middle, the pressure regulating valve rod (12) is sleeved with the pressure regulating spring (13), two ends of the pressure regulating spring (13) are respectively contacted with the pressure regulating diaphragm (9) and the inner wall surface of the pressure regulating right valve body (10), the left side of the pressure regulating diaphragm (9) is contacted with the pressure regulating nut (11), and the pressure regulating nut (11) is installed; the upper end of the pressure regulating left valve body (7) is provided with an atmosphere compensation hole (8), and the atmosphere compensation hole (8) is a stepped hole; a magnet (14) is embedded at the right end of the pressure regulating valve rod (12); and a pipe head is embedded at the lower end between the pressure regulating left valve body (7) and the pressure regulating right valve body (10), and the pipe head is connected with the pulse valve (3) through a pipeline (2).

3. The full-through vacuum interface diaphragm valve fatigue testing system of claim 1, wherein: the right end of the pressure regulating valve (4) is connected with a pressure guide valve (5) into a whole through a connecting shell (16), the pressure guide valve (5) comprises a magnet (14), a pressure guide spring (15), a pressure guide diaphragm (17), a pressure guide rod (18), a diaphragm gland (23), a pressure guide left valve body (24), a pressure guide middle valve body (25) and a pressure guide right valve body (26), and the right side surface of the connecting shell (16) is sequentially connected with the diaphragm gland (23), the pressure guide left valve body (24), the pressure guide middle valve body (25) and the pressure guide right valve body (26); a pressure guide diaphragm (17) is fixed between the connecting shell (16) and the diaphragm gland (23), the middle part of the pressure guide diaphragm (17) is connected with a pressure guide rod (18), the left end of the pressure guide rod (18) is sleeved with a magnet (14), the pressure guide rod (18) is sleeved with a pressure guide spring (15), the right end of the pressure guide spring (15) is contacted with the inner cavity wall surface of a pressure guide left valve body (24), the pressure guide left valve body (24) is installed on the right side of the diaphragm gland (23), the right end of the pressure guide left valve body (24) is provided with a pressure guide middle valve body (25), and the right end of the pressure guide middle valve body (25) is connected with a pressure guide right valve body; the pressure guide left valve body (24) and the pressure guide middle valve body (25) are internally and transversely provided with pressure guide rods (18), and the right sides of the pressure guide rods (18) are provided with 2 annular bulge structures; the middle part of the lower end of the pressure guide left valve body (24) is provided with an atmospheric hole (21), the atmospheric hole (21) is a circular through hole, and the atmospheric hole (21) is externally connected with the atmosphere; pressure guide holes (19) are formed between the upper end of the pressure guide left valve body (24) and the upper end of the pressure guide middle valve body (25) and between the upper end of the pressure guide middle valve body (25) and the upper end of the pressure guide right valve body (26), the pressure guide holes (19) are connected with an inner cavity of the diaphragm valve (6) through a pipeline (2), and sealing rings (20) are arranged between the pressure guide left valve body (24) and the pressure guide middle valve body (25) and between the pressure guide middle valve body (25) and the pressure guide right valve body (26); the lower end of the pressure guide middle valve body (25) is vertically provided with a vacuum hole (22), the vacuum hole (22) is a circular through hole, and the vacuum hole (22) is externally connected with a vacuum source.

[ technical field ] A method for producing a semiconductor device

The invention relates to the technical field of diaphragm valves, in particular to the technical field of a full-general vacuum interface diaphragm valve fatigue test system.

[ background of the invention ]

The diaphragm valve is a stop valve which uses a diaphragm as an opening and closing piece to close a flow passage, cut off fluid and separate an inner cavity of a valve body from an inner cavity of a valve cover. The diaphragm is made of elastic, corrosion-resistant and impermeable materials such as rubber and plastics. The valve body is made of multipurpose plastic, glass fiber reinforced plastic, ceramic or metal lining rubber material. A diaphragm of a diaphragm valve is highly susceptible to fatigue fracture when used for a long period of time, and once fractured, the diaphragm may have adverse effects. Therefore, a fatigue testing system for a whole set of diaphragm valves is needed to test the diaphragm fatigue limit of the diaphragm valves.

[ summary of the invention ]

The invention aims to solve the problems in the prior art and provides a full-through type vacuum interface diaphragm valve fatigue testing system which can release low-pressure air at intervals through a pulse valve and control a pressure regulating valve and a pressure guide valve to lead the diaphragm valve into vacuum and atmosphere at intervals so as to complete fatigue testing. According to the invention, the time is controlled at intervals by the pulse valve switch, and the size of the cavity needing to be inflated in the pressure regulating valve is changed by the pressure regulating nut on the pressure regulating valve, so that the parameter change required by the fatigue test is completed, and the experiment is carried out to obtain various parameters of the diaphragm valve.

In order to achieve the purpose, the invention provides a full-through type vacuum interface diaphragm valve fatigue testing system which comprises a compressor, a pulse valve, a pressure regulating valve, a pressure guide valve and a diaphragm valve, wherein the compressor is connected with the pulse valve through a pipeline, the pulse valve is connected with the pressure regulating valve through a pipeline, and the right end of the pressure regulating valve is connected with the pressure guide valve into a whole; the lower end of the pressure guide valve is provided with an atmospheric hole and a vacuum hole from left to right, the atmospheric hole is externally connected with atmosphere, the vacuum hole is externally connected with a vacuum source, and an opening at the right end of the pressure guide valve is connected with atmosphere; the upper end of the pressure guide valve is provided with a pressure guide hole, the pressure guide hole is connected with an inner cavity of the diaphragm valve through a pipeline, and the outlet of the diaphragm valve is externally connected with a vacuum source.

Preferably, the pressure regulating valve comprises a pressure regulating left valve body, a pressure regulating diaphragm, a pressure regulating right valve body, a pressure regulating nut, a pressure regulating valve rod, a pressure regulating spring and a magnet, wherein the pressure regulating diaphragm is clamped between the pressure regulating left valve body and the pressure regulating right valve body; the upper end of the pressure regulating left valve body is provided with an atmospheric compensation hole which is a stepped hole; the right end of the pressure regulating valve rod is embedded with a magnet; and a pipe head is embedded at the lower end between the pressure regulating left valve body and the pressure regulating right valve body and is connected with the pulse valve through a pipeline.

Preferably, the right end of the pressure regulating valve is connected with a pressure guide valve into a whole through a connecting shell, the pressure guide valve comprises a magnet, a pressure guide spring, a pressure guide diaphragm, a pressure guide rod, a diaphragm gland, a pressure guide left valve body, a pressure guide middle valve body and a pressure guide right valve body, and the right side surface of the connecting shell is sequentially connected with the diaphragm gland, the pressure guide left valve body, the pressure guide middle valve body and the pressure guide right valve body; a pressure guide diaphragm is fixed between the connecting shell and the diaphragm gland, the middle part of the pressure guide diaphragm is connected with a pressure guide rod, the left end of the pressure guide rod is sleeved with a magnet, a pressure guide spring is sleeved on the pressure guide rod, the right end of the pressure guide spring is contacted with the wall surface of the inner cavity of the pressure guide left valve body, the pressure guide left valve body is arranged on the right side of the diaphragm gland, the pressure guide middle valve body is arranged at the right end of the pressure guide left valve body, and the pressure guide right valve body is connected with the right end of the; the pressure guide left valve body and the pressure guide middle valve body are internally and transversely provided with pressure guide rods, and the right sides of the pressure guide rods are provided with 2 annular bulge structures; the middle part of the lower end of the pressure guide left valve body is provided with an atmospheric hole which is a circular through hole and is externally connected with atmosphere; pressure guide holes are formed between the upper end of the pressure guide left valve body and the upper end of the pressure guide middle valve body and between the upper end of the pressure guide middle valve body and the upper end of the pressure guide right valve body, the pressure guide holes are connected with an inner cavity of the diaphragm valve through pipelines, and sealing rings are arranged between the pressure guide left valve body and the pressure guide middle valve body and between the pressure guide middle valve body and the pressure guide right valve body; the lower end of the pressure guide middle valve body is vertically provided with a vacuum hole, the vacuum hole is a circular through hole, and the vacuum hole is externally connected with a vacuum source.

The invention has the beneficial effects that: the invention can release low-pressure air at intervals through the pulse valve, and control the pressure regulating valve and the pressure guide valve to lead the diaphragm valve to lead vacuum and atmosphere at intervals, thereby completing the fatigue test. According to the invention, the time is controlled at intervals by the pulse valve switch, and the size of the cavity needing to be inflated in the pressure regulating valve is changed by the pressure regulating nut on the pressure regulating valve, so that the parameter change required by the fatigue test is completed, and the experiment is carried out to obtain various parameters of the diaphragm valve.

The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.

[ description of the drawings ]

FIG. 1 is a system schematic diagram of a full-through vacuum interface diaphragm valve fatigue testing system of the present invention;

FIG. 2 is an enlarged view of portion A of FIG. 1 in accordance with the present invention;

FIG. 3 is a cross-sectional view of a pressure regulating valve and a pressure pilot valve of an all-pass vacuum interface diaphragm valve fatigue testing system of the present invention.

In the figure: 1-compressor, 2-pipeline, 3-pulse valve, 4-pressure regulating valve, 5-pressure guiding valve, 6-diaphragm valve, 7-pressure regulating left valve body, 8-atmospheric compensation hole, 9-pressure regulating diaphragm, 10-pressure regulating right valve body, 11-pressure regulating nut, 12-pressure regulating valve rod, 13-pressure regulating spring, 14-magnet, 15-pressure guiding spring, 16-connecting shell, 17-pressure guiding diaphragm, 18-pressure guiding rod, 19-pressure guiding hole, 20-sealing ring, 21-atmospheric hole, 22-vacuum hole, 23-diaphragm gland, 24-pressure guiding left valve body, 25-pressure guiding middle valve body and 26-pressure guiding right valve body.

[ detailed description ] embodiments

Referring to fig. 1, 2 and 3, the present invention includes a compressor 1, a pulse valve 3, a pressure regulating valve 4, a pressure guide valve 5 and a diaphragm valve 6, wherein the compressor 1 is connected with the pulse valve 3 through a pipeline 2, the pulse valve 3 is connected with the pressure regulating valve 4 through the pipeline 2, and the right end of the pressure regulating valve 4 is connected with the pressure guide valve 5 into a whole; the lower end of the pressure guide valve 5 is provided with an atmospheric hole 21 and a vacuum hole 22 from left to right, the atmospheric hole 21 is externally connected with atmosphere, the vacuum hole 22 is externally connected with a vacuum source, and an opening at the right end of the pressure guide valve 5 is connected with atmosphere; the upper end of the pressure guide valve 5 is provided with a pressure guide hole 19, the pressure guide hole 19 is connected with the inner cavity of the diaphragm valve 6 through the pipeline 2, and the outlet of the diaphragm valve 6 is externally connected with a vacuum source.

Specifically, the pressure regulating valve 4 comprises a pressure regulating left valve body 7, a pressure regulating diaphragm 9, a pressure regulating right valve body 10, a pressure regulating nut 11, a pressure regulating valve rod 12, a pressure regulating spring 13 and a magnet 14, wherein the pressure regulating diaphragm 9 is clamped between the pressure regulating left valve body 7 and the pressure regulating right valve body 10, the pressure regulating diaphragm 9 is connected to the middle of the pressure regulating valve rod 12, the pressure regulating valve rod 12 is sleeved with the pressure regulating spring 13, two ends of the pressure regulating spring 13 are respectively contacted with the pressure regulating diaphragm 9 and the inner wall surface of the pressure regulating right valve body 10, the left side of the pressure regulating diaphragm 9 is contacted with the pressure regulating nut 11, and the pressure regulating nut; the upper end of the pressure regulating left valve body 7 is provided with an atmospheric compensation hole 8, and the atmospheric compensation hole 8 is a stepped hole; a magnet 14 is embedded at the right end of the pressure regulating valve rod 12; and a pipe head is embedded at the lower end between the pressure regulating left valve body 7 and the pressure regulating right valve body 10 and is connected with the pulse valve 3 through a pipeline 2.

Specifically, the right end of the pressure regulating valve 4 is connected with a pressure guide valve 5 into a whole through a connecting shell 16, the pressure guide valve 5 comprises a magnet 14, a pressure guide spring 15, a pressure guide diaphragm 17, a pressure guide rod 18, a diaphragm gland 23, a pressure guide left valve body 24, a pressure guide middle valve body 25 and a pressure guide right valve body 26, and the right side surface of the connecting shell 16 is sequentially connected with the diaphragm gland 23, the pressure guide left valve body 24, the pressure guide middle valve body 25 and the pressure guide right valve body 26; a pressure guide diaphragm 17 is fixed between the connecting shell 16 and the diaphragm gland 23, the middle part of the pressure guide diaphragm 17 is connected with a pressure guide rod 18, the left end of the pressure guide rod 18 is sleeved with a magnet 14, the pressure guide rod 18 is sleeved with a pressure guide spring 15, the right end of the pressure guide spring 15 is contacted with the inner cavity wall surface of the pressure guide left valve body 24, the pressure guide left valve body 24 is arranged on the right side of the diaphragm gland 23, the right end of the pressure guide left valve body 24 is provided with a pressure guide middle valve body 25, and the right end of the pressure guide middle valve body 25 is connected with a pressure; the pressure guide rods 18 are transversely arranged in the inner cavities of the pressure guide left valve body 24 and the pressure guide middle valve body 25, and the right sides of the pressure guide rods 18 are provided with 2 annular convex structures; the middle part of the lower end of the pressure guide left valve body 24 is provided with an atmospheric hole 21, the atmospheric hole 21 is a circular through hole, and the atmospheric hole 21 is externally connected with the atmosphere; pressure guide holes 19 are formed between the upper end of the pressure guide left valve body 24 and the upper end of the pressure guide middle valve body 25 and between the upper end of the pressure guide middle valve body 25 and the upper end of the pressure guide right valve body 26, the pressure guide holes 19 are connected with an inner cavity of the diaphragm valve 6 through a pipeline 2, and sealing rings 20 are arranged between the pressure guide left valve body 24 and the pressure guide middle valve body 25 and between the pressure guide middle valve body 25 and the pressure guide right valve body 26; the lower end of the pressure guide middle valve body 25 is vertically provided with a vacuum hole 22, the vacuum hole 22 is a circular through hole, and the vacuum hole 22 is externally connected with a vacuum source.

The working process of the invention is as follows:

the invention relates to a fatigue test system for a full-through vacuum interface diaphragm valve, which is explained in the working process by combining with an attached drawing.

The pulse valve 3 is an electric control type pulse valve and belongs to the prior art; the low-pressure air of the compressor 1 can be led into the pressure regulating valve 4 at intervals through the pulse valve 3; the size of the left cavity of the pressure regulating valve 4 can be adjusted by a pressure regulating nut 11; when the pressure in the left cavity of the pressure regulating valve 4 is enough, the pressure regulating membrane 9 is ejected out, so that the pressure regulating valve rod 12 moves to the right; the movement of the valve rod 12 causes the pressure guide diaphragm 17 to move to the right, so that the convex structure on the pressure guide rod 18 is abutted against the sealing ring 20 on the right side; the atmosphere connected to the lower end of the pressure guide valve 5 is guided into the cavity in the diaphragm valve 6 through the pressure guide hole 19, so that the diaphragm valve 6 is closed. When the pulse valve 3 does not work, the lower end and the right end of the pressure guide valve 5 are both at atmospheric pressure, and under the balanced condition, the pressure guide rod 18 moves leftwards under the action of the restoring force of the spring; the vacuum that the lower extreme of pressure guide valve 5 inserted is led into diaphragm valve 6 inner cavity through pressure guide hole 19, and diaphragm valve 6's diaphragm is opened, and air-vent valve 4, pressure guide valve 5 all recover simultaneously. And finishing the fatigue test in cycles. In the fatigue test, the test parameters are adjusted by adjusting the time interval between the pressure regulating nut 11 and the pulse valve 3.

According to the invention, low-pressure air can be released at intervals through the pulse valve, and the pressure regulating valve and the pressure guide valve are controlled to lead the diaphragm valve to lead vacuum and atmosphere at intervals, so that the fatigue test is completed. According to the invention, the time is controlled at intervals by the pulse valve switch, and the size of the cavity needing to be inflated in the pressure regulating valve is changed by the pressure regulating nut on the pressure regulating valve, so that the parameter change required by the fatigue test is completed, and the experiment is carried out to obtain various parameters of the diaphragm valve.

The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.