阅读说明：本技术 掩膜板、显示面板的制作方法及显示装置 (Mask plate, manufacturing method of display panel and display device ) 是由 彭钊 吴思嘉 于 2020-05-29 设计创作，主要内容包括：本申请公开了一种掩膜板、显示面板的制作方法及显示装置。所述掩膜板包括：透明基板；以及图案层,所述图案层形成于所述透明基板上；在所述图案层上设有透光区,在所述透光区内设有半透膜；所述半透膜边缘的透光率沿远离边缘的方向逐渐减小。本申请通过控制不同残膜区所对应掩膜板上的半透膜的厚度不同和设置于半透膜的孔的密度不同,使得残膜区的透过率呈现阶梯的变化,即残膜区边缘的透过率较低,残膜区中间通过率高,如此设计使得在曝光显影后的残膜厚度基本保持一致,防止残膜的破膜风险。(The application discloses a mask plate, a manufacturing method of a display panel and a display device. The mask plate includes: a transparent substrate; and a pattern layer formed on the transparent substrate; a light-transmitting area is arranged on the pattern layer, and a semi-permeable membrane is arranged in the light-transmitting area; the light transmittance of the semi-permeable membrane edge is gradually reduced along the direction far away from the edge. This application is different and set up in the density difference in the hole of pellicle through the thickness difference of the pellicle of the different incomplete membrane district's corresponding mask plate of control for the transmissivity of incomplete membrane district presents the change of ladder, and the transmissivity at incomplete membrane district edge is lower promptly, and the transmissivity is high in the middle of the incomplete membrane district, and the design makes the incomplete membrane thickness after exposure and development keep unanimous basically, prevents the broken membrane risk of incomplete membrane.)

1. A mask, comprising:

a transparent substrate; and

a pattern layer formed on the transparent substrate;

a light-transmitting area is arranged on the pattern layer, and a semi-permeable membrane is arranged in the light-transmitting area;

the light transmittance of the semi-permeable membrane edge is gradually reduced along the direction far away from the edge.

2. A mask according to claim 1 wherein the semi-permeable membrane is provided with a plurality of holes, the density of the holes decreasing in a direction away from the edge.

3. A mask according to claim 1 wherein the semi-permeable membranes are of the same thickness.

4. A mask according to claim 3 wherein the light transmittance is smaller as the thickness of the semi-permeable membrane is thicker.

5. A mask according to claim 1, wherein the material of the pattern layer is chromium.

6. A mask according to claim 1 wherein the linearity of the holes is less than 3 um.

7. A mask according to claim 1 wherein the semi-permeable membrane has a thickness of 100 to 10000 angstroms.

8. A mask according to claim 1 wherein the semi-permeable membrane has a light transmittance of 20% to 60%.

9. A manufacturing method of a display panel is characterized by comprising the following steps:

forming a first layer pattern having a uniform thickness on a substrate using the mask blank according to any one of claims 1 to 8; and

and sequentially forming subsequent layers of patterns on the first layer of patterns.

10. A display device, comprising: a display panel produced by the method for producing a display panel according to claim 9.

Technical Field

The application relates to the technical field of display, in particular to a mask plate, a manufacturing method of a display panel and a display device.

Background

The mask plate is used for exposure and composition process. In the process of manufacturing the display panel, a mask plate is required to be used for carrying out multiple exposure processes so as to manufacture structures such as a thin film transistor, a pixel electrode, a black matrix, a color filter and the like in the display panel.

The Halftone Mask (Halftone Mask) mainly forms two different film thicknesses by exposing a specific area of the photomask substrate with partial light transmittance characteristics, and controls the light transmittance of different areas by controlling the thickness of chrome films of different areas on the photomask substrate. Generally, the middle of the residual film is broken first due to exposure and chemical solution diffusion, and the larger the residual film area is, the worse the uniformity of the residual film thickness is.

In view of the above, a new method is needed to solve the problem of poor film thickness uniformity in the residual film region.

Disclosure of Invention

The embodiment of the application provides a mask plate, a manufacturing method of a display panel and a display device, and can effectively solve the problem that a thin area is easy to break due to poor uniformity of film thickness of a residual film area.

According to an aspect of the present application, an embodiment of the present application provides a mask plate, including: a transparent substrate; and a pattern layer formed on the transparent substrate; a light-transmitting area is arranged on the pattern layer, and a semi-permeable membrane is arranged in the light-transmitting area; the light transmittance of the semi-permeable membrane edge is gradually reduced along the direction far away from the edge.

Furthermore, a plurality of holes are formed in the semi-permeable membrane, and the density of the holes is gradually reduced along the direction far away from the edge.

Further, the semi-permeable membranes are of the same thickness.

Further, the light transmittance is smaller as the thickness of the semi-permeable membrane is thicker.

Further, the material of the pattern layer is chromium.

Further, the linearity of the hole is less than 3 um.

Further, the semi-permeable membrane has a thickness of 100 to 10000 angstroms.

Further, the semi-permeable membrane has a light transmittance of 20% to 60%.

According to another aspect of the present application, an embodiment of the present application provides a method for manufacturing a display panel, including: forming a first layer of pattern with uniform edge thickness on the substrate by adopting the mask plate; and sequentially forming subsequent layers of patterns on the first layer of patterns.

According to still another aspect of the present application, an embodiment of the present application provides a display device, including: the display panel manufactured by the method for manufacturing the display panel.

The advantage of this application lies in, compares in prior art, earlier through the pellicle that sets up different thickness in this application, from the overall control luminousness. The density of holes formed in the semi-permeable membrane is different on the mask plate corresponding to different residual membrane control areas, so that the transmittance of the residual membrane control areas is changed in a stepped manner, namely the transmittance of the edges of the residual membrane control areas is low, the pass rate of the middle of the residual membrane control areas is high, the thickness of the residual membrane after exposure and development is basically kept consistent through the design, and the risk of membrane breakage of the residual membrane is prevented.

Drawings

The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.

Fig. 1 is a schematic structural diagram of a mask provided in an embodiment of the present application.

Fig. 2 is a schematic diagram of a semi-permeable membrane structure provided in an embodiment of the present application.

Fig. 3 is a manufacturing method of a display panel according to an embodiment of the present disclosure.

Fig. 4 is a display device according to an embodiment of the present disclosure.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate. In this embodiment, the analog display screen touch unit is connected to the head tracking unit, and is configured to acquire a moving path of a sensing cursor in the display device.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.

As shown in fig. 1, a schematic view of a mask structure provided in an embodiment of the present application includes: a transparent substrate 10, a pattern layer 20, and a semi-permeable membrane 30.

Wherein the pattern layer 20 is formed on the transparent substrate 10.

A light-transmitting region 34 is provided on the pattern layer 20, and a semi-permeable membrane 30 is provided in the light-transmitting region 34. In the embodiment of the present application, the material of the pattern layer 20 is chromium, but is not limited thereto.

The light transmittance of the edges of the semi-permeable membrane 30 gradually decreases in a direction away from the edges. By the arrangement, the light intensity in the exposure area is kept consistent, the film thickness of each layer of pattern formed by manufacturing is kept consistent, and the risk of film breaking is prevented.

Fig. 2 is a schematic view of a semipermeable membrane 30 according to an embodiment of the present invention. The semi-permeable membranes 30 are of the same thickness.

In the present embodiment, the semi-permeable membrane 30 has a thickness of 100 to 10000 angstroms, which helps to control light transmittance as a whole. I.e., the greater the thickness of the semi-permeable membrane, the lower the light transmission.

The semi-permeable membrane 30 is provided with a plurality of holes 33, and the density of the holes 33 gradually decreases in a direction away from the edge. In the embodiment of the present application, the shape of the hole 33 is not limited, and in order to ensure the diffraction effect of light, the linearity of the hole 33 is less than 3 um. The semi-permeable membrane 30 has a thickness of 100 to 10000 angstroms. The light transmittance of the semi-permeable membrane 30 is 20% to 60%, and the light transmittance of the semi-permeable membrane 30 is mainly determined by the density of the pores 33. The light transmittance is higher when the density of the holes 33 is higher, whereas the light transmittance is lower when the density of the holes 33 is lower.

The advantage of this application lies in, compares in prior art, earlier through the pellicle that sets up different thickness in this application, from the overall control luminousness. The density of holes formed in the semi-permeable membrane is different on the mask plate corresponding to different residual membrane control areas, so that the transmittance of the residual membrane control areas is changed in a stepped manner, namely the transmittance of the edges of the residual membrane control areas is low, the pass rate of the middle of the residual membrane control areas is high, the thickness of the residual membrane after exposure and development is basically kept consistent through the design, and the risk of membrane breakage of the residual membrane is prevented.

The application also provides a manufacturing method of the display panel, which comprises the following steps:

step S100: by adopting the mask plate in any embodiment, a first layer pattern with uniform thickness is formed on the substrate.

Step S110: and sequentially forming subsequent layers of patterns on the first layer of patterns.

As shown in fig. 3, a process flow diagram of step S100 is provided in the embodiment of the present application.

When the mask plate provided by the embodiment is used for exposure, the light intensity of the light transmitting area of the mask plate is kept consistent, so that the thickness of the residual film area 42 of each layer of manufactured patterns is kept uniform, and the film is not easy to break.

The advantage of this application lies in, compares in prior art, earlier through the pellicle that sets up different thickness in this application, from the overall control luminousness. The density of holes formed in the semi-permeable membrane is different on the mask plate corresponding to different residual membrane control areas, so that the transmittance of the residual membrane control areas is changed in a stepped manner, namely the transmittance of the edges of the residual membrane control areas is low, the pass rate of the middle of the residual membrane control areas is high, the thickness of the residual membrane after exposure and development is basically kept consistent through the design, and the risk of membrane breakage of the residual membrane is prevented.

As shown in fig. 4, the present application also provides a display device including the display panel according to the above embodiment.

The display device may be: any product or component with a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator and the like. When the display device 50 of the present embodiment adopts the display panel of the above embodiment, the display effect is better.

Of course, other conventional structures, such as a power supply unit, a display driving unit, and the like, may also be included in the display device 50 of the present embodiment.

In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.

The principle and the implementation of the present application are explained by applying specific examples, and the above description of the embodiments is only used to help understanding the technical solution and the core idea of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.