阅读说明：本技术 一种集成压电薄膜芯片和减速器的薄膜压电马达 (Thin film piezoelectric motor integrating piezoelectric thin film chip and speed reducer ) 是由 胡启俊 何野 徐波 于 2020-06-12 设计创作，主要内容包括：本发明公开了一种集成压电薄膜芯片和减速器的薄膜压电马达,包括压电薄膜芯片,一组转子齿轮,以及中心齿轮和/或内齿圈；所述的压电薄膜芯片上包含一组薄膜压电马达的定子,所述的定子与转子齿轮底部的转子平台形成旋转式压电马达单元；所述转子齿轮,中心齿轮和/或内齿圈的旋转轴相互平行且轴心位置固定,任一转子齿轮与中心齿轮和/或内齿圈相互啮合,转子齿轮的旋转方向相同,所述的薄膜压电马达的力矩由中心齿轮或内齿圈输出。本发明将压电薄膜芯片与减速器集成,充分利用压电薄膜芯片的潜能,设计得到大体积、大力矩、高旋转精度的新型薄膜压电马达。(The invention discloses a film piezoelectric motor integrating a piezoelectric film chip and a speed reducer, which comprises the piezoelectric film chip, a group of rotor gears, a central gear and/or an inner gear ring; the piezoelectric film chip comprises a group of stators of the film piezoelectric motor, and the stators and a rotor platform at the bottom of the rotor gear form a rotary piezoelectric motor unit; the rotating shafts of the rotor gear, the central gear and/or the inner gear ring are parallel to each other, the axis positions of the rotor gear, the central gear and/or the inner gear ring are fixed, any rotor gear is meshed with the central gear and/or the inner gear ring, the rotating directions of the rotor gears are the same, and the torque of the film piezoelectric motor is output by the central gear or the inner gear ring. The invention integrates the piezoelectric film chip and the speed reducer, fully utilizes the potential of the piezoelectric film chip, and designs the novel film piezoelectric motor with large volume, large moment and high rotation precision.)

1. The thin film piezoelectric motor integrating the piezoelectric thin film chip and the speed reducer is characterized in that the thin film piezoelectric motor internally comprises the piezoelectric thin film chip (8), a group of rotor gears (2), a central gear (1) and/or an inner gear ring (3); the piezoelectric film chip (8) comprises a group of stator structures of film piezoelectric motors, any rotor gear (2) is in friction connection with the corresponding stator structure through a rotor platform at the bottom, and the stator structures and the rotor platform form a rotary piezoelectric motor unit; the thin film piezoelectric motor is characterized in that the rotor gear (2) and the central gear (1) are external gears, the inner gear ring is an inner gear (3), the rotating shafts of the rotor gear (2) and the central gear (1) and/or the inner gear ring (3) are parallel to each other, the axis positions of the rotating shafts are fixed, the rotor gear (2) is meshed with the central gear (1) and/or the inner gear ring (3), the rotating directions of any rotor gear (2) are the same, and the torque of the thin film piezoelectric motor is output by the central gear (1) or the inner gear ring (3).

2. The thin film piezoelectric motor according to claim 1, wherein the thin film piezoelectric motor comprises a central gear (1), a stator structure on the piezoelectric thin film chip (8) and a rotor platform of the central gear (1) form a piezoelectric motor unit, and the rotation direction of the central gear (1) is opposite to that of the rotor gear (2).

3. The thin film piezoelectric motor according to claim 1, wherein the thin film piezoelectric motor comprises a set of rotor gears (2) and a sun gear (1), any one of the rotor gears (2) is engaged with the sun gear (1), the rotor gears (2) generate an input torque, and the torque is output from the sun gear (1) through gear engagement.

4. The thin film piezoelectric motor according to claim 1, wherein the thin film piezoelectric motor comprises a set of rotor gears (2) and an inner gear ring (3), any one of the rotor gears (2) is engaged with the inner gear ring (3), the rotor gears (2) generate an input torque, and the torque is output from the inner gear ring (3) through gear engagement.

5. The thin film piezoelectric motor according to claim 1, wherein the thin film piezoelectric motor comprises a set of rotor gears (2), a central gear (1) and an internal gear ring (3), the central gear (1) and the internal gear ring (3) are coaxial, any one of the rotor gears (2) is meshed with the central gear (1) and the internal gear ring (3), the rotor gears (2) generate an input torque, and the torque is output from the central gear (1) through gear meshing.

6. The thin film piezoelectric motor according to claim 1, wherein the thin film piezoelectric motor comprises a set of rotor gears (2), a central gear (1) and an inner gear ring (3), the central gear (1) and the inner gear ring (3) are coaxial, any one of the rotor gears (2) is meshed with the central gear (1) and the inner gear ring (3), the rotor gears (2) generate an input torque, and the torque is output from the inner gear ring (3) through gear meshing.

7. The thin film piezoelectric motor according to claim 1, wherein any one of the piezoelectric motor units has the same structure.

8. The thin film piezoelectric motor according to claim 1, wherein the number of the rotor gears (2) is three or more, and each rotor gear (2) has the same parameter, and the axes of the rotation axes thereof are circumferentially arranged at equal intervals around the axis of the central gear (1) or the inner gear ring (3).

9. The thin film piezoelectric motor according to claim 1, wherein the rotor gears (2) are arranged in multiple stages, wherein the rotor gears (2) of adjacent two stages are engaged with each other and rotate in opposite directions, the rotor gear (2) of the first stage is engaged with the central gear (1), and/or the rotor gear (2) of the last stage is engaged with the inner gear ring (3).

10. The thin film piezoelectric motor according to claim 9, wherein the rotor gears (2) of the same stage have the same parameters, and are circumferentially arranged at equal intervals with the axis of the central gear (1) or the inner gear ring (3) as the center.

Technical Field

The invention belongs to the technical field of micro-electro-mechanical systems (MEMS), relates to a piezoelectric motor, and particularly relates to a film piezoelectric motor integrating a piezoelectric film chip and a speed reducer.

Background

The piezoelectric motor is moved by driving the piezoelectric material to vibrate and rub with the rotor through a circuit. Therefore, the piezoelectric motor has high torque density, large holding torque, high rotation precision and good electromagnetic compatibility, and is widely used as various rotary platforms for carrying precise devices.

Piezoelectric materials can be classified into bulk piezoelectric materials and thin-film piezoelectric materials according to their shapes. Bulk piezoelectric materials are generally bulky, but cannot be finely machined and cannot be integrated with microelectronic processes. The thin film piezoelectric material can be precisely processed by a microelectronic process and integrated with a microelectronic circuit, which is the key for ensuring the performance and batch production of the piezoelectric motor. However, the volume of a single thin-film piezoelectric motor cannot be made large (the thin film is easily broken due to the thin-film material), so that even if the torque density is large, the total output torque of the thin-film piezoelectric motor is small. This limits the use of thin film piezoelectric motors in high volume, high torque applications.

The speed reducer is a device which is meshed with each other through a plurality of gear structures to achieve the purposes of reducing the rotating speed and improving the torque (simultaneously improving the rotating precision). The speed reducer formed by a plurality of gear sets can amplify and converge a plurality of input torques together to output the torques outwards. The output torque acts on the rotating platform through some structure.

Disclosure of Invention

The invention aims to provide an integrated thin film piezoelectric motor, which utilizes the advantages of a piezoelectric thin film wafer to manufacture a plurality of small piezoelectric motor structures, combines a speed reducer structure and integrates a piezoelectric thin film chip comprising a plurality of small motor structures with the speed reducer structure of a gear set, thereby manufacturing the thin film piezoelectric motor integrating the piezoelectric thin film chip and the speed reducer, can amplify and merge a plurality of input moments for output, and has the advantages of large output moment and high rotation precision.

In order to realize the purpose, the invention adopts the following technical scheme:

a thin film piezoelectric motor integrating a piezoelectric thin film chip and a speed reducer is characterized in that the thin film piezoelectric motor comprises the piezoelectric thin film chip, a group of rotor gears, a central gear and/or an inner gear ring; the piezoelectric film chip comprises a group of stator structures of the film piezoelectric motor, any rotor gear is in friction connection with the corresponding stator structure through a rotor platform at the bottom, and the stator structure and the rotor platform form a rotary piezoelectric motor unit; the thin film piezoelectric motor is characterized in that the rotor gear and the central gear are external gears, the inner gear ring is an inner gear, the rotating shafts of the rotor gear and the central gear and/or the inner gear ring are parallel to each other, the axis positions of the rotating shafts are fixed, the rotor gear is meshed with the central gear and/or the inner gear ring, the rotating directions of any rotor gear are the same, and the torque of the thin film piezoelectric motor is output by the central gear or the inner gear ring.

The piezoelectric thin-film wafer can manufacture a chip including a plurality of piezoelectric motor units (small motor structure) in one device by using a microelectronic process and ensure accuracy. The piezoelectric motor unit on the chip can be matched with the rotor, and the piezoelectric motor unit generates vibration under the drive of a circuit and drives the rotor to rotate by friction force. The film piezoelectric motor of the invention carries out integrated design on a piezoelectric film chip and a speed reducer, a plurality of piezoelectric motor units on one piezoelectric film chip are matched with a rotor gear, friction generates a plurality of input torques and drives the rotor gear to rotate, and the plurality of input torques output the torque at a central gear or an inner gear ring after the amplification and confluence of a gear set (the speed reducer), thereby obtaining the novel film piezoelectric motor with volume expansion, large torque and high rotation precision.

In the film piezoelectric motor, the tooth shapes of the rotor gear, the central gear and/or the inner gear ring can adopt positive teeth or adopt helical teeth simultaneously.

In the thin film piezoelectric motor according to the present invention, in the case of including the sun gear, the sun gear may selectively generate or not generate the input torque. When the central gear generates an input torque, a stator structure added on the piezoelectric film chip and a rotor platform of the central gear form a piezoelectric motor unit, and the rotation direction of the central gear is opposite to that of the rotor gear.

The thin film piezoelectric motor of the present invention may adopt one of the following different structural modes according to the input and output modes of the torque:

the thin film piezoelectric motor comprises a group of rotor gears and a central gear, any one of the rotor gears is meshed with the central gear, the rotor gears generate input torque, and the torque is output from the central gear through gear meshing;

the thin film piezoelectric motor comprises a group of rotor gears and an inner gear ring, any one of the rotor gears is meshed with the inner gear ring, the rotor gears generate input torque, and the torque is output from the inner gear ring through gear meshing;

the film piezoelectric motor comprises a group of rotor gears, a central gear and an inner gear ring, wherein the central gear and the inner gear ring are coaxial, any one of the rotor gears is meshed with the central gear and the inner gear ring, the rotor gears generate input torque, the torque is output from the central gear through gear meshing, and the inner gear ring is used for improving the stability of the gear set reducer.

The film piezoelectric motor comprises a group of rotor gears, a central gear and an inner gear ring, wherein the central gear and the inner gear ring are coaxial, any one of the rotor gears is meshed with the central gear and the inner gear ring, the rotor gears generate input torque, and the torque is output from the inner gear ring through gear meshing. The sun gear may either enhance the stability of the gear unit reducer or alternatively allow the sun gear to generate or not generate input torque. If the sun gear produces an input torque, the sun gear rotates in the opposite direction to the rotor gear.

Preferably, in the thin film piezoelectric motor, any one of the piezoelectric motor units has the same structure.

Preferably, in the thin film piezoelectric motor, the number of the rotor gears is three or more, and each rotor gear has the same parameter, and the axes of the rotating shafts are circumferentially arranged at equal intervals with the axis of the central gear or the inner gear ring as the center.

In the thin film piezoelectric motor, the rotor gears are not limited to be arranged in one stage, and the rotor gears can be arranged in multiple stages. The technical scheme of the multi-stage arrangement of the rotor gears is the same as that of the multi-stage arrangement, each rotor gear corresponds to one piezoelectric motor unit on the piezoelectric film chip, the rotor gears of two adjacent stages are meshed with each other and have opposite rotating directions, the first stage rotor gear is meshed with the central gear (if any), and the last stage rotor gear is meshed with the inner gear ring (if any). Preferably, the parameters of the rotor gears of the same stage are the same, and the axes of the rotor gears are circumferentially arranged at equal intervals by taking the axis of the central gear or the inner gear ring as the center. The scheme of multistage arrangement of the rotor gears is more compact, the potential of the piezoelectric film chip can be more effectively utilized, and the piezoelectric motor unit is greatly expanded in space. Under the same device volume, the output torque of the scheme of multistage arrangement of the rotor gears is larger.

The invention has the beneficial effects that:

(1) the piezoelectric film chip and the reducer are organically integrated to form a novel film piezoelectric motor with large volume, large torque and high rotation precision.

(2) Wide application range and flexible design. The motor solution can be designed flexibly depending on the needs of the application and the limitations of the manufacturing process capabilities.

(3) Compact structure and fully utilizes the potential of the piezoelectric film chip.

(4) Good symmetry and is beneficial to the stability of the device structure.

Drawings

FIG. 1 is a schematic diagram of a single thin film piezoelectric motor;

FIG. 2 is a schematic view of a first structure of a thin film piezoelectric motor according to the present invention;

FIG. 3 is a schematic view of a second structure of a thin film piezoelectric motor according to the present invention;

FIG. 4 is a schematic view of a third structural mode of the thin film piezoelectric motor according to the present invention;

FIG. 5 is a schematic diagram of a fourth exemplary embodiment of a thin film piezoelectric motor according to the present invention;

FIG. 6 is a perspective view of the thin film piezoelectric motor of the FIG. 3 construction of the present invention;

FIG. 7 is an exploded view of the thin film piezoelectric motor of the FIG. 3 construction of the present invention;

FIG. 8 is a schematic view of the structure of the two-stage arrangement of the rotor gear of the thin film piezoelectric motor according to the present invention;

in the figure: the structure comprises a central gear 1, a rotor gear 2, an inner gear ring 3, a nut 4, an upper support frame 5, a bearing 7, a piezoelectric film chip 8, a lower support frame 9, a bolt 10, a rotor (rotor platform), a stator 12 and a support structure 13.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the following detailed description is merely illustrative of the invention and is not intended to limit the invention. It is intended that the scope of the invention be limited not by this detailed description, but rather by the claims appended hereto.

As shown in fig. 1, a single rotary motion type thin film piezoelectric motor generally includes a stator 12 made of a piezoelectric thin film material, and a rotor 11 (rotor stage) frictionally coupled to the stator 12, and the stator 12 vibrates under the action of a driving circuit to rotate the rotor by a frictional force. The required stator can be conveniently manufactured by utilizing the piezoelectric film chip.

The invention discloses a film piezoelectric motor integrating a piezoelectric film chip and a speed reducer, which comprises a piezoelectric film chip 8 and a group of rotor gears 2, wherein a stator required by the film piezoelectric motor is integrated on the piezoelectric film chip 8, the contact surfaces of the rotor gears 2 and the stator comprise rotor platforms (friction materials), and the rotor platforms of the rotor gears 2 are in friction connection with the stator to form a rotary motion type piezoelectric motor unit with a structure similar to that of figure 1.

The film piezoelectric motor also comprises a central gear 1 or an inner gear ring 3, or both the central gear 1 and the inner gear ring 3. The rotor gear 2 is meshed with the central gear 1 and/or the inner gear ring 3, the rotating directions of any rotor gear 2 are the same, and the torque of the film piezoelectric motor is output by the central gear 1 or the inner gear ring 3.

In the film piezoelectric motor, the rotor gear 2 and the central gear 1 are external gears, the inner gear ring 3 is an internal gear, and the tooth profiles of the external gears and the internal gear ring can adopt positive teeth or adopt helical teeth simultaneously. The rotating shafts of the rotor gear 2, the central gear 1 and/or the inner gear ring 3 are parallel to each other, and the axis position is fixed by a bearing 4.

The principle of the structure is as follows: a plurality of piezoelectric motor unit structures on a chip 8 of the piezoelectric motor are matched with the rotor gear 2, friction is generated, a plurality of input torques are generated, the rotor gear 2 is driven to rotate, and the number of the piezoelectric motor unit structures is the same as that of the rotor gear 2 in a normal condition. The multiple input torques are amplified and merged by the gear set reducer to output the torques at the sun gear 1 or the inner gear ring 3. The output torque is output outwards through a certain structure, so that a novel thin film piezoelectric motor with large volume, large torque and high rotation precision is obtained.

According to the film piezoelectric motor integrating the piezoelectric film chip and the speed reducer, the number of the rotor gears 2 can be more than or equal to three, the parameters of each rotor gear 2 are recommended to be the same, namely, the rotor gears have the same size, the same number of teeth, the same rotating speed and the like, and the corresponding piezoelectric motor units have the same structure. The axes of the rotating shafts of the rotor gears 2 are circumferentially arranged at equal intervals with the axes of the sun gear 1 or the inner gear ring 3 as the center.

Hereinafter, preferred embodiments of the thin film piezoelectric motor according to the present invention will be described in detail in 4 categories according to the torque input/output method with reference to fig. 2 to 5 (the piezoelectric thin film chip 8 and the rotor stage are not shown in the drawings). In the following description, 3 rotor gears 2 having the same parameters, the same rotation direction, and the same distance are circumferentially arranged in the rotor gear set as an example.

In a first scheme, as shown in fig. 2, the film piezoelectric motor comprises a piezoelectric film chip 8, a set of rotor gears 2, a central gear 1 and an inner gear ring 3. The piezoelectric thin film chip 8 includes a set of stator structures corresponding to the rotor gear 2, and any stator structure and the corresponding rotor platform of the rotor gear 2 form a piezoelectric motor unit with the same structure. The central gear 1 and the inner gear ring 3 are coaxial, any rotor gear 2 is meshed with the central gear 1 and the inner gear ring 3, the rotor gear 2 generates input torque through friction of a piezoelectric motor unit on the piezoelectric film chip 8, the torque is output from the central gear 1 through gear meshing, and the inner gear ring 3 is used for improving the stability of the gear set reducer.

Fig. 3 shows a second technical solution, in which the thin film piezoelectric motor includes a piezoelectric thin film chip 8, a set of rotor gears 2, a sun gear 1 and an inner gear ring 3. The piezoelectric thin film chip 8 includes a set of stator structures corresponding to the rotor gear 2, and any one of the stator structures and the corresponding rotor platform of the rotor gear 2 form a piezoelectric motor unit. The central gear 1 and the inner gear ring 3 are coaxial, any rotor gear 2 is meshed with the central gear 1 and the inner gear ring 3, the rotor gear 2 generates input torque, and the torque is output from the inner gear ring 3 through gear meshing. Sun gear 1 may either improve the stability of the gear unit reduction or alternatively allow sun gear 1 to generate or not generate input torque. If the central gear 1 generates an input torque, the piezoelectric film chip 8 comprises a stator structure corresponding to the central gear 1, and the parameters of the central gear 1 are the same as those of the rotor gear 2, and the rotation direction is opposite.

Fig. 4 and 5 are two simplified schemes, and the sun gear 1 or the inner gear ring 3 is omitted in the structure on the premise of ensuring the stability of the speed reducer.

The thin film piezoelectric motor shown in fig. 4 includes a set of rotor gears 2 and a sun gear 1, each rotor gear 2 is meshed with the sun gear 1, the rotor gears 2 generate input torque, and the torque is output from the sun gear 1 through gear meshing.

The thin film piezoelectric motor shown in fig. 5 includes a set of rotor gear 2 and inner gear ring 3, any one of the rotor gear 2 is meshed with the inner gear ring 3, the rotor gear 2 generates input torque, and the torque is output from the inner gear ring 3 through gear meshing.

Fig. 6 and 7 show a specific embodiment of the thin film piezoelectric motor integrating a piezoelectric thin film chip and a speed reducer, which includes a piezoelectric thin film chip 8 (including a stator structure), a central gear 1, a rotor gear 2, and an inner gear ring 3, and is assembled by a bearing 7, an upper support frame 5, a lower support frame 9, a bolt 10, a nut 4, and the like.

The specific structure of the thin film piezoelectric motor described in fig. 2 to 5 above, in which the rotor gears are arranged in only one stage, the thin film piezoelectric motor integrating the piezoelectric thin film chip and the speed reducer of the present invention may also adopt rotor gears arranged in multiple stages, so as to more effectively utilize the potential of the piezoelectric thin film chip, and the thin film piezoelectric motor has a more compact structure and a larger output torque. Like the one-level arrangement mode of the rotor gears, in the scheme of the multi-level arrangement of the rotor gears, each rotor gear corresponds to a piezoelectric motor unit on a piezoelectric film chip and is circumferentially arranged at equal intervals. The rotor gears of adjacent two stages are meshed with each other and have opposite rotating directions, the rotor gear of the first stage is meshed with the central gear (if any), and the rotor gear of the last stage is meshed with the inner gear ring (if any).

The embodiments of the multi-stage arrangement of the rotor gears shown in fig. 2 to 5 can also be divided into a plurality of different configurations according to the torque input/output mode, which are not listed here. Fig. 8 shows one of the two-stage arrangement of the rotor gears, the torque input/output mode is similar to the structure shown in fig. 2, which includes two-stage rotor gears 2, a central gear 1 and an inner gear ring 3, the rotor gears 2 in fig. 2 are extended to be two-stage rotor gears 2 with the same parameters, and the same-stage rotor gears 2 are arranged circumferentially at equal intervals with the axis of the central gear 1 (the inner gear ring 3) as the center. The first-stage rotor gear 2 is meshed with the central gear 1, the first-stage rotor gear 2 is meshed with the second-stage rotor gear 2, the second-stage rotor gear 2 is meshed with the inner gear ring 3, the rotating directions of the first-stage rotor gear 2 and the second-stage rotor gear 2 are opposite, and the central gear 1 outputs torque.