阅读说明：本技术 一种超高真空红外光谱原位分析系统 (Ultrahigh vacuum infrared spectrum in-situ analysis system ) 是由 严洁 刘建 高平 孙晓军 刘维民 于 2018-08-24 设计创作，主要内容包括：本发明公开了一种超高真空红外光谱原位分析系统,包括红外光谱仪,该系统还包括与超高真空样品室相连的样品控制装置和超高真空获得装置；超高真空样品室两侧设有超高真空KBr红外窗口；超高真空获得装置包括无油机械泵、涡轮分子泵和溅射离子泵；样品控制装置由微分头通过轴、杆控制其下方的样品架,并与超高真空样品室采用金属封接,通过波纹管进行力及运动的传递。本发明实现了模拟空间环境下材料表面的红外光谱原位分析。(The invention discloses an ultra-high vacuum infrared spectrum in-situ analysis system, which comprises an infrared spectrometer, a sample control device and an ultra-high vacuum obtaining device, wherein the sample control device and the ultra-high vacuum obtaining device are connected with an ultra-high vacuum sample chamber; ultrahigh vacuum KBr infrared windows are arranged on two sides of the ultrahigh vacuum sample chamber; the ultrahigh vacuum obtaining device comprises an oil-free mechanical pump, a turbo molecular pump and a sputtering ion pump; the sample control device controls the sample frame below the sample control device through a shaft and a rod by a differential head, and is in metal sealing connection with the ultrahigh vacuum sample chamber, and force and motion are transmitted through a corrugated pipe. The invention realizes the infrared spectrum in-situ analysis of the material surface in the simulated space environment.)

1. An ultra-high vacuum infrared spectrum in-situ analysis system comprises an infrared spectrometer (2), and is characterized by also comprising a sample control device (6) and an ultra-high vacuum obtaining device which are connected with an ultra-high vacuum sample chamber (1); ultrahigh vacuum KBr infrared windows (7) are arranged on two sides of the ultrahigh vacuum sample chamber (1); the ultrahigh vacuum obtaining device comprises an oil-free mechanical pump (4), a turbo molecular pump (5) and a sputtering ion pump; the sample control device (6) controls a sample frame below the sample control device through a shaft and a rod by a differential head, is in metal sealing connection with the ultrahigh vacuum sample chamber (1), and transmits force and motion through a corrugated pipe.

2. The system according to claim 1, characterized in that the ultra-high vacuum sample chamber (1) is connected with a space tribology experimental system through a gate valve (3) arranged on the ultra-high vacuum sample chamber.

3. A system according to claim 2, characterized in that said gate valve (3) is a double gate valve.

4. The system as claimed in claim 1, wherein the ultra-high vacuum obtaining means has an ultimate vacuum of 10^-8Pa。

5. The system according to claim 1, wherein the optical path system of the infrared spectrometer (2) uses grazing incidence at an angle of 4^oAnd (5) carrying out infrared spectrum acquisition in a mode.

Technical Field

The invention relates to an ultra-high vacuum infrared spectrum in-situ analysis system, which is applied to in-situ infrared spectrum analysis of a microstructure on the surface of a material in a simulated space environment and belongs to the technical field of space science and surface analysis.

Background

The infrared spectrometer is a powerful tool for molecular composition and structural analysis by using the absorption characteristics of substances to infrared radiation with different wavelengths. The infrared spectrum analysis technology has the advantages of high sensitivity, accurate wave number and good repeatability. The infrared spectrometer is applied to the technical field of space science, the change of the physical and chemical properties of the material in a space environment can be accurately associated with the surface microstructure of the material, and the space environment adaptability of the material is improved by optimizing the microstructure of the material. However, water and carbon dioxide in the air not only absorb infrared light, but also pollute the surface of the material, even generate chemical reaction, and influence the accuracy of the detection result. Therefore, there is an urgent need to develop infrared spectroscopy in situ analysis techniques and devices thereof in a spatial environment.

Disclosure of Invention

The invention aims to provide an ultra-high vacuum infrared spectrum in-situ analysis system for solving the problem that the prior art is difficult to realize infrared spectrum in-situ analysis of the surface of a material in a simulated space environment.

An ultra-high vacuum infrared spectrum in-situ analysis system comprises an infrared spectrometer and is characterized by also comprising a sample control device and an ultra-high vacuum obtaining device which are connected with an ultra-high vacuum sample chamber; ultrahigh vacuum KBr infrared windows are arranged on two sides of the ultrahigh vacuum sample chamber; the ultrahigh vacuum obtaining device comprises an oil-free mechanical pump, a turbo molecular pump and a sputtering ion pump; the sample control device controls a sample frame below the sample control device through a shaft and a rod by a differential head, is in metal sealing connection with the ultrahigh vacuum sample chamber, and transmits force and motion through a corrugated pipe.

The ultrahigh vacuum sample chamber is connected with a space tribology experiment system through a gate valve arranged on the ultrahigh vacuum sample chamber, preferably adopts a double-gate valve combination to realize bidirectional sealing, ensures that the ultrahigh vacuum sample chamber can be communicated with or disconnected from the space tribology experiment system at any time, and can independently carry out rapid in-situ analysis on the surface of a material.

The ultimate vacuum of the ultra-high vacuum obtaining device is 10^-8Pa。

The optical path system of the infrared spectrometer adopts the angle of grazing incidence of 4^oAnd (5) carrying out infrared spectrum acquisition in a mode.

The ultrahigh vacuum KBr infrared window is composed of a disk-shaped KBr crystal and an ultrahigh vacuum sealing flange, and the transmittance and the vacuum degree of infrared light are ensured to be obtained.

The sample control device controls the sample to move in four degrees of freedom (in-plane left-right movement, axis rotation and height direction adjustment) so as to obtain the optimal test position.

The invention has the following advantages:

1. the invention realizes the infrared spectrum in-situ analysis of the material surface in the simulated space environment.

2. The system is connected with a space tribology experiment system through an ultrahigh vacuum gate valve, so that in-situ infrared spectrum analysis of a space tribology experiment sample can be realized, the space tribology behavior of a lubricating material is accurately associated with the surface and the chemical state of the lubricating material, the space environment adaptability of the lubricating material is optimized by controlling the surface and the chemical structure of the lubricating material, the problems of matching of cluster structures and compatibility of performances are solved, the pollution of the atmospheric environment to the surface of the sample is avoided, a reliable experiment basis is provided for designing a novel space lubricating material, and the system has great significance for ensuring the smooth implementation of aerospace engineering such as lunar exploration.

3. The sample can be adjusted in four degrees of freedom, so that a light path is ensured to realize a grazing incidence diffuse reflection mode, and a stronger surface reflection infrared spectrum signal can be obtained.

Drawings

Fig. 1 is a side view of the present invention.

Fig. 2 is a top view of the present invention.

FIG. 3 is a schematic view of an optical path system according to the present invention.

In the figure: the method comprises the following steps of 1-an ultrahigh vacuum sample chamber, 2-an infrared spectrometer, 3-a gate valve, 4-an oil-free mechanical pump, 5-a turbo molecular pump, 6-a sample control device and 7-an ultrahigh vacuum KBr infrared window.

Detailed Description

As shown in fig. 1 and 2, an ultra-high vacuum infrared spectroscopy in-situ analysis system comprises an infrared spectrometer 2, a sample control device 6 and an ultra-high vacuum obtaining device which are connected with an ultra-high vacuum sample chamber 1; the two sides of the ultrahigh vacuum sample chamber 1 are provided with ultrahigh vacuum KBr infrared windows 7; the ultrahigh vacuum obtaining device comprises an oil-free mechanical pump 4, a turbo molecular pump 5 and a sputtering ion pump; the sample control device 6 controls the special friction sample frame below the sample control device through a shaft and a rod by a differential head, is sealed and connected with the ultrahigh vacuum sample chamber 1 by metal, and transmits force and motion through a corrugated pipe.

The ultrahigh vacuum sample chamber 1 is connected with a space tribology experiment system through a gate valve 3 arranged on the ultrahigh vacuum sample chamber.

The ultimate vacuum of the ultra-high vacuum obtaining device is 10^-8Pa。

The optical path system of the infrared spectrometer 2 adopts the angle of grazing incidence of 4^oAnd (5) carrying out infrared spectrum acquisition in a mode.

The ultrahigh vacuum sample chamber 1 is connected with a space tribology experiment system through a gate valve 3, after a space tribology experiment is carried out, the gate valve 3 is opened, a sample can be transmitted to the part 2 of the infrared spectrometer through a sample control device, and the gate valve is closed; the vacuum of the ultrahigh vacuum sample chamber 1 is obtained by an oil-free mechanical pump 4, a turbo molecular pump 5 and a sputtering ion pump, and the ultimate vacuum is 10^-8Pa; the sample can be manipulated by four degrees of freedom (in-plane translation, axis rotation and height direction adjustment) by the sample control device 6 to adjust the position, so that low-angle grazing incidence and diffuse reflection of a light path are realized, and a strongest reflection infrared spectrum signal is obtained; the two sides of the ultrahigh vacuum sample chamber 1 are communicated with the infrared spectrometer 2 through an ultrahigh vacuum KBr infrared window 7, and the light path adopts grazing incidence (the angle is 4)^o) And collecting spectral information by the mode. After the test is completed, the gate valve is opened again, and the sample is transferred to the space tribology experiment system.

The ultra-high vacuum infrared spectrum in-situ analysis system can be applied to research on the influence of a space environment on the surface of a material, effectively avoids the influence of the atmospheric environment on the surface of the material in the previous experiment, and provides a novel technical means for the research of space tribology and related fields.