阅读说明：本技术 一种同轴集成式宏微复合驱动器及其控制方法 (Coaxial integrated macro-micro composite driver and control method thereof ) 是由 喻曹丰 代磊 郑爽 熊美俊 于 2019-12-13 设计创作，主要内容包括：本发明公开了一种同轴集成式宏微复合驱动器及其控制方法,兼具毫米级宏动与微米级微动的功能。宏动工况下,该驱动器的宏动线圈被导通,与固定永磁铁通过磁场相互作用,驱动除固定件以外的所有内部件沿轴线方向滚动产生宏动位移。微动工况下,该驱动器的微动线圈被导通产生磁场,使布置于中轴线上由超磁致伸缩材料制成的细棒在磁场作用下于非固定前端发生形变,推动微动杆沿轴向产生微动位移。两线圈导通时的相互影响由布置于其之间的隔磁筒隔绝。同时也对所用控制方法进行具体阐述。本发明的同轴集成式宏微复合驱动器的优点是：在精密定位的驱动过程中可满足大行程、高精度、重载荷、快响应、无衔接误差等特性,同时整体结构简单,制造方便。(The invention discloses a coaxial integrated macro-micro composite driver and a control method thereof, which have the functions of millimeter-scale macro motion and micron-scale micro motion. Under the macro-motion working condition, the macro-motion coil of the driver is conducted and interacts with the fixed permanent magnet through a magnetic field to drive all internal parts except the fixed part to roll along the axis direction to generate macro-motion displacement. Under the micro-motion working condition, a micro-motion coil of the driver is conducted to generate a magnetic field, so that a thin rod which is arranged on a central axis and is made of a giant magnetostrictive material deforms at the non-fixed front end under the action of the magnetic field, and the micro-motion rod is pushed to generate micro-motion displacement along the axial direction. The mutual influence of the two coils when the two coils are conducted is isolated by the magnetism isolating cylinder arranged between the two coils. The control method used is also specifically described. The coaxial integrated macro-micro composite driver has the advantages that: the driving process of the precise positioning can meet the characteristics of large stroke, high precision, heavy load, fast response, no connection error and the like, and meanwhile, the whole structure is simple and the manufacture is convenient.)

1. A coaxial integrated macro-micro composite driver comprises a macro-motion coil framework (4), a micro-motion coil framework (11) and a GMM rod (16), and is characterized in that: the magnetic field interaction type magnetic field sensor is characterized in that a macro-motion coil (3), a fixed sleeve (2) and a shell (10) are arranged on the outer side of a macro-motion coil framework (4), a magnetic yoke sleeve (5) is arranged on the inner side of the macro-motion coil framework (4), the macro-motion coil (3) is wound in a groove on the outer side of the macro-motion coil framework (4), the positive electrode and the negative electrode of the macro-motion coil are respectively connected with a first wire group (20), a rolling steel ball array (19) penetrates through the fixed sleeve (2) every sixty degrees around the circumference along the axial direction of the fixed sleeve and is embedded and arranged on the inner side of the shell (10), the upper surface of the rolling steel ball array (19) is in contact with the shell (10), the lower surface of the rolling steel ball array is in contact with the macro-motion coil (3), the rear part of the macro-motion coil framework (4) and the rear part of the magnetic yoke sleeve (5), so that the macro-motion coil (3) can be conducted, all parts which are arranged in the macro-motion coil framework (4) in a nested manner are driven to roll along the lower surface of the rolling steel ball array (19) along the axial direction and generate macro-motion displacement to the front end, a rear end cover (18) is arranged at the rear end of the shell (10), six arc permanent magnets (14) are uniformly and fixedly arranged on the inner side of the shell, the rear end cover (18) is fixedly connected with the shell (10) and the fixed sleeve (2) through a bolt group (1), the front end of the magnetic yoke sleeve (5) is tightly attached with a front end cover (6), and the front end covers are arranged on the inner sides of the macro-motion coil framework (4) and the fixed sleeve (2) in a nested manner.

2. The co-axial integrated macro-micro compound actuator of claim 1, wherein: micro-motion coil skeleton (11) outside be provided with a micro-motion coil (15), an interior yoke section of thick bamboo (12), a magnetism-isolating section of thick bamboo (13), a magnetic conduction ring (9), micro-motion coil (15) coiling in micro-motion coil skeleton (11) outside recess in, its anodal and negative pole are connected with wire group two (21) respectively, interior yoke section of thick bamboo (12) nested arrange in magnetism-isolating section of thick bamboo (13) in, magnetism-isolating section of thick bamboo (13) nested arrange in yoke sleeve (5) inboard, avoid magnetic field that produces when macro-motion coil (3) and micro-motion coil (15) switch on influence each other, magnetic conduction ring (9) with micro-motion coil skeleton (11) front end paste tightly to arrange to nested in interior yoke section of thick bamboo (12).

3. The co-axial integrated macro-micro compound actuator of claim 1, wherein: the GMM rod (16) is made of giant magnetostrictive material, a magnetic conduction block group (17) is arranged at the front end and the rear end of the GMM rod, a micro-moving rod (8) is arranged at the front end of the magnetic conduction block group (17), a central bolt (22) is arranged at the rear end of the micro-moving rod, a disc spring (7) is arranged at the front end of the annular end of the micro-moving rod (8), the disc spring and the disc spring are jointly arranged in a central groove of the magnetic conduction ring (9) and keep a certain distance from the rear end of the front end cover (6), the central bolt (22) fixes the magnetic conduction block group (17) through the rear end, the GMM rod (16) and the rear end of the micro-moving rod (8) are jointly arranged in the central groove of the micro-moving coil framework (11), and can be conducted to generate a magnetic field at a second lead group (21) of the micro-moving coil (15) which is electrified, so that the GMM rod (16) is deformed, the annular end of the inching rod (8) is pushed to press the disc spring (7) tightly and generate inching displacement along the axial direction.

4. A control method of a coaxial integrated macro-micro composite driver is characterized by comprising the following steps:

s1: establishing a macro-motion displacement X_maAnd passing a current I of the macro-moving coil_maMathematical model X between_ma(I_ma) Micro-motion displacement X_miAnd passing a current I of the micro-coil_miMathematical model X between_mi(I_mi)；

S2: finding X_ma(I_ma) Inverse function I of function_ma(X_ma)，X_mi(I_mi) Inverse function I of function_mi(X_mi)；

S3: setting the distance to be positioned as X₀According to the stroke size of macro motion and micro motion, X is set₀Decomposed into macro-motion displacement X_0aAnd a micromotion displacement X_0i；

S4: based on the inverse functions obtained in step S2, the macro-coil currents I are obtained respectively_a(X_0a) And a micro-coil current I_i(X_0i)；

S5: the macro moving coil is electrified with current I_aThe micro-coil is electrified with current I_i；

S6: respectively detecting the magnitude (X) of the macro displacement and the micro displacement by using a displacement sensor_0ac，X_0ic) And is in accordance with the set value (X)_0a，X_0i) Comparing, and performing error adjustment by using a feedback control algorithm to finally realize X₀The positioning distance of (2).

Technical Field

The invention relates to a driving device in the technical field of precise positioning, in particular to a coaxial integrated macro-micro composite driver and a control method thereof.

Background

With the rapid development of high-end equipment manufacturing industry, the demand for a precision positioning workbench with large stroke, high precision, heavy load and fast response is increasing, and a macro-micro composite driving mode is a main means for solving the contradiction between large stroke and high precision in the precision positioning technology and is increasingly adopted in engineering application. At present, the macro-micro compound driving mode usually adopts the installation mode of series connection superposition, arranges the macro-micro two-stage motion structure, directly places the micro-motion mechanism on the macro-motion mechanism promptly, so not only leads to the workstation overall structure complicated, because the installation has the error, more leads to there being the joint error between the macro-micro two-stage drive moreover. The piezoelectric ceramic driver is the earliest driving device with the mature technology, and in the existing macro-micro composite driving precision positioning workbench, the micro-displacement driver mainly adopts the piezoelectric ceramic driver, but the output force of the piezoelectric ceramic driver is small, so that the heavy load requirement is difficult to meet. Therefore, in order to meet the requirement of high-end equipment manufacturing industry in China on a precision positioning device, a novel macro-micro composite driver with large stroke, high precision and large thrust and a control method with higher precision need to be designed.

Disclosure of Invention

The invention mainly solves the problems of the existing driver, thereby providing a coaxial integrated macro-micro composite driver and a control method thereof, wherein the coaxial integrated macro-micro composite driver has the characteristics of large stroke, high precision, heavy load, fast response, no connection error and the like in the driving process of precise positioning, and has the advantages of simple integral structure, convenient manufacture and higher control precision.

The technical problem of the invention is mainly solved by the following technical scheme:

the utility model provides a coaxial integrated form macro-micro composite driver, includes a macro moving coil skeleton, a micro moving coil skeleton, a GMM stick, its characterized in that: the outer side of the macro-motion coil framework is provided with a macro-motion coil, a fixed sleeve, a shell, the inner side of the macro-motion coil framework is provided with a magnetic yoke sleeve, the macro-motion coil is wound in a groove on the outer side of the macro-motion coil framework, the anode and the cathode of the macro-motion coil are respectively connected with a wire group I, the fixed sleeve is provided with a rolling steel ball array in a penetrating way along the axis direction every sixty degrees around the circumference and is nested and arranged on the inner side of the shell, the upper surface of the rolling steel ball array is contacted with the shell, the lower surface of the rolling steel ball array is contacted with the macro-motion coil, the rear part of the macro-motion coil framework and the rear part of the magnetic yoke sleeve, so that the wire group I which can be electrified by the macro-motion coil is conducted and interacts with the fixedly arranged arc permanent magnet to drive all parts nested and arranged in the macro-motion coil framework to roll along the lower surface of, the magnetic yoke is characterized in that a rear end cover is arranged at the rear end of the shell, six arc-shaped permanent magnets are uniformly and fixedly arranged on the inner side of the shell, the rear end cover is fixedly connected with the shell and the fixed sleeve through a bolt group, a front end cover is closely arranged at the front end of the magnetic yoke sleeve, and the front end cover is embedded and arranged on the inner sides of the macro-motion coil framework and the fixed sleeve.

The utility model discloses a magnetic field of micromotion coil, including micromotion coil skeleton, a magnet yoke section of thick bamboo, a magnetism isolating cylinder, a magnetic ring, the micromotion coil coiling in micromotion coil skeleton outside recess in, its positive pole and negative pole are connected with wire group two respectively, inner yoke section of thick bamboo nested arrange in the magnetism isolating cylinder in, magnetism isolating cylinder nested arrange in the magnet yoke sleeve inboard, avoid the magnetic field that produces when switching on macro-motion coil and micro-motion coil influence each other, the magnetic ring with micro-motion coil skeleton front end paste tightly arrange to nested in inner yoke section of thick bamboo.

The GMM rod is made of a giant magnetostrictive material, a magnetic conducting block group is arranged at the front end and the rear end of the GMM rod, a micro moving rod is arranged at the front end of the magnetic conducting block group, a central bolt is arranged at the rear end of the magnetic conducting block group, a disc spring is arranged at the front end of the annular end of the micro moving rod and is jointly arranged in a central groove of the magnetic conducting ring, a certain distance is kept between the front end and the rear end of the front end cover, the central bolt is fixed with the magnetic conducting block group through the rear end, the GMM rod and the rear end of the micro moving rod are jointly arranged in the central groove of the micro moving coil framework, and a second conducting wire group which is electrified by the micro moving coil can be conducted to generate a magnetic field, so that the GMM rod is deformed at the non-fixed front end under the action of the magnetic field, and the annular end of the micro moving rod is pushed.

A control method of a coaxial integrated macro-micro composite driver is characterized by comprising the following steps:

s1: establishing a macro-motion displacement X_maAnd passing a current I of the macro-moving coil_maMathematical model X between_ma(I_ma) Micro-motion displacement X_miAnd passing a current I of the micro-coil_miMathematical model X between_mi(I_mi)；

S2: finding X_ma(I_ma) Inverse function I of function_ma(X_ma)，X_mi(I_mi) Inverse function I of function_mi(X_mi)；

S3: setting the distance to be positioned as X₀According to the stroke size of macro motion and micro motion, X is set₀Decomposed into macro-motion displacement X_0aAnd a micromotion displacement X_0i；

S4: based on the inverse functions obtained in step S2, the macro-coil currents I are obtained respectively_a(X_0a) And a micro-coil current I_i(X_0i)；

S5: the macro moving coil is electrified with current I_aThe micro-coil is electrified with current I_i；

S6: respectively detecting the magnitude (X) of the macro displacement and the micro displacement by using a displacement sensor_0ac，X_0ic) And is in accordance with the set value (X)_0a，X_0i) Comparing, and performing error adjustment by using a feedback control algorithm to finally realize X₀The positioning distance of (2).

The coaxial integrated macro-micro composite driver and the control method thereof have the advantages that: the driving device can meet the requirements of large stroke, high precision, heavy load, quick response, no connection error and the like in the driving process of precise positioning, and has the advantages of simple integral structure, convenient manufacture and higher control precision.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic perspective view of a coaxial integrated macro-micro composite actuator according to the present invention;

fig. 2 is a schematic perspective cross-sectional view of the coaxial integrated macro-micro composite actuator in fig. 1;

FIG. 3 is a schematic perspective view of the coaxial integrated macro-micro composite actuator of FIG. 1 with the outer casing removed;

FIG. 4 is a schematic diagram of the working principle of the coaxial integrated macro-micro composite actuator in FIG. 1;

wherein:

20. a first lead group; 21. a second lead group;

1. a water delivery pipe is externally connected; 2. fixing the sleeve; 3. a macro-motion coil; 4. a macro-motion coil framework; 5. a yoke sleeve; 6. a front end cover; 7. a disc spring; 8. a micro-moving bar; 9; a magnetic conductive ring; 10. a housing; 11. a micro-motion coil framework; 12. an inner yoke barrel; 13. a magnetism isolating cylinder; 14. an arc-shaped permanent magnet; 15. a micro-motion coil; 16. a GMM rod; 17. a magnetic conducting block group; 18. a rear end cap; 22. a center bolt;

19. rolling the steel ball array;

Detailed Description

The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, and the scope of the present invention will be more clearly and clearly defined.

The coaxial integrated macro-micro composite driver and the control method thereof have the advantages that: the driving device can meet the requirements of large stroke, high precision, heavy load, quick response, no connection error and the like in the driving process of precise positioning, and has the advantages of simple integral structure, convenient manufacture and higher control precision.

As shown in fig. 1, 2, 3 and 4, a coaxial integrated macro-micro composite driver includes a macro-motion coil frame 4, a micro-motion coil frame 11, a GMM rod 16, a macro-motion coil 3 disposed outside the macro-motion coil frame 4, a fixed sleeve 2, a housing 10, a magnetic yoke sleeve 5 disposed inside the housing, the macro-motion coil 3 wound in a groove outside the macro-motion coil frame 4, the positive and negative electrodes of the macro-motion coil being connected to a first wire group 20, the fixed sleeve 2 having a rolling steel ball array 19 disposed around the circumference of the fixed sleeve 2 at intervals of sixty degrees along the axial direction and nested inside the housing 10, the upper surface of the rolling steel ball array 19 contacting the housing 10, the lower surface contacting the macro-motion coil 3, the rear portion of the macro-motion coil frame 4 and the rear portion of the magnetic yoke sleeve 5, so that the macro-motion coil 3 can be conducted by the first energized wire group 20, and through the magnetic field interaction with the arc permanent magnet 14 of the fixed arrangement, all parts that drive the nested arrangement in the coil skeleton of macro movement 4 roll along the lower surface of the steel ball row 19 of the rolling along the axial direction and produce the macro movement to the front end, therefore realize the macro drive of the millimeter level, the rear end of the outer casing 10 has been arranged a back end cover 18, the inboard is fixed and arranged six arc permanent magnets 14 evenly, the back end cover 18 passes the bolt group 1 and the outer casing 10, the fixed sleeve 2 is fixed and connected, the front end of the sleeve 5 of the magnetic yoke has closely arranged a front end cover 6, and the nested arrangement is in the coil skeleton of macro movement 4 and inside of the fixed sleeve 2.

As shown in fig. 1 and 2, a micro coil 15, an inner yoke tube 12, a magnetic isolation tube 13, and a magnetic conductive ring 9 are disposed outside the micro coil frame 11, the micro coil 15 is wound in a groove outside the micro coil frame 11, the positive electrode and the negative electrode of the micro coil are respectively connected to the two lead groups 21, the magnetic field generated when the micro coil is conducted can be isolated by the magnetic isolation tube 13 so as to avoid affecting the macro coil 3, the inner yoke tube 12 is nested in the magnetic isolation tube 13, the magnetic isolation tube is nested inside the magnetic yoke sleeve so as to avoid the magnetic field generated when the macro coil 3 is conducted with the micro coil 15 from affecting each other, and the magnetic conductive ring 9 is closely attached to the front end of the micro coil frame 11 and nested in the inner yoke tube 12.

As shown in fig. 1, 2 and 4, the GMM rod 16 is made of a super magnetostrictive material, the front end and the rear end of the magnetic conduction block set are provided with a magnetic conduction block set 17, the front end of the magnetic conduction block set 17 is provided with a micro-moving rod 8, the rear end is provided with a central bolt 22, the front end of the ring-shaped end of the micro-rod 8 is provided with a disc spring 7 which is arranged in the central groove of the magnetic conductive ring 9 together and keeps a certain distance with the rear end of the front end cover 6, the central bolt 22 fixes the magnetic conducting block group 17 through the rear end, the GMM rod 16 and the rear end of the inching rod 8 are arranged in the central groove of the inching coil framework 11 together, and the second conducting wire group 21 which is electrified in the micro-motion coil 15 is conducted to generate a magnetic field, so that the GMM rod 16 is deformed at the non-fixed front end under the action of the magnetic field, and the annular end of the micro-motion rod 8 is pushed to press the disc spring 7 and generate micro-motion displacement along the axial direction, thereby realizing micro-scale micro-drive.

A control method of a coaxial integrated macro-micro composite driver comprises the following steps:

s1: establishing a macro-motion displacement X_maAnd passing a current I of the macro-moving coil_maMathematical model X between_ma(I_ma) Micro-motion displacement X_miAnd passing a current I of the micro-coil_miMathematical model X between_mi(I_mi)；

S2: finding X_ma(I_ma) Inverse function I of function_ma(X_ma)，X_mi(I_mi) Inverse function I of function_mi(X_mi)；

S3: setting the distance to be positioned as X₀According to the stroke size of macro motion and micro motion, X is set₀Decomposed into macro-motion displacement X_0aAnd a micromotion displacement X_0i；

S4: based on the inverse functions obtained in step S2, the macro-coil currents I are obtained respectively_a(X_0a) And a micro-coil current I_i(X_0i)；

S5: the macro moving coil is electrified with current I_aThe micro-coil is electrified with current I_i；

S6: respectively detecting the magnitude (X) of the macro displacement and the micro displacement by using a displacement sensor_0ac，X_0ic) And is in accordance with the set value (X)_0a，X_0i) Comparing, and performing error adjustment by using a feedback control algorithm to finally realize X₀The positioning distance of (2).

As shown in fig. 1, fig. 2, and fig. 4, the specific working principle of the coaxial integrated macro-micro composite actuator is as follows:

a macro-moving part: the six arc permanent magnets 14 can generate a constant magnetic field B along the radial direction, the length of the macro-moving coil 3 is set to be L, and when the macro-moving coil 3 is electrified with current I_maAt this time, according to the ampere's law, the macro coil 3 is acted by the ampere force F, and the magnitude thereof is BI_maL, the direction of the coil can be judged to be the axial direction of the driver according to the left-hand rule, the macro coil framework 4 and all devices in the framework move along the axial direction together with the macro coil 3 under the action of the force F, the macro motion is realized, and the I is adjusted_maThe magnitude of the value can control the magnitude of the force F, and the macro moving coil framework 4 is made of iron materials and can be subjected to the electromagnetic force F of the arc permanent magnet 14₁Preventing it from moving outwardly, and F₁As the distance of the outward movement of the macro-moving coil skeleton increases, when F₁When equal to F, the macro-motion reaches equilibrium, so I can be adjusted_maThe magnitude of the value controls the macro-motion displacement value.

A micro-motion part: the micro-coil 15 is electrified with current I_miIt will form an electrified solenoid to generate an axial magnetic field H in the interior, because the GMM rod 16 has a magnetostriction effect, under the action of the magnetic field H, the GMM rod 16 will generate extension deformation to push the inching rod 8 to compress the disc spring 7, so that the inching rod 8 generates output displacement to generate inching, and the inching is generated by adjusting I_miThe magnitude of the generated magnetic field H can be controlled, and the elongation of the GMM rod 16 can be adjusted, so that the micro-motion is realized. By regulating I synthetically_maAnd I_miThe device is worthy of size, and the ultra-precise positioning in a large stroke range can be realized for the designed novel macro-micro secondary driver.

The above description is only an embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that are not thought of through the inventive work should be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope defined by the claims.