阅读说明：本技术 保温毡及其制备方法、拉晶炉 (Heat preservation felt, preparation method thereof and crystal pulling furnace ) 是由 不公告发明人 于 2019-11-06 设计创作，主要内容包括：本发明提供了一种保温毡及其制备方法、拉晶炉,属于半导体技术领域。保温毡的制备方法,包括：提供保温毡本体；利用气相沉积工艺在所述保温毡本体表面形成碳基材料保护层。本发明能够增强保温毡表面的抗划伤能力和保护能力,提高保温毡的使用寿命。(The invention provides a heat preservation felt, a preparation method thereof and a crystal pulling furnace, and belongs to the technical field of semiconductors. The preparation method of the heat preservation felt comprises the following steps: providing a heat preservation felt body; and forming a carbon-based material protective layer on the surface of the heat preservation felt body by utilizing a vapor deposition process. The invention can enhance the scratch resistance and the protection capability of the surface of the heat preservation felt and prolong the service life of the heat preservation felt.)

1. The preparation method of the heat preservation felt is characterized by comprising the following steps:

providing a heat preservation felt body;

and forming a carbon-based material protective layer on the surface of the heat preservation felt body by utilizing a vapor deposition process.

2. The method for preparing the heat-insulating felt according to claim 1, wherein the protective layer is diamond-like carbon (DLC).

3. The method for preparing the heat-insulating felt according to claim 2, wherein the step of forming the protective layer on the surface of the heat-insulating felt body comprises the following steps:

in the vacuum cavity, argon is used as sputtering gas, argon plasma is generated through an electric field, a graphite target is bombarded, graphite microparticles are generated, and the graphite microparticles are deposited on the surface of the heat preservation felt body to form the protection layer.

4. The method of making a thermal blanket of claim 3 further comprising:

and part of the graphite particles enter the pores of the heat preservation felt body to form a bonding layer combined with the heat preservation felt body.

5. The preparation method of the heat preservation felt according to claim 3, characterized in that the deposition temperature is 600-900 ℃, the deposition pressure is 0.5-1Pa, and the deposition thickness is 50-100 um.

6. The heat preservation felt is characterized by being manufactured by the manufacturing method of any one of claims 1 to 5, and comprising a heat preservation felt body and a carbon-based material protection layer positioned on the surface of the heat preservation felt body.

7. The insulation blanket of claim 6 wherein the protective layer is diamond-like carbon (DLC).

8. The insulation blanket of claim 7, further comprising:

and the bonding layer is positioned in the pores of the heat preservation felt body and is formed by graphite particles and is combined with the heat preservation felt body.

9. The insulation blanket of claim 6 wherein the protective layer has a thickness of 50-100 um.

10. A crystal pulling furnace comprising a heater and the thermal blanket of any one of claims 6 to 9 wrapped around the outside of the heater.