阅读说明：本技术 一种t型爬行式压电驱动平台 (T-shaped creeping type piezoelectric driving platform ) 是由 万嫩 李建平 温建明 于 2019-07-25 设计创作，主要内容包括：本发明涉及一种T型爬行式压电驱动平台，包括两组相同的压电驱动单元，动子和底座。每组压电单元包括压电叠堆、T型柔性铰链机构、预紧螺钉、预紧楔块、螺旋测微头。压电叠堆在电压信号驱动下可伸长和恢复，驱动T型柔性铰链机构变形实现预紧和驱动；预紧螺钉和螺旋测微头可调节T型柔性铰链机构和动子间的初始预紧力；底座支撑其他零件。两组压电驱动单元交替工作，驱动动子实现爬行式运动。该平台可应用于精密超精密机械加工、微机电系统、微操作机器人、大规模集成电路制造、生物技术领域。(The invention relates to a T-shaped crawling type piezoelectric driving platform which comprises two groups of same piezoelectric driving units, a rotor and a base. Each group of piezoelectric units comprises a piezoelectric stack, a T-shaped flexible hinge mechanism, a pre-tightening screw, a pre-tightening wedge block and a spiral micrometer head. The piezoelectric stack can be stretched and recovered under the drive of a voltage signal, and the T-shaped flexible hinge mechanism is driven to deform to realize pre-tightening and driving; the initial pretightening force between the T-shaped flexible hinge mechanism and the rotor can be adjusted by the pretightening screw and the screw micrometer head; the base supports other components. The two groups of piezoelectric driving units work alternately to drive the rotor to realize crawling type motion. The platform can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro operation robots, large-scale integrated circuit manufacturing and biotechnology.)

1. A T-shaped creeping type piezoelectric driving platform comprises two groups of same piezoelectric driving units, a rotor and a base. Each group of piezoelectric units comprises a piezoelectric stack, a T-shaped flexible hinge mechanism, a pre-tightening screw, a pre-tightening wedge block and a spiral micrometer head, and is characterized in that: the driving platform drives the rotor to realize micro-nano grade crawling type motion by alternately working of the two groups of piezoelectric driving units. The rotor adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw, so that high-precision reciprocating linear motion can be realized; the T-shaped flexible hinge mechanism is arranged on the base through a screw; the piezoelectric stack is arranged in the T-shaped flexible hinge mechanism and can be pre-tightened through a pre-tightening wedge block; the initial pretightening force between the T-shaped flexible hinge mechanism and the rotor can be adjusted by the pretightening screw and the screw micrometer head.

2. A T-shaped crawling type piezoelectric driving platform according to claim 1, characterized in that the two groups of T-shaped flexible hinge mechanisms are made of spring steel, high-strength aluminum alloy and other materials and are connected into a T shape through thin-wall flexible hinges.

3. A T-shaped creeping piezoelectric driving platform according to claim 1, wherein the mover is provided with a mechanism for reciprocating linear motion such as a ball linear guide, a roller linear guide, a V-groove linear guide, a dovetail groove linear guide, or the like.

4. The T-shaped crawling type piezoelectric driving platform according to claim 1, wherein the piezoelectric stack is electrically driven to move the T-shaped flexible hinge mechanism to provide a driving force and a pre-tightening force, the driving force drives the mover to linearly move, and the pre-tightening force enables the T-shaped flexible hinge mechanism to tightly press the mover.

Technical Field

The invention relates to the field of precise and ultra-precise machining, micro-nano operation robots and micro electro mechanical systems, in particular to a T-shaped crawling type piezoelectric driving platform.

Background

The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving platform. The traditional driving platform has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving platform. The piezoelectric driving platform has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, is increasingly applied to micro positioning and precise ultra-precision machining, but the working stroke of the piezoelectric driving platform is limited due to the inverse piezoelectric effect of a single piezoelectric element, so that the application of the piezoelectric driving platform is greatly limited. Therefore, it is necessary to design a piezoelectric precision driving platform capable of achieving micro/nano positioning accuracy and realizing larger working stroke.

Disclosure of Invention

The invention aims to provide a T-shaped crawling type piezoelectric driving platform, which solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, high output rigidity and output load and high output frequency, and can realize the creeping type linear motion output function with large stroke.

According to the invention, two groups of piezoelectric driving units work alternately, the piezoelectric stack is electrified to push the T-shaped flexible hinge mechanism to move, driving force and pretightening force are provided, and linear motion of the rotor is finally realized.

The above object of the present invention is achieved by the following technical solutions:

a T-shaped creeping piezoelectric driving platform mainly comprises two groups of same piezoelectric driving units, a rotor and a base. Each group of piezoelectric units comprises a piezoelectric stack, a T-shaped flexible hinge mechanism, a pre-tightening screw, a pre-tightening wedge block and a spiral micrometer head, and the driving platform drives the rotor to realize micro-nano grade crawling type linear motion by alternately working of the two groups of piezoelectric driving units. The rotor adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw, so that high-precision reciprocating linear motion can be realized; the T-shaped flexible hinge mechanism is arranged on the base through a screw; the piezoelectric stack is arranged in the T-shaped flexible hinge mechanism and can be pre-tightened through a pre-tightening wedge block; the initial pretightening force between the T-shaped flexible hinge mechanism and the rotor can be adjusted by the pretightening screw and the screw micrometer head.

The piezoelectric stack is electrified to push the T-shaped flexible hinge mechanism to move, driving force and pretightening force are provided, the driving force pushes the rotor to do linear motion, and the pretightening force enables the T-shaped flexible hinge mechanism to jack the rotor tightly.

The piezoelectric stack adopts a piezoelectric ceramic stack PZT with a shape controllable surface.

The T-shaped flexible hinge mechanism can be made of spring steel, high-strength aluminum alloy and other materials and is connected into a T shape through a thin-wall flexible hinge.

The contact part of the upper end of the T-shaped flexible hinge mechanism and the mover is of an arc-shaped structure.

The rotor can adopt a ball linear guide rail, a roller linear guide rail, a V-shaped groove linear guide rail, a dovetail groove linear guide rail and other mechanisms capable of realizing reciprocating linear motion.

The main advantages of the invention are: two groups of piezoelectric driving units work alternately, and the T-shaped flexible hinge mechanism moves to provide driving force and pretightening force to push the rotor to do crawling linear motion. The platform has the advantages of high driving reliability, good stability, high working efficiency and the like. The micro-motion precision control method can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like, greatly improves the micro-motion precision of the micro-electro-mechanical systems, improves the disadvantages of complex and large structure, unreliable performance and the like of the traditional driver, and has wide application prospect.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.

FIG. 1 is a schematic isometric view of the present invention;

FIG. 2 is a schematic front view of the present invention;

FIG. 3 is a schematic view of the T-shaped flexible hinge mechanism of the present invention.

In the figure:

1. a mover; 2, pre-tightening a wedge block I; 3, piezoelectric stack I;

4. a piezoelectric stack II; 5, pre-tightening a wedge block II; 6, a T-shaped flexible hinge mechanism;

7. pre-tightening the screw; 8, piezoelectric stack III; 9, pre-tightening a wedge block III;

10. a micrometer screw head; a base; 12, piezoelectric stack IV;

13. a piezoelectric stack V; 14. piezoelectric stack VI; a piezoelectric driving unit II;

16. and a piezoelectric driving unit I.

Detailed Description

The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.

Referring to fig. 1 to 3, a T-shaped crawling piezoelectric driving platform mainly includes a piezoelectric driving unit I (16), a piezoelectric driving unit II (15), a mover (1), and a base (11). The piezoelectric driving unit I (16) comprises a pre-tightening wedge block I (2), a piezoelectric stack I (3), a piezoelectric stack II (4), a pre-tightening wedge block II (5), a T-shaped flexible hinge mechanism (6), a pre-tightening screw (7), a piezoelectric stack III (8), a pre-tightening wedge block III (9) and a spiral micrometer head (10), and the piezoelectric driving unit II (15) and the piezoelectric driving unit I (16) are completely the same in composition structure. The mover (1) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base (11) through a screw; the T-shaped flexible hinge mechanism (6) is arranged on the base (11) through screws; the piezoelectric stack I (3), the piezoelectric stack III (8) and the piezoelectric stack II (4) are arranged in a T-shaped flexible hinge mechanism (6); the pre-tightening wedge block (2), the pre-tightening wedge block (5) and the pre-tightening wedge block (9) pre-tighten the piezoelectric stack I (3), the piezoelectric stack II (4) and the piezoelectric stack III (8) respectively; the pre-tightening screw (7) is fastened on the base (11), and the initial pre-tightening force between the T-shaped flexible hinge mechanism (6) and the rotor (1) can be adjusted through the pre-tightening screw (7) and the spiral micrometer head (10); the arc-shaped structure at the upper end of the T-shaped flexible hinge mechanism (6) is contacted with the rotor (1); the base (11) plays a role in supporting, installing and fixing other parts, and the rotor (1) and the T-shaped flexible hinge mechanism (6) are installed on the base (11) through screws.

The piezoelectric stack I (3) and the piezoelectric stack III (8) are electrically driven to move the T-shaped flexible hinge mechanism (6) and respectively provide driving force and pretightening force, the driving force drives the rotor (1) to do linear motion, and the pretightening force enables the T-shaped flexible hinge mechanism (6) to jack the rotor (1).

The piezoelectric stacks I (3), III (8) and II (4) adopt piezoelectric ceramic stacks PZT with controllable surface shapes.

The T-shaped flexible hinge mechanism (6) can be made of spring steel, high-strength aluminum alloy and other materials and is connected into a T shape through a thin-wall flexible hinge.

The upper end of the T-shaped flexible hinge mechanism (6) is in an arc-shaped structure with the contact part of the mover (1).

Referring to fig. 1 to 3, the specific working process of the present invention is as follows:

realization of creeping motion of the mover (1), initial state: adjusting the pretightening screw (7) and the screw micrometer head (10) to control the initial pretightening force between the T-shaped flexible hinge mechanism (6) and the rotor (1). Piezoelectric signals in the form of four groups of square waves are adopted to respectively control a piezoelectric stack I (3), a piezoelectric stack III (8), a piezoelectric stack V (13) and a piezoelectric stack IV (12) in a piezoelectric driving unit I (16) and a piezoelectric driving unit II (15). The piezoelectric stack I (3) and the piezoelectric stack III (8) are not electrified, and the system is in a free state; when the piezoelectric stack I (3) and the piezoelectric stack III (8) are electrified, the piezoelectric stack I (3) and the piezoelectric stack III (8) extend through an inverse piezoelectric effect to drive the T-shaped flexible hinge mechanism (6) to deform to generate a driving force and a pretightening force, the piezoelectric stack III (8) drives the T-shaped flexible hinge mechanism (6) to compress the mover (1), and the piezoelectric stack I (3) drives the T-shaped flexible hinge mechanism (6) to drive the mover (1) to move; when the piezoelectric stack I (3) and the piezoelectric stack III (8) start to lose power, the piezoelectric stack V (13) and the piezoelectric stack IV (12) are electrified. The piezoelectric stack I (3) and the piezoelectric stack III (8) return to a free state after power failure, the T-shaped flexible hinge mechanism (6) returns to an initial state, and the mover (1) is still kept at a moved position under the action of inertia force; after the piezoelectric stack V (13) and the piezoelectric stack IV (12) are energized, the piezoelectric driving unit II (15) repeats the operation of the piezoelectric driving unit I (16). When the piezoelectric stack V (13) and the piezoelectric stack IV (12) start to lose power, the piezoelectric stack I (3) and the piezoelectric stack III (8) are electrified, and the next cycle is started. And repeating the steps, and alternately electrifying the piezoelectric driving unit I (16) and the piezoelectric driving unit II (15) to work, so that the driving platform can realize crawling type motion and obtain larger output displacement. The piezoelectric stacks II (4) and III (8) and VI (14) and IV (12) in the piezoelectric driving unit I (16) and the piezoelectric driving unit II (15) are respectively loaded with the same voltage, and the steps are repeated, so that the creeping type large-stroke linear motion in the opposite direction can be realized.

The T-shaped creeping piezoelectric driving platform adopts the piezoelectric stack as a driving source and the T-shaped flexible hinge mechanism as a power transmission element, has the characteristics of small heat, stable driving, reliability and high efficiency, and can realize creeping large-stroke reciprocating linear precise driving.