阅读说明：本技术 卡盘的校正方法 (Method for correcting chuck ) 是由 西宫民和 于 2018-06-15 设计创作，主要内容包括：本发明的课题在于,校正卡盘的轴线和工件的芯,使其高精度地匹配。本发明提供一种具备校正工序的卡盘的校正方法,其中,所述卡盘具备主体、柱塞、以及夹爪,所述主体具有背面主体、配置在该背面主体的前侧的前面主体所述柱塞设置在该主体内,且构成为所述主体的轴线上移动,所述夹爪构成为通过所述柱塞的移动而被引导在所述前面主体上移动,其移动方向是朝向以所述轴线为中心而成的径方向,在所述校正工序中,当使工件被把持在所述夹爪上时,在相对于所述轴线维持所述背面主体的位置的同时,使所述前面主体在以所述轴线为中心的径方向移动,或者,相对于所述轴线维持所述背面主体的位置的同时,使所述前面主体相对于所述轴线倾斜。(The invention aims to correct the axis of a chuck and the core of a workpiece to match with high precision. The invention provides a method for correcting a chuck with a correcting process, wherein the chuck is provided with a main body, a plunger and a clamping jaw, the body has a back body, a front body disposed on the front side of the back body, and a plunger disposed in the front body, and is configured to move on the axis of the body, the holding jaw is configured to be guided to move on the front body by the movement of the plunger, the moving direction is directed in a radial direction around the axis, and in the aligning step, when the workpiece is held by the holding jaw, moving the front body in a radial direction about the axis while maintaining the position of the rear body with respect to the axis, alternatively, the front body is tilted with respect to the axis while maintaining the position of the rear body with respect to the axis.)

1. A method for correcting a chuck having a correcting step,

the chuck comprises a main body, a plunger, and a jaw,

the main body comprises a back main body and a front main body arranged at the front side of the back main body,

the plunger is disposed within the body and configured to move on an axis of the body,

the holding jaw is guided to move on the front body by the movement of the plunger, and the moving direction of the holding jaw is a radial direction around the axis,

in the above-mentioned correction process, the correction process,

when the gripping jaws are caused to grip a workpiece,

the front body is moved in a radial direction about the axis while maintaining the position of the back body with respect to the axis, or the front body is tilted with respect to the axis while maintaining the position of the back body with respect to the axis.

2. The correction method according to claim 1,

the chuck has a guide rod disposed from the back body toward the front body,

the guide rod is inserted into a guide hole provided in the front body.

3. The method of claim 1 or 2,

the chuck has bolts for fixing the front body to the rear body,

the front body is moved in the radial direction in a state where the bolt is loosened, and the bolt is tightened at a stage when the movement is completed.

4. The method of claim 2, wherein,

the force applying means for pressing the front body against the back body is attached to the guide bar.

5. The correction method according to claim 2 or 4,

the front body is moved in the radial direction by inserting an adjusting bolt into the front body and pressing the adjusting bolt against a side surface of the back body or a side surface of the guide bar.

6. The correction method according to claim 3,

the back body is provided with an inclined sliding surface,

has an adjusting screw which can advance and retreat in the front body by a rotating operation from the front side of the front body and a tapered head part slides on the sliding surface,

by advancing and retracting the adjusting screw, the tapered head slides on the sliding surface, and the front body moves in the radial direction.

7. The correction method according to any one of claims 1 to 6,

the back body is provided with dampers in a bridge shape between 1 st seat surfaces which are arranged at intervals, and the dampers are fastened to the respective seat surfaces by 1 st bolts,

the front body is configured to fasten the damper between the 1 st seat surfaces by a 2 nd bolt with respect to a 2 nd seat surface provided on a back surface thereof, and to provide a slider configured to change a deformation length of the damper with respect to the damper arranged in a shape of a bridge between the adjacent 1 st seat surfaces,

in the above-mentioned correction process, the correction process,

when the grip claw is caused to grip a workpiece, the position of the slider is changed so that the front body is tilted with respect to the axis.

8. The correction method according to claim 7,

the damper is disposed at least 3 or more positions at equal angular intervals in a bridge shape.

[ technical field ] A method for producing a semiconductor device

The present invention relates to a method for correcting a chuck used in a machine tool.

[ background of the invention ]

In order to grip a workpiece with high accuracy, mechanical forming of the gripping jaws is performed. The mechanical forming generally means that the rotation center of the chuck and the center of the workpiece are aligned with each other with high accuracy while the holding surface of the chuck is processed in a state where the formed plug is held. However, since the gripping surfaces of the jaws are machined in a state where the formed plug is gripped by the chuck body side with respect to the workpiece gripping surfaces of the jaws, the positions of the gripping surfaces are different from the positions where the formed plug is gripped. Therefore, when the workpiece is actually held, the workpiece center may be slightly deviated from the rotation center of the chuck.

[ Prior Art document ]

[ patent document ]

Patent document 1: japanese patent laid-open publication No. 2011-110676

[ summary of the invention ]

[ problem to be solved by the invention ]

An example is disclosed in patent document 1, which is an example of gripping a molded plug on a stretching rod of a jaw to which a jaw is attached, and forming a leading end of the stretching rod. According to this example, when the molded plug holding portion is provided on the stretching rod, the chuck jaws are separated from the chuck body toward the front of the axis of the chuck. When the jaws are separated from the chuck body forward of the axis of the chuck, the center (core) of the workpiece is likely to be displaced from the center (axis) of rotation of the chuck. The present invention aims to make the center (core) of a workpiece coincide with the rotation center (axis) of a chuck to improve accuracy.

[ MEANS FOR SOLVING PROBLEMS ] to solve the problems

According to the present invention, there is provided a method of calibrating a chuck having a calibration step, wherein the chuck includes a body, a plunger, and a jaw, the body has a back body and a front body disposed on the front side of the back body, the plunger is disposed in the body, and is configured to move on the axis of the body, the holding jaw is configured to be guided to move on the front body by the movement of the plunger, the moving direction is directed in a radial direction around the axis, and in the aligning step, when the workpiece is gripped by the gripping jaws, moving the front body in a radial direction centered on the axis while maintaining the position of the rear body with respect to the axis, or, maintaining the position of the rear body with respect to the axis while tilting the front body with respect to the axis.

According to the present invention, since the front body is moved in the radial direction about the axis line while maintaining the position of the back body with respect to the axis line, or the front body is tilted with respect to the axis line while maintaining the position of the back body with respect to the axis line, it is possible to improve the accuracy with which the center (core) of the workpiece and the rotation center (axis line) of the chuck coincide, even without molding the chuck.

Preferably, the chuck has a guide rod provided from the rear body toward the front body, the guide rod being inserted into a guide hole provided in the front body.

Preferably, the chuck has a bolt for fixing the front body to the rear body, and the front body is moved in the radial direction while the bolt is loosened, and the bolt is tightened at a stage after the movement is completed.

Preferably, the guide bar is attached to a biasing means for pressing the front body against the rear body.

Preferably, the front body is moved in the radial direction by inserting an adjustment bolt into the front body and pressing the adjustment bolt against a side surface of the back body or a side surface of the guide bar.

Preferably, the rear body is provided with an inclined sliding surface, and an adjustment screw that can advance and retreat in the front body by a rotational operation from a front surface side of the front body is provided, and the tapered head slides on the sliding surface by advancing and retreating the adjustment screw, so that the front body moves in the radial direction.

Preferably, the rear body is provided with dampers in a bridge shape between 1 st seat surfaces provided at intervals, the dampers are fastened to the respective seat surfaces by 1 st bolts, the front body is fastened to 2 nd seat surfaces provided on the rear surface of the front body by 2 nd bolts, the dampers are fastened between the 1 st seat surfaces by 2 nd bolts, and sliders for changing the deformation length of the dampers are provided to the dampers arranged in a bridge shape between the adjacent 1 st seat surfaces, and in the correcting step, when the workpiece is gripped by the jaws, the positions of the sliders are changed so that the front body is tilted with respect to the axis.

Preferably, the damper is disposed in a bridge shape at a position spaced at equal angular intervals of at least 3 or more.

Description of the drawings

Fig. 1 shows a chuck according to embodiment 1, in which fig. 1A is a sectional view thereof, and fig. 1B is a partially modified sectional view.

Fig. 2 is a perspective view of the chuck according to embodiment 1.

Fig. 3 is a partially enlarged view of the chuck according to embodiment 1, fig. 3A is an installation view, and fig. 3B is an exploded view.

Fig. 4 is a view showing a chuck according to embodiment 2, in which fig. 4A is a perspective view and fig. 4B is a sectional view.

Fig. 5 is an exploded view of a part of the chuck of embodiment 2.

Fig. 6 is an exploded view of a part of the chuck according to embodiment 2, in which fig. 6A shows a front body, a plunger, and a jaw, and fig. 6B shows a back surface of the front body.

Fig. 7 is a diagram illustrating a configuration for correcting gripping accuracy, in which fig. 7A is a cross-sectional view taken along the X-X line, and fig. 7B is a diagram for explaining the principle.

Fig. 8 is a view showing a chuck according to embodiment 3, in which fig. 8A is a perspective view, fig. 8B is a sectional view, fig. 8C is a rear view of a front body, and fig. 8D is a perspective view of an adjuster.

Fig. 9 is a perspective view showing a chuck according to embodiment 4, in which fig. 9A is a sectional view taken along the line Y1-Y1, fig. 9C is a view showing an adjusting screw, and fig. 9D is a sectional view taken along the line Y2-Y2.

[ detailed description ] embodiments