阅读说明：本技术 能量转换部件、振动发电装置、力传感器装置以及驱动器 (Energy conversion member, vibration power generation device, force sensor device, and driver ) 是由 成田史生 小野寺隆一 田山严 渡边将仁 千叶大喜 佐佐达郎 佐藤武信 江幡贵司 于 2018-04-20 设计创作，主要内容包括：技术问题：本发明提供能够提高发电能力并具有稳定的发电性能的振动发电装置、构成该振动发电装置的能量转换部件、具有该能量转换部件的力传感器装置、以及驱动器。解决方案：能量转换部件(1)是将固体的软磁性材料(2)与固体的磁致伸缩材料(3)接合而形成的。振动发电装置(10)构成为通过由能量转换部件(1)构成的振动部(13)的振动产生的磁致伸缩材料(3)的逆磁致伸缩效应来发电。力传感器装置具有力检测部,其检测由能量转换部件(1)构成的传感器部变形时的磁致伸缩材料的逆磁致伸缩效应引起的磁化的变化,并根据该磁化的变化来求出作用于传感器部的力。驱动器(20)构成为利用磁致伸缩材料(3)的磁致伸缩效应使由能量转换部件(1)构成的振动部(13)振动。(The technical problem is as follows: the invention provides a vibration power generation device capable of improving power generation capacity and having stable power generation performance, an energy conversion member constituting the vibration power generation device, a force sensor device having the energy conversion member, and an actuator. The solution is as follows: the energy conversion member (1) is formed by joining a solid soft magnetic material (2) and a solid magnetostrictive material (3). The vibration power generation device (10) is configured to generate power by the inverse magnetostrictive effect of a magnetostrictive material (3) generated by vibration of a vibration section (13) formed of an energy conversion member (1). The force sensor device has a force detection unit that detects a change in magnetization caused by the inverse magnetostrictive effect of a magnetostrictive material when a sensor unit formed of an energy conversion member (1) is deformed, and determines a force acting on the sensor unit from the change in magnetization. The actuator (20) is configured to vibrate the vibration section (13) formed by the energy conversion member (1) by using the magnetostrictive effect of the magnetostrictive material (3).)

1. An energy conversion member characterized in that,

the magnetic recording medium is formed by bonding a solid soft magnetic material and a solid magnetostrictive material.

2. The energy conversion component of claim 1,

the magnetostrictive material is made of Fe-Co alloy, Fe-Al alloy, Ni-Fe alloy or Ni-Co alloy.

3. The energy conversion component of claim 1 or 2,

the soft magnetic material is composed of a magnetostrictive material having a magnetostrictive coefficient with a sign different from that of the magnetostrictive material.

4. The energy conversion component of claim 3,

one of the soft magnetic material and the magnetostrictive material is composed of an Fe-Co alloy or an Fe-Al alloy having a positive magnetostrictive coefficient, and the other of the soft magnetic material and the magnetostrictive material is composed of an Ni-0-20 mass% Fe alloy or an Ni-Co alloy having a negative magnetostrictive coefficient.

5. The energy conversion component of any one of claims 1 to 4,

the soft magnetic material and the magnetostrictive material are joined by thermal diffusion joining, hot rolling, or hot drawing.

6. The energy conversion component of claim 3 or 4,

the soft magnetic material and the magnetostrictive material are joined by an adhesive or welding.

7. The energy conversion component of any one of claims 1 to 6,

joining the soft magnetic material and the magnetostrictive material in a state where a load is applied.

8. A vibration power generation device is characterized in that,

having a vibrating portion constituted by the energy conversion member according to any one of claims 1 to 7,

electricity is generated by the inverse magnetostrictive effect of the magnetostrictive material generated by the vibration of the vibrating portion.

9. Vibration power generation device according to claim 8,

the vibrating portion has one or more stress-concentrated portions at the time of vibration.

10. A force sensor device, comprising:

a sensor portion constituted by the energy conversion member according to any one of claims 1 to 7; and

and a force detection unit that detects a change in magnetization due to the inverse magnetostrictive effect of the magnetostrictive material when the sensor unit is deformed, and that obtains a force acting on the sensor unit from the change in magnetization.

11. The force sensor device of claim 10,

the force detection unit includes a magnetic sensor disposed in the vicinity of the magnetostrictive material, and the change in magnetization is detected by the magnetic sensor as a leakage magnetic flux.

12. The force sensor device of claim 10,

the force detection unit has a detection coil disposed in the vicinity of the magnetostrictive material, and detects a change in the magnetization as a change in impedance by the detection coil.

13. The force sensor device according to any one of claims 10 to 12,

the sensor portion has one or more portions on which stress concentrates when the force acts.

14. A driver, characterized by having:

a vibrating portion constituted by the energy conversion member according to any one of claims 1 to 7; and

and a vibration coil configured to vibrate the vibration portion by a magnetostrictive effect of the magnetostrictive material when a current flows therethrough.

15. The driver of claim 14,

the coil for vibration is wound around the vibration portion or around a yoke magnetically coupled to the vibration portion.

Technical Field

The present invention relates to an energy conversion member, a vibration power generation device, a force sensor device, and an actuator.

Background

A typical conventional vibration power generation device using a magnetostrictive material includes a vibrating portion formed by attaching the magnetostrictive material to a vibrating member having a shape that is likely to vibrate, such as a cantilever beam, with an adhesive or the like, and generates power by utilizing the inverse magnetostrictive effect of the magnetostrictive material when the magnetostrictive material and the vibrating member vibrate together (see, for example, patent document 1 or 2).

As a strong, lightweight material having high power generation performance based on the inverse magnetostrictive effect, the present inventors have developed a composite material in which a wire rod made of a magnetostrictive material is embedded in a base material made of an epoxy resin (see, for example, non-patent document 1), and prior art documents thereof

Patent document

Patent document 1: japanese patent laid-open publication No. 2013-177664

Patent document 2: japanese patent laid-open No. 2014-107982

Non-patent document

Non-patent document 1: fumio Narita, "Inverse Magnetostrictive Effect in Fe29Co71Wire/Polymer Composites" (reverse Magnetostrictive Effect in Fe29Co71Wire/Polymer Composites), Advanced Engineering Materials, 1 month 2017, Vol.19, No. 1, 1600586.

Disclosure of Invention

Technical problem to be solved

However, in the power generation devices described in patent documents 1 and 2, the power generation capacity can be improved by increasing the amount of power generation or widening the frequency of power generation by elaborating the shape of the vibration member, but there is a technical problem that improvement of the power generation capacity is limited only by this. Further, the composite material described in non-patent document 1 has a high power generation capability, but since the composite material is manufactured by pouring an epoxy resin as a base material around the wire of the magnetostrictive material, there is a problem that the quality of the base material may fluctuate and the power generation performance may be unstable.

The present invention has been made in view of the above problems, and an object thereof is to provide a vibration power generation device capable of improving power generation capacity and having stable power generation performance, an energy conversion member constituting the vibration power generation device, a force sensor device having the energy conversion member, and an actuator.

(II) technical scheme

In order to achieve the above object, an energy conversion member according to the present invention is configured by bonding a solid soft magnetic material and a solid magnetostrictive material.

The energy conversion member of the present invention is suitably used for devices utilizing conversion between electric energy, magnetic energy, mechanical energy, and the like, such as a vibration power generation device, a force sensor device, and a driver. The energy conversion member of the present invention can be manufactured, for example, by mass-producing a member in which a soft magnetic material and a magnetostrictive material are joined as a composite magnetostrictive material, and cutting a desired member shape from the composite magnetostrictive material. The absolute value of the magnetostriction coefficient lambda of the magnetostrictive material is 20ppm or more.

The vibration power generation device of the present invention includes a vibration unit including the energy conversion member of the present invention, and generates power by an inverse magnetostrictive effect of the magnetostrictive material due to vibration of the vibration unit.

The vibration power generation device of the present invention can generate power by the inverse magnetostrictive effect of the magnetostrictive material when the vibration portion composed of the energy conversion member of the present invention vibrates, and can change the magnetization of the soft magnetic material by the change in magnetization due to the inverse magnetostrictive effect. By changing the magnetization of the soft magnetic material, the vibration power generation capability by the inverse magnetostrictive effect can be improved as compared with the case where only the inverse magnetostrictive effect of the magnetostrictive material is used. Further, since the vibrating portion is formed by joining a solid soft magnetic material and a solid magnetostrictive material, the power generation performance does not fluctuate as compared with the case of manufacturing from a liquid material, and a desired stable power generation performance can be obtained.

The vibration power generation device of the present invention is suitably mounted on a vibration body for use. The vibrating body is not limited as long as it can vibrate, but preferably vibrates in the vibration direction of the vibrating portion and at a substantially constant frequency including the natural frequency of the vibrating portion in order to efficiently generate power. The vibrator is an industrial machine such as a pump or a motor.

In the vibration power generation device of the present invention, the vibration portion may have one or more portions in which stress is concentrated during vibration. In this case, the change in magnetic flux density in the vicinity of the stress concentration portion at the time of vibration can be increased, and the power generation efficiency can be improved by adjusting the position of stress concentration and the position of the power generation coil. The stress concentration portion can be formed by changing the cross-sectional shape along the longitudinal direction of the vibrating portion, for example.

The force sensor device of the present invention is characterized by comprising: a sensor unit including the energy conversion member of the present invention; and a force detection unit that detects a change in magnetization due to the inverse magnetostrictive effect of the magnetostrictive material when the sensor unit is deformed, and obtains a force acting on the sensor unit from the change in magnetization.

The force sensor device of the present invention can detect a change in magnetization due to the inverse magnetostrictive effect of the magnetostrictive material by the force detection unit when a force acts on the sensor unit formed of the energy conversion member of the present invention and deforms. In this case, since the magnetization of the soft magnetic material is also changed by the change in magnetization due to the inverse magnetostrictive effect, the change in magnetization is increased as compared with the case of using only the magnetostrictive material, and the ability to detect the force acting on the sensor unit can be improved. Further, since the sensor portion is formed by joining a solid soft magnetic material and a solid magnetostrictive material, the magnetization change performance with respect to the force applied does not fluctuate as compared with the case of manufacturing the sensor portion from a liquid material, and a desired stable magnetization change performance can be obtained.

In the force sensor device according to the present invention, the force detection unit may include a magnetic sensor disposed in the vicinity of the magnetostrictive material, and the change in magnetization may be detected by the magnetic sensor as a leakage magnetic flux. The magnetic sensor is not limited as long as it can detect a change in magnetization as a leakage magnetic flux, and is formed of, for example, a hall element. Further, the force detection unit may include a detection coil disposed in the vicinity of the magnetostrictive material, and the change in magnetization may be detected as a change in impedance by the detection coil. The detection coil is, for example, an electromagnetic coil.

In the force sensor device of the present invention, the sensor portion may have one or more portions in which stress concentrates when the force acts. In this case, the change in magnetic flux density in the vicinity of the stress concentration portion where the force acts can be increased, and the detection capability can be improved by adjusting the position of the stress concentration and the position of the power generation coil. The stress concentration portion may be formed by changing a cross-sectional shape in a longitudinal direction of the sensor portion, for example.

The driver of the present invention is characterized by comprising: a vibrating section composed of the energy conversion member of the present invention; and a vibration coil configured to vibrate the vibration portion by a magnetostrictive effect of the magnetostrictive material when a current flows therethrough. The driver of the present invention may have the same structure as the vibration power generation device of the present invention. In the actuator according to the present invention, the coil for vibration may be wound around the vibration part, or may be wound around a yoke magnetically coupled to the vibration part.

In the actuator of the present invention, when a current is applied to the vibrating coil, the magnetization of the magnetostrictive material is changed by the current, and thus the vibrating portion can be vibrated by the magnetostrictive effect of the magnetostrictive material. In this case, the synergistic effect of the magnetization behavior of the soft magnetic material and the magnetostrictive phenomenon of the magnetostrictive material can improve the vibration efficiency as compared with the case of using only the magnetostrictive material. Further, since the vibrating portion is formed by joining a solid soft magnetic material and a solid magnetostrictive material, the vibration performance does not fluctuate as compared with the case of manufacturing from a liquid material, and a desired stable vibration performance can be obtained.

In the energy conversion member of the present invention, the magnetostrictive material is preferably made of an Fe-Co alloy, an Fe-Al alloy, Ni, a Ni-Fe alloy, or a Ni-Co alloy. In this case, by subjecting a relatively inexpensive Fe-Co alloy, Fe-Al alloy, Ni-Fe alloy, or Ni-Co alloy to rolling and heat treatment, a magnetostrictive material having high energy conversion efficiency can be easily produced. Therefore, the power generation efficiency in the case of using the vibration power generator, the force detection capability in the case of using the force sensor device, and the vibration efficiency in the case of using the actuator can be improved. Further, these magnetostrictive materials are excellent in workability, and are easy to be subjected to plastic working such as cutting and bending, and thus can be easily formed into any shape. The Ni-Fe alloy preferably has an Fe content of 20 mass% or less, and the Ni-Co alloy preferably has a Co content of 30 mass% or less. In addition, the magnetostrictive material may contain Cr, Ni, Nb, V, Ti in order to improve corrosion resistance and durability.

The soft magnetic material of the energy conversion member of the present invention is not limited, and may be made of, for example, Fe — Ni alloy typified by pure iron and PB ferromagnetic iron-nickel alloy, silicon steel, or electromagnetic stainless steel. The coercivity of the soft magnetic material is preferably 8A/cm or less, and particularly preferably 3A/cm. In addition, the soft magnetic material may be composed of a magnetostrictive material having a magnetostrictive coefficient with a sign different from that of the magnetostrictive material. As these materials, for example, either one of the soft magnetic material and the magnetostrictive material may be made of an Fe-Co alloy or an Fe-Al alloy having a positive magnetostrictive coefficient, while the other may be made of an Ni-0 to 20 mass% Fe alloy (including pure Ni) or an Ni-Co alloy having a negative magnetostrictive coefficient. In this case, the inverse magnetostrictive effect due to the compressive stress and the tensile stress generated simultaneously by the vibration and the force can be utilized, and the power generation capability in the case of being used in the vibration power generation device and the force detection capability in the case of being used in the force sensor device can be further improved. Further, the change in magnetization by the current can utilize the magnetostrictive effect generated simultaneously in the positive magnetostrictive material and the negative magnetostrictive material, and the vibrating ability when used in the actuator can be further improved.

In the energy conversion member according to the present invention, the soft magnetic material and the magnetostrictive material may be joined by any method such as thermal diffusion joining, hot rolling, hot drawing, adhesive bonding, welding, clad rolling, or explosive compression bonding. In particular, when bonding is performed by thermal diffusion bonding, hot rolling, or hot drawing, the movement of the domain wall of the magnetostrictive material is facilitated by the residual stress after cooling by high-temperature bonding, and magnetization change is promoted. Therefore, the power generation capability and the force detection capability based on the inverse magnetostrictive effect when used in the vibration power generation device and the force sensor device, and the vibration capability based on the magnetostrictive effect when used in the actuator can be further improved.

In the energy conversion member according to the present invention, the soft magnetic material and the magnetostrictive material may be joined to each other in a state where a load is applied. In this case, by removing the residual stress at the time of load after bonding, the domain wall of the magnetostrictive material is easily moved, and the magnetization change is promoted. Therefore, the power generation capability and the force detection capability based on the inverse magnetostrictive effect when used in the vibration power generation device and the force sensor device, and the vibration capability based on the magnetostrictive effect when used in the actuator can be further improved.

In the present invention, the energy conversion member may be formed by joining a solid member and a solid magnetostrictive material by thermal diffusion joining, hot rolling, and hot drawing, without using a soft magnetic material. Alternatively, the solid member and the solid magnetostrictive material may be joined by an adhesive or welding in a state where a load is applied to the solid member to form the energy conversion member. In these cases, although the use of a soft magnetic material is not as much as possible, the residual stress facilitates the movement of the domain wall of the magnetostrictive material, and the magnetization change is promoted. Therefore, the power generation capability and the force detection capability based on the inverse magnetostrictive effect when used in the vibration power generation device and the force sensor device, and the vibration capability based on the magnetostrictive effect when used in the actuator can be further improved. The solid member is, for example, stainless steel, wood, or the like.

(III) advantageous effects

According to the present invention, it is possible to provide a vibration power generation device capable of improving power generation capability and having stable power generation performance, an energy conversion member constituting the vibration power generation device, a force sensor device having the energy conversion member, and an actuator.

Drawings

Fig. 1 (a) is a side view showing thermal diffusion bonding of the energy conversion member according to the embodiment of the present invention, fig. 1 (b) is a side view showing hot rolling of the energy conversion member according to the embodiment of the present invention, and fig. 1 (c) is a side view showing hot drawing of the energy conversion member according to the embodiment of the present invention.

Fig. 2 (a) is a perspective view showing a test piece used in a three-point bending test of an energy conversion member according to an embodiment of the present invention, and fig. 2 (b) is a side view showing an implementation state of a measurement test of magnetic flux density by the three-point bending test.

Fig. 3 is a graph showing the results of a measurement test of magnetic flux density by a three-point bending test of the test piece of the energy conversion member shown in fig. 2, which is a graph of the change in magnetic flux density with respect to load.

Fig. 4 is a graph showing a measurement test of the magnetic flux density by the three-point bending test shown in fig. 2, which is a graph of a change in the magnetic flux density with respect to a load.

Fig. 5 is a side view showing a vibration power generation device according to an embodiment of the present invention.

FIG. 6 is a graph showing the measurement results of the amount of power generation relative to the vibration frequency of the vibration portion of the vibration power generation device shown in FIG. 5, which is formed by thermal diffusion bonding of pure iron and an Fe-70 mass% Co alloy, and the vibration portion of the Fe-70 mass% Co alloy alone.

Fig. 7 is a graph showing the measurement results of the amount of power generation relative to the vibration frequency of the vibration portion of the vibration power generation device shown in fig. 5, in which pure iron and pure Ni, and pure iron and a Ni-10 mass% Fe-based alloy are thermally diffusion bonded, respectively, and the vibration portion of pure Ni alone.

Fig. 8 is a graph showing the measurement results of the amount of power generation relative to the vibration frequency of the vibration portion of the vibration power generation device shown in fig. 5, which is formed by thermal diffusion bonding of pure iron and a Ni-20 mass% Co alloy, and the vibration portion of only the Ni-20 mass% Co alloy.

Fig. 9 is a graph showing measurement results of the amount of power generation relative to the vibration frequency of the vibration portion of the vibration power generation device shown in fig. 5, the vibration portion being formed by thermal diffusion bonding of pure Ni and an Fe-70 mass% Co alloy, the vibration portion being formed by bonding pure Ni and an Fe-70 mass% Co alloy, and the vibration portion being formed of only an Fe-70 mass% Co alloy.

FIG. 10 is a graph showing the measurement results of the amount of power generation relative to the vibration frequency of the vibration portion of the vibration power generation device shown in FIG. 5, which is formed by thermal diffusion bonding of pure Ni and an Fe-8 mass% Al alloy, and the vibration portion of only an Fe-8 mass% Al alloy.

FIG. 11 is a graph showing the measurement results of the amount of power generation relative to the vibration frequency of the vibration portion of the vibration power generation device shown in FIG. 5, which is formed by thermal diffusion bonding of the Ni-20 mass% Co alloy and the Fe-70 mass% Co alloy, and the vibration portion of the Fe-70 mass% Co alloy alone.

Fig. 12 is a graph showing the measurement results of the amount of power generation relative to the vibration frequency of the vibration portion of the vibration power generation device shown in fig. 5, the vibration portion being formed by thermally diffusion bonding SUS304 and an Fe-70 mass% Co alloy, the vibration portion being formed by bonding SUS304 and an Fe-70 mass% Co alloy, and the vibration portion being formed only of an Fe-70 mass% Co alloy.

Fig. 13 is a side view showing a driver of an embodiment of the present invention.

Fig. 14 (a) is a side view showing a modification example of the actuator according to the embodiment of the present invention in which the vibrating portion is formed in a double support beam shape (japanese character: rotation ち beam shape), fig. 14 (b) is a side view showing a deformability of the actuator according to the embodiment of the present invention in which the coil for vibration is wound around the yoke, and fig. 14 (c) is a side view showing a modification example of the actuator according to the embodiment of the present invention in which the actuator is formed only of the vibrating portion and contacts the magnetic field changing body.

Detailed Description

Embodiments of the present invention are described below with reference to the drawings.

[ energy conversion member pertaining to embodiment of the invention ]

Fig. 1 to 4 show an energy conversion member 1 according to an embodiment of the present invention.

As shown in fig. 1, the energy conversion member 1 has an elongated plate-shaped solid soft magnetic material 2 and an elongated plate-shaped solid magnetostrictive material 3, and the soft magnetic material 2 and the magnetostrictive material 3 have the same length and width. The energy conversion member 1 is formed into an elongated plate shape by aligning and joining the surface of the soft magnetic material 2 and the surface of the magnetostrictive material 3 with the side edges aligned.

The soft magnetic material 2 is made of a magnetic material such as pure iron, for example, and the kind of the magnetic material is different from that of the magnetostrictive material 3. The magnetostrictive material 3 is made of, for example, Fe-Co alloy, Fe-Al alloy, Ni-Fe alloy, or Ni-Co alloy. In the case of Ni-Fe alloy, the Fe content is preferably 20 mass% or less, and in the case of Ni-Co alloy, the Co content is preferably 30 mass% or less. In addition, the magnetostrictive material 3 may contain Cr, Ni, Nb, V, Ti, and the like in order to improve corrosion resistance and durability. As shown in fig. 1 (a), the energy conversion member 1 is formed by thermally diffusion bonding the soft magnetic material 2 and the magnetostrictive material 3 by applying a load by heating with a pressing device.

The energy conversion member 1 is suitably used for devices utilizing conversion between electric energy, magnetic energy, mechanical energy, and the like, such as a vibration power generation device, a force sensor device, and a driver. The energy conversion member 1 of the present invention can be manufactured, for example, by mass-producing a member in which the soft magnetic material 2 and the magnetostrictive material 3 are joined together as a composite magnetostrictive material, and cutting a desired member shape from the composite magnetostrictive material.

In the energy conversion member 1, since the soft magnetic material 2 and the magnetostrictive material 3 are thermally diffusion bonded, the residual stress after cooling facilitates the movement of the domain wall of the magnetostrictive material 3, and promotes the magnetization change. This can improve energy conversion efficiency. Since the relatively inexpensive magnetostrictive material 3 such as an Fe-Co alloy, an Fe-Al alloy, Ni, a Ni-Fe alloy, or a Ni-Co alloy can be used, the energy conversion member 1 can be manufactured inexpensively and easily. Further, since these magnetostrictive materials 3 are excellent in workability and are easily subjected to plastic working such as cutting and bending, they can be easily formed into any shape.

In the energy conversion member 1, the soft magnetic material 2 may be made of a magnetostrictive material having a magnetostrictive coefficient different in sign from that of the magnetostrictive material 3. As these materials, for example, either the soft magnetic material 2 or the magnetostrictive material 3 may be made of an Fe-Co alloy or an Fe-Al alloy having a positive magnetostriction coefficient, while the other may be made of an Ni-0 to 20 mass% Fe alloy (including pure Ni) or an Ni-Co alloy having a negative magnetostriction coefficient. In this case, the inverse magnetostrictive effect due to the compressive stress and the tensile stress generated simultaneously by the vibration and the force can be utilized, and the energy conversion efficiency can be improved.

The energy conversion member 1 is not limited to the thermal diffusion bonding, and may be bonded by any method such as hot rolling with a roller as shown in fig. 1 (b), welding or fusing as shown in fig. 1 (c), hot drawing, an adhesive, clad rolling, or explosive bonding. When joining is performed by hot rolling and hot drawing, energy conversion efficiency can be improved as in the case of thermal diffusion joining.

The energy conversion member 1 may be formed by bonding the soft magnetic material 2 and the magnetostrictive material 3 in a state where a load is applied. In this case, the residual stress at the time of releasing the load after the bonding makes it easy to move the domain wall of the magnetostrictive material 3 and promotes the magnetization change, so that the energy conversion efficiency can be improved.