阅读说明：本技术 一种直线型压电精密驱动平台 (Linear piezoelectric precision driving platform ) 是由 万嫩 李建平 温建明 于 2019-04-08 设计创作，主要内容包括：本发明涉及一种直线型压电精密驱动平台,主要包括压电叠堆、非对称薄壁式柔性铰链机构和动子。压电叠堆安装在非对称薄壁式柔性铰链机构内,通过非对称薄壁式柔性铰链机构的寄生惯性运动,实现动子的直线移动；预紧旋钮调节非对称薄壁式柔性铰链机构与动子间的初始预紧力；固定底座支撑和安装固定其他零件。本发明压电叠堆主输出方向与动子运动方向垂直设计,使压电叠堆主输出方向的刚度得到充分利用；非对称薄壁式柔性铰链机构刚度高,能承受较大的负载,同时产生驱动力和预紧力,提高了驱动平台的输出负载。该平台可应用于精密超精密机械加工、微机电系统、微操作机器人领域,具有结构简单,工作稳定,输出效益高的优点。(The invention relates to a linear piezoelectric precision driving platform which mainly comprises a piezoelectric stack, an asymmetric thin-wall flexible hinge mechanism and a rotor. The piezoelectric stack is arranged in the asymmetric thin-wall flexible hinge mechanism, and the linear movement of the rotor is realized through the parasitic inertia motion of the asymmetric thin-wall flexible hinge mechanism; the pre-tightening knob adjusts the initial pre-tightening force between the asymmetric thin-wall flexible hinge mechanism and the rotor; the fixed base supports and mounts other parts. The main output direction of the piezoelectric stack is perpendicular to the motion direction of the rotor, so that the rigidity of the main output direction of the piezoelectric stack is fully utilized; the asymmetric thin-wall flexible hinge mechanism has high rigidity, can bear larger load, simultaneously generates driving force and pretightening force, and improves the output load of the driving platform. The platform can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems and micro operation robots, and has the advantages of simple structure, stable work and high output benefit.)

1. The utility model provides a linear type piezoelectricity precision drive platform, includes piezoelectric stack (3), flexible hinge mechanism of asymmetric thin wall formula (4), active cell (5), pretension voussoir (2), pretension knob (1), pretension knob (7), base (6), its characterized in that: the piezoelectric stack (3) is arranged in the asymmetric thin-wall flexible hinge mechanism (4), the piezoelectric stack (3) is driven to drive the asymmetric thin-wall flexible hinge mechanism (4) to extend, the piezoelectric stack (3) is controlled to drive the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) to move in a stepping mode, and then the rotor (5) is driven to move linearly and precisely; the rotor (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw to realize high-precision linear motion; the asymmetric thin-wall flexible hinge mechanism (4) is arranged on the base through screws; the piezoelectric stack (3) can be pre-tightened through the pre-tightening wedge block (2); the pretightening screws (1) and (7) can adjust the initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5).

2. The linear piezoelectric precision driving platform according to claim 1, wherein the main output direction of the piezoelectric stack (3) is perpendicular to the moving direction of the rotor (5), and the fixed end of the asymmetric thin-wall flexible hinge mechanism (4) is consistent with the main output direction of the piezoelectric stack (3), so that the larger rigidity of the main output direction of the piezoelectric stack (3) is fully utilized, and the output load of the piezoelectric driving platform is greatly improved through the parasitic inertia motion of the asymmetric thin-wall flexible hinge mechanism (4).

3. The linear piezoelectric precision driving platform according to claim 1, wherein the asymmetric thin-wall flexible hinge mechanism (4) and the pressing part of the mover (5) are designed to be arc-shaped structures, which is beneficial to the stability of contact.

4. The linear piezoelectric precision driving platform according to claim 1, wherein the mover (5) can adopt a ball linear guide, a roller linear guide, a V-shaped groove linear guide, a dovetail groove linear guide and the like, and has a simple and reliable structure.

Technical Field

The invention relates to the field of precision ultraprecision machining, micro-nano operation robots and micro electro mechanical systems, in particular to a linear piezoelectric precision driving platform.

Background

The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving platform. The traditional driving platform has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving platform. The piezoelectric ceramic driver has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. In the conventional piezoelectric inertia driving platform, a piezoelectric element and a rotor mass block are usually arranged in the motion direction of the piezoelectric element in parallel, the pretightening force is perpendicular to the main output direction of the piezoelectric element, and the output load of the whole platform mainly depends on the friction force generated by the pretightening force. However, a piezoelectric element such as a piezoelectric stack generally adopts a d33 working mode, and the rigidity of the piezoelectric element on a cross section perpendicular to the main output direction is small, so that the generated pretightening force is small, the output load of the whole platform is greatly reduced, and the large rigidity of the piezoelectric element in the main output direction is not fully utilized; the rollback phenomenon in motion further degrades output performance. Therefore, it is necessary to design a novel piezoelectric precision driving platform which further improves the output load by making full use of the rigidity of the piezoelectric stack in the main output direction and the parasitic inertia motion of the asymmetric thin-wall flexible hinge mechanism.

Disclosure of Invention

The invention aims to provide a linear piezoelectric precision driving platform, which solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, high output rigidity and output load and high output frequency, and can realize the linear motion output function.

The piezoelectric stack is adopted, the main output direction of the piezoelectric stack is perpendicular to the moving direction of the rotor, the eight thin-wall flexible hinge mechanisms are connected, the piezoelectric stack drives the asymmetric thin-wall flexible hinge mechanisms to realize parasitic inertia motion, the output performance of the platform is greatly improved, and the linear motion of the rotor in a certain direction is realized.

The above object of the present invention is achieved by the following technical solutions:

the utility model provides a linear type piezoelectricity precision driving platform, includes piezoelectric stack (3), asymmetric thin wall formula flexible hinge mechanism (4), active cell (5), pretension voussoir (2), pretension knob (1), pretension knob (7), base (6), precision driving platform utilizes parasitic inertia principle to realize the accurate linear drive of micro-nanometer level marching type. The rotor (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base (6) through a screw; the asymmetric thin-wall flexible hinge mechanism (4) is arranged on the base (6) through screws; the pre-tightening wedge block (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-wall flexible hinge mechanism (4), and the piezoelectric stack (3) can be pre-tightened through the pre-tightening wedge block (2); the pre-tightening knob (1) and the pre-tightening knob (7) are fastened on the base (6) and are in contact with the lower end of the asymmetric thin-wall hinge mechanism (4); the asymmetric thin-wall hinge mechanism (4) is formed in an asymmetric mode by connecting eight thin-wall flexible hinges, and an arc-shaped structure at the upper end of the asymmetric thin-wall hinge mechanism is in contact with the rotor (5); the base (6) plays a role in supporting, installing and fixing other parts; the piezoelectric stack (3) is arranged in the asymmetric thin-wall flexible hinge mechanism (4), the piezoelectric stack (3) is driven to drive the asymmetric thin-wall flexible hinge mechanism (4) to extend, the piezoelectric stack (3) is controlled and driven to realize stepping motion between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5), and then the rotor (5) is driven to perform linear precision motion.

The initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) is adjusted through the pretightening knob (1) and the pretightening knob (7).

The main advantages of the invention are: the main output direction of the piezoelectric stack is perpendicular to the motion direction of the rotor by utilizing the parasitic inertial motion principle; the asymmetric flexible hinge mechanism is formed by connecting eight thin-wall flexible hinges, and driven by the piezoelectric stack, the asymmetric thin-wall flexible hinge mechanism performs parasitic inertia motion. The invention can greatly improve the output performance of the platform, realizes the linear motion of the rotor along a certain direction, has the advantages of high driving reliability, good stability, high working efficiency and the like, and can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like. The invention has the advantages of simple structure, compact arrangement, stable movement, high efficiency, low investment, high benefit and the like, and has wider application prospect.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic front view of the present invention;

FIG. 3 is a schematic left side view of the present invention;

FIG. 4 is a schematic view of an asymmetric thin wall flexible hinge mechanism of the present invention.

In the figure:

1. pre-tightening the knob; 2, pre-tightening the wedge block; 3, piezoelectric stacking;

4. an asymmetric thin-walled flexible hinge mechanism; 5, a rotor; 6, a base;

7. and pre-tightening the knob.

Detailed Description

The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.

Referring to fig. 1 to 4, a linear piezoelectric precision driving platform mainly comprises a piezoelectric stack (3), an asymmetric thin-wall flexible hinge mechanism (4), a rotor (5), a pre-tightening wedge block (2), a pre-tightening knob (1), a pre-tightening knob (7) and a base (6), and the piezoelectric linear precision driving is realized by the precision driving platform through a parasitic inertia principle. The rotor (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw; the asymmetric thin-wall flexible hinge mechanism (4) is arranged on the base through screws; the piezoelectric stack (3) is arranged in the asymmetric thin-wall flexible hinge mechanism (4), and the main output direction of the piezoelectric stack is perpendicular to the motion direction of the rotor (5); the pre-tightening wedge block (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-wall flexible hinge mechanism (4) and can be pre-tightened through the pre-tightening wedge block (2); the pre-tightening knob (1) and the pre-tightening knob (7) are fastened on the base (6) and are in contact with the lower end of the asymmetric thin-wall type hinge mechanism (4), the asymmetric thin-wall type flexible hinge mechanism (4) is in an asymmetric thin-wall type, and the arc-shaped structure of the upper end of the asymmetric thin-wall type flexible hinge mechanism is in contact with the rotor (5); the base (6) plays a role in supporting, installing and fixing other parts, and the rotor (5) and the asymmetric thin-wall flexible hinge mechanisms (4) and (6) are installed on the base (6) through screws.

The main output direction of the piezoelectric stack (3) is perpendicular to the motion direction of the rotor (5), so that the larger rigidity of the piezoelectric stack (3) in the main output direction is fully utilized; the asymmetric thin-wall flexible hinge mechanism (4) is good in rigidity output performance, the upper end of the asymmetric thin-wall flexible hinge mechanism (4) can bear larger pretightening force, the movement is stable and efficient, the piezoelectric stack (3) is electrified to transmit the driving force of the linear movement of the rotor (5) and the pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) through the asymmetric thin-wall flexible hinge mechanism (4), so that the output load of the piezoelectric driving platform is greatly improved, and the linear movement along a certain direction is realized.

The initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) is adjusted through the pretightening knob (1) and the pretightening knob (7).

The piezoelectric stack (3) adopts a piezoelectric ceramic stack PZT with a controllable surface shape, and the parasitic inertial motion is realized by controlling the voltage of the piezoelectric stack (3).

Referring to fig. 1 to 4, the specific working process of the present invention is as follows:

realizing linear motion of the rotor, and in an initial state: the contact distance between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5), namely the initial pretightening force in the parasitic motion process, is adjusted by adjusting the pretightening knob (1) and the pretightening knob (7); the piezoelectric stack (3) is controlled by adopting a piezoelectric signal in a sawtooth wave or triangular wave form; the piezoelectric stack (3) is not electrified, and the system is in a free state; when the piezoelectric stack (3) is electrified, the piezoelectric stack is extended through the inverse piezoelectric effect to push the asymmetric thin-wall flexible hinge mechanism (4) to deform, the rotor (5) is pressed by the asymmetric thin-wall flexible hinge mechanism (4), and the rotor (5) is driven to move by the asymmetric thin-wall flexible hinge mechanism (4) under the action of the static friction force between the rotor (5) and the rotor; when the piezoelectric stack (3) is de-energized and rapidly retreats to the initial position, the asymmetric thin-wall flexible hinge mechanism (4) also restores to the initial state, and the mover (5) is still kept at the moved position under the action of inertia force. By repeating the steps, the driving platform can realize linear motion in the required direction, and large output displacement is obtained.

The linear piezoelectric precision driving platform has the characteristics of small heat, stable driving, reliability and high efficiency due to the adoption of the piezoelectric stack as a driving source and the adoption of the asymmetric thin-wall flexible hinge mechanism as a power transmission element, and can realize the functions of linear precision motion and the like.