阅读说明：本技术 台面型光电探测器的制作方法 (Method for manufacturing mesa type photoelectric detector ) 是由 余沛 王丹 王权兵 徐之韬 于 2019-11-06 设计创作，主要内容包括：本发明公开了一种台面型光电探测器的制作方法,该制作方法中,在加工InGaAsP过渡层、InGaAs i层、InP腐蚀停止层、InGaAs n层和InP衬底层的过程中,不进行去胶处理,最后一次性去除光刻后留下的光刻胶。本发明利用涂胶层对光电探测器光敏面结构形成充分的保护,避免在去胶、清洗等步骤中带进新的杂质及与氧气的接触氧化,降低器件表面态的形成几率,降低器件的暗电流,从而得到高性能的InGaAs/InP PIN台面光电探测器。(The invention discloses a method for manufacturing a mesa-type photoelectric detector, which is characterized in that in the process of processing an InGaAsP transition layer, an InGaAs i layer, an InP corrosion stop layer, an InGaAs n layer and an InP substrate layer, photoresist removing treatment is not carried out, and photoresist left after photoetching is removed for one time. The invention utilizes the glue coating layer to fully protect the photosensitive surface structure of the photoelectric detector, avoids bringing in new impurities and contact oxidation with oxygen in the steps of removing glue, cleaning and the like, reduces the formation probability of the surface state of the device, reduces the dark current of the device, and thus obtains the high-performance InGaAs/InP PIN mesa photoelectric detector.)

1. A method for manufacturing a mesa-type photoelectric detector is characterized in that in the manufacturing method, in the process of processing an InGaAsP transition layer, an InGaAs i layer, an InP corrosion stop layer, an InGaAs n layer and an InP substrate layer, photoresist removing treatment is not carried out, and photoresist left after photoetching is removed for one time.

2. The method of claim 1, wherein the method comprises the steps of:

s1, processing the InGaAs p layer, including spin coating, prebaking, photoetching exposure, developing, hardening, wet etching and photoresist removal, to form a p layer etching bench;

s2, processing the InGaAsP transition layer, including spin coating, prebaking, photoetching exposure, developing, hardening, and wet etching to form a transition layer etching bench;

s3, processing an InGaAs i layer and an InP corrosion stop layer, wherein the steps include spin coating, prebaking, photoetching exposure, developing, hardening and wet etching to form an i-layer corrosion bench;

s4, processing the InGaAs n layer and the InP substrate layer, wherein the steps include spin coating, prebaking, photoetching exposure, developing, hardening and wet etching to form an n-layer etching bench;

s5, removing the photoresist left after the photoetching in the steps S2, S3 and S4.

3. The method of fabricating a mesa-type photodetector as claimed in claim 2, further comprising the steps of:

s6, SiN_x+SiO₂And (3) depositing a composite film, wherein the formed composite deposited film is used as a protective film and an antireflection film of the photosensitive surface of the table-board photoelectric detector.

4. The method for fabricating a mesa-type photodetector as claimed in claim 2, wherein the etching of the InGaAsp layer in step S1 specifically includes:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking, namely baking the epitaxial wafer for a certain time at the temperature of 100 ~ 120 ℃, wherein the baking time is about 90s ~ 120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening, namely hardening at the temperature of 90 ~ 120 ℃ for 120s ~ 180 s;

wet etching: surface activating epitaxial wafer surface with plasma surface cleaning equipment, and using sulfuric acid (H) with certain concentration₂SO₄) Etching the epitaxial structure by using etching solution according to a pattern window formed by photoetching to form a p-layer etching platform;

removing the photoresist: carrying out surface photoresist removing and cleaning on the epitaxial wafer by adopting an NMP photoresist removing solution, and removing the photoresist left after photoetching; and (3) carrying out photoresist removing treatment on the epitaxial wafer by using Reactive Ion Etching (RIE) equipment to remove redundant residual photoresist, residual products of wet etching reaction, surface oxides and impurity contaminants.

5. The method for fabricating a mesa photodetector as claimed in claim 2, wherein the etching of the InGaAsP transition layer in step S2 specifically comprises:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking, namely baking the epitaxial wafer for a certain time at the temperature of 60 ~ 90 ℃ for 90s ~ 120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening, namely hardening at the temperature of 60 ~ 90 ℃ for 90s ~ 120 s;

wet etching: and performing surface activation on the surface of the epitaxial wafer by adopting plasma surface cleaning equipment, and then performing corrosion on the epitaxial structure by using hydrobromic acid (HBr) system corrosive liquid with certain concentration according to a pattern window formed by photoetching to form a transition layer corrosion bench.

6. The method of claim 2, wherein the etching of the InGaAsi layer and the InP etch stop layer in step S3 includes:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking, namely baking the epitaxial wafer for a certain time at the temperature of 60 ~ 90 ℃ for 90s ~ 120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening, namely hardening at the temperature of 60 ~ 90 ℃ for 90s ~ 120 s;

wet etching: surface activating epitaxial wafer surface with plasma surface cleaning equipment, and using phosphoric acid (H) with certain concentration₃PO₄) Etching the epitaxial structure with hydrobromic acid (HBr) etching solution according to the pattern window formed by photoetching; wherein phosphoric acid (H)₃PO₄) The etching solution is used for etching an InGaAs i layer with a certain thickness, and the hydrobromic acid (HBr) etching solution etches an InP etching stop layer with a certain thickness to form an i-layer etching bench.

7. The method for fabricating a mesa photodetector as claimed in claim 2, wherein the etching of the InGaAsn layer and the InP substrate layer in step S4 specifically includes:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking, namely baking the epitaxial wafer for a certain time at the temperature of 60 ~ 90 ℃ for 90s ~ 120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening, namely hardening at the temperature of 60 ~ 90 ℃ for 90s ~ 120 s;

wet etching: surface activating epitaxial wafer surface with plasma surface cleaning equipment, and using phosphoric acid (H) with certain concentration₃PO₄) Etching the epitaxial structure with hydrochloric acid (HCl) etching solution according to the pattern window formed by photoetching; wherein phosphoric acid (H)₃PO₄) The etching solution is used for etching an InGaAs n layer with a certain thickness, and the hydrochloric acid (HCl) etching solution is used for etching the InP substrate to form an n-layer etching platform.

8. The method of claim 2, wherein the removing the photoresist in step S5 specifically includes:

carrying out surface photoresist removing and cleaning on the epitaxial wafer by adopting an NMP photoresist removing solution; and removing the photoresist of the epitaxial wafer by using reactive ion etching equipment to remove redundant residual photoresist, and wet etching reaction residual products, surface oxides and impurity contaminants.

9. The method for manufacturing a mesa-type photodetector according to claim 3, wherein the step S6 specifically includes:

and (3) adopting Plasma Enhanced Chemical Vapor Deposition (PECVD) equipment to deposit the composite film.

10. The method of fabricating a mesa-type photodetector as claimed in any one of claims 2 to 9, wherein the etching of the InGaAsP transition layer is overetching into the underlying InGaAs i layer;

the etch of the InP etch stop layer is also an overetch to the underlying InGaAs n layer.

Technical Field

The invention belongs to the technical field of manufacturing and processing of photoelectric detector chips, and relates to a manufacturing and processing method for forming a table surface of a table-surface type photoelectric detector.

Background

Modern society is a highly information-oriented society. Optical fiber communication is rapidly developing towards ultra-high speed and high capacity as a main way of information transmission. The 5G brings new opportunities and challenges to the development of optical fiber communication, and the whole industry, such as optical fibers, optical modules, optical access network systems and the like, needs technical innovation and breakthrough in application. The photodetector is one of important devices in an optical communication system, and can convert an optical signal into an electrical signal for signal processing, and the coming of the 5G era puts higher requirements on the performance of the photodetector.

Early photodiodes consisted of a reverse biased p-n junction with a narrow absorption region where photons could not be absorbed sufficiently; minority carriers are easily recombined when diffused in the p-region or the n-region, which reduces the responsivity of the photodiode. In order to solve the problem, a PIN-type detector has been developed, which is also a reverse-biased semiconductor diode in nature, and is different from a common photodiode in that an undoped or low-doped i layer is sandwiched between a heavily doped p region and an n region. When external bias voltage is applied, the whole i-type layer is a depletion layer, and under the action of an electric field of the depletion region, photogenerated carriers quickly drift through the depletion region to reach a p region or an n region, so that the response speed of the device is improved. The InGaAs/InP PIN photoelectric detector has excellent electronic conductivity and capability of absorbing radiation in 1.01.7 μm wave band, so that the InGaAs/InP PIN photoelectric detector is widely applied to optical fiber communication systems.

The basic structure of the InGaAs/InP PIN photoelectric detector comprises a mesa structure and a plane structure. Mesa structures require mesa formation (by etching or trenching). The mesa structure has the advantages of eliminating the bent part of the planar junction, improving the surface breakdown voltage, reducing the boundary capacitance and inductance, being favorable for improving the working frequency and being suitable for high-speed communication transmission. Therefore, mesa type photodetectors are widely used in high-speed electronic devices and optoelectronic devices. However, in the mesa type photodetector, due to the fact that the periodicity of crystal lattices is damaged in the mesa preparation process, dangling bonds are generated on the surface of outmost atoms, and the dangling bonds can capture electrons or holes in a body to form a surface depletion layer to increase the surface state. And other defects and impurity oxides exist on the surface of the outermost layer, and due to the factors, impurity energy levels are introduced into forbidden bands to generate recombination centers, so that the surface recombination rate is increased, the surface leakage current of the device is increased, and the electrical performance of the device is seriously influenced. How to reduce the influence of the semiconductor surface effect is an important link for improving the performance index of the device.

The manufacturing process of the mesa photoelectric detector can be roughly divided into the following five steps:

(1) the P-type three-membered ring manufacturing process comprises the following steps: carrying out wet etching or dry etching on the annular pattern formed after photoetching by using a photoetching technology to form a P-type ternary ring structure;

(2) and (3) diffusion process: and carrying out wet etching or dry etching on the porous pattern formed after photoetching by using a photoetching technology to form a diffusion pore structure. Performing high-temperature impurity diffusion through diffusion equipment to form the I-V characteristic and the photoresponse characteristic of the device;

(3) a table top forming process: carrying out continuous wet etching or dry etching on the pattern formed after the photoetching by a continuous photoetching technology to form a required platform;

(4) the electrode manufacturing process comprises the following steps: and carrying out wet etching or dry etching on the pattern formed after photoetching by using a photoetching technology, and opening electrode windows of the P-type electrode and the N-type electrode. Forming P-type and N-type metal electrodes with specific patterns by using electron beam evaporation equipment;

(5) and (3) thinning process: and thinning the wafer to the required thickness by a high-precision lapping machine.

The mesa molding process is the core process of the fabrication process of mesa type photodetectors, and has the greatest influence on the performance of the photodetectors. In the conventional photoelectric detector mesa forming process, a continuous dry etching or wet etching method is adopted. And etching the epitaxial wafer according to the mesa pattern window, and etching off part of the buffer layer, the absorption layer, the gradual change layer, the charge layer, the multiplication layer and the contact layer in the epitaxial wafer so as to form the epitaxial mesa. The general etching process comprises the process steps of cleaning, photoresist homogenizing, exposing, developing, wet etching, photoresist removing and the like. In the conventional mesa molding process, a photoresist removing process is performed after each wet etching. The defect is that in the processes of removing the photoresist, cleaning and homogenizing the photoresist later, the photosensitive surface structure part at the top of the mesa photodetector is exposed for a long time, so that the problems of surface oxidation, unnecessary impurity introduction and the like are caused, a large number of surface states are formed at the surface, the surface recombination rate, the surface leakage current and the like are increased, and the performance indexes of the device such as responsivity, dark current, quantum efficiency, reliability, running speed and the like are seriously influenced.

Disclosure of Invention

In order to overcome the defects of the prior art, the invention aims to provide a method for forming the mesa of the mesa type photoelectric detector, which can fully protect the surface of the photoelectric detector through process optimization, effectively reduce the formation of the surface state of the device, reduce the dark current of the device and greatly improve the overall performance of the device.

The technical scheme adopted by the invention for achieving the purpose is as follows:

in the manufacturing method, in the process of processing an InGaAsP transition layer, an InGaAs i layer, an InP corrosion stop layer, an InGaAs n layer and an InP substrate layer, photoresist is not removed, and photoresist left after photoetching is removed at last.

In connection with the above technical scheme, the manufacturing method specifically comprises the following steps:

s1, processing the InGaAs p layer, including spin coating, prebaking, photoetching exposure, developing, hardening, wet etching and photoresist removal, to form a p layer etching bench;

s2, processing the InGaAsP transition layer, including spin coating, prebaking, photoetching exposure, developing, hardening, and wet etching to form a transition layer etching bench;

s3, processing an InGaAs i layer and an InP corrosion stop layer, wherein the steps include spin coating, prebaking, photoetching exposure, developing, hardening and wet etching to form an i-layer corrosion bench;

s4, processing the InGaAs n layer and the InP substrate layer, wherein the steps include spin coating, prebaking, photoetching exposure, developing, hardening and wet etching to form an n-layer etching bench;

s5, removing the photoresist left after the photoetching in the steps S2, S3 and S4.

The technical scheme also comprises the following steps:

s6, SiN_x+SiO₂And (3) depositing a composite film, wherein the formed composite deposited film is used as a protective film and an antireflection film of the photosensitive surface of the table-board photoelectric detector.

In step S1, the etching of the InGaAs p layer specifically includes:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking: baking the epitaxial wafer for a certain time at the temperature of 100-120 ℃, wherein the baking time is about 90-120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening the film: hardening the film at the temperature of 90-120 ℃ for 120-180 s;

wet etching: surface activating epitaxial wafer surface with plasma surface cleaning equipment, and using sulfuric acid (H) with certain concentration₂SO₄) Etching the epitaxial structure by using etching solution according to a pattern window formed by photoetching to form a p-layer etching platform;

removing the photoresist: carrying out surface photoresist removing and cleaning on the epitaxial wafer by adopting an NMP photoresist removing solution, and removing the photoresist left after photoetching; and (3) carrying out photoresist removing treatment on the epitaxial wafer by using Reactive Ion Etching (RIE) equipment to remove redundant residual photoresist, residual products of wet etching reaction, surface oxides and impurity contaminants.

In step S2, the etching of the InGaAsP transition layer specifically includes:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking: baking the epitaxial wafer for a certain time at the temperature of 60-90 ℃, wherein the baking time is 90-120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening the film: hardening the film at the temperature of 60-90 ℃ for 90-120 s;

wet etching: and performing surface activation on the surface of the epitaxial wafer by adopting plasma surface cleaning equipment, and then performing corrosion on the epitaxial structure by using hydrobromic acid (HBr) system corrosive liquid with certain concentration according to a pattern window formed by photoetching to form a transition layer corrosion bench.

In step S3, the etching of the InGaAs i region and the InP etching stop layer specifically includes:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking: baking the epitaxial wafer for a certain time at the temperature of 60-90 ℃, wherein the baking time is 90-120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening the film: hardening the film at the temperature of 60-90 ℃ for 90-120 s;

wet etching: surface activating epitaxial wafer surface with plasma surface cleaning equipment, and using phosphoric acid (H) with certain concentration₃PO₄) Etching the epitaxial structure with hydrobromic acid (HBr) etching solution according to the pattern window formed by photoetching; wherein phosphoric acid (H)₃PO₄) The etching solution is used for etching an InGaAs i layer with a certain thickness, and the hydrobromic acid (HBr) etching solution etches an InP etching stop layer with a certain thickness to form an i-layer etching bench.

In step S4, the etching of the InGaAs n region and the InP substrate layer specifically includes:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking: baking the epitaxial wafer for a certain time at the temperature of 60-90 ℃, wherein the baking time is 90-120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening the film: hardening the film at the temperature of 60-90 ℃ for 90-120 s;

wet etching: surface activating epitaxial wafer surface with plasma surface cleaning equipment, and using phosphoric acid (H) with certain concentration₃PO₄) Etching the epitaxial structure with hydrochloric acid (HCl) etching solution according to the pattern window formed by photoetching; wherein phosphoric acid (H)₃PO₄) The etching solution is used for etching an InGaAs n layer with a certain thickness, and the hydrochloric acid (HCl) etching solution is used for etching the InP substrate to form an n-layer etching platform.

In connection with the above technical solution, the photoresist removing step S5 specifically includes:

carrying out surface photoresist removing and cleaning on the epitaxial wafer by adopting an NMP photoresist removing solution; and removing the photoresist of the epitaxial wafer by using reactive ion etching equipment to remove redundant residual photoresist, and wet etching reaction residual products, surface oxides and impurity contaminants.

In connection with the above technical solution, step S6 specifically includes:

and (3) adopting Plasma Enhanced Chemical Vapor Deposition (PECVD) equipment to deposit the composite film.

And according to the technical scheme, the InGaAsP transition layer is over-etched to the lower InGaAs i layer. The etch of the InP etch stop layer is an overetch to the underlying InGaAs n layer. To ensure the InGaAsP transition layer and the InP etch stop layer are etched completely.

The invention has the following beneficial effects: the invention provides a new mesa molding method of a mesa type photoelectric detector, which adopts a process method that photoresist is not removed temporarily after wet etching, and photoresist is removed uniformly after all etching is finished, and a glue coating layer is utilized to fully protect a photosensitive surface structure of the photoelectric detector, thereby avoiding bringing in new impurities and contact oxidation with oxygen in the steps of photoresist removal, cleaning and the like, reducing the formation probability of the surface state of a device, reducing the dark current of the device and further obtaining the high-performance InGaAs/InP PIN mesa photoelectric detector.

Drawings

The invention will be further described with reference to the accompanying drawings and examples, in which:

FIG. 1 is a flow chart of a method of fabricating a mesa-type photodetector according to an embodiment of the present invention;

FIG. 2 is a schematic view of an epitaxial structure of a mesa InGaAs/InP PIN photodetector according to an embodiment of the present invention;

FIG. 3 is a schematic view of an InGaAs p layer etching mesa in accordance with an embodiment of the present invention;

FIG. 4 is a schematic illustration showing an InGaAsP transition layer etching station according to an embodiment of the present invention;

FIG. 5 is a schematic view of an InGaAs i layer etch and an InP etch stop layer etch mesa in accordance with an embodiment of the present invention;

FIG. 6 is a schematic illustration showing the InGaAs n layer etching and InP substrate layer etching mesas in accordance with an embodiment of the present invention;

FIG. 7 is a schematic diagram of a mesa InGaAs/InP PIN photodetector mesa configuration according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

The epitaxial structure of the mesa InGaAs/InP PIN photoelectric detector processed by the embodiment of the invention is shown in the attached figure 2, and comprises the following components in sequence from top to bottom:

(1) the InGaAs layer and the PIN structure p layer are about 0.1-0.3 μm thick.

(2) The InGaAsP layer and the transition layer are about 0.3-0.5 μm thick.

(3) The InGaAs layer and the PIN structure i layer are about 2-3 mu m in thickness.

(4) The InP layer, the etch stop layer, was about 30nm thick.

(5) The InGaAs layer and the PIN structure n layer are about 0.3-0.5 μm thick.

(6) And the thickness of the InP substrate layer is about 350 mu m.

And etching the epitaxial wafer according to a pattern window formed by photoetching, and etching off parts of (2) a transition layer, (3) an i region, (4) an etching stop layer, (5) an n region and (6) a substrate layer in the epitaxial wafer, thereby forming the epitaxial mesa. The method solves the problems that the surface of the chip is easy to oxidize and new impurities are brought in the steps of removing photoresist, cleaning and the like by optimizing the corrosion process.

In the process of processing the InGaAsP transition layer, the InGaAs i layer, the InP corrosion stop layer, the InGaAs n layer and the InP substrate layer, the photoresist is not removed, and the photoresist left after photoetching is removed at last. According to the method, a process method that photoresist is not removed temporarily after wet etching and photoresist is removed uniformly after all etching is completed is adopted, the photoresist layer is utilized to fully protect the photosensitive surface structure of the photoelectric detector, new impurities brought in the steps of photoresist removal, cleaning and the like and contact oxidation with oxygen are avoided, the formation probability of the surface state of the device is reduced, the dark current of the device is reduced, and therefore the high-performance InGaAs/InP PIN mesa photoelectric detector is obtained. The advantage of midway photoresist removal is that after wet etching, the photoresist is easily cleaned and removed by NMP photoresist removing solution. The photoresist is uniformly removed after the continuous wet etching, which may cause difficulty in removing the photoresist due to the high temperature baking in the continuous pre-baking and hardening processes of the photoresist. In the pre-baking and film hardening process before the InGaAsP transition layer, the InGaAs i layer, the InP corrosion stop layer, the InGaAs n layer and the InP substrate layer are corroded, the baking temperature can be reduced, the baking time can be shortened, and the problem of difficulty in photoresist stripping caused by continuous photoetching corrosion without photoresist stripping can be successfully solved.

As shown in fig. 1, the method for manufacturing a mesa-type photodetector according to an embodiment of the present invention specifically includes the following steps:

s1, processing the InGaAs p layer, including spin coating, prebaking, photoetching exposure, developing, hardening, wet etching and photoresist removal, to form a p layer etching bench;

s2, processing the InGaAsP transition layer, including spin coating, prebaking, photoetching exposure, developing, hardening, and wet etching to form a transition layer etching bench;

s3, processing an InGaAs i layer and an InP corrosion stop layer, wherein the steps include spin coating, prebaking, photoetching exposure, developing, hardening and wet etching to form an i-layer corrosion bench;

s4, processing the InGaAs n layer and the InP substrate layer, wherein the steps include spin coating, prebaking, photoetching exposure, developing, hardening and wet etching to form an n-layer etching bench;

s5, removing the photoresist left after the photoetching in the steps S2, S3 and S4.

Further, the method also comprises the following steps:

s6, SiN_x+SiO₂And (3) depositing a composite film, wherein the formed composite deposited film is used as a protective film and an antireflection film of the photosensitive surface of the table-board photoelectric detector.

Specifically, the etching of the InGaAs p layer in S1 includes the steps of:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking: baking the epitaxial wafer for a certain time at the temperature of 100-120 ℃, wherein the baking time is about 90-120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening the film: hardening the film at the temperature of 90-120 ℃ for 120-180 s;

wet etching: surface activating epitaxial wafer surface with plasma surface cleaning equipment, and using sulfuric acid (H) with certain concentration₂SO₄) Etching the epitaxial structure by using the etching solution according to the pattern window formed by photoetching to form a p-layer etching platform, as shown in FIG. 3;

removing the photoresist: carrying out surface photoresist removing and cleaning on the epitaxial wafer by adopting an NMP photoresist removing solution, and removing the photoresist left after photoetching; and (3) carrying out photoresist removing treatment on the epitaxial wafer by using Reactive Ion Etching (RIE) equipment to remove redundant residual photoresist, residual products of wet etching reaction, surface oxides and impurity contaminants.

Further, the InGaAsP transition layer etching in S2 specifically comprises the steps of:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking: baking the epitaxial wafer for a certain time at the temperature of 60-90 ℃, wherein the baking time is 90-120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening the film: hardening the film at the temperature of 60-90 ℃ for 90-120 s;

wet etching: and (3) activating the surface of the epitaxial wafer by adopting plasma surface cleaning equipment, and then corroding the epitaxial structure by using hydrobromic acid (HBr) system corrosive liquid with certain concentration according to a pattern window formed by photoetching to form a transition layer corrosion bench, as shown in fig. 4. The InGaAsP transition layer is over-etched to the underlying InGaAs i layer to ensure the InGaAsP transition layer is completely etched.

The etch of the InP etch stop layer is also an overetch to the underlying InGaAs n layer.

Further, the etching of the InGaAs i layer and the InP etching stop layer in S3 specifically includes the steps of:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking: baking the epitaxial wafer for a certain time at the temperature of 60-90 ℃, wherein the baking time is 90-120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening the film: hardening the film at the temperature of 60-90 ℃ for 90-120 s;

wet etching: surface activating epitaxial wafer surface with plasma surface cleaning equipment, and using phosphoric acid (H) with certain concentration₃PO₄) In the presence of a hydrobromic acid (HBr) -based etchantEtching the epitaxial structure by the etched pattern window; wherein phosphoric acid (H)₃PO₄) The etching solution is used to etch an InGaAs i layer with a certain thickness, and the hydrobromic acid (HBr) etching solution etches an nP etch stop layer with a certain thickness to form an i-layer etching mesa, as shown in FIG. 5.

Further, the InGaAs n layer etching and InP substrate layer etching in S4 specifically includes the steps of:

glue homogenizing: spin-coating the epitaxial wafer by full-automatic spin-coating developing equipment;

pre-baking: baking the epitaxial wafer for a certain time at the temperature of 60-90 ℃, wherein the baking time is 90-120 s;

exposure: photoetching and exposing the epitaxial wafer by using a contact type photoetching machine;

and (3) developing: developing the epitaxial wafer by adopting full-automatic spin coating developing equipment to form a corrosion window required by corrosion;

hardening the film: hardening the film at the temperature of 60-90 ℃ for 90-120 s;

wet etching: surface activating epitaxial wafer surface with plasma surface cleaning equipment, and using phosphoric acid (H) with certain concentration₃PO₄) Etching the epitaxial structure with hydrochloric acid (HCl) etching solution according to the pattern window formed by photoetching; wherein phosphoric acid (H)₃PO₄) The etching solution is used for etching an InGaAs n layer with a certain thickness, and the hydrochloric acid (HCl) etching solution is used for etching the InP substrate to form an n-layer etching mesa, as shown in fig. 6. The etch of the InP etch stop layer is also overetched to the underlying InGaAs n layer to ensure that the InP etch stop layer is etched through.

Further, the photoresist removal in S5 specifically includes the steps of:

carrying out surface photoresist removing and cleaning on the epitaxial wafer by adopting an NMP (N-methyl-2-pyrrolidone) photoresist removing solution, and removing the photoresist left after photoetching in the S2, S3 and S4 process steps; and (3) carrying out photoresist removing treatment on the epitaxial wafer by Reactive Ion Etching (RIE) equipment to remove redundant residual photoresist, wet etching reaction residual products, surface oxides and impurity contaminants.

Further, the air conditioner is provided with a fan,SiN in S6_x+SiO₂The composite film deposition specifically comprises the steps of:

the deposition of the composite film is carried out by adopting a Plasma Enhanced Chemical Vapor Deposition (PECVD) device, and the film thickness is about 200nm SiN_x+300nm SiO₂The composite film can be used as an antireflection film layer of the photoelectric detector and also can be used as a protective film layer of a photosensitive surface of the photoelectric detector.

After the above-mentioned process steps of S1-S6, a mesa structure of InGaAs/InP PIN photodetector shown in fig. 7 is formed, and compared with the prior art, in the three consecutive wet etching processes of S2, S3, and S4, because the "photoresist removal" process after each wet etching is removed, the photosensitive surface structure of the photodetector is fully protected, and the phenomenon that the surface of the epitaxial wafer is exposed in the air and is easily oxidized to form a large number of surface states on the surface is avoided, so that the dark current of the photodetector is increased, and the like, which affect the photoelectric performance of the device. Meanwhile, the process flow is simplified, and the process cost is saved.

It will be understood that modifications and variations can be made by persons skilled in the art in light of the above teachings and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.